DE68917231T2 - Sondenkarte, Verfahren zur Messung eines zu messenden Teiles mit derselben und elektrischer Schaltungsteil. - Google Patents
Sondenkarte, Verfahren zur Messung eines zu messenden Teiles mit derselben und elektrischer Schaltungsteil.Info
- Publication number
- DE68917231T2 DE68917231T2 DE68917231T DE68917231T DE68917231T2 DE 68917231 T2 DE68917231 T2 DE 68917231T2 DE 68917231 T DE68917231 T DE 68917231T DE 68917231 T DE68917231 T DE 68917231T DE 68917231 T2 DE68917231 T2 DE 68917231T2
- Authority
- DE
- Germany
- Prior art keywords
- measuring
- measured
- same
- electrical circuit
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63119243A JPH01291168A (ja) | 1988-05-18 | 1988-05-18 | プローブカードおよびそれを用いた被測定部品の測定法 |
JP63119242A JPH01291167A (ja) | 1988-05-18 | 1988-05-18 | プローブカードおよびそれを用いた被測定部品の測定法 |
JP13339988A JPH01302171A (ja) | 1988-05-31 | 1988-05-31 | プローブカード及びそれを用いた被測定部品の測定法 |
JP63133402A JPH01302833A (ja) | 1988-05-31 | 1988-05-31 | 電気回路部材 |
JP63133403A JPH01302834A (ja) | 1988-05-31 | 1988-05-31 | 電気的接続部材の製造方法及び電気回路部材 |
JP13340088A JPH01302172A (ja) | 1988-05-31 | 1988-05-31 | プローブカード及びそれを用いた被測定部品の測定法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68917231D1 DE68917231D1 (de) | 1994-09-08 |
DE68917231T2 true DE68917231T2 (de) | 1994-12-15 |
Family
ID=27552550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68917231T Expired - Fee Related DE68917231T2 (de) | 1988-05-18 | 1989-05-17 | Sondenkarte, Verfahren zur Messung eines zu messenden Teiles mit derselben und elektrischer Schaltungsteil. |
Country Status (3)
Country | Link |
---|---|
US (1) | US5606263A (de) |
EP (1) | EP0355273B1 (de) |
DE (1) | DE68917231T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4007221A1 (de) * | 1990-03-07 | 1991-09-12 | Gao Ges Automation Org | Pruefkopf fuer kontaktflaechen von wertkarten mit eingelagertem halbleiterchip |
JP3253069B2 (ja) * | 1990-07-25 | 2002-02-04 | キヤノン株式会社 | 電気的接続部材を用いた被測定部品の検査方法 |
US5311119A (en) * | 1990-09-12 | 1994-05-10 | Hewlett-Packard Company | Probe contact through small amplitude vibration for bed of nails testing |
DE69233684D1 (de) | 1991-02-22 | 2007-04-12 | Canon Kk | Elektrischer Verbindungskörper und Herstellungsverfahren dafür |
US6741085B1 (en) | 1993-11-16 | 2004-05-25 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
US20020053734A1 (en) | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
JP2796070B2 (ja) * | 1995-04-28 | 1998-09-10 | 松下電器産業株式会社 | プローブカードの製造方法 |
AU6635296A (en) * | 1995-05-26 | 1996-12-18 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates wi th spring contacts |
US8033838B2 (en) | 1996-02-21 | 2011-10-11 | Formfactor, Inc. | Microelectronic contact structure |
JP3604233B2 (ja) * | 1996-05-24 | 2004-12-22 | 株式会社日本マイクロニクス | 検査用ヘッド |
US6060891A (en) * | 1997-02-11 | 2000-05-09 | Micron Technology, Inc. | Probe card for semiconductor wafers and method and system for testing wafers |
US6798224B1 (en) * | 1997-02-11 | 2004-09-28 | Micron Technology, Inc. | Method for testing semiconductor wafers |
US5894161A (en) | 1997-02-24 | 1999-04-13 | Micron Technology, Inc. | Interconnect with pressure sensing mechanism for testing semiconductor wafers |
JPH10319044A (ja) * | 1997-05-15 | 1998-12-04 | Mitsubishi Electric Corp | プローブカード |
US6550116B2 (en) * | 1997-07-11 | 2003-04-22 | Matsushita Electric Industrial Co., Ltd. | Method for manufacturing a bimorph piezoelectric device for acceleration sensor |
US6246245B1 (en) | 1998-02-23 | 2001-06-12 | Micron Technology, Inc. | Probe card, test method and test system for semiconductor wafers |
US6130546A (en) * | 1998-05-11 | 2000-10-10 | Lsi Logic Corporation | Area array (flip chip) probe card |
JP2000258495A (ja) * | 1999-03-12 | 2000-09-22 | Oki Electric Ind Co Ltd | 半導体デバイス試験装置 |
JP2002139540A (ja) * | 2000-10-30 | 2002-05-17 | Nec Corp | プローブ構造体とその製造方法 |
US6683466B2 (en) * | 2002-05-17 | 2004-01-27 | International Business Machines Corporation | Piston for module test |
US7321234B2 (en) * | 2003-12-18 | 2008-01-22 | Lecroy Corporation | Resistive test probe tips and applications therefor |
EP1695100A4 (de) * | 2003-12-18 | 2009-12-30 | Lecroy Corp | Widerstands-sondenspitzen |
JP4723195B2 (ja) * | 2004-03-05 | 2011-07-13 | 株式会社オクテック | プローブの製造方法 |
US7218128B2 (en) * | 2005-02-14 | 2007-05-15 | International Business Machines Corporation | Method and apparatus for locating and testing a chip |
KR100920228B1 (ko) * | 2007-11-21 | 2009-10-05 | 삼성전기주식회사 | 열가소성 수지를 이용한 프로브 카드 |
JP4677493B2 (ja) * | 2008-01-22 | 2011-04-27 | キヤノン株式会社 | 圧電振動型力センサ |
JP2010123910A (ja) * | 2008-10-21 | 2010-06-03 | Renesas Electronics Corp | Tcp型半導体装置及びそのテスト方法 |
JP5553504B2 (ja) | 2008-12-26 | 2014-07-16 | キヤノン株式会社 | 半導体装置の製造方法及び半導体装置 |
US9529014B1 (en) * | 2013-03-15 | 2016-12-27 | Insight Photonic Solutions, Inc. | System and method for acquiring electrical measurements of an electronic device |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3786559A (en) * | 1972-05-22 | 1974-01-22 | Hewlett Packard Co | Cold diffusion welds in a microcircuit package assembly |
DE2344239B2 (de) * | 1973-09-01 | 1977-11-03 | Luther, Erich, 3050 Wunstorf; Maelzer, Fritz; Maelzer, Martin; 7910 Reutti Post Neu-Ulm; Türkkan, Tamer, 3011 Laatzen | Kontaktvorrichtung zum anschliessen einer gedruckten schaltung an ein pruefgeraet |
US4038599A (en) * | 1974-12-30 | 1977-07-26 | International Business Machines Corporation | High density wafer contacting and test system |
US4242719A (en) * | 1979-06-01 | 1980-12-30 | Interconnection Technology, Inc. | Solder-weld P.C. board apparatus |
US4402561A (en) * | 1981-03-27 | 1983-09-06 | Amp Incorporated | Socket for integrated circuit package with extended leads |
US4465972A (en) * | 1982-04-05 | 1984-08-14 | Allied Corporation | Connection arrangement for printed circuit board testing apparatus |
US4404059A (en) * | 1982-05-26 | 1983-09-13 | Livshits Vladimir I | Process for manufacturing panels to be used in microelectronic systems |
US4585991A (en) * | 1982-06-03 | 1986-04-29 | Texas Instruments Incorporated | Solid state multiprobe testing apparatus |
US4766371A (en) * | 1982-07-24 | 1988-08-23 | Risho Kogyo Co., Ltd. | Test board for semiconductor packages |
US4504783A (en) * | 1982-09-30 | 1985-03-12 | Storage Technology Partners | Test fixture for providing electrical access to each I/O pin of a VLSI chip having a large number of I/O pins |
US4649339A (en) * | 1984-04-25 | 1987-03-10 | Honeywell Inc. | Integrated circuit interface |
DK291184D0 (da) * | 1984-06-13 | 1984-06-13 | Boeegh Petersen Allan | Fremgangsmaade og indretning til test af kredsloebsplader |
US4565640A (en) * | 1984-12-24 | 1986-01-21 | Merck & Co., Inc. | Aqueous compositions containing cyanuric acid |
US4757256A (en) * | 1985-05-10 | 1988-07-12 | Micro-Probe, Inc. | High density probe card |
US5014161A (en) * | 1985-07-22 | 1991-05-07 | Digital Equipment Corporation | System for detachably mounting semiconductors on conductor substrate |
US4643499A (en) * | 1985-09-04 | 1987-02-17 | At&T Bell Laboratories | Component mounting apparatus |
GB2189657B (en) * | 1986-04-25 | 1990-02-14 | Plessey Co Plc | Improvements in or relating to electrical contactors |
EP0256368B1 (de) * | 1986-08-07 | 1992-09-30 | Siemens Aktiengesellschaft | Prüfeinrichtung für beidseitige, zweistufige Kontaktierung bestückter Leiterplatten |
US4891585A (en) * | 1986-09-05 | 1990-01-02 | Tektronix, Inc. | Multiple lead probe for integrated circuits in wafer form |
US4820976A (en) * | 1987-11-24 | 1989-04-11 | Advanced Micro Devices, Inc. | Test fixture capable of electrically testing an integrated circuit die having a planar array of contacts |
US4862075A (en) * | 1988-09-01 | 1989-08-29 | Photon Dynamics, Inc. | High frequency test head using electro-optics |
US4922192A (en) * | 1988-09-06 | 1990-05-01 | Unisys Corporation | Elastic membrane probe |
US4992850A (en) * | 1989-02-15 | 1991-02-12 | Micron Technology, Inc. | Directly bonded simm module |
-
1989
- 1989-05-17 DE DE68917231T patent/DE68917231T2/de not_active Expired - Fee Related
- 1989-05-17 EP EP89108882A patent/EP0355273B1/de not_active Expired - Lifetime
-
1996
- 1996-03-22 US US08/620,393 patent/US5606263A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5606263A (en) | 1997-02-25 |
EP0355273B1 (de) | 1994-08-03 |
DE68917231D1 (de) | 1994-09-08 |
EP0355273A1 (de) | 1990-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE68917231D1 (de) | Sondenkarte, Verfahren zur Messung eines zu messenden Teiles mit derselben und elektrischer Schaltungsteil. | |
DE59101538D1 (de) | Verfahren zur kontaktlosen Messung des elektrischen Widerstands eines Untersuchungsmaterials. | |
DE3776259D1 (de) | Verfahren und geraet zur multipol-akustischen messung in einem bohrloch. | |
DE3888577T2 (de) | Gerät zur Messung von Elektrolyten. | |
DE3789662D1 (de) | Schaltung zur linearen Messung eines in einer Last fliessenden Stromes. | |
DE3680839D1 (de) | Vorrichtung zur messung von verschiebungen. | |
DE3668991D1 (de) | Vorrichtung zur pruefung der vollstaendigkeit einer elektrode in einem potentiometrischen elektrodensystem. | |
DE68921630T2 (de) | Vorrichtung zur Messung von kleinen Verschiebungen. | |
DE68906039T2 (de) | Vorrichtung und Verfahren zur Messung eines kurzen Lichtimpulses oder eines kurzen elektrischen Impulses. | |
DE69310030D1 (de) | Vorrichtung zur Messung von Zeitbasisfehlern | |
DE68905965T2 (de) | Verfahren und Anordnung zur optischen Messung von elektrischen und magnetischen Grössen. | |
DE68926356D1 (de) | Vorrichtung zur Messung der thermischen Konduktivität | |
DE58908265D1 (de) | Verfahren und Vorrichtung zur Messung kleiner elektrischer Signale. | |
DE69012227T2 (de) | Vorrichtung zur Messung von Verschiebungen. | |
DE68923283D1 (de) | Verfahren, prüfsonde und vorrichtung zur messung eines wechselsromspannungsabfalls. | |
DE69111560D1 (de) | Verfahren und Vorrichtung zur Messung der elektrischen Leitfähigkeit von Flüssigkeiten. | |
DE3783583T2 (de) | Vorrichtung zur messung magnetischer teilchen in einer fluessigkeit. | |
DE69010627T2 (de) | Verfahren und Gerät zur Messung von Bodenschwankungen. | |
DE3851816D1 (de) | Gerät zur Messung der Entfernung zu einem Objekt. | |
DE3678496D1 (de) | Vorrichtung zur messung der elektrischen leitfaehigkeit eines gegenstandes. | |
DE58904936D1 (de) | Vorrichtung zur messung von in einer probe vorliegenden probenbestandteilen. | |
DE3667862D1 (de) | Schaltung zur messung der kenngroessen einer getesteten anordnung. | |
DE3872208T2 (de) | Verfahren und vorrichtung zur messung der radioaktivitaet. | |
DE68927938D1 (de) | Verfahren zur Messung der thermischen Konduktivität | |
DE3853568T2 (de) | Verfahren und Vorrichtung zur Feststellung und zur Messung der elastischen Anisotropie. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |