DE69005611T2 - Monolithischer beschleunigungsmesser mit biegsam montiertem kraftwandler. - Google Patents

Monolithischer beschleunigungsmesser mit biegsam montiertem kraftwandler.

Info

Publication number
DE69005611T2
DE69005611T2 DE90911014T DE69005611T DE69005611T2 DE 69005611 T2 DE69005611 T2 DE 69005611T2 DE 90911014 T DE90911014 T DE 90911014T DE 69005611 T DE69005611 T DE 69005611T DE 69005611 T2 DE69005611 T2 DE 69005611T2
Authority
DE
Germany
Prior art keywords
monolithic
accelerator
power converter
mounted power
bending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90911014T
Other languages
English (en)
Other versions
DE69005611D1 (de
Inventor
Brian Norling
Rex Peters
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sundstrand Corp
Original Assignee
Sundstrand Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Corp filed Critical Sundstrand Corp
Priority claimed from PCT/US1990/003201 external-priority patent/WO1991001009A1/en
Application granted granted Critical
Publication of DE69005611D1 publication Critical patent/DE69005611D1/de
Publication of DE69005611T2 publication Critical patent/DE69005611T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration
DE90911014T 1989-07-06 1990-06-05 Monolithischer beschleunigungsmesser mit biegsam montiertem kraftwandler. Expired - Fee Related DE69005611T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/544,221 US5165279A (en) 1989-07-06 1989-07-06 Monolithic accelerometer with flexurally mounted force transducer
PCT/US1990/003201 WO1991001009A1 (en) 1989-07-06 1990-06-05 Monolithic accelerometer with flexurally mounted force transducers

Publications (2)

Publication Number Publication Date
DE69005611D1 DE69005611D1 (de) 1994-02-10
DE69005611T2 true DE69005611T2 (de) 1994-04-28

Family

ID=24171280

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90911014T Expired - Fee Related DE69005611T2 (de) 1989-07-06 1990-06-05 Monolithischer beschleunigungsmesser mit biegsam montiertem kraftwandler.

Country Status (2)

Country Link
US (1) US5165279A (de)
DE (1) DE69005611T2 (de)

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FR2666887A1 (fr) * 1990-09-17 1992-03-20 Asulab Sa Capteur de mesure d'une grandeur physique.
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5456111A (en) * 1994-01-24 1995-10-10 Alliedsignal Inc. Capacitive drive vibrating beam accelerometer
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd Inc Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
DE19810447A1 (de) * 1998-03-11 1999-09-16 Hilti Ag Aufhängung für eine schwerkraftbeeinflusste Messeinrichtung
US7098871B1 (en) 1998-08-05 2006-08-29 Microvision, Inc. Optical scanning system with correction
US6285489B1 (en) 1999-08-05 2001-09-04 Microvision Inc. Frequency tunable resonant scanner with auxiliary arms
US6525310B2 (en) * 1999-08-05 2003-02-25 Microvision, Inc. Frequency tunable resonant scanner
US6433907B1 (en) * 1999-08-05 2002-08-13 Microvision, Inc. Scanned display with plurality of scanning assemblies
US6384406B1 (en) 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
US6331909B1 (en) 1999-08-05 2001-12-18 Microvision, Inc. Frequency tunable resonant scanner
US7262765B2 (en) * 1999-08-05 2007-08-28 Microvision, Inc. Apparatuses and methods for utilizing non-ideal light sources
US6795221B1 (en) 1999-08-05 2004-09-21 Microvision, Inc. Scanned display with switched feeds and distortion correction
US6245590B1 (en) 1999-08-05 2001-06-12 Microvision Inc. Frequency tunable resonant scanner and method of making
US6256131B1 (en) 1999-08-05 2001-07-03 Microvision Inc. Active tuning of a torsional resonant structure
US6661393B2 (en) 1999-08-05 2003-12-09 Microvision, Inc. Scanned display with variation compensation
US6924476B2 (en) * 2002-11-25 2005-08-02 Microvision, Inc. Resonant beam scanner with raster pinch compensation
US6654158B2 (en) 2001-04-20 2003-11-25 Microvision, Inc. Frequency tunable resonant scanner with auxiliary arms
US6653621B2 (en) 2001-03-23 2003-11-25 Microvision, Inc. Frequency tunable resonant scanner and method of making
US6882462B2 (en) * 2002-11-01 2005-04-19 Microvision, Inc. Resonant scanner with asymmetric mass distribution
US6362912B1 (en) 1999-08-05 2002-03-26 Microvision, Inc. Scanned imaging apparatus with switched feeds
US6445362B1 (en) 1999-08-05 2002-09-03 Microvision, Inc. Scanned display with variation compensation
US6515781B2 (en) 1999-08-05 2003-02-04 Microvision, Inc. Scanned imaging apparatus with switched feeds
US6634231B2 (en) * 2001-05-15 2003-10-21 Honeywell International, Inc. Accelerometer strain isolator
US6701786B2 (en) 2002-04-29 2004-03-09 L-3 Communications Corporation Closed loop analog gyro rate sensor
FR2842914B1 (fr) * 2002-07-26 2004-08-27 Sagem Capteur inertiel compact
US6938334B2 (en) * 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
US7146856B2 (en) * 2004-06-07 2006-12-12 Honeywell International, Inc. Dynamically balanced capacitive pick-off accelerometer
US7140250B2 (en) * 2005-02-18 2006-11-28 Honeywell International Inc. MEMS teeter-totter accelerometer having reduced non-linearty
JP2007163244A (ja) * 2005-12-13 2007-06-28 Epson Toyocom Corp 加速度センサ素子、加速度センサ
US7444883B2 (en) * 2005-12-22 2008-11-04 Honeywell International Inc. Vibrating beam force transducer
US7802475B2 (en) * 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
US8191420B2 (en) * 2009-08-13 2012-06-05 Meggitt (San Juan Capistrano), Inc. Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
JP2011117944A (ja) * 2009-10-29 2011-06-16 Seiko Epson Corp 加速度センサー
RU2477491C1 (ru) * 2011-08-10 2013-03-10 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" - Госкорпорация "Росатом" Датчик резонаторный
JP2013122375A (ja) * 2011-11-07 2013-06-20 Seiko Epson Corp 物理量検出デバイス、物理量検出器、および電子機器
WO2013089079A1 (ja) * 2011-12-12 2013-06-20 株式会社村田製作所 加速度センサ
US9222956B2 (en) * 2013-11-26 2015-12-29 Raytheon Company High bandwidth linear flexure bearing
GB201415087D0 (en) 2014-08-26 2014-10-08 Univ Glasgow Measurement of acceleration
US11258158B2 (en) 2017-08-17 2022-02-22 Raytheon Company Apparatus and method for providing linear motion of a device
JP7040253B2 (ja) * 2018-04-20 2022-03-23 セイコーエプソン株式会社 物理量センサーモジュール、傾斜計、慣性計測装置、構造物監視装置、及び移動体
US10670825B2 (en) 2018-08-23 2020-06-02 Raytheon Company Mounting devices with integrated alignment adjustment features and locking mechanisms

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856425B2 (ja) * 1978-10-11 1983-12-14 横河電機株式会社 力変換機構
US4215570A (en) * 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
GB2121953B (en) * 1982-06-10 1985-09-04 Itt Ind Ltd Improvements in transducers
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
US4751849A (en) * 1986-06-17 1988-06-21 Paroscientific, Inc. Force-sensitive resonator load cell
US4766768A (en) * 1987-10-22 1988-08-30 Sundstrand Data Control, Inc. Accelerometer with isolator for common mode inputs
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4881408A (en) * 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer

Also Published As

Publication number Publication date
US5165279A (en) 1992-11-24
DE69005611D1 (de) 1994-02-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee