DE69004357T2 - Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen. - Google Patents
Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen.Info
- Publication number
- DE69004357T2 DE69004357T2 DE90401721T DE69004357T DE69004357T2 DE 69004357 T2 DE69004357 T2 DE 69004357T2 DE 90401721 T DE90401721 T DE 90401721T DE 69004357 T DE69004357 T DE 69004357T DE 69004357 T2 DE69004357 T2 DE 69004357T2
- Authority
- DE
- Germany
- Prior art keywords
- situ
- cleaning
- optical
- excimer laser
- laser elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/371,103 US5001873A (en) | 1989-06-26 | 1989-06-26 | Method and apparatus for in situ cleaning of excimer laser optics |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69004357D1 DE69004357D1 (de) | 1993-12-09 |
DE69004357T2 true DE69004357T2 (de) | 1994-02-24 |
Family
ID=23462487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE90401721T Expired - Lifetime DE69004357T2 (de) | 1989-06-26 | 1990-06-19 | Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5001873A (de) |
EP (1) | EP0406062B1 (de) |
JP (1) | JPH03129886A (de) |
CA (1) | CA2019862A1 (de) |
DE (1) | DE69004357T2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009035789A1 (de) * | 2009-07-31 | 2010-11-25 | Carl Zeiss Laser Optics Gmbh | Optisches System |
DE102019100270A1 (de) * | 2019-01-08 | 2020-07-09 | Sick Ag | Analysevorrichtung |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5599223A (en) * | 1991-04-10 | 1997-02-04 | Mains Jr.; Gilbert L. | Method for material removal |
US5222332A (en) * | 1991-04-10 | 1993-06-29 | Mains Jr Gilbert L | Method for material removal |
US5373523A (en) * | 1992-10-15 | 1994-12-13 | Kabushiki Kaisha Komatsu Seisakusho | Excimer laser apparatus |
US5366156A (en) * | 1993-06-14 | 1994-11-22 | International Business Machines Corporation | Nozzle apparatus for producing aerosol |
US5377911A (en) * | 1993-06-14 | 1995-01-03 | International Business Machines Corporation | Apparatus for producing cryogenic aerosol |
US5967156A (en) * | 1994-11-07 | 1999-10-19 | Krytek Corporation | Processing a surface |
US5931721A (en) | 1994-11-07 | 1999-08-03 | Sumitomo Heavy Industries, Ltd. | Aerosol surface processing |
DE19615333A1 (de) * | 1995-07-24 | 1997-01-30 | Hewlett Packard Co | Gasanalysator mit einer Anordnung zur Sprühreinigung eines optischen Elements |
US6391005B1 (en) | 1998-03-30 | 2002-05-21 | Agilent Technologies, Inc. | Apparatus and method for penetration with shaft having a sensor for sensing penetration depth |
US6120357A (en) * | 1999-02-22 | 2000-09-19 | Imation Corp. | System and method for CO2 cleaning of data storage disks |
US6069909A (en) * | 1999-03-08 | 2000-05-30 | Xmr, Inc. | Excimer laser with improved window mount |
US6419559B1 (en) * | 2000-07-10 | 2002-07-16 | Applied Materials, Inc. | Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet |
US8641644B2 (en) | 2000-11-21 | 2014-02-04 | Sanofi-Aventis Deutschland Gmbh | Blood testing apparatus having a rotatable cartridge with multiple lancing elements and testing means |
US6768765B1 (en) * | 2001-06-07 | 2004-07-27 | Lambda Physik Ag | High power excimer or molecular fluorine laser system |
US7749174B2 (en) | 2001-06-12 | 2010-07-06 | Pelikan Technologies, Inc. | Method and apparatus for lancet launching device intergrated onto a blood-sampling cartridge |
US7041068B2 (en) | 2001-06-12 | 2006-05-09 | Pelikan Technologies, Inc. | Sampling module device and method |
US9795747B2 (en) | 2010-06-02 | 2017-10-24 | Sanofi-Aventis Deutschland Gmbh | Methods and apparatus for lancet actuation |
US7344507B2 (en) | 2002-04-19 | 2008-03-18 | Pelikan Technologies, Inc. | Method and apparatus for lancet actuation |
US9427532B2 (en) | 2001-06-12 | 2016-08-30 | Sanofi-Aventis Deutschland Gmbh | Tissue penetration device |
US8337419B2 (en) | 2002-04-19 | 2012-12-25 | Sanofi-Aventis Deutschland Gmbh | Tissue penetration device |
US9226699B2 (en) | 2002-04-19 | 2016-01-05 | Sanofi-Aventis Deutschland Gmbh | Body fluid sampling module with a continuous compression tissue interface surface |
US7981056B2 (en) | 2002-04-19 | 2011-07-19 | Pelikan Technologies, Inc. | Methods and apparatus for lancet actuation |
CA2448902C (en) | 2001-06-12 | 2010-09-07 | Pelikan Technologies, Inc. | Self optimizing lancing device with adaptation means to temporal variations in cutaneous properties |
US7033371B2 (en) | 2001-06-12 | 2006-04-25 | Pelikan Technologies, Inc. | Electric lancet actuator |
JP2003042967A (ja) * | 2001-07-27 | 2003-02-13 | Hitachi Ltd | パターン欠陥検査装置 |
US7226461B2 (en) | 2002-04-19 | 2007-06-05 | Pelikan Technologies, Inc. | Method and apparatus for a multi-use body fluid sampling device with sterility barrier release |
US9314194B2 (en) | 2002-04-19 | 2016-04-19 | Sanofi-Aventis Deutschland Gmbh | Tissue penetration device |
US7547287B2 (en) | 2002-04-19 | 2009-06-16 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US7674232B2 (en) | 2002-04-19 | 2010-03-09 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US7976476B2 (en) | 2002-04-19 | 2011-07-12 | Pelikan Technologies, Inc. | Device and method for variable speed lancet |
US8360992B2 (en) | 2002-04-19 | 2013-01-29 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for penetrating tissue |
US9248267B2 (en) | 2002-04-19 | 2016-02-02 | Sanofi-Aventis Deustchland Gmbh | Tissue penetration device |
US8784335B2 (en) | 2002-04-19 | 2014-07-22 | Sanofi-Aventis Deutschland Gmbh | Body fluid sampling device with a capacitive sensor |
US7331931B2 (en) | 2002-04-19 | 2008-02-19 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US9795334B2 (en) | 2002-04-19 | 2017-10-24 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for penetrating tissue |
US7892183B2 (en) | 2002-04-19 | 2011-02-22 | Pelikan Technologies, Inc. | Method and apparatus for body fluid sampling and analyte sensing |
US8372016B2 (en) | 2002-04-19 | 2013-02-12 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for body fluid sampling and analyte sensing |
US7297122B2 (en) | 2002-04-19 | 2007-11-20 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US8267870B2 (en) | 2002-04-19 | 2012-09-18 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for body fluid sampling with hybrid actuation |
US7491178B2 (en) | 2002-04-19 | 2009-02-17 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US7232451B2 (en) | 2002-04-19 | 2007-06-19 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US8702624B2 (en) | 2006-09-29 | 2014-04-22 | Sanofi-Aventis Deutschland Gmbh | Analyte measurement device with a single shot actuator |
US8579831B2 (en) | 2002-04-19 | 2013-11-12 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for penetrating tissue |
US8221334B2 (en) | 2002-04-19 | 2012-07-17 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for penetrating tissue |
US7901362B2 (en) | 2002-04-19 | 2011-03-08 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US7229458B2 (en) | 2002-04-19 | 2007-06-12 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US7909778B2 (en) | 2002-04-19 | 2011-03-22 | Pelikan Technologies, Inc. | Method and apparatus for penetrating tissue |
US8574895B2 (en) | 2002-12-30 | 2013-11-05 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus using optical techniques to measure analyte levels |
ES2347248T3 (es) | 2003-05-30 | 2010-10-27 | Pelikan Technologies Inc. | Procedimiento y aparato para la inyeccion de fluido. |
WO2004107964A2 (en) | 2003-06-06 | 2004-12-16 | Pelikan Technologies, Inc. | Blood harvesting device with electronic control |
WO2006001797A1 (en) | 2004-06-14 | 2006-01-05 | Pelikan Technologies, Inc. | Low pain penetrating |
WO2005033659A2 (en) | 2003-09-29 | 2005-04-14 | Pelikan Technologies, Inc. | Method and apparatus for an improved sample capture device |
US9351680B2 (en) | 2003-10-14 | 2016-05-31 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for a variable user interface |
EP1706026B1 (de) | 2003-12-31 | 2017-03-01 | Sanofi-Aventis Deutschland GmbH | Verfahren und vorrichtung zur verbesserung der fluidströmung und der probennahme |
US7822454B1 (en) | 2005-01-03 | 2010-10-26 | Pelikan Technologies, Inc. | Fluid sampling device with improved analyte detecting member configuration |
US8828203B2 (en) | 2004-05-20 | 2014-09-09 | Sanofi-Aventis Deutschland Gmbh | Printable hydrogels for biosensors |
US9775553B2 (en) | 2004-06-03 | 2017-10-03 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for a fluid sampling device |
US9820684B2 (en) | 2004-06-03 | 2017-11-21 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for a fluid sampling device |
US8652831B2 (en) | 2004-12-30 | 2014-02-18 | Sanofi-Aventis Deutschland Gmbh | Method and apparatus for analyte measurement test time |
WO2009126900A1 (en) | 2008-04-11 | 2009-10-15 | Pelikan Technologies, Inc. | Method and apparatus for analyte detecting device |
US9375169B2 (en) | 2009-01-30 | 2016-06-28 | Sanofi-Aventis Deutschland Gmbh | Cam drive for managing disposable penetrating member actions with a single motor and motor and control system |
US8965476B2 (en) | 2010-04-16 | 2015-02-24 | Sanofi-Aventis Deutschland Gmbh | Tissue penetration device |
CN103230899B (zh) * | 2013-04-28 | 2015-02-04 | 哈尔滨工业大学 | 一种用于冲扫激光传输光学系统中微小颗粒的进气节流板装置 |
CN103230900B (zh) * | 2013-04-28 | 2015-03-04 | 哈尔滨工业大学 | 一种用于保持大口径光学元件表面洁净的冲扫装置 |
CN103230901B (zh) * | 2013-04-28 | 2015-02-04 | 哈尔滨工业大学 | 一种保持激光传输光学系统中洁净度的冲扫装置和方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2119948C3 (de) * | 1971-04-23 | 1974-01-03 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Gaslaser |
US4052680A (en) * | 1976-07-01 | 1977-10-04 | Xerox Corporation | Metal vapor laser having cataphoresis means |
US4631250A (en) * | 1985-03-13 | 1986-12-23 | Research Development Corporation Of Japan | Process for removing covering film and apparatus therefor |
FR2591816B1 (fr) * | 1985-12-16 | 1990-10-05 | Asulab Sa | Laser a gaz equipe de vannes a trois fonctions |
JPS62160799A (ja) * | 1986-01-09 | 1987-07-16 | 赤井電機株式会社 | プリント基板の取付方法 |
JPS639171A (ja) * | 1986-06-30 | 1988-01-14 | Komatsu Ltd | エキシマレ−ザのレ−ザヘツド |
JPS639175A (ja) * | 1986-06-30 | 1988-01-14 | Komatsu Ltd | 縦型エキシマレ−ザのレ−ザヘツド |
US4806171A (en) * | 1987-04-22 | 1989-02-21 | The Boc Group, Inc. | Apparatus and method for removing minute particles from a substrate |
-
1989
- 1989-06-26 US US07/371,103 patent/US5001873A/en not_active Expired - Lifetime
-
1990
- 1990-06-19 DE DE90401721T patent/DE69004357T2/de not_active Expired - Lifetime
- 1990-06-19 EP EP90401721A patent/EP0406062B1/de not_active Expired - Lifetime
- 1990-06-22 JP JP2163017A patent/JPH03129886A/ja active Pending
- 1990-06-26 CA CA002019862A patent/CA2019862A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009035789A1 (de) * | 2009-07-31 | 2010-11-25 | Carl Zeiss Laser Optics Gmbh | Optisches System |
DE102019100270A1 (de) * | 2019-01-08 | 2020-07-09 | Sick Ag | Analysevorrichtung |
Also Published As
Publication number | Publication date |
---|---|
EP0406062A1 (de) | 1991-01-02 |
CA2019862A1 (en) | 1990-12-26 |
JPH03129886A (ja) | 1991-06-03 |
EP0406062B1 (de) | 1993-11-03 |
US5001873A (en) | 1991-03-26 |
DE69004357D1 (de) | 1993-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |