DE68906040D1 - Verfahren zur optischen abtastmikroskopie in konfokaler anordnung mit grossem tiefenschaerfenbereich und vorrichtung zur durchfuehrung des verfahrens. - Google Patents

Verfahren zur optischen abtastmikroskopie in konfokaler anordnung mit grossem tiefenschaerfenbereich und vorrichtung zur durchfuehrung des verfahrens.

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Publication number
DE68906040D1
DE68906040D1 DE8989400202T DE68906040T DE68906040D1 DE 68906040 D1 DE68906040 D1 DE 68906040D1 DE 8989400202 T DE8989400202 T DE 8989400202T DE 68906040 T DE68906040 T DE 68906040T DE 68906040 D1 DE68906040 D1 DE 68906040D1
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DE
Germany
Prior art keywords
confokal
focus
arrangement
carrying
optical scanning
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989400202T
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English (en)
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DE68906040T2 (de
Inventor
Bernard Picard
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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Publication of DE68906040D1 publication Critical patent/DE68906040D1/de
Publication of DE68906040T2 publication Critical patent/DE68906040T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0075—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. increasing, the depth of field or depth of focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
DE89400202T 1988-01-27 1989-01-25 Verfahren zur optischen Abtastmikroskopie in konfokaler Anordnung mit grossem Tiefenschärfenbereich und Vorrichtung zur durchführung des Verfahrens. Expired - Fee Related DE68906040T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8800934A FR2626383B1 (fr) 1988-01-27 1988-01-27 Procede de microscopie optique confocale a balayage et en profondeur de champ etendue et dispositifs pour la mise en oeuvre du procede

Publications (2)

Publication Number Publication Date
DE68906040D1 true DE68906040D1 (de) 1993-05-27
DE68906040T2 DE68906040T2 (de) 1993-10-14

Family

ID=9362694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89400202T Expired - Fee Related DE68906040T2 (de) 1988-01-27 1989-01-25 Verfahren zur optischen Abtastmikroskopie in konfokaler Anordnung mit grossem Tiefenschärfenbereich und Vorrichtung zur durchführung des Verfahrens.

Country Status (5)

Country Link
US (1) US4965441A (de)
EP (1) EP0327425B1 (de)
JP (1) JPH01245215A (de)
DE (1) DE68906040T2 (de)
FR (1) FR2626383B1 (de)

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DE68906040T2 (de) 1993-10-14
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EP0327425A1 (de) 1989-08-09
FR2626383A1 (fr) 1989-07-28
US4965441A (en) 1990-10-23

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