DE69210110T2 - Strahlabtast-Galvanometer mit Spiegel und Magnet von geringer Trägheit - Google Patents
Strahlabtast-Galvanometer mit Spiegel und Magnet von geringer TrägheitInfo
- Publication number
- DE69210110T2 DE69210110T2 DE69210110T DE69210110T DE69210110T2 DE 69210110 T2 DE69210110 T2 DE 69210110T2 DE 69210110 T DE69210110 T DE 69210110T DE 69210110 T DE69210110 T DE 69210110T DE 69210110 T2 DE69210110 T2 DE 69210110T2
- Authority
- DE
- Germany
- Prior art keywords
- mirror
- beam scanning
- scanning galvanometer
- low inertia
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R5/00—Instruments for converting a single current or a single voltage into a mechanical displacement
- G01R5/14—Moving-iron instruments
- G01R5/16—Moving-iron instruments with pivoting magnet
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/723,368 US5221933A (en) | 1991-06-28 | 1991-06-28 | Beam scanning galvanometer with low inertia mirror and magnet |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69210110D1 DE69210110D1 (de) | 1996-05-30 |
DE69210110T2 true DE69210110T2 (de) | 1997-01-09 |
Family
ID=24905936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69210110T Expired - Fee Related DE69210110T2 (de) | 1991-06-28 | 1992-06-24 | Strahlabtast-Galvanometer mit Spiegel und Magnet von geringer Trägheit |
Country Status (4)
Country | Link |
---|---|
US (1) | US5221933A (de) |
EP (1) | EP0520387B1 (de) |
JP (1) | JPH05249402A (de) |
DE (1) | DE69210110T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0743631A (ja) * | 1993-08-02 | 1995-02-14 | Fuji Photo Film Co Ltd | 共振型光偏向器を用いた走査装置 |
US5982521A (en) * | 1995-11-15 | 1999-11-09 | Brother Kogyo Kabushiki Kaisha | Optical scanner |
JP3456130B2 (ja) * | 1997-11-26 | 2003-10-14 | 三菱電機株式会社 | 距離測定装置 |
JPH11160434A (ja) * | 1997-11-26 | 1999-06-18 | Mitsubishi Electric Corp | 距離測定装置 |
DE19914696C2 (de) * | 1999-03-31 | 2002-11-28 | Fraunhofer Ges Forschung | Gerät zur schnellen Messung winkelabhängiger Beugungseffekte an feinstrukturierten Oberflächen |
US6304359B1 (en) | 1999-07-20 | 2001-10-16 | Lasesys Corporation | High scan efficiency galvanometric laser scanning device |
AU2001278851A1 (en) * | 2000-06-16 | 2001-12-24 | Gsi Lumonics Corporation | System of monitoring bearing performance |
US6705727B1 (en) | 2002-12-30 | 2004-03-16 | Bausch & Lomb Incorporated | Mechanism for rotationally moving a mirror |
US20040263935A1 (en) * | 2003-05-22 | 2004-12-30 | Heinz Keiser | Scanner |
JP2007531023A (ja) * | 2004-04-01 | 2007-11-01 | ベンキュー モバイル ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー オッフェネ ハンデルスゲゼルシャフト | 投影システム内のマイクロミラーの変位の特定 |
JP2016126103A (ja) * | 2014-12-26 | 2016-07-11 | セイコーエプソン株式会社 | 光学デバイス、画像表示装置および光学デバイスの製造方法 |
US10720824B2 (en) | 2015-02-06 | 2020-07-21 | William R. Benner, Jr. | Low cost limited rotation rotary actuator |
US9991773B2 (en) | 2015-02-06 | 2018-06-05 | William R. Benner, Jr. | Low cost limited rotation rotary actuator |
US10211587B2 (en) | 2015-03-31 | 2019-02-19 | Versitech Limited | Spatial chirped cavity for temporally stretching/compressing optical pulses |
US11181621B2 (en) | 2018-12-07 | 2021-11-23 | Beijing Voyager Technology Co., Ltd. | Mirror assembly for light steering |
US11119195B2 (en) | 2018-12-07 | 2021-09-14 | Beijing Voyager Technology Co., Ltd. | Mirror assembly for light steering |
WO2020117287A1 (en) | 2018-12-07 | 2020-06-11 | Didi Research America, Llc | Mirror assembly for light steering |
US10422881B1 (en) * | 2018-12-07 | 2019-09-24 | Didi Research America, Llc | Mirror assembly for light steering |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3671766A (en) * | 1970-06-29 | 1972-06-20 | Hughes Aircraft Co | Oscillating mechanism |
US3849592A (en) * | 1973-02-05 | 1974-11-19 | Litton Systems Inc | Graphic data redundancy reduction for text and half-tone optical facsimile system |
US3988537A (en) * | 1974-06-14 | 1976-10-26 | Cooley Austin G | Illuminating and transmitting system |
US4495609A (en) * | 1975-03-10 | 1985-01-22 | Digital Recording Corporation | Recording and playback system |
US4320488A (en) * | 1975-03-10 | 1982-03-16 | Digital Recording Corporation | Recording and playback system |
DE3424230A1 (de) * | 1984-06-30 | 1986-03-20 | Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg | Schwingspiegel |
SU1430931A1 (ru) * | 1985-11-04 | 1988-10-15 | Институт Машиноведения Им.А.А.Благонравова | Сканатор дл лазерных технологических установок |
US4827125A (en) * | 1987-04-29 | 1989-05-02 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Confocal scanning laser microscope having no moving parts |
US4996540A (en) * | 1988-01-29 | 1991-02-26 | Konica Corporation | Recorder with ligament supported scan mirror and resilient optical system support |
US5177631A (en) * | 1991-06-28 | 1993-01-05 | Eastman Kodak Company | Magnetic position sensor |
-
1991
- 1991-06-28 US US07/723,368 patent/US5221933A/en not_active Expired - Fee Related
-
1992
- 1992-06-24 EP EP92110589A patent/EP0520387B1/de not_active Expired - Lifetime
- 1992-06-24 DE DE69210110T patent/DE69210110T2/de not_active Expired - Fee Related
- 1992-06-29 JP JP17136292A patent/JPH05249402A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US5221933A (en) | 1993-06-22 |
JPH05249402A (ja) | 1993-09-28 |
EP0520387A2 (de) | 1992-12-30 |
EP0520387B1 (de) | 1996-04-24 |
EP0520387A3 (en) | 1993-02-03 |
DE69210110D1 (de) | 1996-05-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |