DE69125550D1 - Messsystem zur Analyse von Lageabweichungen einer Platte in einem Plattenherstellungsverfahren und zum Liefern von geeigneten Informationen zur Anpassung der Plattenherstellungsverfahren - Google Patents
Messsystem zur Analyse von Lageabweichungen einer Platte in einem Plattenherstellungsverfahren und zum Liefern von geeigneten Informationen zur Anpassung der PlattenherstellungsverfahrenInfo
- Publication number
- DE69125550D1 DE69125550D1 DE69125550T DE69125550T DE69125550D1 DE 69125550 D1 DE69125550 D1 DE 69125550D1 DE 69125550 T DE69125550 T DE 69125550T DE 69125550 T DE69125550 T DE 69125550T DE 69125550 D1 DE69125550 D1 DE 69125550D1
- Authority
- DE
- Germany
- Prior art keywords
- plate
- plate manufacturing
- adapting
- measuring system
- suitable information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/576,304 US5206820A (en) | 1990-08-31 | 1990-08-31 | Metrology system for analyzing panel misregistration in a panel manufacturing process and providing appropriate information for adjusting panel manufacturing processes |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69125550D1 true DE69125550D1 (de) | 1997-05-15 |
DE69125550T2 DE69125550T2 (de) | 1997-07-31 |
Family
ID=24303860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69125550T Expired - Fee Related DE69125550T2 (de) | 1990-08-31 | 1991-08-22 | Messsystem zur Analyse von Lageabweichungen einer Platte in einem Plattenherstellungsverfahren und zum Liefern von geeigneten Informationen zur Anpassung der Plattenherstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5206820A (de) |
EP (1) | EP0473363B1 (de) |
JP (1) | JP2824351B2 (de) |
DE (1) | DE69125550T2 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6067379A (en) * | 1988-12-09 | 2000-05-23 | Cognex Corporation | Method and apparatus for locating patterns in an optical image |
DE4406538A1 (de) | 1994-02-28 | 1995-08-31 | Mania Gmbh | Leiterplatten-Prüfeinrichtung mit Prüfadapter und Verfahren zum Einstellen desselben |
US5602937A (en) * | 1994-06-01 | 1997-02-11 | Cognex Corporation | Methods and apparatus for machine vision high accuracy searching |
JPH0891543A (ja) * | 1994-09-28 | 1996-04-09 | Omron Corp | 画像処理方法およびその装置 |
JP3409493B2 (ja) * | 1995-03-13 | 2003-05-26 | ソニー株式会社 | マスクパターンの補正方法および補正装置 |
US5801966A (en) * | 1995-07-24 | 1998-09-01 | Cognex Corporation | Machine vision methods and articles of manufacture for determination of convex hull and convex hull angle |
US6026176A (en) | 1995-07-25 | 2000-02-15 | Cognex Corporation | Machine vision methods and articles of manufacture for ball grid array inspection |
US5757956A (en) * | 1995-10-31 | 1998-05-26 | Cognex Corp. | Template rotating method for locating bond pads in an image |
US5754679A (en) * | 1995-10-31 | 1998-05-19 | Cognex Corp. | Image rotating method for locating bond pads in an image |
US5845007A (en) * | 1996-01-02 | 1998-12-01 | Cognex Corporation | Machine vision method and apparatus for edge-based image histogram analysis |
US5872870A (en) * | 1996-02-16 | 1999-02-16 | Cognex Corporation | Machine vision methods for identifying extrema of objects in rotated reference frames |
US5909504A (en) * | 1996-03-15 | 1999-06-01 | Cognex Corporation | Method of testing a machine vision inspection system |
US6259827B1 (en) | 1996-03-21 | 2001-07-10 | Cognex Corporation | Machine vision methods for enhancing the contrast between an object and its background using multiple on-axis images |
US5949901A (en) * | 1996-03-21 | 1999-09-07 | Nichani; Sanjay | Semiconductor device image inspection utilizing image subtraction and threshold imaging |
US6298149B1 (en) | 1996-03-21 | 2001-10-02 | Cognex Corporation | Semiconductor device image inspection with contrast enhancement |
US5978502A (en) * | 1996-04-01 | 1999-11-02 | Cognex Corporation | Machine vision methods for determining characteristics of three-dimensional objects |
JP3011401B2 (ja) * | 1996-08-29 | 2000-02-21 | 日本電産リード株式会社 | 上側治具位置決め機構付きプリント基板検査装置および上側治具位置決め方法 |
US6137893A (en) * | 1996-10-07 | 2000-10-24 | Cognex Corporation | Machine vision calibration targets and methods of determining their location and orientation in an image |
US5960125A (en) | 1996-11-21 | 1999-09-28 | Cognex Corporation | Nonfeedback-based machine vision method for determining a calibration relationship between a camera and a moveable object |
US5953130A (en) * | 1997-01-06 | 1999-09-14 | Cognex Corporation | Machine vision methods and apparatus for machine vision illumination of an object |
US6075881A (en) * | 1997-03-18 | 2000-06-13 | Cognex Corporation | Machine vision methods for identifying collinear sets of points from an image |
US5974169A (en) * | 1997-03-20 | 1999-10-26 | Cognex Corporation | Machine vision methods for determining characteristics of an object using boundary points and bounding regions |
US6141033A (en) * | 1997-05-15 | 2000-10-31 | Cognex Corporation | Bandwidth reduction of multichannel images for machine vision |
US6608647B1 (en) | 1997-06-24 | 2003-08-19 | Cognex Corporation | Methods and apparatus for charge coupled device image acquisition with independent integration and readout |
US5978080A (en) * | 1997-09-25 | 1999-11-02 | Cognex Corporation | Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view |
US6025854A (en) * | 1997-12-31 | 2000-02-15 | Cognex Corporation | Method and apparatus for high speed image acquisition |
US6282328B1 (en) | 1998-01-28 | 2001-08-28 | Cognex Corporation | Machine vision systems and methods for morphological transformation of an image with non-uniform offsets |
US6236769B1 (en) | 1998-01-28 | 2001-05-22 | Cognex Corporation | Machine vision systems and methods for morphological transformation of an image with zero or other uniform offsets |
US6381375B1 (en) | 1998-02-20 | 2002-04-30 | Cognex Corporation | Methods and apparatus for generating a projection of an image |
US6215915B1 (en) | 1998-02-20 | 2001-04-10 | Cognex Corporation | Image processing methods and apparatus for separable, general affine transformation of an image |
US6516092B1 (en) | 1998-05-29 | 2003-02-04 | Cognex Corporation | Robust sub-model shape-finder |
US6381366B1 (en) | 1998-12-18 | 2002-04-30 | Cognex Corporation | Machine vision methods and system for boundary point-based comparison of patterns and images |
US6687402B1 (en) | 1998-12-18 | 2004-02-03 | Cognex Corporation | Machine vision methods and systems for boundary feature comparison of patterns and images |
US6684402B1 (en) | 1999-12-01 | 2004-01-27 | Cognex Technology And Investment Corporation | Control methods and apparatus for coupling multiple image acquisition devices to a digital data processor |
US6748104B1 (en) | 2000-03-24 | 2004-06-08 | Cognex Corporation | Methods and apparatus for machine vision inspection using single and multiple templates or patterns |
JP4485667B2 (ja) * | 2000-08-21 | 2010-06-23 | パナソニック株式会社 | 部品実装装置のオフセット測定用基板及び部品実装装置のオフセット測定方法 |
US6581202B1 (en) * | 2000-11-10 | 2003-06-17 | Viasystems Group, Inc. | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
US6804388B2 (en) * | 2001-03-14 | 2004-10-12 | Maniabarco, Inc. | Method and apparatus of registering a printed circuit board |
US7089160B2 (en) * | 2002-01-08 | 2006-08-08 | International Business Machines Corporation | Model for modifying drill data to predict hole locations in a panel structure |
US7765668B2 (en) * | 2002-12-10 | 2010-08-03 | Chep Technology Pty Limited | Automated pallet inspection and repair |
US8111904B2 (en) * | 2005-10-07 | 2012-02-07 | Cognex Technology And Investment Corp. | Methods and apparatus for practical 3D vision system |
US8162584B2 (en) * | 2006-08-23 | 2012-04-24 | Cognex Corporation | Method and apparatus for semiconductor wafer alignment |
JP5303230B2 (ja) * | 2008-09-29 | 2013-10-02 | 株式会社日立ハイテクノロジーズ | 画像処理システム、及び走査型電子顕微鏡装置 |
JP6498564B2 (ja) * | 2015-08-20 | 2019-04-10 | 日置電機株式会社 | 処理装置、基板検査装置、処理方法および基板検査方法 |
US10565697B2 (en) * | 2017-10-22 | 2020-02-18 | Kla-Tencor Corporation | Utilizing overlay misregistration error estimations in imaging overlay metrology |
CN212936279U (zh) * | 2020-07-08 | 2021-04-09 | 瑞声科技(新加坡)有限公司 | 用于lcp基板的内层板结构及lcp基板 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3955072A (en) * | 1971-03-22 | 1976-05-04 | Kasper Instruments, Inc. | Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask |
US4259019A (en) * | 1971-03-22 | 1981-03-31 | Kasper Instruments, Inc. | Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask |
JPS5923467B2 (ja) * | 1979-04-16 | 1984-06-02 | 株式会社日立製作所 | 位置検出方法 |
JPS5628650A (en) * | 1979-08-16 | 1981-03-20 | Mitsubishi Petrochemical Co | Method of crushing epoxy resin or epoxy resin composition |
JPS5994419A (ja) * | 1982-11-19 | 1984-05-31 | Canon Inc | 分割焼付け装置におけるアライメント方法 |
US4713784A (en) * | 1983-07-04 | 1987-12-15 | Canon Kabushiki Kaisha | Alignment apparatus |
US4536239A (en) * | 1983-07-18 | 1985-08-20 | Nicolet Instrument Corporation | Multi-layer circuit board inspection system |
GB2146427B (en) * | 1983-08-01 | 1987-10-21 | Canon Kk | Semiconductor manufacture |
JPS61174717A (ja) * | 1985-01-30 | 1986-08-06 | Canon Inc | 位置合わせ装置 |
US4805123B1 (en) * | 1986-07-14 | 1998-10-13 | Kla Instr Corp | Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems |
US4697087A (en) * | 1986-07-31 | 1987-09-29 | The Perkin-Elmer Corporation | Reverse dark field alignment system for scanning lithographic aligner |
JPH0761599B2 (ja) * | 1986-10-08 | 1995-07-05 | 株式会社日立製作所 | 製造設備監視方法 |
US4774640A (en) * | 1987-03-26 | 1988-09-27 | Montean Jr John | Illuminating device for determining dimensional integrity of material working tools |
JPS63310113A (ja) * | 1987-06-11 | 1988-12-19 | Nec Corp | 半導体集積回路の製造装置 |
JPS63310116A (ja) * | 1987-06-12 | 1988-12-19 | Hitachi Ltd | 半導体チツプパタンの基準位置合せ方法 |
US4793052A (en) * | 1987-11-13 | 1988-12-27 | American Telephone And Telegraph Company, At&T Laboratories | Method for positioning a panel |
US4918380A (en) * | 1988-07-07 | 1990-04-17 | Paur Tom R | System for measuring misregistration |
US4894606A (en) * | 1988-07-07 | 1990-01-16 | Paur Tom R | System for measuring misregistration of printed circuit board layers |
-
1990
- 1990-08-31 US US07/576,304 patent/US5206820A/en not_active Expired - Fee Related
-
1991
- 1991-08-22 EP EP91307732A patent/EP0473363B1/de not_active Expired - Lifetime
- 1991-08-22 DE DE69125550T patent/DE69125550T2/de not_active Expired - Fee Related
- 1991-08-30 JP JP24407291A patent/JP2824351B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5206820A (en) | 1993-04-27 |
JP2824351B2 (ja) | 1998-11-11 |
JPH04315557A (ja) | 1992-11-06 |
EP0473363A2 (de) | 1992-03-04 |
EP0473363A3 (en) | 1992-09-02 |
DE69125550T2 (de) | 1997-07-31 |
EP0473363B1 (de) | 1997-04-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |