DE68912482T2 - Dünnfilm-Transistoren, ihre Verfahren zur Herstellung und Anzeigeeinrichtung, die mit solchen Transistoren hergestellt sind. - Google Patents

Dünnfilm-Transistoren, ihre Verfahren zur Herstellung und Anzeigeeinrichtung, die mit solchen Transistoren hergestellt sind.

Info

Publication number
DE68912482T2
DE68912482T2 DE68912482T DE68912482T DE68912482T2 DE 68912482 T2 DE68912482 T2 DE 68912482T2 DE 68912482 T DE68912482 T DE 68912482T DE 68912482 T DE68912482 T DE 68912482T DE 68912482 T2 DE68912482 T2 DE 68912482T2
Authority
DE
Germany
Prior art keywords
transistors
display device
thin film
manufacturing methods
device made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68912482T
Other languages
English (en)
Other versions
DE68912482D1 (de
Inventor
Keith Harlow Nicholas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE68912482D1 publication Critical patent/DE68912482D1/de
Publication of DE68912482T2 publication Critical patent/DE68912482T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/6675—Amorphous silicon or polysilicon transistors
    • H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651—Silicon transistors
    • H01L29/7866—Non-monocrystalline silicon transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651—Silicon transistors
    • H01L29/7866—Non-monocrystalline silicon transistors
    • H01L29/78663—Amorphous silicon transistors
    • H01L29/78669—Amorphous silicon transistors with inverted-type structure, e.g. with bottom gate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/103—Materials and properties semiconductor a-Si
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/104—Materials and properties semiconductor poly-Si
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/018—Compensation doping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/105—Masks, metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/919—Compensation doping
DE68912482T 1988-09-30 1989-09-25 Dünnfilm-Transistoren, ihre Verfahren zur Herstellung und Anzeigeeinrichtung, die mit solchen Transistoren hergestellt sind. Expired - Fee Related DE68912482T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8822960A GB2223353A (en) 1988-09-30 1988-09-30 Thin-film transistor

Publications (2)

Publication Number Publication Date
DE68912482D1 DE68912482D1 (de) 1994-03-03
DE68912482T2 true DE68912482T2 (de) 1994-07-28

Family

ID=10644511

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68912482T Expired - Fee Related DE68912482T2 (de) 1988-09-30 1989-09-25 Dünnfilm-Transistoren, ihre Verfahren zur Herstellung und Anzeigeeinrichtung, die mit solchen Transistoren hergestellt sind.

Country Status (6)

Country Link
US (1) US5047360A (de)
EP (1) EP0361609B1 (de)
JP (1) JPH0744278B2 (de)
KR (1) KR900005613A (de)
DE (1) DE68912482T2 (de)
GB (1) GB2223353A (de)

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US5629218A (en) * 1989-12-19 1997-05-13 Texas Instruments Incorporated Method for forming a field-effect transistor including a mask body and source/drain contacts
US5198379A (en) * 1990-04-27 1993-03-30 Sharp Kabushiki Kaisha Method of making a MOS thin film transistor with self-aligned asymmetrical structure
JPH04133313A (ja) * 1990-09-25 1992-05-07 Semiconductor Energy Lab Co Ltd 半導体作製方法
TW237562B (de) 1990-11-09 1995-01-01 Semiconductor Energy Res Co Ltd
US5166084A (en) * 1991-09-03 1992-11-24 Motorola, Inc. Process for fabricating a silicon on insulator field effect transistor
DE69215608T2 (de) * 1991-09-05 1997-03-27 Casio Computer Co Ltd Dünnschichttransistor und dessen Herstellungsmethode
US5334859A (en) * 1991-09-05 1994-08-02 Casio Computer Co., Ltd. Thin-film transistor having source and drain electrodes insulated by an anodically oxidized film
US6979840B1 (en) * 1991-09-25 2005-12-27 Semiconductor Energy Laboratory Co., Ltd. Thin film transistors having anodized metal film between the gate wiring and drain wiring
DE69223118T2 (de) * 1991-11-26 1998-03-05 Casio Computer Co Ltd Dünnschicht-Transistor-Panel und dessen Herstellungsmethode
US5559344A (en) * 1992-01-31 1996-09-24 Hitachi, Ltd. Thin-film semiconductor element, thin-film semiconductor device and methods of fabricating the same
EP0566838A3 (en) * 1992-02-21 1996-07-31 Matsushita Electric Ind Co Ltd Manufacturing method of thin film transistor
US5248626A (en) * 1992-08-28 1993-09-28 The United States Of America As Represented By The Secretary Of The Navy Method for fabricating self-aligned gate diffused junction field effect transistor
US5281546A (en) * 1992-09-02 1994-01-25 General Electric Company Method of fabricating a thin film transistor using hydrogen plasma treatment of the intrinsic silicon/doped layer interface
KR950005484B1 (ko) * 1992-09-29 1995-05-24 현대전자산업주식회사 플라즈마 산화 처리를 이용한 폴리실리콘 박막트랜지스터 제조방법
US5858821A (en) * 1993-05-12 1999-01-12 Micron Technology, Inc. Method of making thin film transistors
DE4435461C2 (de) * 1993-10-06 2001-09-20 Micron Technology Inc N D Ges Dünnfilmtransistor und dessen Herstellverfahren
KR950012702A (ko) * 1993-10-21 1995-05-16 이헌조 박막트랜지스터 제조방법
JP3897826B2 (ja) * 1994-08-19 2007-03-28 株式会社半導体エネルギー研究所 アクティブマトリクス型の表示装置
US5550066A (en) * 1994-12-14 1996-08-27 Eastman Kodak Company Method of fabricating a TFT-EL pixel
US5627103A (en) * 1995-03-02 1997-05-06 Sony Corporation Method of thin film transistor formation with split polysilicon deposition
KR100362191B1 (ko) * 1995-12-07 2003-03-06 주식회사 하이닉스반도체 반도체소자의박막트랜지스터및그제조방법
JP3082679B2 (ja) * 1996-08-29 2000-08-28 日本電気株式会社 薄膜トランジスタおよびその製造方法
US6043507A (en) * 1997-09-24 2000-03-28 Micron Technology, Inc. Thin film transistors and methods of making
GB9812739D0 (en) * 1998-06-12 1998-08-12 Koninkl Philips Electronics Nv Active matrix electroluminescent display devices
US6656779B1 (en) * 1998-10-06 2003-12-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor apparatus having semiconductor circuits made of semiconductor devices, and method of manufacture thereof
JP4638115B2 (ja) 2002-07-05 2011-02-23 シャープ株式会社 薄膜トランジスタ装置の製造方法
US6995053B2 (en) * 2004-04-23 2006-02-07 Sharp Laboratories Of America, Inc. Vertical thin film transistor
TW595028B (en) * 2003-08-20 2004-06-21 Au Optronics Corp Display unit of the active matrix organic light emitting diode
KR100977223B1 (ko) * 2003-09-25 2010-08-23 엘지디스플레이 주식회사 액정표시장치의 제조방법
SG115733A1 (en) * 2004-03-12 2005-10-28 Semiconductor Energy Lab Thin film transistor, semiconductor device, and method for manufacturing the same
KR101251998B1 (ko) * 2006-02-20 2013-04-08 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
WO2008114330A1 (ja) * 2007-02-19 2008-09-25 Fujitsu Limited Ｍｅｍｓデバイスおよび光スイッチ
KR100759086B1 (ko) * 2007-02-23 2007-09-19 실리콘 디스플레이 (주) 국부 산화를 이용한 박막 트랜지스터 제조 방법 및 투명박막 트랜지스터
CN103824779A (zh) * 2014-02-18 2014-05-28 北京京东方显示技术有限公司 一种薄膜晶体管及其制作方法、tft阵列基板、显示装置
WO2021189445A1 (zh) * 2020-03-27 2021-09-30 京东方科技集团股份有限公司 薄膜晶体管及其制备方法、阵列基板、显示装置

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US4276095A (en) * 1977-08-31 1981-06-30 International Business Machines Corporation Method of making a MOSFET device with reduced sensitivity of threshold voltage to source to substrate voltage variations
US4459739A (en) * 1981-05-26 1984-07-17 Northern Telecom Limited Thin film transistors
DE3279239D1 (en) * 1981-07-27 1988-12-29 Toshiba Kk Thin-film transistor and method of manufacture therefor
JPS5833872A (ja) * 1981-08-24 1983-02-28 Toshiba Corp 薄膜電界効果トランジスタの製造方法
GB8406330D0 (en) * 1984-03-10 1984-04-11 Lucas Ind Plc Amorphous silicon field effect transistors
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EP0196915B1 (de) * 1985-03-29 1991-08-14 Matsushita Electric Industrial Co., Ltd. Dünnschicht-Transistorenanordnung und Methode zu deren Herstellung
US4882295A (en) * 1985-07-26 1989-11-21 Energy Conversion Devices, Inc. Method of making a double injection field effect transistor
FR2593631B1 (fr) * 1986-01-27 1989-02-17 Maurice Francois Ecran d'affichage a matrice active a resistance de grille et procedes de fabrication de cet ecran
US4704783A (en) * 1986-05-05 1987-11-10 General Electric Company Method for passivating the back channel of amorphous silicon field effect transistors
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Also Published As

Publication number Publication date
KR900005613A (ko) 1990-04-14
GB8822960D0 (en) 1988-11-09
GB2223353A (en) 1990-04-04
JPH0744278B2 (ja) 1995-05-15
JPH02168630A (ja) 1990-06-28
EP0361609B1 (de) 1994-01-19
EP0361609A2 (de) 1990-04-04
US5047360A (en) 1991-09-10
EP0361609A3 (en) 1990-05-23
DE68912482D1 (de) 1994-03-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee