DE69106830D1 - Verfahren zum Vermindern des Schrumpfens beim Brennen keramischer Körper. - Google Patents

Verfahren zum Vermindern des Schrumpfens beim Brennen keramischer Körper.

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Publication number
DE69106830D1
DE69106830D1 DE69106830T DE69106830T DE69106830D1 DE 69106830 D1 DE69106830 D1 DE 69106830D1 DE 69106830 T DE69106830 T DE 69106830T DE 69106830 T DE69106830 T DE 69106830T DE 69106830 D1 DE69106830 D1 DE 69106830D1
Authority
DE
Germany
Prior art keywords
ceramic bodies
firing ceramic
reducing shrinkage
shrinkage
reducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69106830T
Other languages
English (en)
Other versions
DE69106830T2 (de
Inventor
Kurt Richard Mikeska
Daniel T Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Application granted granted Critical
Publication of DE69106830D1 publication Critical patent/DE69106830D1/de
Publication of DE69106830T2 publication Critical patent/DE69106830T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • C04B35/634Polymers
    • C04B35/63404Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00Layered products essentially comprising ceramics, e.g. refractory products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • C04B35/634Polymers
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • C04B35/634Polymers
    • C04B35/63404Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C04B35/63424Polyacrylates; Polymethacrylates
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807Ceramic parts
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562Heating rate
    • CCHEMISTRY; METALLURGY
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567Treatment time
    • CCHEMISTRY; METALLURGY
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • C04B2237/341Silica or silicates
    • CCHEMISTRY; METALLURGY
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • C04B2237/343Alumina or aluminates
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    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/56Using constraining layers before or during sintering
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/56Using constraining layers before or during sintering
    • C04B2237/562Using constraining layers before or during sintering made of alumina or aluminates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/66Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/68Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1142Changing dimension during delaminating [e.g., crushing, expanding, warping, etc.]
    • Y10T156/1147Using shrinking or swelling agent during delaminating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24893Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including particulate material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
DE1991606830 1990-10-04 1991-10-01 Verfahren zum Vermindern des Schrumpfens beim Brennen keramischer Körper. Expired - Lifetime DE69106830T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/591,192 US5254191A (en) 1990-10-04 1990-10-04 Method for reducing shrinkage during firing of ceramic bodies

Publications (2)

Publication Number Publication Date
DE69106830D1 true DE69106830D1 (de) 1995-03-02
DE69106830T2 DE69106830T2 (de) 1995-08-31

Family

ID=24365456

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991606830 Expired - Lifetime DE69106830T2 (de) 1990-10-04 1991-10-01 Verfahren zum Vermindern des Schrumpfens beim Brennen keramischer Körper.

Country Status (8)

Country Link
US (3) US5254191A (de)
EP (1) EP0479219B1 (de)
JP (1) JP2554415B2 (de)
KR (1) KR940001653B1 (de)
CN (3) CN1035609C (de)
CA (1) CA2052210A1 (de)
DE (1) DE69106830T2 (de)
MY (1) MY107198A (de)

Families Citing this family (145)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5254191A (en) * 1990-10-04 1993-10-19 E. I. Du Pont De Nemours And Company Method for reducing shrinkage during firing of ceramic bodies
EP0535711A3 (en) * 1991-10-04 1993-12-01 Matsushita Electric Ind Co Ltd Method for producing multilayered ceramic substrate
US5370759A (en) * 1992-05-20 1994-12-06 Matsushita Electric Industrial Co., Ltd. Method for producing multilayered ceramic substrate
US5470412A (en) * 1992-07-30 1995-11-28 Sumitomo Metal Ceramics Inc. Process for producing a circuit substrate
US5456778A (en) * 1992-08-21 1995-10-10 Sumitomo Metal Ceramics Inc. Method of fabricating ceramic circuit substrate
JP3003413B2 (ja) * 1992-09-21 2000-01-31 松下電器産業株式会社 多層セラミック基板の製造方法
US5798469A (en) * 1992-12-29 1998-08-25 International Business Machines Corporation Non-sintering controlled pattern formation
US5662755A (en) * 1993-10-15 1997-09-02 Matsushita Electric Industrial Co., Ltd. Method of making multi-layered ceramic substrates
US6001761A (en) * 1994-09-27 1999-12-14 Nippon Shokubai Co., Ltd. Ceramics sheet and production method for same
DE69515584T2 (de) * 1994-09-27 2000-09-07 Nippon Shokubai Osaka Kk Keramische Schicht und Verfahren zur Herstellung derselben
JP3570447B2 (ja) * 1994-12-21 2004-09-29 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法、及び記録装置
US5655209A (en) * 1995-03-28 1997-08-05 International Business Machines Corporation Multilayer ceramic substrates having internal capacitor, and process for producing same
US6709749B1 (en) 1995-06-06 2004-03-23 Lamina Ceramics, Inc. Method for the reduction of lateral shrinkage in multilayer circuit boards on a substrate
WO1996039298A1 (en) * 1995-06-06 1996-12-12 Sarnoff Corporation Method for the reduction of lateral shrinkage in multilayer circuit boards on a support
US5708570A (en) * 1995-10-11 1998-01-13 Hughes Aircraft Company Shrinkage-matched circuit package utilizing low temperature co-fired ceramic structures
US5759669A (en) * 1995-12-22 1998-06-02 International Business Machines Corporation Apparatus and method for screening green sheet with via hole using porous backing material
US6042667A (en) * 1996-03-13 2000-03-28 Sumotomo Metal Electronics Devices, Inc. Method of fabricating ceramic multilayer substrate
JP3780386B2 (ja) * 1996-03-28 2006-05-31 株式会社村田製作所 セラミック回路基板及びその製造方法
US5676788A (en) * 1996-06-21 1997-10-14 International Business Machines Corporation Method for forming cavity structures using thermally decomposable surface layer
US5785800A (en) * 1996-06-21 1998-07-28 International Business Machines Corporation Apparatus for forming cavity structures using thermally decomposable surface layer
US5800761A (en) * 1996-10-08 1998-09-01 International Business Machines Corporation Method of making an interface layer for stacked lamination sizing and sintering
US5874162A (en) * 1996-10-10 1999-02-23 International Business Machines Corporation Weighted sintering process and conformable load tile
US5858145A (en) * 1996-10-15 1999-01-12 Sarnoff Corporation Method to control cavity dimensions of fired multilayer circuit boards on a support
US5948193A (en) * 1997-06-30 1999-09-07 International Business Machines Corporation Process for fabricating a multilayer ceramic substrate from thin greensheet
JPH11116279A (ja) * 1997-10-14 1999-04-27 Mitsuboshi Belting Ltd ガラス着色剤組成物
US6016005A (en) * 1998-02-09 2000-01-18 Cellarosi; Mario J. Multilayer, high density micro circuit module and method of manufacturing same
JP3601671B2 (ja) * 1998-04-28 2004-12-15 株式会社村田製作所 複合積層体の製造方法
US6228196B1 (en) * 1998-06-05 2001-05-08 Murata Manufacturing Co., Ltd. Method of producing a multi-layer ceramic substrate
US6258191B1 (en) 1998-09-16 2001-07-10 International Business Machines Corporation Method and materials for increasing the strength of crystalline ceramic
US6592696B1 (en) 1998-10-09 2003-07-15 Motorola, Inc. Method for fabricating a multilayered structure and the structures formed by the method
US6572830B1 (en) 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6245171B1 (en) 1998-11-23 2001-06-12 International Business Machines Corporation Multi-thickness, multi-layer green sheet lamination and method thereof
US6447712B1 (en) * 1998-12-28 2002-09-10 University Of Washington Method for sintering ceramic tapes
US7216348B1 (en) 1999-01-05 2007-05-08 Net2Phone, Inc. Method and apparatus for dynamically balancing call flow workloads in a telecommunications system
JP3771099B2 (ja) 1999-01-27 2006-04-26 松下電器産業株式会社 グリーンシート及びその製造方法、多層配線基板の製造方法、両面配線基板の製造方法
US6258192B1 (en) 1999-02-10 2001-07-10 International Business Machines Corporation Multi-thickness, multi-layer green sheet processing
JP3656484B2 (ja) * 1999-03-03 2005-06-08 株式会社村田製作所 セラミック多層基板の製造方法
US6139666A (en) * 1999-05-26 2000-10-31 International Business Machines Corporation Method for producing ceramic surfaces with easily removable contact sheets
JP3687484B2 (ja) 1999-06-16 2005-08-24 株式会社村田製作所 セラミック基板の製造方法および未焼成セラミック基板
JP3601679B2 (ja) * 1999-07-27 2004-12-15 株式会社村田製作所 複合積層体の製造方法
DE19935677B4 (de) * 1999-07-29 2005-07-07 Robert Bosch Gmbh Paste für den Siebdruck von elektrischen Strukturen auf Trägersubstraten
US6395337B1 (en) * 1999-07-30 2002-05-28 International Business Machines Corporation Substrate with ceramic coating for camber modification and method for making
JP3554962B2 (ja) * 1999-10-28 2004-08-18 株式会社村田製作所 複合積層体およびその製造方法
DE10063265A1 (de) * 1999-12-20 2001-07-05 Murata Manufacturing Co Äußeres Überzugsubstrat für ein elektronisches Bauteil und ein piezoelektrisches Resonanzbauteil
TW507484B (en) * 2000-03-15 2002-10-21 Matsushita Electric Ind Co Ltd Method of manufacturing multi-layer ceramic circuit board and conductive paste used for the same
JP3633435B2 (ja) * 2000-04-10 2005-03-30 株式会社村田製作所 多層セラミック基板、その製造方法および設計方法、ならびに電子装置
JP4576670B2 (ja) * 2000-06-07 2010-11-10 パナソニック株式会社 セラミック基板の製造方法
JP3511982B2 (ja) * 2000-06-14 2004-03-29 株式会社村田製作所 多層配線基板の製造方法
JP3528045B2 (ja) * 2000-07-31 2004-05-17 株式会社村田製作所 積層セラミック電子部品の製造装置
JP3396465B2 (ja) * 2000-08-25 2003-04-14 三井金属鉱業株式会社 銅張積層板
JP3591437B2 (ja) * 2000-09-07 2004-11-17 株式会社村田製作所 多層セラミック基板およびその製造方法ならびに電子装置
JP2002084065A (ja) * 2000-09-07 2002-03-22 Murata Mfg Co Ltd 多層セラミック基板およびその製造方法ならびに電子装置
JP3593964B2 (ja) * 2000-09-07 2004-11-24 株式会社村田製作所 多層セラミック基板およびその製造方法
TW562737B (en) * 2000-11-27 2003-11-21 Murata Manufacturing Co Method of manufacturing ceramic multi-layer substrate, and unbaked composite laminated body
JP4557417B2 (ja) * 2000-12-26 2010-10-06 京セラ株式会社 低温焼成セラミック配線基板の製造方法
JP2002368422A (ja) * 2001-04-04 2002-12-20 Murata Mfg Co Ltd 多層セラミック基板及びその製造方法
JP2002368420A (ja) 2001-06-05 2002-12-20 Murata Mfg Co Ltd ガラスセラミック多層基板の製造方法およびガラスセラミック多層基板
JP3807257B2 (ja) * 2001-06-25 2006-08-09 松下電器産業株式会社 セラミック部品の製造方法
DE10145362C2 (de) * 2001-09-14 2003-10-16 Epcos Ag Verfahren zur Herstellung eines keramischen Substrats
JP2003110238A (ja) * 2001-09-28 2003-04-11 Murata Mfg Co Ltd ガラスセラミック多層基板の製造方法
US6743534B2 (en) 2001-10-01 2004-06-01 Heraeus Incorporated Self-constrained low temperature glass-ceramic unfired tape for microelectronics and methods for making and using the same
JP3716783B2 (ja) * 2001-11-22 2005-11-16 株式会社村田製作所 セラミック多層基板の製造方法及び半導体装置
US6615931B2 (en) * 2002-01-07 2003-09-09 Boart Longyear Co. Continuous feed drilling system
JP2003246680A (ja) * 2002-02-26 2003-09-02 Murata Mfg Co Ltd 多層セラミック基板の製造方法
JP4029207B2 (ja) * 2002-03-06 2008-01-09 株式会社村田製作所 セラミック多層基板の製造方法
TW587067B (en) * 2002-03-07 2004-05-11 Yageo Corp Method for reducing shrinkage during sintering low-temperature ceramic and constrain layer
US7381283B2 (en) * 2002-03-07 2008-06-03 Yageo Corporation Method for reducing shrinkage during sintering low-temperature-cofired ceramics
DE10221483C1 (de) * 2002-05-15 2003-12-04 Saint Gobain Winter Diamantwer Verfahren zur Herstellung frei gesinterter ringförmiger Schleifbeläge für Schleifscheiben
US6827800B2 (en) * 2003-01-30 2004-12-07 E. I. Du Pont De Nemours And Company Process for the constrained sintering of asymmetrically configured dielectric layers
US6960741B2 (en) * 2002-08-26 2005-11-01 Lexmark International, Inc. Large area alumina ceramic heater
JP4517566B2 (ja) * 2002-09-11 2010-08-04 パナソニック株式会社 無収縮セラミック多層基板の製造方法
TW540285B (en) * 2002-09-11 2003-07-01 Universal Scient Ind Co Ltd Parallel stack process of multi-layer circuit board
US6835260B2 (en) * 2002-10-04 2004-12-28 International Business Machines Corporation Method to produce pedestal features in constrained sintered substrates
WO2004034758A1 (ja) 2002-10-10 2004-04-22 Murata Manufacturing Co., Ltd. セラミック多層基板の製造方法
JP4426805B2 (ja) * 2002-11-11 2010-03-03 日本特殊陶業株式会社 配線基板およびその製造方法
EP1435651B1 (de) * 2003-01-02 2012-11-07 E.I. Du Pont De Nemours And Company Prozess zur eingeengten Sinterung von assymetrisch angeordneten Dielektrikalagen
DE10309689B4 (de) * 2003-02-27 2005-04-07 Bundesanstalt für Materialforschung und -Prüfung (BAM) Keramische Platte mit monolithischem Schichtaufbau und Verfahren zu seiner Herstellung
DE102004043273A1 (de) * 2003-09-09 2005-05-04 Ngk Spark Plug Co Verfahren zur Herstellung eines Keramiksubstrats und Keramiksubstrat
US20060234021A1 (en) * 2003-10-17 2006-10-19 Hirayoshi Tanei Multi-layer ceramic substrate, method for manufacturing the same and electronic device using the same
US7303698B2 (en) * 2003-11-19 2007-12-04 E.I. Du Pont De Nemours And Company Thick film conductor case compositions for LTCC tape
US7130522B2 (en) 2004-01-13 2006-10-31 International Business Machines Corporation Method and structure for two-dimensional optical fiber ferrule
US20050194085A1 (en) * 2004-03-02 2005-09-08 Matsushita Electric Industrial Co., Ltd. Method for producing ceramic multilayer substrate
JP2005268692A (ja) * 2004-03-22 2005-09-29 Mitsubishi Electric Corp 多層基板の製造方法
KR100670595B1 (ko) * 2004-03-24 2007-01-17 삼성광주전자 주식회사 업라이트 청소기
JP4496529B2 (ja) * 2004-06-07 2010-07-07 日立金属株式会社 多層セラミック基板の製造方法及び多層セラミック基板
US7682664B2 (en) * 2004-06-08 2010-03-23 Advanced Applied Physics Solutions, Inc. Method of forming composite ceramic targets
US20060009036A1 (en) * 2004-07-12 2006-01-12 Bacher Rudolph J High thermal cycle conductor system
US7731812B2 (en) * 2004-10-19 2010-06-08 E.I. Du Pont De Nemours And Company Thick film conductor case compositions for LTCC tape
US7175724B2 (en) 2004-11-22 2007-02-13 E. I. Du Pont De Nemours And Company Process for the constrained sintering of a pseudo-symmetrically configured low temperature cofired ceramic structure
US7067026B2 (en) * 2004-11-22 2006-06-27 E. I. Du Pont De Nemours And Company Process for the constrained sintering of a pseudo-symmetrically configured low temperature cofired ceramic structure
US7068492B2 (en) * 2004-11-22 2006-06-27 E. I. Du Pont De Nemours And Company Process for the constrained sintering of a pseudo-symmetrically configured low temperature cofired ceramic structure
US20060163768A1 (en) * 2005-01-26 2006-07-27 Needes Christopher R Multi-component LTCC substrate with a core of high dielectric constant ceramic material and processes for the development thereof
US20060162844A1 (en) 2005-01-26 2006-07-27 Needes Christopher R Multi-component LTCC substrate with a core of high dielectric constant ceramic material and processes for the development thereof
KR100703406B1 (ko) * 2005-02-04 2007-04-03 삼성전자주식회사 Dma 제어 장치 및 방법
US7687137B2 (en) * 2005-02-28 2010-03-30 Kyocera Corporation Insulating substrate and manufacturing method therefor, and multilayer wiring board and manufacturing method therefor
JP3956148B2 (ja) * 2005-03-25 2007-08-08 株式会社村田製作所 セラミック多層基板の製造方法及び半導体装置
US7326367B2 (en) * 2005-04-25 2008-02-05 E.I. Du Pont De Nemours And Company Thick film conductor paste compositions for LTCC tape in microwave applications
US7611645B2 (en) * 2005-04-25 2009-11-03 E. I. Du Pont De Nemours And Company Thick film conductor compositions and the use thereof in LTCC circuits and devices
WO2007004415A1 (ja) * 2005-07-01 2007-01-11 Murata Manufacturing Co., Ltd. 多層セラミック基板およびその製造方法ならびに多層セラミック基板作製用複合グリーンシート
JP4557002B2 (ja) * 2005-07-01 2010-10-06 株式会社村田製作所 多層セラミック基板およびその製造方法ならびに多層セラミック基板作製用複合グリーンシート
US20070023388A1 (en) * 2005-07-28 2007-02-01 Nair Kumaran M Conductor composition for use in LTCC photosensitive tape on substrate applications
DE102005037456B4 (de) * 2005-08-01 2007-10-25 Technische Universität Ilmenau Verfahren zur Herstellung eines mehrlagigen Keramikverbundes
JP2007048844A (ja) * 2005-08-08 2007-02-22 Murata Mfg Co Ltd セラミック電子部品の製造方法およびセラミック電子部品
US7550319B2 (en) * 2005-09-01 2009-06-23 E. I. Du Pont De Nemours And Company Low temperature co-fired ceramic (LTCC) tape compositions, light emitting diode (LED) modules, lighting devices and method of forming thereof
CN101129103B (zh) * 2005-11-25 2011-04-06 株式会社村田制作所 多层陶瓷基板的制造方法
US8501299B2 (en) 2006-01-23 2013-08-06 Hitachi Metals, Ltd. Conductive paste, multilayer ceramic substrate and its production method
US7740725B2 (en) * 2006-04-05 2010-06-22 E.I. Du Pont De Nemours And Company Thick film conductor paste composition for LTCC tape in microwave applications
EP2036411A2 (de) 2006-06-16 2009-03-18 E.I. Du Pont De Nemours And Company Verbesserter prozess zum drucklosen restringierten sintern von niedertemperatur-mitbrennkeramik mit oberflächenschaltungsstrukturen
US20080018995A1 (en) * 2006-07-21 2008-01-24 Baun Kenneth W User-directed automated telescope alignment
WO2008020534A1 (fr) 2006-08-18 2008-02-21 Murata Manufacturing Co., Ltd. Procédé de fabrication de corps en céramique moulés
CN101384521B (zh) * 2006-10-24 2012-07-11 株式会社村田制作所 陶瓷生片用浆料组合物及其制造方法以及层叠型陶瓷电子部件及其制造方法
EP2186584B1 (de) * 2007-09-06 2020-08-05 JTEKT Corporation Schneidwerkzeug und verfahren zur fertigung eines schneidwerkzeugs
KR100930165B1 (ko) * 2007-11-29 2009-12-07 삼성전기주식회사 구속용 그린시트 및 이를 이용한 다층 세라믹 기판의 제조방법
US20090162674A1 (en) * 2007-12-20 2009-06-25 Brett Allen Boutwell Tapes comprising barrier coating compositions and components comprising the same
WO2009104619A1 (ja) 2008-02-19 2009-08-27 株式会社村田製作所 積層型セラミック電子部品の製造方法
JP5229316B2 (ja) * 2008-03-25 2013-07-03 株式会社村田製作所 セラミック基板の製造方法
EP2131637B1 (de) * 2008-03-28 2012-10-31 Murata Manufacturing Co. Ltd. Produktionsmethode für keramiksubstrat und verbundblech
KR100973059B1 (ko) * 2008-05-28 2010-07-29 한국세라믹기술원 저온동시소성세라믹스 모듈의 제조방법
JPWO2009151006A1 (ja) 2008-06-13 2011-11-17 株式会社村田製作所 セラミック成形体の製造方法
US20090311124A1 (en) * 2008-06-13 2009-12-17 Baker Hughes Incorporated Methods for sintering bodies of earth-boring tools and structures formed during the same
JP5354011B2 (ja) 2009-04-21 2013-11-27 株式会社村田製作所 多層セラミック基板の製造方法
KR101079381B1 (ko) * 2009-09-11 2011-11-02 삼성전기주식회사 세라믹 기판의 제조 방법 및 이를 이용하여 제작한 세라믹 기판
US8704105B2 (en) * 2009-12-31 2014-04-22 E I Du Pont De Nemours And Company Mixed-metal system conductors for LTCC (low-temperature co-fired ceramic)
EP2544254B1 (de) 2010-03-01 2017-03-29 Panasonic Intellectual Property Management Co., Ltd. Substrat für ein lichtemittierendes element, verfahren zu seiner herstellung sowie lichtemittierende vorrichtung damit
US8386047B2 (en) 2010-07-15 2013-02-26 Advanced Bionics Implantable hermetic feedthrough
US8552311B2 (en) 2010-07-15 2013-10-08 Advanced Bionics Electrical feedthrough assembly
KR101179330B1 (ko) 2010-07-30 2012-09-03 삼성전기주식회사 저온 동시 소성 세라믹 조성물, 이를 포함하는 저온 동시 소성 세라믹 기판 및 이의 제조방법
JP2012044133A (ja) * 2010-08-18 2012-03-01 Samsung Electro-Mechanics Co Ltd 熱電モジュール及びその製造方法
CN102219480A (zh) * 2011-04-22 2011-10-19 辽宁中大超导材料有限公司 一种利用温度梯度控制氧化镁烧结体靶材物理尺寸的方法
US20130052433A1 (en) 2011-08-29 2013-02-28 E I Du Pont De Nemours And Company Compositions for low k, low temperature co-fired composite (ltcc) tapes and low shrinkage, multi-layer ltcc structures formed therefrom
CN104094427A (zh) 2012-02-15 2014-10-08 松下电器产业株式会社 发光装置及其制造方法
US20140015405A1 (en) * 2012-07-12 2014-01-16 Elementech International Co., Ltd. Light emitting diode module
WO2015023612A2 (en) 2013-08-15 2015-02-19 Oxane Materials, Inc. Additive fabrication of proppants
CN105522137B (zh) 2014-10-24 2018-09-11 比亚迪股份有限公司 一种金属陶瓷复合体及其制备方法
US10000011B1 (en) 2016-12-02 2018-06-19 Markforged, Inc. Supports for sintering additively manufactured parts
US10800108B2 (en) 2016-12-02 2020-10-13 Markforged, Inc. Sinterable separation material in additive manufacturing
EP3551365B1 (de) 2016-12-06 2022-03-16 Markforged, Inc. Verfahren zur generativen fertigung mit zuführung von wärmegebogenem material
CN114989733A (zh) 2016-12-21 2022-09-02 康宁股份有限公司 烧结系统和烧结制品
CN106851871A (zh) * 2017-01-13 2017-06-13 杭州格拉思康科技有限公司 层状陶瓷电热元件
CN107759226A (zh) * 2017-10-29 2018-03-06 贵州喜文化艺术有限责任公司 一种陶瓷粉体制备方法
KR102072287B1 (ko) * 2018-02-21 2020-01-31 한국산업기술대학교산학협력단 Ltcc(저온 동시 소성 세라믹)를 이용한 유해가스 감지센서의 제조방법
KR102013896B1 (ko) * 2018-03-29 2019-08-23 조인셋 주식회사 세퍼레이터 및 이를 적용한 다수의 그린시트 유닛의 소성방법
CN108652088A (zh) * 2018-08-06 2018-10-16 云南中烟工业有限责任公司 一种新型卷烟加热元件及其制备方法
CN109678530B (zh) * 2019-01-24 2021-07-23 中国电子科技集团公司第四十三研究所 一种隔离粉及其制作方法
CN112225458B (zh) * 2020-08-13 2022-09-23 航天特种材料及工艺技术研究所 一种陶瓷基复合材料用耐高温低膨胀系数粘接浆料及其制备方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3655496A (en) * 1969-09-25 1972-04-11 Vitta Corp Tape transfer of sinterable conductive, semiconductive or insulating patterns to electronic component substrates
US3879509A (en) * 1971-09-07 1975-04-22 Gilbert James Elderbaum Method of producing thin ceramic sheets with minimal distortion
US4259061A (en) * 1979-12-07 1981-03-31 International Business Machines Corporation Method of achieving uniform sintering shrinkage in a laminated planar green ceramic substrate and apparatus therefor
JPS57181356A (en) * 1981-04-30 1982-11-08 Hitachi Ltd Sintered aluminum nitride body with high heat conductivity
US4521449A (en) * 1984-05-21 1985-06-04 International Business Machines Corporation Process for forming a high density metallurgy system on a substrate and structure thereof
US4654095A (en) * 1985-03-25 1987-03-31 E. I. Du Pont De Nemours And Company Dielectric composition
JPS62128973A (ja) * 1985-11-25 1987-06-11 松下電工株式会社 セラミツクス基板の焼成法
US5130067A (en) * 1986-05-02 1992-07-14 International Business Machines Corporation Method and means for co-sintering ceramic/metal mlc substrates
US5102749A (en) * 1988-01-27 1992-04-07 W. R. Grace & Co.-Conn. Electronic package comprising aluminum nitride and aluminum nitride-borosilicate glass composite
US4806188A (en) * 1988-03-04 1989-02-21 E. I. Du Pont De Nemours And Company Method for fabricating multilayer circuits
US4880684A (en) * 1988-03-11 1989-11-14 International Business Machines Corporation Sealing and stress relief layers and use thereof
US5035961A (en) * 1989-07-05 1991-07-30 Combustion Engineering, Inc. Internal cross-anchoring and reinforcing of multi-layer conductive oxides
US5102720A (en) * 1989-09-22 1992-04-07 Cornell Research Foundation, Inc. Co-fired multilayer ceramic tapes that exhibit constrained sintering
US5006182A (en) * 1989-11-17 1991-04-09 E. I. Du Pont De Nemours And Company Method for fabricating multilayer circuits
US5085720A (en) * 1990-01-18 1992-02-04 E. I. Du Pont De Nemours And Company Method for reducing shrinkage during firing of green ceramic bodies
US5254191A (en) * 1990-10-04 1993-10-19 E. I. Du Pont De Nemours And Company Method for reducing shrinkage during firing of ceramic bodies

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CN1048969C (zh) 2000-02-02
US5474741A (en) 1995-12-12
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CN1145350A (zh) 1997-03-19
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KR920007950A (ko) 1992-05-27
US5254191A (en) 1993-10-19
CA2052210A1 (en) 1992-04-05
EP0479219A1 (de) 1992-04-08
JP2554415B2 (ja) 1996-11-13
JPH04243978A (ja) 1992-09-01
CN1130606A (zh) 1996-09-11
CN1061585A (zh) 1992-06-03
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