DE69125956T2 - Piezoresistives biegeelement für atomkräfte-mikroskopie - Google Patents

Piezoresistives biegeelement für atomkräfte-mikroskopie

Info

Publication number
DE69125956T2
DE69125956T2 DE69125956T DE69125956T DE69125956T2 DE 69125956 T2 DE69125956 T2 DE 69125956T2 DE 69125956 T DE69125956 T DE 69125956T DE 69125956 T DE69125956 T DE 69125956T DE 69125956 T2 DE69125956 T2 DE 69125956T2
Authority
DE
Germany
Prior art keywords
piezoresistive
force microscopy
bending element
nuclear force
nuclear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69125956T
Other languages
English (en)
Other versions
DE69125956D1 (de
Inventor
Thomas Albrecht
Marco Tortonese
Robert Barrett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leland Stanford Junior University
Original Assignee
Leland Stanford Junior University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24558893&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69125956(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leland Stanford Junior University filed Critical Leland Stanford Junior University
Publication of DE69125956D1 publication Critical patent/DE69125956D1/de
Application granted granted Critical
Publication of DE69125956T2 publication Critical patent/DE69125956T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
DE69125956T 1991-01-04 1991-12-30 Piezoresistives biegeelement für atomkräfte-mikroskopie Expired - Fee Related DE69125956T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63816391A 1991-01-04 1991-01-04
PCT/US1991/009759 WO1992012398A1 (en) 1991-01-04 1991-12-30 Piezoresistive cantilever for atomic force microscopy

Publications (2)

Publication Number Publication Date
DE69125956D1 DE69125956D1 (de) 1997-06-05
DE69125956T2 true DE69125956T2 (de) 1997-09-04

Family

ID=24558893

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125956T Expired - Fee Related DE69125956T2 (de) 1991-01-04 1991-12-30 Piezoresistives biegeelement für atomkräfte-mikroskopie

Country Status (8)

Country Link
US (3) US5345815A (de)
EP (1) EP0619872B1 (de)
JP (1) JPH05196458A (de)
KR (1) KR100214152B1 (de)
AU (1) AU1249692A (de)
DE (1) DE69125956T2 (de)
HK (1) HK1007794A1 (de)
WO (1) WO1992012398A1 (de)

Families Citing this family (137)

* Cited by examiner, † Cited by third party
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DE69125956D1 (de) 1997-06-05
HK1007794A1 (en) 1999-04-23
EP0619872A4 (de) 1994-07-05
AU1249692A (en) 1992-08-17
US5345815A (en) 1994-09-13
US5595942A (en) 1997-01-21
EP0619872A1 (de) 1994-10-19
JPH05196458A (ja) 1993-08-06
KR930703584A (ko) 1993-11-30
EP0619872B1 (de) 1997-05-02
WO1992012398A1 (en) 1992-07-23
KR100214152B1 (ko) 1999-08-02
US5483822A (en) 1996-01-16

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