US7235819B2
(en)
*
|
1991-03-18 |
2007-06-26 |
The Trustees Of Boston University |
Semiconductor device having group III nitride buffer layer and growth layers
|
EP0576566B1
(de)
*
|
1991-03-18 |
1999-05-26 |
Trustees Of Boston University |
Verfahren zur herstellung und dotierung hochisolierender dünner schichten aus monokristallinem galliumnitrid
|
US5633192A
(en)
*
|
1991-03-18 |
1997-05-27 |
Boston University |
Method for epitaxially growing gallium nitride layers
|
US5679152A
(en)
|
1994-01-27 |
1997-10-21 |
Advanced Technology Materials, Inc. |
Method of making a single crystals Ga*N article
|
US6958093B2
(en)
*
|
1994-01-27 |
2005-10-25 |
Cree, Inc. |
Free-standing (Al, Ga, In)N and parting method for forming same
|
US6996150B1
(en)
|
1994-09-14 |
2006-02-07 |
Rohm Co., Ltd. |
Semiconductor light emitting device and manufacturing method therefor
|
US5843590A
(en)
*
|
1994-12-26 |
1998-12-01 |
Sumitomo Electric Industries, Ltd. |
Epitaxial wafer and method of preparing the same
|
US5702532A
(en)
*
|
1995-05-31 |
1997-12-30 |
Hughes Aircraft Company |
MOCVD reactor system for indium antimonide epitaxial material
|
DE69633203T2
(de)
|
1995-09-18 |
2005-09-01 |
Hitachi, Ltd. |
Halbleiterlaservorrichtungen
|
JP3879173B2
(ja)
*
|
1996-03-25 |
2007-02-07 |
住友電気工業株式会社 |
化合物半導体気相成長方法
|
US5834331A
(en)
*
|
1996-10-17 |
1998-11-10 |
Northwestern University |
Method for making III-Nitride laser and detection device
|
US6284395B1
(en)
|
1997-03-05 |
2001-09-04 |
Corning Applied Technologies Corp. |
Nitride based semiconductors and devices
|
US5888886A
(en)
*
|
1997-06-30 |
1999-03-30 |
Sdl, Inc. |
Method of doping gan layers p-type for device fabrication
|
AU747260B2
(en)
|
1997-07-25 |
2002-05-09 |
Nichia Chemical Industries, Ltd. |
Nitride semiconductor device
|
US5942148A
(en)
*
|
1997-12-24 |
1999-08-24 |
Preston; Kenneth G. |
Nitride compacts
|
US6459100B1
(en)
|
1998-09-16 |
2002-10-01 |
Cree, Inc. |
Vertical geometry ingan LED
|
JP3770014B2
(ja)
|
1999-02-09 |
2006-04-26 |
日亜化学工業株式会社 |
窒化物半導体素子
|
EP1168539B1
(de)
|
1999-03-04 |
2009-12-16 |
Nichia Corporation |
Nitridhalbleiterlaserelement
|
JP2001345268A
(ja)
*
|
2000-05-31 |
2001-12-14 |
Matsushita Electric Ind Co Ltd |
半導体製造装置及び半導体の製造方法
|
US6544869B1
(en)
*
|
2000-06-23 |
2003-04-08 |
Matsushita Electric Industrial Co., Ltd. |
Method and apparatus for depositing semiconductor film and method for fabricating semiconductor device
|
JP4374156B2
(ja)
*
|
2000-09-01 |
2009-12-02 |
日本碍子株式会社 |
Iii−v族窒化物膜の製造装置及び製造方法
|
JP2002110564A
(ja)
*
|
2000-10-02 |
2002-04-12 |
Japan Pionics Co Ltd |
気相成長装置及び気相成長方法
|
TW544775B
(en)
*
|
2001-02-28 |
2003-08-01 |
Japan Pionics |
Chemical vapor deposition apparatus and chemical vapor deposition method
|
US6902622B2
(en)
*
|
2001-04-12 |
2005-06-07 |
Mattson Technology, Inc. |
Systems and methods for epitaxially depositing films on a semiconductor substrate
|
JP2002371361A
(ja)
*
|
2001-06-18 |
2002-12-26 |
Japan Pionics Co Ltd |
気相成長装置及び気相成長方法
|
US6881983B2
(en)
*
|
2002-02-25 |
2005-04-19 |
Kopin Corporation |
Efficient light emitting diodes and lasers
|
US6911079B2
(en)
*
|
2002-04-19 |
2005-06-28 |
Kopin Corporation |
Method for reducing the resistivity of p-type II-VI and III-V semiconductors
|
WO2003107442A2
(en)
|
2002-06-17 |
2003-12-24 |
Kopin Corporation |
Electrode for p-type gallium nitride-based semiconductors
|
US7002180B2
(en)
*
|
2002-06-28 |
2006-02-21 |
Kopin Corporation |
Bonding pad for gallium nitride-based light-emitting device
|
US6734091B2
(en)
|
2002-06-28 |
2004-05-11 |
Kopin Corporation |
Electrode for p-type gallium nitride-based semiconductors
|
US6955985B2
(en)
|
2002-06-28 |
2005-10-18 |
Kopin Corporation |
Domain epitaxy for thin film growth
|
US7118781B1
(en)
*
|
2003-04-16 |
2006-10-10 |
Cree, Inc. |
Methods for controlling formation of deposits in a deposition system and deposition methods including the same
|
US7122841B2
(en)
|
2003-06-04 |
2006-10-17 |
Kopin Corporation |
Bonding pad for gallium nitride-based light-emitting devices
|
US20050011459A1
(en)
*
|
2003-07-15 |
2005-01-20 |
Heng Liu |
Chemical vapor deposition reactor
|
US20050178336A1
(en)
*
|
2003-07-15 |
2005-08-18 |
Heng Liu |
Chemical vapor deposition reactor having multiple inlets
|
US7052546B1
(en)
*
|
2003-08-28 |
2006-05-30 |
Cape Simulations, Inc. |
High-purity crystal growth
|
US20050179042A1
(en)
*
|
2004-02-13 |
2005-08-18 |
Kopin Corporation |
Monolithic integration and enhanced light extraction in gallium nitride-based light-emitting devices
|
US20050179046A1
(en)
*
|
2004-02-13 |
2005-08-18 |
Kopin Corporation |
P-type electrodes in gallium nitride-based light-emitting devices
|
WO2005124859A2
(en)
*
|
2004-06-10 |
2005-12-29 |
Avansys, Inc. |
Methods and apparatuses for depositing uniform layers
|
KR20080034022A
(ko)
*
|
2005-08-05 |
2008-04-17 |
세키스이가가쿠 고교가부시키가이샤 |
질화갈륨 등의 iii족 질화물의 성막 방법
|
US7879697B2
(en)
|
2006-06-05 |
2011-02-01 |
Regents Of The University Of Minnesota |
Growth of low dislocation density Group-III nitrides and related thin-film structures
|
FR2904008B1
(fr)
*
|
2006-07-18 |
2009-12-04 |
Centre Nat Rech Scient |
NOUVEAU PROCEDE POUR LA CROISSANCE DE NITRURES D'ELEMENTS DU GROUPE IIIb.
|
US8216419B2
(en)
*
|
2008-03-28 |
2012-07-10 |
Bridgelux, Inc. |
Drilled CVD shower head
|
US20090096349A1
(en)
*
|
2007-04-26 |
2009-04-16 |
Moshtagh Vahid S |
Cross flow cvd reactor
|
US20100199914A1
(en)
*
|
2007-10-10 |
2010-08-12 |
Michael Iza |
Chemical vapor deposition reactor chamber
|
US8668775B2
(en)
*
|
2007-10-31 |
2014-03-11 |
Toshiba Techno Center Inc. |
Machine CVD shower head
|
US8628616B2
(en)
*
|
2007-12-11 |
2014-01-14 |
Sumitomo Electric Industries, Ltd. |
Vapor-phase process apparatus, vapor-phase process method, and substrate
|
TWI362769B
(en)
|
2008-05-09 |
2012-04-21 |
Univ Nat Chiao Tung |
Light emitting device and fabrication method therefor
|
JP4892519B2
(ja)
*
|
2008-05-20 |
2012-03-07 |
シャープ株式会社 |
積層型電子写真感光体およびそれを備えた画像形成装置
|
US8847249B2
(en)
|
2008-06-16 |
2014-09-30 |
Soraa, Inc. |
Solid-state optical device having enhanced indium content in active regions
|
US20100006873A1
(en)
*
|
2008-06-25 |
2010-01-14 |
Soraa, Inc. |
HIGHLY POLARIZED WHITE LIGHT SOURCE BY COMBINING BLUE LED ON SEMIPOLAR OR NONPOLAR GaN WITH YELLOW LED ON SEMIPOLAR OR NONPOLAR GaN
|
US8805134B1
(en)
|
2012-02-17 |
2014-08-12 |
Soraa Laser Diode, Inc. |
Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
|
US8143148B1
(en)
|
2008-07-14 |
2012-03-27 |
Soraa, Inc. |
Self-aligned multi-dielectric-layer lift off process for laser diode stripes
|
US8259769B1
(en)
|
2008-07-14 |
2012-09-04 |
Soraa, Inc. |
Integrated total internal reflectors for high-gain laser diodes with high quality cleaved facets on nonpolar/semipolar GaN substrates
|
US8124996B2
(en)
|
2008-08-04 |
2012-02-28 |
Soraa, Inc. |
White light devices using non-polar or semipolar gallium containing materials and phosphors
|
US8284810B1
(en)
|
2008-08-04 |
2012-10-09 |
Soraa, Inc. |
Solid state laser device using a selected crystal orientation in non-polar or semi-polar GaN containing materials and methods
|
JP5383332B2
(ja)
*
|
2008-08-06 |
2014-01-08 |
株式会社日立国際電気 |
基板処理装置、基板処理方法及び半導体装置の製造方法
|
JP5132524B2
(ja)
*
|
2008-11-04 |
2013-01-30 |
キヤノン株式会社 |
窒化ガリウム系化合物半導体層の移設方法、及び窒化ガリウム系化合物半導体層が接合された基板
|
US8252662B1
(en)
|
2009-03-28 |
2012-08-28 |
Soraa, Inc. |
Method and structure for manufacture of light emitting diode devices using bulk GaN
|
US8294179B1
(en)
|
2009-04-17 |
2012-10-23 |
Soraa, Inc. |
Optical device structure using GaN substrates and growth structures for laser applications
|
US8242522B1
(en)
|
2009-05-12 |
2012-08-14 |
Soraa, Inc. |
Optical device structure using non-polar GaN substrates and growth structures for laser applications in 481 nm
|
US8837545B2
(en)
|
2009-04-13 |
2014-09-16 |
Soraa Laser Diode, Inc. |
Optical device structure using GaN substrates and growth structures for laser applications
|
WO2010120819A1
(en)
|
2009-04-13 |
2010-10-21 |
Kaai, Inc. |
Optical device structure using gan substrates for laser applications
|
US8634442B1
(en)
|
2009-04-13 |
2014-01-21 |
Soraa Laser Diode, Inc. |
Optical device structure using GaN substrates for laser applications
|
US8254425B1
(en)
|
2009-04-17 |
2012-08-28 |
Soraa, Inc. |
Optical device structure using GaN substrates and growth structures for laser applications
|
US8416825B1
(en)
|
2009-04-17 |
2013-04-09 |
Soraa, Inc. |
Optical device structure using GaN substrates and growth structure for laser applications
|
US8509275B1
(en)
|
2009-05-29 |
2013-08-13 |
Soraa, Inc. |
Gallium nitride based laser dazzling device and method
|
US10108079B2
(en)
|
2009-05-29 |
2018-10-23 |
Soraa Laser Diode, Inc. |
Laser light source for a vehicle
|
US8427590B2
(en)
|
2009-05-29 |
2013-04-23 |
Soraa, Inc. |
Laser based display method and system
|
US9800017B1
(en)
|
2009-05-29 |
2017-10-24 |
Soraa Laser Diode, Inc. |
Laser device and method for a vehicle
|
US9250044B1
(en)
|
2009-05-29 |
2016-02-02 |
Soraa Laser Diode, Inc. |
Gallium and nitrogen containing laser diode dazzling devices and methods of use
|
US8247887B1
(en)
|
2009-05-29 |
2012-08-21 |
Soraa, Inc. |
Method and surface morphology of non-polar gallium nitride containing substrates
|
US9829780B2
(en)
|
2009-05-29 |
2017-11-28 |
Soraa Laser Diode, Inc. |
Laser light source for a vehicle
|
US8314429B1
(en)
|
2009-09-14 |
2012-11-20 |
Soraa, Inc. |
Multi color active regions for white light emitting diode
|
US8750342B1
(en)
|
2011-09-09 |
2014-06-10 |
Soraa Laser Diode, Inc. |
Laser diodes with scribe structures
|
US8355418B2
(en)
|
2009-09-17 |
2013-01-15 |
Soraa, Inc. |
Growth structures and method for forming laser diodes on {20-21} or off cut gallium and nitrogen containing substrates
|
US9583678B2
(en)
|
2009-09-18 |
2017-02-28 |
Soraa, Inc. |
High-performance LED fabrication
|
US9293644B2
(en)
|
2009-09-18 |
2016-03-22 |
Soraa, Inc. |
Power light emitting diode and method with uniform current density operation
|
US8933644B2
(en)
|
2009-09-18 |
2015-01-13 |
Soraa, Inc. |
LED lamps with improved quality of light
|
KR101368906B1
(ko)
|
2009-09-18 |
2014-02-28 |
소라, 인코포레이티드 |
전력 발광 다이오드 및 전류 밀도 작동 방법
|
US10147850B1
(en)
|
2010-02-03 |
2018-12-04 |
Soraa, Inc. |
System and method for providing color light sources in proximity to predetermined wavelength conversion structures
|
US8905588B2
(en)
|
2010-02-03 |
2014-12-09 |
Sorra, Inc. |
System and method for providing color light sources in proximity to predetermined wavelength conversion structures
|
US9927611B2
(en)
|
2010-03-29 |
2018-03-27 |
Soraa Laser Diode, Inc. |
Wearable laser based display method and system
|
US8451876B1
(en)
|
2010-05-17 |
2013-05-28 |
Soraa, Inc. |
Method and system for providing bidirectional light sources with broad spectrum
|
US8816319B1
(en)
|
2010-11-05 |
2014-08-26 |
Soraa Laser Diode, Inc. |
Method of strain engineering and related optical device using a gallium and nitrogen containing active region
|
US9048170B2
(en)
|
2010-11-09 |
2015-06-02 |
Soraa Laser Diode, Inc. |
Method of fabricating optical devices using laser treatment
|
US8975615B2
(en)
|
2010-11-09 |
2015-03-10 |
Soraa Laser Diode, Inc. |
Method of fabricating optical devices using laser treatment of contact regions of gallium and nitrogen containing material
|
US9025635B2
(en)
|
2011-01-24 |
2015-05-05 |
Soraa Laser Diode, Inc. |
Laser package having multiple emitters configured on a support member
|
US9318875B1
(en)
|
2011-01-24 |
2016-04-19 |
Soraa Laser Diode, Inc. |
Color converting element for laser diode
|
US9595813B2
(en)
|
2011-01-24 |
2017-03-14 |
Soraa Laser Diode, Inc. |
Laser package having multiple emitters configured on a substrate member
|
US9093820B1
(en)
|
2011-01-25 |
2015-07-28 |
Soraa Laser Diode, Inc. |
Method and structure for laser devices using optical blocking regions
|
US9236530B2
(en)
|
2011-04-01 |
2016-01-12 |
Soraa, Inc. |
Miscut bulk substrates
|
US9287684B2
(en)
|
2011-04-04 |
2016-03-15 |
Soraa Laser Diode, Inc. |
Laser package having multiple emitters with color wheel
|
US9646827B1
(en)
|
2011-08-23 |
2017-05-09 |
Soraa, Inc. |
Method for smoothing surface of a substrate containing gallium and nitrogen
|
US8971370B1
(en)
|
2011-10-13 |
2015-03-03 |
Soraa Laser Diode, Inc. |
Laser devices using a semipolar plane
|
US9020003B1
(en)
|
2012-03-14 |
2015-04-28 |
Soraa Laser Diode, Inc. |
Group III-nitride laser diode grown on a semi-polar orientation of gallium and nitrogen containing substrates
|
US9800016B1
(en)
|
2012-04-05 |
2017-10-24 |
Soraa Laser Diode, Inc. |
Facet on a gallium and nitrogen containing laser diode
|
US10559939B1
(en)
|
2012-04-05 |
2020-02-11 |
Soraa Laser Diode, Inc. |
Facet on a gallium and nitrogen containing laser diode
|
US9343871B1
(en)
|
2012-04-05 |
2016-05-17 |
Soraa Laser Diode, Inc. |
Facet on a gallium and nitrogen containing laser diode
|
US8971368B1
(en)
|
2012-08-16 |
2015-03-03 |
Soraa Laser Diode, Inc. |
Laser devices having a gallium and nitrogen containing semipolar surface orientation
|
US20160194753A1
(en)
*
|
2012-12-27 |
2016-07-07 |
Showa Denko K.K. |
SiC-FILM FORMATION DEVICE AND METHOD FOR PRODUCING SiC FILM
|
WO2014103728A1
(ja)
*
|
2012-12-27 |
2014-07-03 |
昭和電工株式会社 |
成膜装置
|
US9166372B1
(en)
|
2013-06-28 |
2015-10-20 |
Soraa Laser Diode, Inc. |
Gallium nitride containing laser device configured on a patterned substrate
|
US9368939B2
(en)
|
2013-10-18 |
2016-06-14 |
Soraa Laser Diode, Inc. |
Manufacturable laser diode formed on C-plane gallium and nitrogen material
|
US9379525B2
(en)
|
2014-02-10 |
2016-06-28 |
Soraa Laser Diode, Inc. |
Manufacturable laser diode
|
US9520695B2
(en)
|
2013-10-18 |
2016-12-13 |
Soraa Laser Diode, Inc. |
Gallium and nitrogen containing laser device having confinement region
|
US9362715B2
(en)
|
2014-02-10 |
2016-06-07 |
Soraa Laser Diode, Inc |
Method for manufacturing gallium and nitrogen bearing laser devices with improved usage of substrate material
|
US9209596B1
(en)
|
2014-02-07 |
2015-12-08 |
Soraa Laser Diode, Inc. |
Manufacturing a laser diode device from a plurality of gallium and nitrogen containing substrates
|
US9871350B2
(en)
|
2014-02-10 |
2018-01-16 |
Soraa Laser Diode, Inc. |
Manufacturable RGB laser diode source
|
US9520697B2
(en)
|
2014-02-10 |
2016-12-13 |
Soraa Laser Diode, Inc. |
Manufacturable multi-emitter laser diode
|
US9564736B1
(en)
|
2014-06-26 |
2017-02-07 |
Soraa Laser Diode, Inc. |
Epitaxial growth of p-type cladding regions using nitrogen gas for a gallium and nitrogen containing laser diode
|
KR20160050113A
(ko)
*
|
2014-10-28 |
2016-05-11 |
삼성전자주식회사 |
나노 구조 반도체 발광 소자의 제조 방법
|
US9246311B1
(en)
|
2014-11-06 |
2016-01-26 |
Soraa Laser Diode, Inc. |
Method of manufacture for an ultraviolet laser diode
|
US9666677B1
(en)
|
2014-12-23 |
2017-05-30 |
Soraa Laser Diode, Inc. |
Manufacturable thin film gallium and nitrogen containing devices
|
US9653642B1
(en)
|
2014-12-23 |
2017-05-16 |
Soraa Laser Diode, Inc. |
Manufacturable RGB display based on thin film gallium and nitrogen containing light emitting diodes
|
US10938182B2
(en)
|
2015-08-19 |
2021-03-02 |
Soraa Laser Diode, Inc. |
Specialized integrated light source using a laser diode
|
US11437774B2
(en)
|
2015-08-19 |
2022-09-06 |
Kyocera Sld Laser, Inc. |
High-luminous flux laser-based white light source
|
US10879673B2
(en)
|
2015-08-19 |
2020-12-29 |
Soraa Laser Diode, Inc. |
Integrated white light source using a laser diode and a phosphor in a surface mount device package
|
US11437775B2
(en)
|
2015-08-19 |
2022-09-06 |
Kyocera Sld Laser, Inc. |
Integrated light source using a laser diode
|
US9787963B2
(en)
|
2015-10-08 |
2017-10-10 |
Soraa Laser Diode, Inc. |
Laser lighting having selective resolution
|
US10771155B2
(en)
|
2017-09-28 |
2020-09-08 |
Soraa Laser Diode, Inc. |
Intelligent visible light with a gallium and nitrogen containing laser source
|
US10222474B1
(en)
|
2017-12-13 |
2019-03-05 |
Soraa Laser Diode, Inc. |
Lidar systems including a gallium and nitrogen containing laser light source
|
US10551728B1
(en)
|
2018-04-10 |
2020-02-04 |
Soraa Laser Diode, Inc. |
Structured phosphors for dynamic lighting
|
US11239637B2
(en)
|
2018-12-21 |
2022-02-01 |
Kyocera Sld Laser, Inc. |
Fiber delivered laser induced white light system
|
US11421843B2
(en)
|
2018-12-21 |
2022-08-23 |
Kyocera Sld Laser, Inc. |
Fiber-delivered laser-induced dynamic light system
|
US11884202B2
(en)
|
2019-01-18 |
2024-01-30 |
Kyocera Sld Laser, Inc. |
Laser-based fiber-coupled white light system
|
US10903623B2
(en)
|
2019-05-14 |
2021-01-26 |
Soraa Laser Diode, Inc. |
Method and structure for manufacturable large area gallium and nitrogen containing substrate
|
US11228158B2
(en)
|
2019-05-14 |
2022-01-18 |
Kyocera Sld Laser, Inc. |
Manufacturable laser diodes on a large area gallium and nitrogen containing substrate
|
CN114108097B
(zh)
*
|
2021-11-10 |
2023-12-22 |
南通大学 |
一种改善氮化镓晶体生长均匀性装置与生长方法
|