DE68925898D1 - Grossflächige uniforme elektronenquelle - Google Patents

Grossflächige uniforme elektronenquelle

Info

Publication number
DE68925898D1
DE68925898D1 DE68925898T DE68925898T DE68925898D1 DE 68925898 D1 DE68925898 D1 DE 68925898D1 DE 68925898 T DE68925898 T DE 68925898T DE 68925898 T DE68925898 T DE 68925898T DE 68925898 D1 DE68925898 D1 DE 68925898D1
Authority
DE
Germany
Prior art keywords
electron source
uniform electron
large uniform
source
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68925898T
Other languages
English (en)
Other versions
DE68925898T2 (de
Inventor
William Livesay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electron Vision Corp
Original Assignee
Electron Vision Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electron Vision Corp filed Critical Electron Vision Corp
Application granted granted Critical
Publication of DE68925898D1 publication Critical patent/DE68925898D1/de
Publication of DE68925898T2 publication Critical patent/DE68925898T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/077Electron guns using discharge in gases or vapours as electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/025Electron guns using a discharge in a gas or a vapour as electron source
DE68925898T 1988-11-14 1989-11-14 Grossflächige uniforme elektronenquelle Expired - Lifetime DE68925898T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/270,751 US5003178A (en) 1988-11-14 1988-11-14 Large-area uniform electron source
PCT/US1989/005252 WO1990005990A1 (en) 1988-11-14 1989-11-14 Large-area uniform electron source

Publications (2)

Publication Number Publication Date
DE68925898D1 true DE68925898D1 (de) 1996-04-11
DE68925898T2 DE68925898T2 (de) 1996-08-29

Family

ID=23032649

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68925898T Expired - Lifetime DE68925898T2 (de) 1988-11-14 1989-11-14 Grossflächige uniforme elektronenquelle

Country Status (5)

Country Link
US (1) US5003178A (de)
EP (1) EP0395752B1 (de)
JP (1) JP2895619B2 (de)
DE (1) DE68925898T2 (de)
WO (1) WO1990005990A1 (de)

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Also Published As

Publication number Publication date
JP2895619B2 (ja) 1999-05-24
WO1990005990A1 (en) 1990-05-31
EP0395752B1 (de) 1996-03-06
EP0395752A1 (de) 1990-11-07
EP0395752A4 (en) 1991-10-30
JPH03503337A (ja) 1991-07-25
DE68925898T2 (de) 1996-08-29
US5003178A (en) 1991-03-26

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