DE69031119D1 - Herstellung von planbildschirmen - Google Patents

Herstellung von planbildschirmen

Info

Publication number
DE69031119D1
DE69031119D1 DE69031119T DE69031119T DE69031119D1 DE 69031119 D1 DE69031119 D1 DE 69031119D1 DE 69031119 T DE69031119 T DE 69031119T DE 69031119 T DE69031119 T DE 69031119T DE 69031119 D1 DE69031119 D1 DE 69031119D1
Authority
DE
Germany
Prior art keywords
screens
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69031119T
Other languages
English (en)
Other versions
DE69031119T2 (de
Inventor
William Bell Hugle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69031119D1 publication Critical patent/DE69031119D1/de
Application granted granted Critical
Publication of DE69031119T2 publication Critical patent/DE69031119T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0402—Recording geometries or arrangements
    • G03H1/0408—Total internal reflection [TIR] holograms, e.g. edge lit or substrate mode holograms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0094—Adaptation of holography to specific applications for patterning or machining using the holobject as input light distribution
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2223/00—Optical components
    • G03H2223/18—Prism
DE69031119T 1989-04-19 1990-04-18 Herstellung von planbildschirmen Expired - Fee Related DE69031119T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB898908871A GB8908871D0 (en) 1989-04-19 1989-04-19 Manufacture of flat panel displays
PCT/GB1990/000589 WO1990013062A2 (en) 1989-04-19 1990-04-18 Manufacture of flat panel displays

Publications (2)

Publication Number Publication Date
DE69031119D1 true DE69031119D1 (de) 1997-09-04
DE69031119T2 DE69031119T2 (de) 1998-02-05

Family

ID=10655307

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69031119T Expired - Fee Related DE69031119T2 (de) 1989-04-19 1990-04-18 Herstellung von planbildschirmen

Country Status (7)

Country Link
US (1) US5626991A (de)
EP (1) EP0469026B1 (de)
JP (1) JP3208450B2 (de)
KR (1) KR100196560B1 (de)
DE (1) DE69031119T2 (de)
GB (1) GB8908871D0 (de)
WO (1) WO1990013062A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9010009D0 (en) * 1990-05-03 1990-06-27 Hugle William B Method of manufacturing a transistor
US6329104B1 (en) * 1992-03-16 2001-12-11 Holtronic Technologies, Ltd. Position alignment system for holographic lithography process
US5640257A (en) * 1992-10-14 1997-06-17 Holtronic Technologies Ltd. Apparatus and method for the manufacture of high uniformity total internal reflection holograms
GB2271648B (en) * 1992-10-14 1996-04-03 Holtronic Technologies Ltd Apparatus and method for the manufacture of high uniformity total internal reflection holograms
GB2311144B (en) * 1996-03-12 2000-05-24 Holtronic Technologies Ltd Method and apparatus for holographically recording an essentially periodic pattern
DE19700162B4 (de) * 1997-01-07 2006-09-07 Eads Deutschland Gmbh Verfahren zur Herstellung eines holografischen Bildschirms für die Laseraufprojektion
DE19730565A1 (de) * 1997-07-17 1999-02-11 Daimler Benz Ag Verwendung eines holographischen Bildschirmes als Darstellungsfläche für Informationssysteme
FR2771520B1 (fr) * 1997-11-24 1999-12-24 Commissariat Energie Atomique Procede de formation de motifs dans une couche de resine photosensible, hologramme pour sa mise en oeuvre et systeme d'enregistrement de l'hologramme, application aux sources et ecrans a micropointes
US6392750B1 (en) * 1999-08-31 2002-05-21 Candescent Technologies Corporation Use of scattered and/or transmitted light in determining characteristics, including dimensional information, of object such as part of flat-panel display
US6359669B1 (en) 1999-09-17 2002-03-19 Rockwell Collins, Inc. Flat panel displays having an edge texture
TWI294252B (en) * 2004-09-28 2008-03-01 Toshiba Matsushita Display Tec Display
KR100727781B1 (ko) * 2006-09-01 2007-06-14 주식회사 대우일렉트로닉스 광정보 처리장치와 처리방법
WO2008130559A2 (en) 2007-04-16 2008-10-30 North Carolina State University Methods of fabricating switchable liquid crystal polarization gratings on reflective substrates and related devices
CN104122672B (zh) * 2014-07-24 2016-02-10 四川大学 一种基于微球形透镜阵列的3d显示器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1273329A (en) * 1968-09-19 1972-05-10 Agfa Gevaert Ag Light sensitive photographic material
US3677634A (en) * 1968-12-23 1972-07-18 Ibm Contactless mask pattern exposure process and apparatus system having virtual extended depth of focus
GB1216631A (en) * 1969-01-23 1970-12-23 Standard Telephones Cables Ltd Improvements in or relating to holographic storage of information
US3647289A (en) * 1969-03-28 1972-03-07 Holotron Corp Apparatus and method for hologram copying with reference beam intensity control
AT323808B (de) * 1969-12-19 1975-07-25 Siemens Ag Verfahren zur herstellung von halbleiterbauelementen mit holographischer projektion der ätzmuster und anordnung hiefür
DE2140408A1 (de) * 1971-08-12 1973-03-01 Ibm Deutschland Verfahren zur herstellung von hologrammen
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings
US4332473A (en) * 1979-01-31 1982-06-01 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for detecting a mutual positional relationship of two sample members
US4458977A (en) * 1981-06-01 1984-07-10 Hughes Aircraft Company Systems for forming improved reflection holograms with a single beam
US4631416A (en) * 1983-12-19 1986-12-23 Hewlett-Packard Company Wafer/mask alignment system using diffraction gratings
US4878086A (en) * 1985-04-01 1989-10-31 Canon Kabushiki Kaisha Flat panel display device and manufacturing of the same
GB8531830D0 (en) * 1985-12-30 1986-02-05 Davies H J Photo fabrication
NL8600697A (nl) * 1986-01-09 1987-08-03 Philips Nv Beeldweergeefinrichting en een methode voor de vervaardiging ervan.
FR2593953B1 (fr) * 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
GB8615908D0 (en) * 1986-06-30 1986-08-06 Hugle W B Integrated circuits
GB8629223D0 (en) * 1986-12-06 1987-01-14 Emi Plc Thorn Replication of carriers
GB8802333D0 (en) * 1988-02-03 1988-03-02 Holtronic Technologies Ltd Improvements in manufacture of integrated circuits using holographic techniques

Also Published As

Publication number Publication date
KR100196560B1 (ko) 1999-06-15
JPH05505032A (ja) 1993-07-29
KR920701865A (ko) 1992-08-12
GB8908871D0 (en) 1989-06-07
WO1990013062A2 (en) 1990-11-01
US5626991A (en) 1997-05-06
WO1990013062A3 (en) 1990-11-29
DE69031119T2 (de) 1998-02-05
EP0469026A1 (de) 1992-02-05
EP0469026B1 (de) 1997-07-23
JP3208450B2 (ja) 2001-09-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee