DE69106431D1 - Piezoelektrischer/elektrostriktiver Antrieb mit mindestens einer piezoelektrischen/elektrostriktiven Schicht. - Google Patents
Piezoelektrischer/elektrostriktiver Antrieb mit mindestens einer piezoelektrischen/elektrostriktiven Schicht.Info
- Publication number
- DE69106431D1 DE69106431D1 DE69106431T DE69106431T DE69106431D1 DE 69106431 D1 DE69106431 D1 DE 69106431D1 DE 69106431 T DE69106431 T DE 69106431T DE 69106431 T DE69106431 T DE 69106431T DE 69106431 D1 DE69106431 D1 DE 69106431D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- electrostrictive
- drive
- layer
- electrostrictive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1051—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/10513—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11566590A JPH07108102B2 (ja) | 1990-05-01 | 1990-05-01 | 圧電／電歪膜型アクチュエータの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69106431D1 true DE69106431D1 (de) | 1995-02-16 |
| DE69106431T2 DE69106431T2 (de) | 1995-08-10 |
Family
ID=14668269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69106431T Expired - Lifetime DE69106431T2 (de) | 1990-05-01 | 1991-03-27 | Piezoelektrischer/elektrostriktiver Antrieb mit mindestens einer piezoelektrischen/elektrostriktiven Schicht. |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5126615A (de) |
| EP (1) | EP0455342B1 (de) |
| JP (1) | JPH07108102B2 (de) |
| DE (1) | DE69106431T2 (de) |
Families Citing this family (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69026765T2 (de) * | 1989-07-11 | 1996-10-24 | Ngk Insulators Ltd | Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb |
| JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電／電歪アクチュエータ |
| JPH0487253U (de) * | 1990-11-30 | 1992-07-29 | ||
| JP2923813B2 (ja) * | 1991-06-11 | 1999-07-26 | キヤノン株式会社 | カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
| EP0526048B1 (de) * | 1991-07-18 | 1997-11-12 | Ngk Insulators, Ltd. | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
| FR2681698A1 (fr) * | 1991-09-25 | 1993-03-26 | Thermocoax Cie | Detecteur d'essieux pour installation en surface de chaussee a plusieurs voies. |
| JP2665106B2 (ja) * | 1992-03-17 | 1997-10-22 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| JP3144948B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | インクジェットプリントヘッド |
| JP3317308B2 (ja) * | 1992-08-26 | 2002-08-26 | セイコーエプソン株式会社 | 積層型インクジェット記録ヘッド、及びその製造方法 |
| JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電／電歪アクチュエータ |
| US6601949B1 (en) | 1992-08-26 | 2003-08-05 | Seiko Epson Corporation | Actuator unit for ink jet recording head |
| US5424596A (en) * | 1992-10-05 | 1995-06-13 | Trw Inc. | Activated structure |
| JP3120260B2 (ja) | 1992-12-26 | 2000-12-25 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| US5525853A (en) * | 1993-01-21 | 1996-06-11 | Trw Inc. | Smart structures for vibration suppression |
| US6252334B1 (en) | 1993-01-21 | 2001-06-26 | Trw Inc. | Digital control of smart structures |
| JPH06218917A (ja) * | 1993-01-22 | 1994-08-09 | Sharp Corp | インクジェットヘッド |
| US5504388A (en) * | 1993-03-12 | 1996-04-02 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element having electrode film(s) with specified surface roughness |
| US6004644A (en) * | 1994-07-26 | 1999-12-21 | Ngk Insulators, Ltd. | Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure |
| DE69434514T2 (de) | 1993-12-24 | 2006-06-22 | Seiko Epson Corp. | Tintenstrahlaufzeichnungskopf |
| US5450747A (en) * | 1993-12-27 | 1995-09-19 | International Business Machines Corporation | Method for optimizing piezoelectric surface asperity detection sensor |
| EP0812692B1 (de) | 1993-12-28 | 2001-11-07 | Seiko Epson Corporation | Tintenstrahlaufzeichnungskopf |
| US6420819B1 (en) | 1994-01-27 | 2002-07-16 | Active Control Experts, Inc. | Packaged strain actuator |
| US6404107B1 (en) * | 1994-01-27 | 2002-06-11 | Active Control Experts, Inc. | Packaged strain actuator |
| JP3162584B2 (ja) * | 1994-02-14 | 2001-05-08 | 日本碍子株式会社 | 圧電／電歪膜型素子及びその製造方法 |
| US6049158A (en) * | 1994-02-14 | 2000-04-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same |
| JPH07280637A (ja) * | 1994-04-01 | 1995-10-27 | Ngk Insulators Ltd | 失火センサ |
| JP3187669B2 (ja) * | 1994-04-01 | 2001-07-11 | 日本碍子株式会社 | ディスプレイ素子及びディスプレイ装置 |
| JP3323343B2 (ja) * | 1994-04-01 | 2002-09-09 | 日本碍子株式会社 | センサ素子及び粒子センサ |
| US5552655A (en) * | 1994-05-04 | 1996-09-03 | Trw Inc. | Low frequency mechanical resonator |
| US5825121A (en) * | 1994-07-08 | 1998-10-20 | Seiko Epson Corporation | Thin film piezoelectric device and ink jet recording head comprising the same |
| DE69510284T2 (de) | 1994-08-25 | 1999-10-14 | Seiko Epson Corp | Flüssigkeitsstrahlkopf |
| JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
| JP3501860B2 (ja) * | 1994-12-21 | 2004-03-02 | 日本碍子株式会社 | 圧電／電歪膜型素子及びその製造方法 |
| US5814923A (en) * | 1994-12-27 | 1998-09-29 | Seiko Epson Corporation | Piezoelectric thin-film device, process for producing the same, and ink jet recording head using said device |
| JPH08192513A (ja) * | 1995-01-18 | 1996-07-30 | Fujitsu Ltd | 圧電式インクジェットプリンタヘッド |
| JP3465427B2 (ja) * | 1995-07-28 | 2003-11-10 | ソニー株式会社 | 圧電アクチュエーター及びその製造方法 |
| JP3320596B2 (ja) | 1995-09-27 | 2002-09-03 | 日本碍子株式会社 | 圧電／電歪膜型素子及びその製造方法 |
| JP3432974B2 (ja) * | 1995-10-13 | 2003-08-04 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| JPH09113434A (ja) * | 1995-10-20 | 1997-05-02 | Ngk Insulators Ltd | 軸流粒子センサ |
| US5838805A (en) * | 1995-11-06 | 1998-11-17 | Noise Cancellation Technologies, Inc. | Piezoelectric transducers |
| JP3344888B2 (ja) * | 1995-12-28 | 2002-11-18 | 日本碍子株式会社 | 圧電／電歪膜型素子及びその製造方法 |
| JP3503386B2 (ja) * | 1996-01-26 | 2004-03-02 | セイコーエプソン株式会社 | インクジェット式記録ヘッド及びその製造方法 |
| DE19620826C2 (de) * | 1996-05-23 | 1998-07-09 | Siemens Ag | Piezoelektrischer Biegewandler sowie Verfahren zu dessen Herstellung |
| US5925972A (en) * | 1996-09-27 | 1999-07-20 | Ngk Insulators, Ltd. | Multiple element particle sensor and signal processing electronics |
| US6091182A (en) | 1996-11-07 | 2000-07-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
| US6494566B1 (en) | 1997-01-31 | 2002-12-17 | Kyocera Corporation | Head member having ultrafine grooves and a method of manufacture thereof |
| AU7717398A (en) | 1997-06-19 | 1999-01-04 | Nct Group, Inc. | Loudspeaker assembly |
| US6246156B1 (en) * | 1998-03-27 | 2001-06-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
| US6594875B2 (en) | 1998-10-14 | 2003-07-22 | Samsung Electro-Mechanics Co. | Method for producing a piezoelectric/electrostrictive actuator |
| US6351057B1 (en) * | 1999-01-25 | 2002-02-26 | Samsung Electro-Mechanics Co., Ltd | Microactuator and method for fabricating the same |
| US6337465B1 (en) * | 1999-03-09 | 2002-01-08 | Mide Technology Corp. | Laser machining of electroactive ceramics |
| DE19920576C1 (de) | 1999-05-04 | 2000-06-21 | Siemens Ag | Piezoelektrischer Biegewandler |
| JP3611198B2 (ja) * | 2000-02-16 | 2005-01-19 | 松下電器産業株式会社 | アクチュエータとこれを用いた情報記録再生装置 |
| US6752601B2 (en) * | 2001-04-06 | 2004-06-22 | Ngk Insulators, Ltd. | Micropump |
| FR2830189B1 (fr) * | 2001-09-28 | 2004-10-01 | Oreal | Composition de teinture a effet eclaircissant pour fibres keratiniques humaines |
| GB2390480B (en) * | 2002-02-19 | 2005-06-22 | Maximilian Hans Hobelsberger | Piezo actuator |
| US6597587B1 (en) | 2002-04-02 | 2003-07-22 | The University Of Hong Kong | Current driven synchronous rectifier with energy recovery using hysterisis driver |
| US6910714B2 (en) | 2003-04-02 | 2005-06-28 | General Motors Corporation | Energy absorbing assembly and methods for operating the same |
| US7266868B2 (en) * | 2003-06-30 | 2007-09-11 | Brother Kogyo Kabushiki Kaisha | Method of manufacturing liquid delivery apparatus |
| US7388319B2 (en) * | 2004-10-15 | 2008-06-17 | Fujifilm Dimatix, Inc. | Forming piezoelectric actuators |
| US7420317B2 (en) * | 2004-10-15 | 2008-09-02 | Fujifilm Dimatix, Inc. | Forming piezoelectric actuators |
| JP4748978B2 (ja) * | 2004-12-02 | 2011-08-17 | 日本碍子株式会社 | 圧電／電歪素子及びその製造方法 |
| DE202005002216U1 (de) * | 2005-02-11 | 2006-06-22 | Argillon Gmbh | Piezoelektrisches Element |
| JP4332748B2 (ja) * | 2005-12-27 | 2009-09-16 | セイコーエプソン株式会社 | セラミックス膜の製造方法およびセラミックス膜製造装置 |
| JP2010021512A (ja) * | 2008-01-30 | 2010-01-28 | Ngk Insulators Ltd | 圧電／電歪膜型素子及びその製造方法 |
| JP5475272B2 (ja) * | 2008-03-21 | 2014-04-16 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| JP2011109119A (ja) * | 2011-01-05 | 2011-06-02 | Kyocera Corp | 積層型圧電素子およびこれを用いた噴射装置 |
| US9406314B1 (en) | 2012-10-04 | 2016-08-02 | Magnecomp Corporation | Assembly of DSA suspensions using microactuators with partially cured adhesive, and DSA suspensions having PZTs with wrap-around electrodes |
| US9862592B2 (en) * | 2015-03-13 | 2018-01-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | MEMS transducer and method for manufacturing the same |
| JP6766328B2 (ja) * | 2015-07-30 | 2020-10-14 | セイコーエプソン株式会社 | 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS603280B2 (ja) * | 1979-12-27 | 1985-01-26 | 日本特殊陶業株式会社 | 圧電ブザ−、エレクトロ・ルミネツセンス複合物 |
| US4435667A (en) * | 1982-04-28 | 1984-03-06 | Peizo Electric Products, Inc. | Spiral piezoelectric rotary actuator |
| JPS58196079A (ja) * | 1982-05-11 | 1983-11-15 | Nec Corp | 電歪効果素子 |
| JPS60200778A (ja) * | 1984-03-23 | 1985-10-11 | Matsushita Electric Ind Co Ltd | 超音波駆動モ−タ |
| JPS6197159A (ja) * | 1984-10-17 | 1986-05-15 | 鐘淵化学工業株式会社 | 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法 |
| JPS61159777A (ja) * | 1985-01-07 | 1986-07-19 | Nec Corp | 電歪効果素子 |
| US4697118A (en) * | 1986-08-15 | 1987-09-29 | General Electric Company | Piezoelectric switch |
| JPH077815B2 (ja) * | 1987-01-23 | 1995-01-30 | 富士通株式会社 | 半導体装置の冷却方法 |
| US5038069A (en) * | 1987-11-09 | 1991-08-06 | Texas Instruments Incorporated | Cylinder pressure sensor for an internal combustion engine |
| JPH01157418A (ja) * | 1987-12-15 | 1989-06-20 | Fujitsu General Ltd | 共振変位アクチュエータ用圧電材料 |
-
1990
- 1990-05-01 JP JP11566590A patent/JPH07108102B2/ja not_active Expired - Lifetime
-
1991
- 1991-03-20 US US07/672,330 patent/US5126615A/en not_active Expired - Lifetime
- 1991-03-27 DE DE69106431T patent/DE69106431T2/de not_active Expired - Lifetime
- 1991-03-27 EP EP91302660A patent/EP0455342B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69106431T2 (de) | 1995-08-10 |
| EP0455342A1 (de) | 1991-11-06 |
| EP0455342B1 (de) | 1995-01-04 |
| JPH0412678A (ja) | 1992-01-17 |
| JPH07108102B2 (ja) | 1995-11-15 |
| US5126615A (en) | 1992-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |