DE69122726T2 - Tintenstrahlaufzeichnung - Google Patents

Tintenstrahlaufzeichnung

Info

Publication number
DE69122726T2
DE69122726T2 DE69122726T DE69122726T DE69122726T2 DE 69122726 T2 DE69122726 T2 DE 69122726T2 DE 69122726 T DE69122726 T DE 69122726T DE 69122726 T DE69122726 T DE 69122726T DE 69122726 T2 DE69122726 T2 DE 69122726T2
Authority
DE
Germany
Prior art keywords
ink
inkjet recording
energy generators
substrate
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69122726T
Other languages
English (en)
Other versions
DE69122726D1 (de
Inventor
Toshio Suzuki
Asao Saito
Makoto Shibata
Junichi Kobayashi
Hirokazu Komuro
Toshihiro Mori
Shuji Koyama
Sakai Yokoyama
Ryoichi Koizumi
Keiichi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP40989590A external-priority patent/JPH04214357A/ja
Priority claimed from JP473691A external-priority patent/JPH04247947A/ja
Priority claimed from JP6104591A external-priority patent/JPH04276456A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69122726D1 publication Critical patent/DE69122726D1/de
Publication of DE69122726T2 publication Critical patent/DE69122726T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
DE69122726T 1990-12-12 1991-12-11 Tintenstrahlaufzeichnung Expired - Lifetime DE69122726T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP40989590A JPH04214357A (ja) 1990-12-12 1990-12-12 インクジェット記録ヘッドおよびインクジェット記録装置
JP473691A JPH04247947A (ja) 1991-01-18 1991-01-18 インクジェット記録ヘッドおよびインクジェット記録装置
JP6104591A JPH04276456A (ja) 1991-03-04 1991-03-04 液体噴射記録ヘッド、及び同ヘッドを備えた記録装置

Publications (2)

Publication Number Publication Date
DE69122726D1 DE69122726D1 (de) 1996-11-21
DE69122726T2 true DE69122726T2 (de) 1997-03-13

Family

ID=27276434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69122726T Expired - Lifetime DE69122726T2 (de) 1990-12-12 1991-12-11 Tintenstrahlaufzeichnung

Country Status (4)

Country Link
US (1) US5491505A (de)
EP (1) EP0490668B1 (de)
AT (1) ATE144193T1 (de)
DE (1) DE69122726T2 (de)

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DE69510284T2 (de) * 1994-08-25 1999-10-14 Seiko Epson Corp Flüssigkeitsstrahlkopf
EP0715957B1 (de) * 1994-12-05 1999-05-26 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Tintenstrahlkopfes
JPH08174833A (ja) * 1994-12-21 1996-07-09 Canon Inc インクジェット記録装置の記録ヘッドおよびその基板端面への酸化皮膜形成方法
JP3513270B2 (ja) * 1995-06-30 2004-03-31 キヤノン株式会社 インクジェット記録ヘッド及びインクジェット記録装置
JPH09109392A (ja) 1995-10-13 1997-04-28 Canon Inc インクジェット記録ヘッドの製造方法および同方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置
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DE69725073T2 (de) 1996-07-31 2004-07-08 Canon K.K. Aufzeichnungskopf und Aufzeichnungsverfahren
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JP3408130B2 (ja) 1997-12-19 2003-05-19 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
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JP3592208B2 (ja) 2000-07-10 2004-11-24 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
JP4669138B2 (ja) * 2001-02-22 2011-04-13 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3652321B2 (ja) 2001-05-08 2005-05-25 キヤノン株式会社 インクジェット記録ヘッド
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CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
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JP4630680B2 (ja) * 2005-01-31 2011-02-09 キヤノン株式会社 半導体素子の製造方法およびインクジェット記録ヘッドの製造方法
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US8438729B2 (en) * 2006-03-09 2013-05-14 Canon Kabushiki Kaisha Method of producing liquid discharge head
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KR20080104851A (ko) * 2007-05-29 2008-12-03 삼성전자주식회사 잉크젯 프린트헤드
JP5311975B2 (ja) * 2007-12-12 2013-10-09 キヤノン株式会社 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド
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JP5765924B2 (ja) * 2010-12-09 2015-08-19 キヤノン株式会社 液体吐出ヘッドの駆動方法、液体吐出ヘッド、及び液体吐出装置
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Also Published As

Publication number Publication date
EP0490668A2 (de) 1992-06-17
ATE144193T1 (de) 1996-11-15
EP0490668A3 (en) 1992-12-02
DE69122726D1 (de) 1996-11-21
US5491505A (en) 1996-02-13
EP0490668B1 (de) 1996-10-16

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