DE69109447T2 - Thermischer Dünnschichttintenstrahldruckkopf mit einer plastischen Düsenplatte und Herstellungsverfahren. - Google Patents

Thermischer Dünnschichttintenstrahldruckkopf mit einer plastischen Düsenplatte und Herstellungsverfahren.

Info

Publication number
DE69109447T2
DE69109447T2 DE69109447T DE69109447T DE69109447T2 DE 69109447 T2 DE69109447 T2 DE 69109447T2 DE 69109447 T DE69109447 T DE 69109447T DE 69109447 T DE69109447 T DE 69109447T DE 69109447 T2 DE69109447 T2 DE 69109447T2
Authority
DE
Germany
Prior art keywords
thin film
manufacturing process
nozzle plate
inkjet printhead
thermal inkjet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109447T
Other languages
English (en)
Other versions
DE69109447D1 (de
Inventor
Marzio Leban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of DE69109447D1 publication Critical patent/DE69109447D1/de
Application granted granted Critical
Publication of DE69109447T2 publication Critical patent/DE69109447T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE69109447T 1990-11-08 1991-11-05 Thermischer Dünnschichttintenstrahldruckkopf mit einer plastischen Düsenplatte und Herstellungsverfahren. Expired - Fee Related DE69109447T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/610,609 US5229785A (en) 1990-11-08 1990-11-08 Method of manufacture of a thermal inkjet thin film printhead having a plastic orifice plate

Publications (2)

Publication Number Publication Date
DE69109447D1 DE69109447D1 (de) 1995-06-08
DE69109447T2 true DE69109447T2 (de) 1995-09-07

Family

ID=24445726

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109447T Expired - Fee Related DE69109447T2 (de) 1990-11-08 1991-11-05 Thermischer Dünnschichttintenstrahldruckkopf mit einer plastischen Düsenplatte und Herstellungsverfahren.

Country Status (4)

Country Link
US (1) US5229785A (de)
EP (1) EP0485182B1 (de)
JP (1) JP3213624B2 (de)
DE (1) DE69109447T2 (de)

Families Citing this family (47)

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US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
GB9301602D0 (en) * 1993-01-27 1993-03-17 Domino Printing Sciences Plc Nozzle plate for ink jet printer
US5459501A (en) * 1993-02-01 1995-10-17 At&T Global Information Solutions Company Solid-state ink-jet print head
US5450109A (en) * 1993-03-24 1995-09-12 Hewlett-Packard Company Barrier alignment and process monitor for TIJ printheads
US5534901A (en) * 1994-06-06 1996-07-09 Xerox Corporation Ink jet printhead having a flat surface heater plate
US5493320A (en) * 1994-09-26 1996-02-20 Lexmark International, Inc. Ink jet printing nozzle array bonded to a polymer ink barrier layer
US6183064B1 (en) 1995-08-28 2001-02-06 Lexmark International, Inc. Method for singulating and attaching nozzle plates to printheads
US6135586A (en) * 1995-10-31 2000-10-24 Hewlett-Packard Company Large area inkjet printhead
US6758552B1 (en) 1995-12-06 2004-07-06 Hewlett-Packard Development Company Integrated thin-film drive head for thermal ink-jet printer
US5883650A (en) * 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US6239820B1 (en) 1995-12-06 2001-05-29 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US6113221A (en) * 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
US6000787A (en) * 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JPH10202874A (ja) * 1997-01-24 1998-08-04 Seiko Epson Corp インクジェットプリンタヘッド及びその製造方法
US6158843A (en) * 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
US6093330A (en) * 1997-06-02 2000-07-25 Cornell Research Foundation, Inc. Microfabrication process for enclosed microstructures
US6155675A (en) * 1997-08-28 2000-12-05 Hewlett-Packard Company Printhead structure and method for producing the same
US6179413B1 (en) * 1997-10-31 2001-01-30 Hewlett-Packard Company High durability polymide-containing printhead system and method for making the same
US6180536B1 (en) 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
TW369485B (en) * 1998-07-28 1999-09-11 Ind Tech Res Inst Monolithic producing method for chip of ink-jet printing head
US6461812B2 (en) * 1998-09-09 2002-10-08 Agilent Technologies, Inc. Method and multiple reservoir apparatus for fabrication of biomolecular arrays
KR100325526B1 (ko) * 1998-10-26 2002-04-17 윤종용 잉크 분사 장치의 제조 방법
US6132032A (en) * 1999-08-13 2000-10-17 Hewlett-Packard Company Thin-film print head for thermal ink-jet printers
US6290331B1 (en) 1999-09-09 2001-09-18 Hewlett-Packard Company High efficiency orifice plate structure and printhead using the same
US6776439B2 (en) * 1999-11-18 2004-08-17 David E. Albrecht Flange plates for fluid port interfaces
US6513896B1 (en) * 2000-03-10 2003-02-04 Hewlett-Packard Company Methods of fabricating fit firing chambers of different drop weights on a single printhead
US6971170B2 (en) * 2000-03-28 2005-12-06 Microjet Technology Co., Ltd Method of manufacturing printhead
US6283584B1 (en) 2000-04-18 2001-09-04 Lexmark International, Inc. Ink jet flow distribution system for ink jet printer
US6644789B1 (en) 2000-07-06 2003-11-11 Lexmark International, Inc. Nozzle assembly for an ink jet printer
US6375313B1 (en) * 2001-01-08 2002-04-23 Hewlett-Packard Company Orifice plate for inkjet printhead
US6684504B2 (en) * 2001-04-09 2004-02-03 Lexmark International, Inc. Method of manufacturing an imageable support matrix for printhead nozzle plates
JP2004050524A (ja) * 2002-07-18 2004-02-19 Canon Inc 液体噴射ヘッドの製造方法
US6739519B2 (en) * 2002-07-31 2004-05-25 Hewlett-Packard Development Company, Lp. Plurality of barrier layers
US7478476B2 (en) * 2002-12-10 2009-01-20 Hewlett-Packard Development Company, L.P. Methods of fabricating fit firing chambers of different drop wights on a single printhead
TWI233886B (en) * 2003-08-26 2005-06-11 Ind Tech Res Inst Component for inkjet print head and manufacturing method thereof
US6857727B1 (en) * 2003-10-23 2005-02-22 Hewlett-Packard Development Company, L.P. Orifice plate and method of forming orifice plate for fluid ejection device
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US7325309B2 (en) * 2004-06-08 2008-02-05 Hewlett-Packard Development Company, L.P. Method of manufacturing a fluid ejection device with a dry-film photo-resist layer
TWI250629B (en) * 2005-01-12 2006-03-01 Ind Tech Res Inst Electronic package and fabricating method thereof
US20060209123A1 (en) * 2005-03-16 2006-09-21 Eastman Kodak Company High density reinforced orifice plate
US20070182777A1 (en) * 2006-02-08 2007-08-09 Eastman Kodak Company Printhead and method of forming same
US7607227B2 (en) * 2006-02-08 2009-10-27 Eastman Kodak Company Method of forming a printhead
JP5350429B2 (ja) * 2011-02-10 2013-11-27 キヤノン株式会社 インクジェット記録ヘッドの製造方法
KR101347690B1 (ko) * 2012-01-11 2014-01-07 주식회사 기가레인 노즐 플레이트 및 그 제조 방법
JP6380890B2 (ja) * 2013-08-12 2018-08-29 Ｔｉａｎｍａ Ｊａｐａｎ株式会社 インクジェットプリンタヘッド及びその製造方法、並びにインクジェットプリンタヘッドを搭載した描画装置
FR3091410B1 (fr) * 2018-12-26 2021-01-15 St Microelectronics Crolles 2 Sas Procédé de gravure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374707A (en) * 1981-03-19 1983-02-22 Xerox Corporation Orifice plate for ink jet printing machines
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
US4716423A (en) * 1985-11-22 1987-12-29 Hewlett-Packard Company Barrier layer and orifice plate for thermal ink jet print head assembly and method of manufacture
US4847630A (en) * 1987-12-17 1989-07-11 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
ES2087890T3 (es) * 1989-03-24 1996-08-01 Canon Kk Proceso para la fabricacion de un cabezal para la impresion por chorros de tinta.
US5016024A (en) * 1990-01-09 1991-05-14 Hewlett-Packard Company Integral ink jet print head
US4954225A (en) * 1990-01-10 1990-09-04 Dynamics Research Corporation Method for making nozzle plates

Also Published As

Publication number Publication date
JPH06340076A (ja) 1994-12-13
JP3213624B2 (ja) 2001-10-02
EP0485182B1 (de) 1995-05-03
US5229785A (en) 1993-07-20
DE69109447D1 (de) 1995-06-08
EP0485182A1 (de) 1992-05-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE),

8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE

8339 Ceased/non-payment of the annual fee