DE69004357D1 - Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen. - Google Patents

Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen.

Info

Publication number
DE69004357D1
DE69004357D1 DE90401721T DE69004357T DE69004357D1 DE 69004357 D1 DE69004357 D1 DE 69004357D1 DE 90401721 T DE90401721 T DE 90401721T DE 69004357 T DE69004357 T DE 69004357T DE 69004357 D1 DE69004357 D1 DE 69004357D1
Authority
DE
Germany
Prior art keywords
situ
cleaning
optical
excimer laser
laser elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90401721T
Other languages
English (en)
Other versions
DE69004357T2 (de
Inventor
Denis Rufin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE69004357D1 publication Critical patent/DE69004357D1/de
Publication of DE69004357T2 publication Critical patent/DE69004357T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
DE90401721T 1989-06-26 1990-06-19 Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen. Expired - Lifetime DE69004357T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/371,103 US5001873A (en) 1989-06-26 1989-06-26 Method and apparatus for in situ cleaning of excimer laser optics

Publications (2)

Publication Number Publication Date
DE69004357D1 true DE69004357D1 (de) 1993-12-09
DE69004357T2 DE69004357T2 (de) 1994-02-24

Family

ID=23462487

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90401721T Expired - Lifetime DE69004357T2 (de) 1989-06-26 1990-06-19 Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen.

Country Status (5)

Country Link
US (1) US5001873A (de)
EP (1) EP0406062B1 (de)
JP (1) JPH03129886A (de)
CA (1) CA2019862A1 (de)
DE (1) DE69004357T2 (de)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5599223A (en) * 1991-04-10 1997-02-04 Mains Jr.; Gilbert L. Method for material removal
US5222332A (en) * 1991-04-10 1993-06-29 Mains Jr Gilbert L Method for material removal
US5373523A (en) * 1992-10-15 1994-12-13 Kabushiki Kaisha Komatsu Seisakusho Excimer laser apparatus
US5366156A (en) * 1993-06-14 1994-11-22 International Business Machines Corporation Nozzle apparatus for producing aerosol
US5377911A (en) * 1993-06-14 1995-01-03 International Business Machines Corporation Apparatus for producing cryogenic aerosol
US5967156A (en) * 1994-11-07 1999-10-19 Krytek Corporation Processing a surface
US5931721A (en) 1994-11-07 1999-08-03 Sumitomo Heavy Industries, Ltd. Aerosol surface processing
DE19615333A1 (de) * 1995-07-24 1997-01-30 Hewlett Packard Co Gasanalysator mit einer Anordnung zur Sprühreinigung eines optischen Elements
US6391005B1 (en) 1998-03-30 2002-05-21 Agilent Technologies, Inc. Apparatus and method for penetration with shaft having a sensor for sensing penetration depth
US6120357A (en) * 1999-02-22 2000-09-19 Imation Corp. System and method for CO2 cleaning of data storage disks
US6069909A (en) * 1999-03-08 2000-05-30 Xmr, Inc. Excimer laser with improved window mount
US6419559B1 (en) * 2000-07-10 2002-07-16 Applied Materials, Inc. Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet
US8641644B2 (en) 2000-11-21 2014-02-04 Sanofi-Aventis Deutschland Gmbh Blood testing apparatus having a rotatable cartridge with multiple lancing elements and testing means
US6768765B1 (en) * 2001-06-07 2004-07-27 Lambda Physik Ag High power excimer or molecular fluorine laser system
US7749174B2 (en) 2001-06-12 2010-07-06 Pelikan Technologies, Inc. Method and apparatus for lancet launching device intergrated onto a blood-sampling cartridge
US7041068B2 (en) 2001-06-12 2006-05-09 Pelikan Technologies, Inc. Sampling module device and method
US9795747B2 (en) 2010-06-02 2017-10-24 Sanofi-Aventis Deutschland Gmbh Methods and apparatus for lancet actuation
US7344507B2 (en) 2002-04-19 2008-03-18 Pelikan Technologies, Inc. Method and apparatus for lancet actuation
US9427532B2 (en) 2001-06-12 2016-08-30 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US8337419B2 (en) 2002-04-19 2012-12-25 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US9226699B2 (en) 2002-04-19 2016-01-05 Sanofi-Aventis Deutschland Gmbh Body fluid sampling module with a continuous compression tissue interface surface
US7981056B2 (en) 2002-04-19 2011-07-19 Pelikan Technologies, Inc. Methods and apparatus for lancet actuation
CA2448902C (en) 2001-06-12 2010-09-07 Pelikan Technologies, Inc. Self optimizing lancing device with adaptation means to temporal variations in cutaneous properties
US7033371B2 (en) 2001-06-12 2006-04-25 Pelikan Technologies, Inc. Electric lancet actuator
JP2003042967A (ja) * 2001-07-27 2003-02-13 Hitachi Ltd パターン欠陥検査装置
US7226461B2 (en) 2002-04-19 2007-06-05 Pelikan Technologies, Inc. Method and apparatus for a multi-use body fluid sampling device with sterility barrier release
US9314194B2 (en) 2002-04-19 2016-04-19 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US7547287B2 (en) 2002-04-19 2009-06-16 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7674232B2 (en) 2002-04-19 2010-03-09 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7976476B2 (en) 2002-04-19 2011-07-12 Pelikan Technologies, Inc. Device and method for variable speed lancet
US8360992B2 (en) 2002-04-19 2013-01-29 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US9248267B2 (en) 2002-04-19 2016-02-02 Sanofi-Aventis Deustchland Gmbh Tissue penetration device
US8784335B2 (en) 2002-04-19 2014-07-22 Sanofi-Aventis Deutschland Gmbh Body fluid sampling device with a capacitive sensor
US7331931B2 (en) 2002-04-19 2008-02-19 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US9795334B2 (en) 2002-04-19 2017-10-24 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US7892183B2 (en) 2002-04-19 2011-02-22 Pelikan Technologies, Inc. Method and apparatus for body fluid sampling and analyte sensing
US8372016B2 (en) 2002-04-19 2013-02-12 Sanofi-Aventis Deutschland Gmbh Method and apparatus for body fluid sampling and analyte sensing
US7297122B2 (en) 2002-04-19 2007-11-20 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8267870B2 (en) 2002-04-19 2012-09-18 Sanofi-Aventis Deutschland Gmbh Method and apparatus for body fluid sampling with hybrid actuation
US7491178B2 (en) 2002-04-19 2009-02-17 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7232451B2 (en) 2002-04-19 2007-06-19 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8702624B2 (en) 2006-09-29 2014-04-22 Sanofi-Aventis Deutschland Gmbh Analyte measurement device with a single shot actuator
US8579831B2 (en) 2002-04-19 2013-11-12 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US8221334B2 (en) 2002-04-19 2012-07-17 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US7901362B2 (en) 2002-04-19 2011-03-08 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7229458B2 (en) 2002-04-19 2007-06-12 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7909778B2 (en) 2002-04-19 2011-03-22 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8574895B2 (en) 2002-12-30 2013-11-05 Sanofi-Aventis Deutschland Gmbh Method and apparatus using optical techniques to measure analyte levels
ES2347248T3 (es) 2003-05-30 2010-10-27 Pelikan Technologies Inc. Procedimiento y aparato para la inyeccion de fluido.
WO2004107964A2 (en) 2003-06-06 2004-12-16 Pelikan Technologies, Inc. Blood harvesting device with electronic control
WO2006001797A1 (en) 2004-06-14 2006-01-05 Pelikan Technologies, Inc. Low pain penetrating
WO2005033659A2 (en) 2003-09-29 2005-04-14 Pelikan Technologies, Inc. Method and apparatus for an improved sample capture device
US9351680B2 (en) 2003-10-14 2016-05-31 Sanofi-Aventis Deutschland Gmbh Method and apparatus for a variable user interface
EP1706026B1 (de) 2003-12-31 2017-03-01 Sanofi-Aventis Deutschland GmbH Verfahren und vorrichtung zur verbesserung der fluidströmung und der probennahme
US7822454B1 (en) 2005-01-03 2010-10-26 Pelikan Technologies, Inc. Fluid sampling device with improved analyte detecting member configuration
US8828203B2 (en) 2004-05-20 2014-09-09 Sanofi-Aventis Deutschland Gmbh Printable hydrogels for biosensors
US9775553B2 (en) 2004-06-03 2017-10-03 Sanofi-Aventis Deutschland Gmbh Method and apparatus for a fluid sampling device
US9820684B2 (en) 2004-06-03 2017-11-21 Sanofi-Aventis Deutschland Gmbh Method and apparatus for a fluid sampling device
US8652831B2 (en) 2004-12-30 2014-02-18 Sanofi-Aventis Deutschland Gmbh Method and apparatus for analyte measurement test time
WO2009126900A1 (en) 2008-04-11 2009-10-15 Pelikan Technologies, Inc. Method and apparatus for analyte detecting device
US9375169B2 (en) 2009-01-30 2016-06-28 Sanofi-Aventis Deutschland Gmbh Cam drive for managing disposable penetrating member actions with a single motor and motor and control system
DE102009035789A1 (de) * 2009-07-31 2010-11-25 Carl Zeiss Laser Optics Gmbh Optisches System
US8965476B2 (en) 2010-04-16 2015-02-24 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
CN103230899B (zh) * 2013-04-28 2015-02-04 哈尔滨工业大学 一种用于冲扫激光传输光学系统中微小颗粒的进气节流板装置
CN103230900B (zh) * 2013-04-28 2015-03-04 哈尔滨工业大学 一种用于保持大口径光学元件表面洁净的冲扫装置
CN103230901B (zh) * 2013-04-28 2015-02-04 哈尔滨工业大学 一种保持激光传输光学系统中洁净度的冲扫装置和方法
DE102019100270A1 (de) * 2019-01-08 2020-07-09 Sick Ag Analysevorrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2119948C3 (de) * 1971-04-23 1974-01-03 Siemens Ag, 1000 Berlin U. 8000 Muenchen Gaslaser
US4052680A (en) * 1976-07-01 1977-10-04 Xerox Corporation Metal vapor laser having cataphoresis means
US4631250A (en) * 1985-03-13 1986-12-23 Research Development Corporation Of Japan Process for removing covering film and apparatus therefor
FR2591816B1 (fr) * 1985-12-16 1990-10-05 Asulab Sa Laser a gaz equipe de vannes a trois fonctions
JPS62160799A (ja) * 1986-01-09 1987-07-16 赤井電機株式会社 プリント基板の取付方法
JPS639171A (ja) * 1986-06-30 1988-01-14 Komatsu Ltd エキシマレ−ザのレ−ザヘツド
JPS639175A (ja) * 1986-06-30 1988-01-14 Komatsu Ltd 縦型エキシマレ−ザのレ−ザヘツド
US4806171A (en) * 1987-04-22 1989-02-21 The Boc Group, Inc. Apparatus and method for removing minute particles from a substrate

Also Published As

Publication number Publication date
EP0406062A1 (de) 1991-01-02
DE69004357T2 (de) 1994-02-24
CA2019862A1 (en) 1990-12-26
JPH03129886A (ja) 1991-06-03
EP0406062B1 (de) 1993-11-03
US5001873A (en) 1991-03-26

Similar Documents

Publication Publication Date Title
DE69004357T2 (de) Verfahren und Apparat zur Reinigung "in situ" von optischen Excimer-Laser-Elementen.
DE69112320D1 (de) Verfahren und Vorrichtung zur optischen Abtastung.
DE69131668D1 (de) Verfahren und vorrichtung zum optischen schalten
DE69030943T2 (de) Zusammensetzung zum Reinigen von Kontaktlinsen und Verfahren
DE69127609T2 (de) Vorrichtung und verfahren zur herstellung von diamanten
DE69025796T2 (de) Vorrichtung und Verfahren zur Bildabtastung
DE69131006T2 (de) Gerät und Verfahren zur optischen Zeichenerkennung
DE69124287T2 (de) Verfahren und Apparat zum Reinigen von Silizium
DE69025259D1 (de) Verfahren und Gerät zur Bilderzeugung
DE69030815D1 (de) Apparat und verfahren zur erzeugung von dokumenten
DE68907886T2 (de) Verfahren und Vorrichtung zum Anwenden von optischen Zeitbereichsreflektometern.
DE69308204D1 (de) Verfahren zur Walzenreinigung und Vorrichtung dafür
DE69410900T2 (de) Verfahren und Vorrichtung zur Überwachung von Oberflächen-Laserreinigung
DE3751702D1 (de) Verfahren und apparat zur untersuchung von oberflächenfehlern
DE59206975D1 (de) Verfahren und Vorrichtung zum elektro-optischen Abtasten von (Zigaretten-)Packungen
DE69109706T3 (de) Verfahren und Apparat zur Suspensionspolymerisation.
DE69418505D1 (de) Verfahren und Apparat zur Orientierungsbestimmung von Papierfasern
DE69602865D1 (de) Verfahren und Vorrichtung zum Herstellen von optischen Körpern
DE59009500D1 (de) Vorrichtung und verfahren zur beseitigung von niederschlägen von dünnwandigen oberflächen.
DE69033535T2 (de) Verfahren und vorrichtung zur reinigung von bohrklein
DE69322593T2 (de) Verfahren und Vorrichtung zur optischen Aufzeichnung
DE69128164D1 (de) Verfahren und Apparat zur Detektion von Lageabweichungen
DE59010880D1 (de) Verfahren und Vorrichtung zur Feinreinigung von Textilfasern
DE69025120D1 (de) Verfahren und Vorrichtung zur Belichtung
DE69032768D1 (de) Verfahren und Gerät zur Bilderzeugung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition