DE69124977T2 - Durchflussregler - Google Patents

Durchflussregler

Info

Publication number
DE69124977T2
DE69124977T2 DE69124977T DE69124977T DE69124977T2 DE 69124977 T2 DE69124977 T2 DE 69124977T2 DE 69124977 T DE69124977 T DE 69124977T DE 69124977 T DE69124977 T DE 69124977T DE 69124977 T2 DE69124977 T2 DE 69124977T2
Authority
DE
Germany
Prior art keywords
flow controller
controller
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69124977T
Other languages
English (en)
Other versions
DE69124977D1 (de
Inventor
Shigeru Itoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYOHARA MASAKO
Original Assignee
KYOHARA MASAKO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYOHARA MASAKO filed Critical KYOHARA MASAKO
Publication of DE69124977D1 publication Critical patent/DE69124977D1/de
Application granted granted Critical
Publication of DE69124977T2 publication Critical patent/DE69124977T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/506—Mechanical actuating means with screw-spindle or internally threaded actuating means with plural sets of thread, e.g. with different pitch
DE69124977T 1991-01-11 1991-12-09 Durchflussregler Expired - Fee Related DE69124977T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991003854U JP2541613Y2 (ja) 1991-01-11 1991-01-11 制御器

Publications (2)

Publication Number Publication Date
DE69124977D1 DE69124977D1 (de) 1997-04-10
DE69124977T2 true DE69124977T2 (de) 1997-10-09

Family

ID=11568771

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69124977T Expired - Fee Related DE69124977T2 (de) 1991-01-11 1991-12-09 Durchflussregler

Country Status (7)

Country Link
US (1) US5188338A (de)
EP (1) EP0494511B1 (de)
JP (1) JP2541613Y2 (de)
KR (1) KR940010774B1 (de)
CA (1) CA2059082C (de)
DE (1) DE69124977T2 (de)
SG (1) SG46997A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2109105T3 (es) * 1994-07-07 1998-01-01 Aage V Kjaers Maskinfabrik A S Valvula de cierre.
US6824118B1 (en) * 2001-06-07 2004-11-30 Bryan W. Stafford Micro-adjustment flow control valve
US7059584B2 (en) * 2002-12-10 2006-06-13 Kay Balasubramanian Diaphragm valve having adjustable closure means
JP2006153042A (ja) * 2004-11-25 2006-06-15 Surpass Kogyo Kk 流量調節弁
KR100980237B1 (ko) * 2005-12-02 2010-09-09 씨케이디 가부시키 가이샤 유량조정밸브
DK1798458T3 (da) * 2005-12-13 2009-06-02 Pergola S R L Membranventil til komprimeret eller flydende gas
WO2008094672A2 (en) * 2007-01-31 2008-08-07 Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
JP6491877B2 (ja) * 2014-12-25 2019-03-27 株式会社フジキン 流体制御器
JP6491878B2 (ja) * 2014-12-25 2019-03-27 株式会社フジキン 流体制御器
US10851898B2 (en) * 2016-09-29 2020-12-01 Hitachi Metals, Ltd. Flow control valve and mass flow controller using the same
WO2020171018A1 (ja) * 2019-02-19 2020-08-27 株式会社フジキン バルブ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB191323961A (en) * 1913-10-22 1914-10-22 Reginald James Mclaren Whibley Improvements in or relating to Regulating Valves.
FR532655A (fr) * 1921-03-23 1922-02-09 App Magondeaux Soc D Robinet pointeau pour distributions de fluides à haute pression
FR805910A (fr) * 1935-05-13 1936-12-03 Const D App A Gaz S A Robinet à pointeau
US2388989A (en) * 1944-04-08 1945-11-13 Shriver & Company Inc T Diaphragm valve
US2654559A (en) * 1950-03-08 1953-10-06 Imp Brass Mfg Co Diaphragm valve
US2812777A (en) * 1953-11-20 1957-11-12 George W Dahl Diaphragm mounting in valve body
DE1239899B (de) * 1962-08-30 1967-05-03 Johannes Erhard Regulierventil, insbesondere fuer Warmwasser- und Niederdruckdampfheizungen
US3428291A (en) * 1965-05-24 1969-02-18 Nuclear Products Co Bellows metering valve
US3409271A (en) * 1966-05-04 1968-11-05 Ideal Aerosmith Inc Fluid flow control valve
GB1509552A (en) * 1975-03-06 1978-05-04 Saunders Valve Co Ltd Fluid flow control valves
FR2593260B1 (fr) * 1986-01-17 1988-08-12 Filleau Paul Robinet a commande par vis micrometrique
JPS6392882U (de) * 1986-12-05 1988-06-15
JPH01176275A (ja) * 1988-01-01 1989-07-12 Toshiba Corp 窒化物セラミックスの製造方法
JPH01299385A (ja) * 1988-05-26 1989-12-04 Toyooki Kogyo Co Ltd 流量制御弁

Also Published As

Publication number Publication date
KR920015458A (ko) 1992-08-26
EP0494511A3 (en) 1992-09-23
EP0494511A2 (de) 1992-07-15
EP0494511B1 (de) 1997-03-05
DE69124977D1 (de) 1997-04-10
JP2541613Y2 (ja) 1997-07-16
SG46997A1 (en) 1998-03-20
KR940010774B1 (ko) 1994-11-11
US5188338A (en) 1993-02-23
CA2059082A1 (en) 1992-07-12
CA2059082C (en) 1997-03-25
JPH0495370U (de) 1992-08-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee