DE69113141D1 - Laser mit vertikalem Resonator und Spiegel mit steuerbarer Reflektivität. - Google Patents
Laser mit vertikalem Resonator und Spiegel mit steuerbarer Reflektivität.Info
- Publication number
- DE69113141D1 DE69113141D1 DE69113141T DE69113141T DE69113141D1 DE 69113141 D1 DE69113141 D1 DE 69113141D1 DE 69113141 T DE69113141 T DE 69113141T DE 69113141 T DE69113141 T DE 69113141T DE 69113141 D1 DE69113141 D1 DE 69113141D1
- Authority
- DE
- Germany
- Prior art keywords
- mirror
- laser
- vertical resonator
- controllable reflectivity
- reflectivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/0208—Semi-insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
- H01S5/0614—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by electric field, i.e. whereby an additional electric field is used to tune the bandgap, e.g. using the Stark-effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18302—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] comprising an integrated optical modulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2054—Methods of obtaining the confinement
- H01S5/2059—Methods of obtaining the confinement by means of particular conductivity zones, e.g. obtained by particle bombardment or diffusion
- H01S5/2063—Methods of obtaining the confinement by means of particular conductivity zones, e.g. obtained by particle bombardment or diffusion obtained by particle bombardment
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/548,033 US5056098A (en) | 1990-07-05 | 1990-07-05 | Vertical cavity laser with mirror having controllable reflectivity |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69113141D1 true DE69113141D1 (de) | 1995-10-26 |
DE69113141T2 DE69113141T2 (de) | 1996-05-09 |
Family
ID=24187135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69113141T Expired - Fee Related DE69113141T2 (de) | 1990-07-05 | 1991-06-28 | Laser mit vertikalem Resonator und Spiegel mit steuerbarer Reflektivität. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5056098A (de) |
EP (1) | EP0465145B1 (de) |
JP (1) | JP2545165B2 (de) |
DE (1) | DE69113141T2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04107976A (ja) * | 1990-08-28 | 1992-04-09 | Mitsubishi Electric Corp | 半導体レーザ装置 |
US5365541A (en) * | 1992-01-29 | 1994-11-15 | Trw Inc. | Mirror with photonic band structure |
US5245622A (en) * | 1992-05-07 | 1993-09-14 | Bandgap Technology Corporation | Vertical-cavity surface-emitting lasers with intra-cavity structures |
JPH06291406A (ja) * | 1993-03-31 | 1994-10-18 | Fujitsu Ltd | 面発光半導体レーザ |
US5574738A (en) * | 1995-06-07 | 1996-11-12 | Honeywell Inc. | Multi-gigahertz frequency-modulated vertical-cavity surface emitting laser |
JPH0964334A (ja) * | 1995-08-28 | 1997-03-07 | Toshiba Corp | 発光素子と外部変調器の集積素子 |
US5978401A (en) * | 1995-10-25 | 1999-11-02 | Honeywell Inc. | Monolithic vertical cavity surface emitting laser and resonant cavity photodetector transceiver |
US5764674A (en) * | 1996-06-28 | 1998-06-09 | Honeywell Inc. | Current confinement for a vertical cavity surface emitting laser |
US5757837A (en) * | 1996-10-16 | 1998-05-26 | The Regents Of The University Of California | Intracavity quantum well photodetector integrated within a vertical-cavity surface-emitting laser and method of operating same |
US5774487A (en) * | 1996-10-16 | 1998-06-30 | Honeywell Inc. | Filamented multi-wavelength vertical-cavity surface emitting laser |
US6064683A (en) * | 1997-12-12 | 2000-05-16 | Honeywell Inc. | Bandgap isolated light emitter |
US6341138B1 (en) | 1999-06-16 | 2002-01-22 | Gore Enterprise Holdings, Inc. | Constant temperature performance laser |
FR2805902B1 (fr) * | 2000-03-03 | 2002-05-10 | Centre Nat Rech Scient | Dispositif optoelectronique semiconducteur a fonction de transfert modulable electriquement |
US7065124B2 (en) | 2000-11-28 | 2006-06-20 | Finlsar Corporation | Electron affinity engineered VCSELs |
US6990135B2 (en) * | 2002-10-28 | 2006-01-24 | Finisar Corporation | Distributed bragg reflector for optoelectronic device |
US6905900B1 (en) | 2000-11-28 | 2005-06-14 | Finisar Corporation | Versatile method and system for single mode VCSELs |
US6836501B2 (en) * | 2000-12-29 | 2004-12-28 | Finisar Corporation | Resonant reflector for increased wavelength and polarization control |
US6782027B2 (en) | 2000-12-29 | 2004-08-24 | Finisar Corporation | Resonant reflector for use with optoelectronic devices |
US6727520B2 (en) | 2000-12-29 | 2004-04-27 | Honeywell International Inc. | Spatially modulated reflector for an optoelectronic device |
TWI227799B (en) * | 2000-12-29 | 2005-02-11 | Honeywell Int Inc | Resonant reflector for increased wavelength and polarization control |
DE10102458A1 (de) * | 2001-01-15 | 2002-07-25 | Infineon Technologies Ag | Vertikallaserdiode mit ausbleichbarem Absorbermittel |
US6606199B2 (en) | 2001-10-10 | 2003-08-12 | Honeywell International Inc. | Graded thickness optical element and method of manufacture therefor |
US6816526B2 (en) * | 2001-12-28 | 2004-11-09 | Finisar Corporation | Gain guide implant in oxide vertical cavity surface emitting laser |
US6965626B2 (en) | 2002-09-03 | 2005-11-15 | Finisar Corporation | Single mode VCSEL |
US6813293B2 (en) | 2002-11-21 | 2004-11-02 | Finisar Corporation | Long wavelength VCSEL with tunnel junction, and implant |
US7298942B2 (en) | 2003-06-06 | 2007-11-20 | Finisar Corporation | Pluggable optical optic system having a lens fiber stop |
US7433381B2 (en) | 2003-06-25 | 2008-10-07 | Finisar Corporation | InP based long wavelength VCSEL |
US7075962B2 (en) | 2003-06-27 | 2006-07-11 | Finisar Corporation | VCSEL having thermal management |
US7277461B2 (en) | 2003-06-27 | 2007-10-02 | Finisar Corporation | Dielectric VCSEL gain guide |
US7054345B2 (en) | 2003-06-27 | 2006-05-30 | Finisar Corporation | Enhanced lateral oxidation |
US6961489B2 (en) | 2003-06-30 | 2005-11-01 | Finisar Corporation | High speed optical system |
US7149383B2 (en) | 2003-06-30 | 2006-12-12 | Finisar Corporation | Optical system with reduced back reflection |
US7210857B2 (en) | 2003-07-16 | 2007-05-01 | Finisar Corporation | Optical coupling system |
US6887801B2 (en) | 2003-07-18 | 2005-05-03 | Finisar Corporation | Edge bead control method and apparatus |
US7031363B2 (en) | 2003-10-29 | 2006-04-18 | Finisar Corporation | Long wavelength VCSEL device processing |
US7920612B2 (en) * | 2004-08-31 | 2011-04-05 | Finisar Corporation | Light emitting semiconductor device having an electrical confinement barrier near the active region |
US7596165B2 (en) * | 2004-08-31 | 2009-09-29 | Finisar Corporation | Distributed Bragg Reflector for optoelectronic device |
US7829912B2 (en) * | 2006-07-31 | 2010-11-09 | Finisar Corporation | Efficient carrier injection in a semiconductor device |
US8031752B1 (en) | 2007-04-16 | 2011-10-04 | Finisar Corporation | VCSEL optimized for high speed data |
EP2525450B1 (de) | 2011-05-17 | 2017-10-04 | Danmarks Tekniske Universitet | Gitterspiegel mit Modulation der Reflektivität |
DK2729997T3 (en) | 2011-07-04 | 2016-01-25 | Univ Danmarks Tekniske | Laser devices |
US9557556B2 (en) | 2013-03-18 | 2017-01-31 | Si-Ware Systems | Integrated apertured micromirror and applications thereof |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1206526B (de) * | 1961-08-18 | 1965-12-09 | Standard Elektrik Lorenz Ag | Modulierbarer optischer Sender |
JPS59115583A (ja) * | 1982-12-22 | 1984-07-04 | Sanyo Electric Co Ltd | 半導体レ−ザ |
JPS6032381A (ja) * | 1983-08-01 | 1985-02-19 | Matsushita Electric Ind Co Ltd | 面発光半導体レ−ザ装置 |
JPS60154693A (ja) * | 1984-01-25 | 1985-08-14 | Fujitsu Ltd | 半導体発光装置 |
JPS6179280A (ja) * | 1984-09-27 | 1986-04-22 | Agency Of Ind Science & Technol | 面発光型半導体レ−ザ装置及びその製造方法 |
JPH0793473B2 (ja) * | 1987-10-06 | 1995-10-09 | 古河電気工業株式会社 | 光半導体素子 |
JPS6446996A (en) * | 1988-08-03 | 1989-02-21 | Agency Ind Science Techn | Method for realizing optical bistable function and optical bistable function element |
US4943970A (en) * | 1988-10-24 | 1990-07-24 | General Dynamics Corporation, Electronics Division | Surface emitting laser |
US4873696A (en) * | 1988-10-31 | 1989-10-10 | The Regents Of The University Of California | Surface-emitting lasers with periodic gain and a parallel driven nipi structure |
JPH0311689A (ja) * | 1989-06-08 | 1991-01-18 | Fujikura Ltd | 面発光型波長制御dbrレーザ |
US4949350A (en) * | 1989-07-17 | 1990-08-14 | Bell Communications Research, Inc. | Surface emitting semiconductor laser |
-
1990
- 1990-07-05 US US07/548,033 patent/US5056098A/en not_active Expired - Lifetime
-
1991
- 1991-06-28 EP EP91305859A patent/EP0465145B1/de not_active Expired - Lifetime
- 1991-06-28 DE DE69113141T patent/DE69113141T2/de not_active Expired - Fee Related
- 1991-07-05 JP JP3191251A patent/JP2545165B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0465145A3 (en) | 1992-07-22 |
JPH04233293A (ja) | 1992-08-21 |
JP2545165B2 (ja) | 1996-10-16 |
DE69113141T2 (de) | 1996-05-09 |
US5056098A (en) | 1991-10-08 |
EP0465145B1 (de) | 1995-09-20 |
EP0465145A2 (de) | 1992-01-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |