DE69017947T2 - Verfahren und Vorrichtung zum Messen der Dicke dünner Filme. - Google Patents

Verfahren und Vorrichtung zum Messen der Dicke dünner Filme.

Info

Publication number
DE69017947T2
DE69017947T2 DE69017947T DE69017947T DE69017947T2 DE 69017947 T2 DE69017947 T2 DE 69017947T2 DE 69017947 T DE69017947 T DE 69017947T DE 69017947 T DE69017947 T DE 69017947T DE 69017947 T2 DE69017947 T2 DE 69017947T2
Authority
DE
Germany
Prior art keywords
measuring
thickness
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69017947T
Other languages
English (en)
Other versions
DE69017947D1 (de
Inventor
Nathan Gold
Jon Opsal
David L Willenborg
Allan Rosencwaig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Wave Inc
Original Assignee
Therma Wave Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Publication of DE69017947D1 publication Critical patent/DE69017947D1/de
Application granted granted Critical
Publication of DE69017947T2 publication Critical patent/DE69017947T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69017947T 1989-05-04 1990-05-02 Verfahren und Vorrichtung zum Messen der Dicke dünner Filme. Expired - Lifetime DE69017947T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/347,812 US4999014A (en) 1989-05-04 1989-05-04 Method and apparatus for measuring thickness of thin films

Publications (2)

Publication Number Publication Date
DE69017947D1 DE69017947D1 (de) 1995-04-27
DE69017947T2 true DE69017947T2 (de) 1995-11-16

Family

ID=23365380

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69017947T Expired - Lifetime DE69017947T2 (de) 1989-05-04 1990-05-02 Verfahren und Vorrichtung zum Messen der Dicke dünner Filme.

Country Status (4)

Country Link
US (1) US4999014A (de)
EP (1) EP0397388B1 (de)
JP (1) JP2514099B2 (de)
DE (1) DE69017947T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012102756A1 (de) * 2012-03-30 2013-10-02 Hseb Dresden Gmbh Verfahren zur Detektion vergrabener Schichten

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US4999014A (en) 1991-03-12
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