DE68921008D1 - Photonenabtasttunneleffektmikroskop. - Google Patents

Photonenabtasttunneleffektmikroskop.

Info

Publication number
DE68921008D1
DE68921008D1 DE68921008T DE68921008T DE68921008D1 DE 68921008 D1 DE68921008 D1 DE 68921008D1 DE 68921008 T DE68921008 T DE 68921008T DE 68921008 T DE68921008 T DE 68921008T DE 68921008 D1 DE68921008 D1 DE 68921008D1
Authority
DE
Germany
Prior art keywords
field
probe
photons
sample area
photon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921008T
Other languages
English (en)
Other versions
DE68921008T2 (de
Inventor
Thomas L Ferrell
Robert J Warmack
Robin C Reddick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIM D INVESTISSEMENT D Ste
Original Assignee
SIM D INVESTISSEMENT D Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SIM D INVESTISSEMENT D Ste filed Critical SIM D INVESTISSEMENT D Ste
Publication of DE68921008D1 publication Critical patent/DE68921008D1/de
Application granted granted Critical
Publication of DE68921008T2 publication Critical patent/DE68921008T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe
DE68921008T 1988-10-21 1989-10-20 Photonenabtasttunneleffektmikroskop. Expired - Fee Related DE68921008T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/260,926 US5018865A (en) 1988-10-21 1988-10-21 Photon scanning tunneling microscopy
PCT/US1989/004725 WO1990004753A1 (en) 1988-10-21 1989-10-20 Photon scanning tunneling microscopy

Publications (2)

Publication Number Publication Date
DE68921008D1 true DE68921008D1 (de) 1995-03-16
DE68921008T2 DE68921008T2 (de) 1995-07-20

Family

ID=22991232

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921008T Expired - Fee Related DE68921008T2 (de) 1988-10-21 1989-10-20 Photonenabtasttunneleffektmikroskop.

Country Status (12)

Country Link
US (1) US5018865A (de)
EP (1) EP0439534B1 (de)
JP (1) JP3095226B2 (de)
AT (1) ATE118087T1 (de)
AU (1) AU623703B2 (de)
BR (1) BR8907735A (de)
DE (1) DE68921008T2 (de)
DK (1) DK170596B1 (de)
FI (1) FI96990C (de)
NO (1) NO303247B1 (de)
RU (2) RU2049327C1 (de)
WO (1) WO1990004753A1 (de)

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US6265711B1 (en) * 1994-07-28 2001-07-24 General Nanotechnology L.L.C. Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements
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US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US5485536A (en) * 1994-10-13 1996-01-16 Accuphotonics, Inc. Fiber optic probe for near field optical microscopy
US5664036A (en) * 1994-10-13 1997-09-02 Accuphotonics, Inc. High resolution fiber optic probe for near field optical microscopy and method of making same
US5557452A (en) * 1995-02-06 1996-09-17 University Of Hawaii Confocal microscope system
US5495109A (en) * 1995-02-10 1996-02-27 Molecular Imaging Corporation Electrochemical identification of molecules in a scanning probe microscope
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US5874726A (en) * 1995-10-10 1999-02-23 Iowa State University Research Foundation Probe-type near-field confocal having feedback for adjusting probe distance
US5796909A (en) * 1996-02-14 1998-08-18 Islam; Mohammed N. All-fiber, high-sensitivity, near-field optical microscopy instrument employing guided wave light collector and specimen support
JP3290586B2 (ja) * 1996-03-13 2002-06-10 セイコーインスツルメンツ株式会社 走査型近視野光学顕微鏡
JP3260619B2 (ja) * 1996-03-19 2002-02-25 セイコーインスツルメンツ株式会社 光導波路プロ−ブおよび光システム
US5774221A (en) * 1996-08-21 1998-06-30 Polaroid Corporation Apparatus and methods for providing phase controlled evanescent illumination
US5910940A (en) * 1996-10-08 1999-06-08 Polaroid Corporation Storage medium having a layer of micro-optical lenses each lens generating an evanescent field
US5939709A (en) * 1997-06-19 1999-08-17 Ghislain; Lucien P. Scanning probe optical microscope using a solid immersion lens
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
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US6831886B1 (en) * 1998-11-27 2004-12-14 Minolta Co., Ltd. Optical head and optical head device
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Also Published As

Publication number Publication date
RU94028284A (ru) 1996-04-10
JP3095226B2 (ja) 2000-10-03
DK170596B1 (da) 1995-11-06
DK73491A (da) 1991-06-12
US5018865A (en) 1991-05-28
AU623703B2 (en) 1992-05-21
FI911922A0 (fi) 1991-04-19
RU2049327C1 (ru) 1995-11-27
JPH04505653A (ja) 1992-10-01
EP0439534A4 (en) 1993-05-12
NO911563D0 (no) 1991-04-19
NO911563L (no) 1991-06-19
NO303247B1 (no) 1998-06-15
FI96990C (fi) 1996-09-25
AU4493089A (en) 1990-05-14
ATE118087T1 (de) 1995-02-15
BR8907735A (pt) 1991-08-20
DE68921008T2 (de) 1995-07-20
EP0439534A1 (de) 1991-08-07
EP0439534B1 (de) 1995-02-01
FI96990B (fi) 1996-06-14
WO1990004753A1 (en) 1990-05-03
DK73491D0 (da) 1991-04-22

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