DE69109225T2 - Wahrnehmung und Messung von Beschleunigung. - Google Patents

Wahrnehmung und Messung von Beschleunigung.

Info

Publication number
DE69109225T2
DE69109225T2 DE69109225T DE69109225T DE69109225T2 DE 69109225 T2 DE69109225 T2 DE 69109225T2 DE 69109225 T DE69109225 T DE 69109225T DE 69109225 T DE69109225 T DE 69109225T DE 69109225 T2 DE69109225 T2 DE 69109225T2
Authority
DE
Germany
Prior art keywords
perception
acceleration
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109225T
Other languages
English (en)
Other versions
DE69109225D1 (de
Inventor
Robert M Boysel
Jeffrey B Sampsell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69109225D1 publication Critical patent/DE69109225D1/de
Application granted granted Critical
Publication of DE69109225T2 publication Critical patent/DE69109225T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
    • B81C1/00246—Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
DE69109225T 1990-10-12 1991-09-30 Wahrnehmung und Messung von Beschleunigung. Expired - Fee Related DE69109225T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/596,841 US5192395A (en) 1990-10-12 1990-10-12 Method of making a digital flexure beam accelerometer

Publications (2)

Publication Number Publication Date
DE69109225D1 DE69109225D1 (de) 1995-06-01
DE69109225T2 true DE69109225T2 (de) 1995-08-31

Family

ID=24388936

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109225T Expired - Fee Related DE69109225T2 (de) 1990-10-12 1991-09-30 Wahrnehmung und Messung von Beschleunigung.

Country Status (6)

Country Link
US (2) US5192395A (de)
EP (2) EP0613009A3 (de)
JP (1) JPH0661509A (de)
KR (1) KR100221296B1 (de)
DE (1) DE69109225T2 (de)
TW (1) TW275727B (de)

Families Citing this family (192)

* Cited by examiner, † Cited by third party
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TW275727B (de) 1996-05-11
US5305640A (en) 1994-04-26
EP0613009A2 (de) 1994-08-31
KR920008493A (ko) 1992-05-28
EP0480274A1 (de) 1992-04-15
DE69109225D1 (de) 1995-06-01
EP0480274B1 (de) 1995-04-26
US5192395A (en) 1993-03-09
JPH0661509A (ja) 1994-03-04
KR100221296B1 (ko) 1999-09-15

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