ATE148202T1
(de)
*
|
1991-05-03 |
1997-02-15 |
Regipur Polyurethan Anlagentec |
Mehrlagen-membran mit leckage-ableitung für membranpumpen
|
DE69311319T2
(de)
*
|
1992-03-05 |
1998-01-08 |
Joe Santa & Ass Pty Ltd |
Pumpe und membran
|
US5343736A
(en)
*
|
1992-06-15 |
1994-09-06 |
Systems Chemistry, Inc. |
Optical leak sensor and position detector
|
US5501577A
(en)
*
|
1994-12-19 |
1996-03-26 |
Cornell; Gary L. |
Gas operated pump leak preventer
|
US5560279A
(en)
*
|
1995-03-16 |
1996-10-01 |
W. L. Gore & Associates, Inc. |
Pre-failure sensing diaphragm
|
ES2117936B1
(es)
*
|
1995-09-22 |
1999-05-16 |
Navarro Bonet Jose Manuel |
Bombeo por camara de embolos de volumen variable.
|
JP4004097B2
(ja)
*
|
1996-04-12 |
2007-11-07 |
グラコ・インコーポレーテッド |
ポンプ
|
US5883299A
(en)
*
|
1996-06-28 |
1999-03-16 |
Texaco Inc |
System for monitoring diaphragm pump failure
|
AU3601997A
(en)
*
|
1996-07-15 |
1998-02-09 |
Furon Company |
Double acting pneumatically driven rolling diaphragm pump
|
US6079959A
(en)
*
|
1996-07-15 |
2000-06-27 |
Saint-Gobain Performance Plastics Corporation |
Reciprocating pump
|
TW539918B
(en)
|
1997-05-27 |
2003-07-01 |
Tokyo Electron Ltd |
Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
|
US6106246A
(en)
*
|
1998-10-05 |
2000-08-22 |
Trebor International, Inc. |
Free-diaphragm pump
|
US6957952B1
(en)
|
1998-10-05 |
2005-10-25 |
Trebor International, Inc. |
Fiber optic system for detecting pump cycles
|
US6695593B1
(en)
|
1998-10-05 |
2004-02-24 |
Trebor International, Inc. |
Fiber optics systems for high purity pump diagnostics
|
US7029238B1
(en)
*
|
1998-11-23 |
2006-04-18 |
Mykrolis Corporation |
Pump controller for precision pumping apparatus
|
US8172546B2
(en)
|
1998-11-23 |
2012-05-08 |
Entegris, Inc. |
System and method for correcting for pressure variations using a motor
|
DE19925508A1
(de)
|
1999-06-04 |
2000-12-21 |
Freudenberg Carl Fa |
Einrichtung zur Erkennung von Undichtheiten an Membranen
|
US6190136B1
(en)
*
|
1999-08-30 |
2001-02-20 |
Ingersoll-Rand Company |
Diaphragm failure sensing apparatus and diaphragm pumps incorporating same
|
EP1234322A2
(de)
|
1999-11-02 |
2002-08-28 |
Tokyo Electron Limited |
Verfahren und vorrichtungen zur überkritischen verarbeitung von werkstücken
|
US6748960B1
(en)
|
1999-11-02 |
2004-06-15 |
Tokyo Electron Limited |
Apparatus for supercritical processing of multiple workpieces
|
US6325932B1
(en)
*
|
1999-11-30 |
2001-12-04 |
Mykrolis Corporation |
Apparatus and method for pumping high viscosity fluid
|
DE10012904B4
(de)
*
|
2000-03-16 |
2004-08-12 |
Lewa Herbert Ott Gmbh + Co |
Membraneinspannung mit Elastizitätsausgleich
|
US6663361B2
(en)
*
|
2000-04-04 |
2003-12-16 |
Baker Hughes Incorporated |
Subsea chemical injection pump
|
JP3497831B2
(ja)
*
|
2000-05-01 |
2004-02-16 |
アドバンス電気工業株式会社 |
インジェクター
|
US6561774B2
(en)
*
|
2000-06-02 |
2003-05-13 |
Tokyo Electron Limited |
Dual diaphragm pump
|
KR100750018B1
(ko)
|
2000-07-26 |
2007-08-16 |
동경 엘렉트론 주식회사 |
반도체 기판의 처리를 위한 고압 챔버 및 반도체 기판의고압 처리를 위한 장치
|
US6820490B2
(en)
*
|
2001-10-16 |
2004-11-23 |
Neomedix Corporation |
Systems and methods for measuring pressure
|
JP3542990B2
(ja)
|
2001-12-05 |
2004-07-14 |
株式会社ヤマダコーポレーション |
ダイヤフラムポンプ装置
|
US7001468B1
(en)
|
2002-02-15 |
2006-02-21 |
Tokyo Electron Limited |
Pressure energized pressure vessel opening and closing device and method of providing therefor
|
US7387868B2
(en)
|
2002-03-04 |
2008-06-17 |
Tokyo Electron Limited |
Treatment of a dielectric layer using supercritical CO2
|
JP4365558B2
(ja)
*
|
2002-04-08 |
2009-11-18 |
株式会社テクノ高槻 |
電磁振動型ダイヤフラムポンプ
|
JP3574641B2
(ja)
*
|
2002-04-19 |
2004-10-06 |
株式会社イワキ |
ポンプシステム
|
DE10231920B4
(de)
*
|
2002-07-15 |
2006-10-19 |
SCHÜTZE, Thomas |
Mehrlagen-Membran
|
US7021635B2
(en)
*
|
2003-02-06 |
2006-04-04 |
Tokyo Electron Limited |
Vacuum chuck utilizing sintered material and method of providing thereof
|
US7225820B2
(en)
*
|
2003-02-10 |
2007-06-05 |
Tokyo Electron Limited |
High-pressure processing chamber for a semiconductor wafer
|
US7077917B2
(en)
|
2003-02-10 |
2006-07-18 |
Tokyo Electric Limited |
High-pressure processing chamber for a semiconductor wafer
|
US7134849B1
(en)
|
2003-04-22 |
2006-11-14 |
Trebor International, Inc. |
Molded disposable pneumatic pump
|
US7270137B2
(en)
|
2003-04-28 |
2007-09-18 |
Tokyo Electron Limited |
Apparatus and method of securing a workpiece during high-pressure processing
|
US7001153B2
(en)
*
|
2003-06-30 |
2006-02-21 |
Blue-White Industries |
Peristaltic injector pump leak monitor
|
US7163380B2
(en)
*
|
2003-07-29 |
2007-01-16 |
Tokyo Electron Limited |
Control of fluid flow in the processing of an object with a fluid
|
US20050035514A1
(en)
*
|
2003-08-11 |
2005-02-17 |
Supercritical Systems, Inc. |
Vacuum chuck apparatus and method for holding a wafer during high pressure processing
|
US20050067002A1
(en)
*
|
2003-09-25 |
2005-03-31 |
Supercritical Systems, Inc. |
Processing chamber including a circulation loop integrally formed in a chamber housing
|
US7186093B2
(en)
*
|
2004-10-05 |
2007-03-06 |
Tokyo Electron Limited |
Method and apparatus for cooling motor bearings of a high pressure pump
|
US7168928B1
(en)
*
|
2004-02-17 |
2007-01-30 |
Wilden Pump And Engineering Llc |
Air driven hydraulic pump
|
US7250374B2
(en)
|
2004-06-30 |
2007-07-31 |
Tokyo Electron Limited |
System and method for processing a substrate using supercritical carbon dioxide processing
|
US7307019B2
(en)
|
2004-09-29 |
2007-12-11 |
Tokyo Electron Limited |
Method for supercritical carbon dioxide processing of fluoro-carbon films
|
US20060065189A1
(en)
*
|
2004-09-30 |
2006-03-30 |
Darko Babic |
Method and system for homogenization of supercritical fluid in a high pressure processing system
|
US7491036B2
(en)
|
2004-11-12 |
2009-02-17 |
Tokyo Electron Limited |
Method and system for cooling a pump
|
CA3127360A1
(en)
*
|
2004-11-17 |
2006-05-26 |
Proportionair, Inc. |
Control system for an air operated diaphragm pump
|
US7517199B2
(en)
*
|
2004-11-17 |
2009-04-14 |
Proportion Air Incorporated |
Control system for an air operated diaphragm pump
|
WO2006057957A2
(en)
|
2004-11-23 |
2006-06-01 |
Entegris, Inc. |
System and method for a variable home position dispense system
|
US7140393B2
(en)
|
2004-12-22 |
2006-11-28 |
Tokyo Electron Limited |
Non-contact shuttle valve for flow diversion in high pressure systems
|
US7434590B2
(en)
|
2004-12-22 |
2008-10-14 |
Tokyo Electron Limited |
Method and apparatus for clamping a substrate in a high pressure processing system
|
US7435447B2
(en)
|
2005-02-15 |
2008-10-14 |
Tokyo Electron Limited |
Method and system for determining flow conditions in a high pressure processing system
|
US7291565B2
(en)
|
2005-02-15 |
2007-11-06 |
Tokyo Electron Limited |
Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
|
US7380984B2
(en)
*
|
2005-03-28 |
2008-06-03 |
Tokyo Electron Limited |
Process flow thermocouple
|
US7767145B2
(en)
|
2005-03-28 |
2010-08-03 |
Toyko Electron Limited |
High pressure fourier transform infrared cell
|
US20060225772A1
(en)
*
|
2005-03-29 |
2006-10-12 |
Jones William D |
Controlled pressure differential in a high-pressure processing chamber
|
US7494107B2
(en)
|
2005-03-30 |
2009-02-24 |
Supercritical Systems, Inc. |
Gate valve for plus-atmospheric pressure semiconductor process vessels
|
DE502005000867D1
(de)
*
|
2005-04-12 |
2007-07-26 |
Wagner J Ag |
Membranpumpe
|
US7789971B2
(en)
|
2005-05-13 |
2010-09-07 |
Tokyo Electron Limited |
Treatment of substrate using functionalizing agent in supercritical carbon dioxide
|
US7524383B2
(en)
|
2005-05-25 |
2009-04-28 |
Tokyo Electron Limited |
Method and system for passivating a processing chamber
|
US8197231B2
(en)
|
2005-07-13 |
2012-06-12 |
Purity Solutions Llc |
Diaphragm pump and related methods
|
JP5339914B2
(ja)
|
2005-11-21 |
2013-11-13 |
インテグリス・インコーポレーテッド |
低減された形状要因を有するポンプのためのシステムと方法
|
US8753097B2
(en)
|
2005-11-21 |
2014-06-17 |
Entegris, Inc. |
Method and system for high viscosity pump
|
US8025486B2
(en)
|
2005-12-02 |
2011-09-27 |
Entegris, Inc. |
System and method for valve sequencing in a pump
|
US7878765B2
(en)
|
2005-12-02 |
2011-02-01 |
Entegris, Inc. |
System and method for monitoring operation of a pump
|
WO2007067339A2
(en)
*
|
2005-12-02 |
2007-06-14 |
Entegris, Inc. |
Fixed volume valve system
|
CN101356488B
(zh)
|
2005-12-02 |
2012-05-16 |
恩特格里公司 |
与泵控制器对接的i/o系统、方法和设备
|
US7850431B2
(en)
|
2005-12-02 |
2010-12-14 |
Entegris, Inc. |
System and method for control of fluid pressure
|
US8083498B2
(en)
|
2005-12-02 |
2011-12-27 |
Entegris, Inc. |
System and method for position control of a mechanical piston in a pump
|
KR20080073778A
(ko)
|
2005-12-02 |
2008-08-11 |
엔테그리스, 아이엔씨. |
O링 없는 로우 프로파일 피팅 및 피팅 조립체
|
CN101356372B
(zh)
|
2005-12-02 |
2012-07-04 |
恩特格里公司 |
用于在泵中进行压力补偿的系统和方法
|
US7897196B2
(en)
*
|
2005-12-05 |
2011-03-01 |
Entegris, Inc. |
Error volume system and method for a pump
|
TWI402423B
(zh)
|
2006-02-28 |
2013-07-21 |
Entegris Inc |
用於一幫浦操作之系統及方法
|
US7684446B2
(en)
|
2006-03-01 |
2010-03-23 |
Entegris, Inc. |
System and method for multiplexing setpoints
|
US7494265B2
(en)
|
2006-03-01 |
2009-02-24 |
Entegris, Inc. |
System and method for controlled mixing of fluids via temperature
|
SE0900233A1
(sv)
*
|
2009-02-24 |
2010-08-25 |
Tetra Laval Holdings & Finance |
Membranpumphuvud för en homogenisator
|
GB2470348B
(en)
*
|
2009-04-29 |
2011-06-08 |
Flotronic Pumps Ltd |
Double-diaphragm pump with unidirectional valve arrangement
|
DE102010013108A1
(de)
*
|
2010-03-26 |
2011-09-29 |
Promera Gmbh & Co. Kg |
Doppelmembranpumpe
|
FR2966525B1
(fr)
*
|
2010-10-22 |
2012-11-16 |
Milton Roy Europe |
Pompe a membrane a forte capacite d'aspiration
|
EP2704759A4
(de)
*
|
2011-05-05 |
2015-06-03 |
Eksigent Technologies Llc |
Gelkupplung für elektrokinetische abgabesysteme
|
CA2862756A1
(en)
*
|
2012-02-29 |
2013-09-06 |
Kci Licensing, Inc. |
Systems and methods for supplying reduced pressure and measuring flow using a disc pump system
|
US9610392B2
(en)
|
2012-06-08 |
2017-04-04 |
Fresenius Medical Care Holdings, Inc. |
Medical fluid cassettes and related systems and methods
|
US20150345487A1
(en)
*
|
2012-12-21 |
2015-12-03 |
Tetra Laval Holdings & Finance S.A. |
A piston pump arrangement for hygienic processing applications
|
CN104870817A
(zh)
*
|
2012-12-21 |
2015-08-26 |
利乐拉瓦尔集团及财务有限公司 |
一种用于卫生处理应用的活塞泵装置
|
CN104747419B
(zh)
*
|
2015-03-17 |
2018-02-23 |
上海江浪流体机械制造有限公司 |
一种带力传递环的气动隔膜泵
|
CN104747420A
(zh)
*
|
2015-03-17 |
2015-07-01 |
上海如迪流体输送设备有限公司 |
一种带外漏报警、关停装置的气动隔膜泵
|
DE102016216006A1
(de)
*
|
2016-08-25 |
2018-03-01 |
Siemens Aktiengesellschaft |
Doppelmembran für eine Staubpumpe
|
DE102019109283A1
(de)
*
|
2019-04-09 |
2020-10-15 |
Prominent Gmbh |
Membranbruchüberwachung
|
IT201900008754A1
(it)
*
|
2019-06-12 |
2020-12-12 |
Gea Mech Equipment Italia S P A |
Pompa a doppia membrana per impiego in un apparato di omogeneizzazione di un prodotto fluido e metodo per rilevare perdite in tale pompa
|