DE69027273D1 - Biaxialer Roboter mit magnetischer Kupplung - Google Patents

Biaxialer Roboter mit magnetischer Kupplung

Info

Publication number
DE69027273D1
DE69027273D1 DE69027273T DE69027273T DE69027273D1 DE 69027273 D1 DE69027273 D1 DE 69027273D1 DE 69027273 T DE69027273 T DE 69027273T DE 69027273 T DE69027273 T DE 69027273T DE 69027273 D1 DE69027273 D1 DE 69027273D1
Authority
DE
Germany
Prior art keywords
magnetic coupling
biaxial robot
biaxial
robot
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69027273T
Other languages
English (en)
Other versions
DE69027273T2 (de
Inventor
Robert B Lowrance
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE69027273D1 publication Critical patent/DE69027273D1/de
Publication of DE69027273T2 publication Critical patent/DE69027273T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J21/00—Chambers provided with manipulation devices
    • B25J21/005—Clean rooms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
DE69027273T 1989-10-20 1990-10-10 Biaxialer Roboter mit magnetischer Kupplung Expired - Fee Related DE69027273T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US42477189A 1989-10-20 1989-10-20

Publications (2)

Publication Number Publication Date
DE69027273D1 true DE69027273D1 (de) 1996-07-11
DE69027273T2 DE69027273T2 (de) 1997-01-23

Family

ID=23683794

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69027273T Expired - Fee Related DE69027273T2 (de) 1989-10-20 1990-10-10 Biaxialer Roboter mit magnetischer Kupplung
DE69032945T Expired - Fee Related DE69032945T2 (de) 1989-10-20 1990-10-10 Robotereinrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69032945T Expired - Fee Related DE69032945T2 (de) 1989-10-20 1990-10-10 Robotereinrichtung

Country Status (6)

Country Link
US (5) US5583408A (de)
EP (3) EP0423608B1 (de)
JP (1) JPH0755464B2 (de)
KR (1) KR100204161B1 (de)
DE (2) DE69027273T2 (de)
ES (2) ES2090074T3 (de)

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Publication number Publication date
EP0600851B1 (de) 1999-02-03
US5764012A (en) 1998-06-09
DE69032945T2 (de) 1999-09-16
US5469035A (en) 1995-11-21
EP0423608A1 (de) 1991-04-24
EP0858867A3 (de) 1999-03-17
EP0423608B1 (de) 1996-06-05
DE69032945D1 (de) 1999-03-18
US5990585A (en) 1999-11-23
US5583408A (en) 1996-12-10
EP0600851A3 (en) 1994-08-17
KR100204161B1 (ko) 1999-06-15
DE69027273T2 (de) 1997-01-23
EP0858867A2 (de) 1998-08-19
JPH03136779A (ja) 1991-06-11
ES2090074T3 (es) 1996-10-16
KR910007637A (ko) 1991-05-30
US5656902A (en) 1997-08-12
ES2130295T3 (es) 1999-07-01
EP0600851A2 (de) 1994-06-08
JPH0755464B2 (ja) 1995-06-14

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