DE69111591T2 - Ventil mit positionsdetektor und damit versehener mikropumpe. - Google Patents
Ventil mit positionsdetektor und damit versehener mikropumpe.Info
- Publication number
- DE69111591T2 DE69111591T2 DE1991611591 DE69111591T DE69111591T2 DE 69111591 T2 DE69111591 T2 DE 69111591T2 DE 1991611591 DE1991611591 DE 1991611591 DE 69111591 T DE69111591 T DE 69111591T DE 69111591 T2 DE69111591 T2 DE 69111591T2
- Authority
- DE
- Germany
- Prior art keywords
- valve
- pct
- position detector
- micropump
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000003814 drug Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000002847 impedance measurement Methods 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000007257 malfunction Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/142—Pressure infusion, e.g. using pumps
- A61M5/145—Pressure infusion, e.g. using pumps using pressurised reservoirs, e.g. pressurised by means of pistons
- A61M5/1452—Pressure infusion, e.g. using pumps using pressurised reservoirs, e.g. pressurised by means of pistons pressurised by means of pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0086—Medical applications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0086—Medical applications
- F16K2099/0088—Implanted devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0094—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH2833/90A CH683793A5 (fr) | 1990-08-31 | 1990-08-31 | Clapet muni d'un détecteur de position par contact et micropompe comportant un tel clapet. |
CH360/91A CH684286A5 (fr) | 1991-02-06 | 1991-02-06 | Clapet muni d'un détecteur de position par contact et micropompe comportant un tel clapet. |
PCT/EP1991/001586 WO1992004569A1 (en) | 1990-08-31 | 1991-08-21 | A valve equipped with a position detector and a micropump incorporating said valve |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69111591D1 DE69111591D1 (de) | 1995-08-31 |
DE69111591T2 true DE69111591T2 (de) | 1996-02-29 |
Family
ID=25684344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991611591 Expired - Lifetime DE69111591T2 (de) | 1990-08-31 | 1991-08-21 | Ventil mit positionsdetektor und damit versehener mikropumpe. |
Country Status (9)
Country | Link |
---|---|
US (1) | US5271724A (de) |
EP (1) | EP0498863B1 (de) |
JP (1) | JP3111319B2 (de) |
AT (1) | ATE125605T1 (de) |
AU (1) | AU645841B2 (de) |
CA (1) | CA2069894C (de) |
DE (1) | DE69111591T2 (de) |
ES (1) | ES2075459T3 (de) |
WO (1) | WO1992004569A1 (de) |
Families Citing this family (128)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4119955C2 (de) * | 1991-06-18 | 2000-05-31 | Danfoss As | Miniatur-Betätigungselement |
DE4223067C2 (de) * | 1992-07-14 | 1997-08-07 | Univ Dresden Tech | Mikromechanischer Durchflußbegrenzer in Mehrschichtenstruktur |
DE69410487T2 (de) * | 1993-12-28 | 1998-11-05 | Westonbridge Int Ltd | Mikropumpe |
CH689836A5 (fr) * | 1994-01-14 | 1999-12-15 | Westonbridge Int Ltd | Micropompe. |
US5856174A (en) * | 1995-06-29 | 1999-01-05 | Affymetrix, Inc. | Integrated nucleic acid diagnostic device |
US20050100946A1 (en) * | 1995-06-29 | 2005-05-12 | Affymetrix, Inc. | Integrated nucleic acid diagnostic device and method for in-situ confocal microscopy |
US6168948B1 (en) | 1995-06-29 | 2001-01-02 | Affymetrix, Inc. | Miniaturized genetic analysis systems and methods |
US20020022261A1 (en) * | 1995-06-29 | 2002-02-21 | Anderson Rolfe C. | Miniaturized genetic analysis systems and methods |
US20020068357A1 (en) * | 1995-09-28 | 2002-06-06 | Mathies Richard A. | Miniaturized integrated nucleic acid processing and analysis device and method |
US5942443A (en) * | 1996-06-28 | 1999-08-24 | Caliper Technologies Corporation | High throughput screening assay systems in microscale fluidic devices |
US20060000722A1 (en) * | 1996-06-28 | 2006-01-05 | Caliper Life Sciences, Inc. | High throughput screening assay systems in microscale fluidic devices |
CN1173776C (zh) | 1996-06-28 | 2004-11-03 | 卡钳技术有限公司 | 在微规模流体性设备里的高通过量的筛选分析系统 |
US5699157A (en) * | 1996-07-16 | 1997-12-16 | Caliper Technologies Corp. | Fourier detection of species migrating in a microchannel |
US6221654B1 (en) * | 1996-09-25 | 2001-04-24 | California Institute Of Technology | Method and apparatus for analysis and sorting of polynucleotides based on size |
EP0954450A4 (de) * | 1997-01-24 | 2000-03-22 | California Inst Of Techn | Mikroelektromechanisches ventil |
DE19802367C1 (de) * | 1997-02-19 | 1999-09-23 | Hahn Schickard Ges | Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben |
CA2284612A1 (en) | 1997-04-04 | 1998-10-15 | Michael Knapp | Closed-loop biochemical analyzers |
DE19720482C5 (de) * | 1997-05-16 | 2006-01-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Mikromembranpumpe |
DE69813569T2 (de) * | 1997-08-20 | 2004-04-08 | Westonbridge International Ltd., Wellington Quay | Mikropumpe mit einem einlasssteuerorgan zum selbstansaugen |
US7485263B2 (en) * | 1997-08-26 | 2009-02-03 | Eppendorf Ag | Microproportioning system |
US6540895B1 (en) | 1997-09-23 | 2003-04-01 | California Institute Of Technology | Microfabricated cell sorter for chemical and biological materials |
US6833242B2 (en) | 1997-09-23 | 2004-12-21 | California Institute Of Technology | Methods for detecting and sorting polynucleotides based on size |
US7214298B2 (en) | 1997-09-23 | 2007-05-08 | California Institute Of Technology | Microfabricated cell sorter |
US6074725A (en) * | 1997-12-10 | 2000-06-13 | Caliper Technologies Corp. | Fabrication of microfluidic circuits by printing techniques |
US6203523B1 (en) | 1998-02-02 | 2001-03-20 | Medtronic Inc | Implantable drug infusion device having a flow regulator |
DE19918694C2 (de) * | 1998-04-27 | 2002-03-14 | Matsushita Electric Works Ltd | Verfahren zum Messen des Drucks eines Fluids und Miniaturpumpe zur Durchführung dieses Verfahrens |
DE59900839D1 (de) * | 1998-05-08 | 2002-03-21 | Infineon Technologies Ag | Mikroventil |
DE19821638C2 (de) * | 1998-05-14 | 2000-07-06 | Festo Ag & Co | Mikroventil |
US6132685A (en) * | 1998-08-10 | 2000-10-17 | Caliper Technologies Corporation | High throughput microfluidic systems and methods |
US6308723B1 (en) | 1998-11-18 | 2001-10-30 | Alliedsignal, Inc. | Piezo-resistive position indicator |
US6303343B1 (en) | 1999-04-06 | 2001-10-16 | Caliper Technologies Corp. | Inefficient fast PCR |
EP1185871A4 (de) | 1999-06-01 | 2003-01-15 | Caliper Techn Corp | Assays im kleinstformat und mikrofluidische vorrichtungen für aktivitäten von transportern, gradienten und bindungsassays |
CN1082625C (zh) * | 1999-07-07 | 2002-04-10 | 张建辉 | 一种带有三通式出入口的压电陶瓷泵 |
US6247678B1 (en) * | 1999-11-01 | 2001-06-19 | Swagelok Company | Shape memory alloy actuated fluid control valve |
EP1128075A3 (de) * | 2000-02-24 | 2003-10-29 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Mikropumpe und/oder Mikromischer mit integriertem Sensor und Verfahren zu dessen Herstellung |
AU2001240040A1 (en) * | 2000-03-03 | 2001-09-17 | California Institute Of Technology | Combinatorial array for nucleic acid analysis |
US7351376B1 (en) | 2000-06-05 | 2008-04-01 | California Institute Of Technology | Integrated active flux microfluidic devices and methods |
US6589229B1 (en) | 2000-07-31 | 2003-07-08 | Becton, Dickinson And Company | Wearable, self-contained drug infusion device |
US7198250B2 (en) * | 2000-09-18 | 2007-04-03 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
MXPA03002388A (es) * | 2000-09-18 | 2004-09-06 | Par Technologies Llc | Accionador piezoelectrico y bomba que lo utiliza. |
DE10048376C2 (de) | 2000-09-29 | 2002-09-19 | Fraunhofer Ges Forschung | Mikroventil mit einem normalerweise geschlossenen Zustand |
US20090118139A1 (en) | 2000-11-07 | 2009-05-07 | Caliper Life Sciences, Inc. | Microfluidic method and system for enzyme inhibition activity screening |
US8900811B2 (en) | 2000-11-16 | 2014-12-02 | Caliper Life Sciences, Inc. | Method and apparatus for generating thermal melting curves in a microfluidic device |
US20050202470A1 (en) * | 2000-11-16 | 2005-09-15 | Caliper Life Sciences, Inc. | Binding assays using molecular melt curves |
US20050143789A1 (en) * | 2001-01-30 | 2005-06-30 | Whitehurst Todd K. | Methods and systems for stimulating a peripheral nerve to treat chronic pain |
US6626417B2 (en) * | 2001-02-23 | 2003-09-30 | Becton, Dickinson And Company | Microfluidic valve and microactuator for a microvalve |
US20050196785A1 (en) * | 2001-03-05 | 2005-09-08 | California Institute Of Technology | Combinational array for nucleic acid analysis |
US6960437B2 (en) | 2001-04-06 | 2005-11-01 | California Institute Of Technology | Nucleic acid amplification utilizing microfluidic devices |
US7723123B1 (en) | 2001-06-05 | 2010-05-25 | Caliper Life Sciences, Inc. | Western blot by incorporating an affinity purification zone |
US20020187564A1 (en) * | 2001-06-08 | 2002-12-12 | Caliper Technologies Corp. | Microfluidic library analysis |
US20060062696A1 (en) * | 2001-07-27 | 2006-03-23 | Caliper Life Sciences, Inc. | Optimized high throughput analytical systems |
US6852492B2 (en) * | 2001-09-24 | 2005-02-08 | Intel Corporation | Nucleic acid sequencing by raman monitoring of uptake of precursors during molecular replication |
US7247274B1 (en) | 2001-11-13 | 2007-07-24 | Caliper Technologies Corp. | Prevention of precipitate blockage in microfluidic channels |
US7691333B2 (en) | 2001-11-30 | 2010-04-06 | Fluidigm Corporation | Microfluidic device and methods of using same |
US7118910B2 (en) | 2001-11-30 | 2006-10-10 | Fluidigm Corporation | Microfluidic device and methods of using same |
US6561224B1 (en) * | 2002-02-14 | 2003-05-13 | Abbott Laboratories | Microfluidic valve and system therefor |
JP4417116B2 (ja) * | 2002-03-05 | 2010-02-17 | カリパー・ライフ・サイエンシズ・インク. | 混合式マイクロ流体システム |
US7303727B1 (en) | 2002-03-06 | 2007-12-04 | Caliper Life Sciences, Inc | Microfluidic sample delivery devices, systems, and methods |
US7312085B2 (en) | 2002-04-01 | 2007-12-25 | Fluidigm Corporation | Microfluidic particle-analysis systems |
JP2005521425A (ja) | 2002-04-01 | 2005-07-21 | フルイディグム コーポレイション | 微小流体粒子分析システム |
US6976590B2 (en) | 2002-06-24 | 2005-12-20 | Cytonome, Inc. | Method and apparatus for sorting particles |
US6808075B2 (en) | 2002-04-17 | 2004-10-26 | Cytonome, Inc. | Method and apparatus for sorting particles |
US9943847B2 (en) | 2002-04-17 | 2018-04-17 | Cytonome/St, Llc | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
US8241883B2 (en) * | 2002-04-24 | 2012-08-14 | Caliper Life Sciences, Inc. | High throughput mobility shift |
US20030226987A1 (en) * | 2002-06-06 | 2003-12-11 | Gallmeyer Christopher F. | Method and apparatus for seat detection and soft seating in a piezoelectric device actuated valve system |
US7143785B2 (en) | 2002-09-25 | 2006-12-05 | California Institute Of Technology | Microfluidic large scale integration |
EP1546412B1 (de) | 2002-10-02 | 2014-05-21 | California Institute Of Technology | MIKROFLUIDISCHE NUKLEINSûUREANALYSE |
US20050042639A1 (en) * | 2002-12-20 | 2005-02-24 | Caliper Life Sciences, Inc. | Single molecule amplification and detection of DNA length |
JP4395133B2 (ja) | 2002-12-20 | 2010-01-06 | カリパー・ライフ・サイエンシズ・インク. | Dnaの単一分子増幅および検出 |
US8275554B2 (en) * | 2002-12-20 | 2012-09-25 | Caliper Life Sciences, Inc. | System for differentiating the lengths of nucleic acids of interest in a sample |
US7604965B2 (en) | 2003-04-03 | 2009-10-20 | Fluidigm Corporation | Thermal reaction device and method for using the same |
US20050145496A1 (en) | 2003-04-03 | 2005-07-07 | Federico Goodsaid | Thermal reaction device and method for using the same |
US8828663B2 (en) | 2005-03-18 | 2014-09-09 | Fluidigm Corporation | Thermal reaction device and method for using the same |
US7476363B2 (en) | 2003-04-03 | 2009-01-13 | Fluidigm Corporation | Microfluidic devices and methods of using same |
US7235159B2 (en) * | 2003-09-17 | 2007-06-26 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
US20050214197A1 (en) * | 2003-09-17 | 2005-09-29 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
US20050098750A1 (en) * | 2003-11-06 | 2005-05-12 | Daniel Sobek | Electrostatic sealing device and method of use thereof |
US20050147980A1 (en) * | 2003-12-30 | 2005-07-07 | Intel Corporation | Nucleic acid sequencing by Raman monitoring of uptake of nucleotides during molecular replication |
US20050147979A1 (en) * | 2003-12-30 | 2005-07-07 | Intel Corporation | Nucleic acid sequencing by Raman monitoring of uptake of nucleotides during molecular replication |
US7287965B2 (en) * | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
US7290993B2 (en) * | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
US20050225201A1 (en) * | 2004-04-02 | 2005-10-13 | Par Technologies, Llc | Piezoelectric devices and methods and circuits for driving same |
US7312554B2 (en) * | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
US7753072B2 (en) | 2004-07-23 | 2010-07-13 | Afa Controls Llc | Valve assemblies including at least three chambers and related methods |
US20060081294A1 (en) * | 2004-10-15 | 2006-04-20 | Festo Corporation | Pressure regulator with integrated flow switch |
US9260693B2 (en) | 2004-12-03 | 2016-02-16 | Cytonome/St, Llc | Actuation of parallel microfluidic arrays |
US7258533B2 (en) * | 2004-12-30 | 2007-08-21 | Adaptivenergy, Llc | Method and apparatus for scavenging energy during pump operation |
US20060147329A1 (en) * | 2004-12-30 | 2006-07-06 | Tanner Edward T | Active valve and active valving for pump |
US20060194724A1 (en) * | 2005-02-25 | 2006-08-31 | Whitehurst Todd K | Methods and systems for nerve regeneration |
US20060232166A1 (en) * | 2005-04-13 | 2006-10-19 | Par Technologies Llc | Stacked piezoelectric diaphragm members |
WO2006113339A2 (en) * | 2005-04-13 | 2006-10-26 | Par Trchnologies, Llc | Piezoelectric diaphragm assembly with conductors on flexible film |
DE102005038483B3 (de) * | 2005-08-13 | 2006-12-14 | Albert-Ludwigs-Universität Freiburg | Mikropumpe |
US20070075286A1 (en) * | 2005-10-04 | 2007-04-05 | Par Technologies, Llc | Piezoelectric valves drive |
US20070129681A1 (en) * | 2005-11-01 | 2007-06-07 | Par Technologies, Llc | Piezoelectric actuation of piston within dispensing chamber |
US8007267B2 (en) | 2005-11-02 | 2011-08-30 | Affymetrix, Inc. | System and method for making lab card by embossing |
US8075852B2 (en) | 2005-11-02 | 2011-12-13 | Affymetrix, Inc. | System and method for bubble removal |
US7345407B2 (en) * | 2005-11-18 | 2008-03-18 | Adaptivenergy, Llc. | Human powered piezoelectric power generating device |
KR20080083039A (ko) * | 2005-12-31 | 2008-09-12 | 코닝 인코포레이티드 | 마이크로리액터 유리 막 센서 |
US7909928B2 (en) * | 2006-03-24 | 2011-03-22 | The Regents Of The University Of Michigan | Reactive coatings for regioselective surface modification |
US20080124726A1 (en) | 2006-05-26 | 2008-05-29 | Althea Technologies, Inc. | Biochemical analysis of partitioned cells |
US7947148B2 (en) * | 2006-06-01 | 2011-05-24 | The Regents Of The University Of Michigan | Dry adhesion bonding |
WO2008012728A1 (en) * | 2006-07-27 | 2008-01-31 | Koninklijke Philips Electronics N.V. | Device for molecular diagnosis |
US8202267B2 (en) | 2006-10-10 | 2012-06-19 | Medsolve Technologies, Inc. | Method and apparatus for infusing liquid to a body |
US20080246367A1 (en) * | 2006-12-29 | 2008-10-09 | Adaptivenergy, Llc | Tuned laminated piezoelectric elements and methods of tuning same |
US8399047B2 (en) * | 2007-03-22 | 2013-03-19 | The Regents Of The Univeristy Of Michigan | Multifunctional CVD coatings |
US20090020463A1 (en) * | 2007-07-18 | 2009-01-22 | Horn-Jiunn Sheen | Triple-channel particle separation device |
US8016260B2 (en) * | 2007-07-19 | 2011-09-13 | Formulatrix, Inc. | Metering assembly and method of dispensing fluid |
US20090186344A1 (en) * | 2008-01-23 | 2009-07-23 | Caliper Life Sciences, Inc. | Devices and methods for detecting and quantitating nucleic acids using size separation of amplicons |
US8986253B2 (en) | 2008-01-25 | 2015-03-24 | Tandem Diabetes Care, Inc. | Two chamber pumps and related methods |
US8708961B2 (en) | 2008-01-28 | 2014-04-29 | Medsolve Technologies, Inc. | Apparatus for infusing liquid to a body |
CN101550926B (zh) * | 2008-03-31 | 2014-03-12 | 研能科技股份有限公司 | 双腔流体输送装置 |
US8408421B2 (en) | 2008-09-16 | 2013-04-02 | Tandem Diabetes Care, Inc. | Flow regulating stopcocks and related methods |
AU2009293019A1 (en) | 2008-09-19 | 2010-03-25 | Tandem Diabetes Care Inc. | Solute concentration measurement device and related methods |
US8230744B2 (en) | 2009-05-06 | 2012-07-31 | Cequr Sa | Low-dead volume microfluidic circuit and methods |
US20100282766A1 (en) * | 2009-05-06 | 2010-11-11 | Heiko Arndt | Low-Dead Volume Microfluidic Component and Method |
EP2437887B1 (de) | 2009-06-04 | 2016-05-11 | Lockheed Martin Corporation | Mikrofluidischer chip für dna analyse von mehrfachen proben |
AU2010278894B2 (en) | 2009-07-30 | 2014-01-30 | Tandem Diabetes Care, Inc. | Infusion pump system with disposable cartridge having pressure venting and pressure feedback |
MX2013004184A (es) | 2010-10-15 | 2013-07-29 | Lockheed Corp | Diseño optico microfluidico. |
EP2469089A1 (de) * | 2010-12-23 | 2012-06-27 | Debiotech S.A. | Elektronisches Steuerungsverfahren und System für eine piezoelektrische Pumpe |
JP5533823B2 (ja) * | 2011-09-06 | 2014-06-25 | 株式会社村田製作所 | 流体制御装置 |
JP5900155B2 (ja) * | 2011-09-06 | 2016-04-06 | 株式会社村田製作所 | 流体制御装置 |
US9322054B2 (en) | 2012-02-22 | 2016-04-26 | Lockheed Martin Corporation | Microfluidic cartridge |
US9180242B2 (en) | 2012-05-17 | 2015-11-10 | Tandem Diabetes Care, Inc. | Methods and devices for multiple fluid transfer |
US9173998B2 (en) | 2013-03-14 | 2015-11-03 | Tandem Diabetes Care, Inc. | System and method for detecting occlusions in an infusion pump |
JP6740255B2 (ja) * | 2015-02-10 | 2020-08-12 | ノヴァ メジャリング インスツルメンツ インコーポレイテッド | 二次イオン質量分析を用いた半導体測定および表面分析のためのシステムならびに手法 |
CN107784660B (zh) * | 2017-11-02 | 2020-12-04 | 武汉新芯集成电路制造有限公司 | 图像处理方法、图像处理系统及缺陷检测装置 |
JP7226221B2 (ja) * | 2019-09-24 | 2023-02-21 | 株式会社島津製作所 | マイクロバルブ |
CN111779656B (zh) * | 2020-06-17 | 2022-05-10 | 长春大学 | 一种双摆式压电风机 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4585209A (en) | 1983-10-27 | 1986-04-29 | Harry E. Aine | Miniature valve and method of making same |
US4543457A (en) * | 1984-01-25 | 1985-09-24 | Transensory Devices, Inc. | Microminiature force-sensitive switch |
US4562741A (en) * | 1984-04-20 | 1986-01-07 | Craig Hosterman | Pressure relief valve with pressure indicating means |
US4579001A (en) * | 1984-04-20 | 1986-04-01 | Craig Hosterman | Pressure relief valve with pressure indicating means |
US4737660A (en) * | 1986-11-13 | 1988-04-12 | Transensory Device, Inc. | Trimmable microminiature force-sensitive switch |
US4838887A (en) * | 1987-12-15 | 1989-06-13 | Shiley Infusaid Inc. | Programmable valve pump |
GB2215914B (en) * | 1988-03-17 | 1991-07-03 | Emi Plc Thorn | A microengineered diaphragm pressure switch and a method of manufacture thereof |
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
US4855544A (en) * | 1988-09-01 | 1989-08-08 | Honeywell Inc. | Multiple level miniature electromechanical accelerometer switch |
FR2639085B1 (fr) | 1988-11-15 | 1991-04-19 | Neuchatel Universite | Microvanne electrostatique integree et procede de fabrication d'une telle microvanne |
CH679555A5 (de) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd |
-
1991
- 1991-08-21 JP JP03513659A patent/JP3111319B2/ja not_active Expired - Fee Related
- 1991-08-21 US US07/848,985 patent/US5271724A/en not_active Expired - Lifetime
- 1991-08-21 ES ES91914373T patent/ES2075459T3/es not_active Expired - Lifetime
- 1991-08-21 EP EP19910914373 patent/EP0498863B1/de not_active Expired - Lifetime
- 1991-08-21 WO PCT/EP1991/001586 patent/WO1992004569A1/en active IP Right Grant
- 1991-08-21 AU AU84228/91A patent/AU645841B2/en not_active Ceased
- 1991-08-21 DE DE1991611591 patent/DE69111591T2/de not_active Expired - Lifetime
- 1991-08-21 AT AT91914373T patent/ATE125605T1/de not_active IP Right Cessation
- 1991-08-21 CA CA 2069894 patent/CA2069894C/en not_active Expired - Lifetime
Also Published As
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AU645841B2 (en) | 1994-01-27 |
US5271724A (en) | 1993-12-21 |
CA2069894C (en) | 2001-04-24 |
JPH05502090A (ja) | 1993-04-15 |
JP3111319B2 (ja) | 2000-11-20 |
ATE125605T1 (de) | 1995-08-15 |
EP0498863A1 (de) | 1992-08-19 |
WO1992004569A1 (en) | 1992-03-19 |
CA2069894A1 (en) | 1992-03-01 |
AU8422891A (en) | 1992-03-30 |
DE69111591D1 (de) | 1995-08-31 |
ES2075459T3 (es) | 1995-10-01 |
EP0498863B1 (de) | 1995-07-26 |
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Owner name: DEBIOTECH S.A., LAUSANNE, CH |