DE68904316D1 - Verfahren zur kontrastoptimierung im bild einer probe. - Google Patents

Verfahren zur kontrastoptimierung im bild einer probe.

Info

Publication number
DE68904316D1
DE68904316D1 DE8989400120T DE68904316T DE68904316D1 DE 68904316 D1 DE68904316 D1 DE 68904316D1 DE 8989400120 T DE8989400120 T DE 8989400120T DE 68904316 T DE68904316 T DE 68904316T DE 68904316 D1 DE68904316 D1 DE 68904316D1
Authority
DE
Germany
Prior art keywords
sample
image
contrast optimization
optimization
contrast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989400120T
Other languages
English (en)
Other versions
DE68904316T2 (de
Inventor
Michel Darboux
Gilles Grand
Frederic Moisan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE68904316D1 publication Critical patent/DE68904316D1/de
Publication of DE68904316T2 publication Critical patent/DE68904316T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
DE8989400120T 1988-01-18 1989-01-16 Verfahren zur kontrastoptimierung im bild einer probe. Expired - Fee Related DE68904316T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8800496A FR2626074B1 (fr) 1988-01-18 1988-01-18 Procede d'optimisation du contraste dans une image d'un echantillon

Publications (2)

Publication Number Publication Date
DE68904316D1 true DE68904316D1 (de) 1993-02-25
DE68904316T2 DE68904316T2 (de) 1993-07-01

Family

ID=9362394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989400120T Expired - Fee Related DE68904316T2 (de) 1988-01-18 1989-01-16 Verfahren zur kontrastoptimierung im bild einer probe.

Country Status (5)

Country Link
US (1) US4991970A (de)
EP (1) EP0327416B1 (de)
JP (1) JPH01213077A (de)
DE (1) DE68904316T2 (de)
FR (1) FR2626074B1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2089332A1 (en) * 1992-03-12 1993-09-13 Robert Bishop Method of and apparatus for object or surface inspection employing multicolor reflection discrimination
US5426509A (en) * 1993-05-20 1995-06-20 Peplinski; Robert A. Device and method for detecting foreign material on a moving printed film web
DE4321177A1 (de) * 1993-06-25 1995-01-05 Heidelberger Druckmasch Ag Vorrichtung zur parallelen Bildinspektion und Farbregelung an einem Druckprodukt
DE4401535C2 (de) * 1994-01-20 2002-10-24 Heidelberger Druckmasch Ag Verfahren zum Abtasten von im Mehrfarbendruck erzeugten Registermarken
US6075872A (en) * 1997-09-04 2000-06-13 Tailored Lighting Inc. Process for illuminating artwork
US5642433A (en) * 1995-07-31 1997-06-24 Neopath, Inc. Method and apparatus for image contrast quality evaluation
US5852498A (en) * 1997-04-04 1998-12-22 Kairos Scientific Inc. Optical instrument having a variable optical filter
EP1107316A3 (de) 1999-12-02 2004-05-19 Nikon Corporation Festkörperbildsensor, dessen Herstellungsverfahren und digitale Kamera
US7162100B1 (en) 2002-12-11 2007-01-09 Itt Manufacturing Enterprises Inc. Methods for image enhancement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4028728A (en) * 1976-04-02 1977-06-07 Western Electric Company, Inc. Method of and video system for identifying different light-reflective surface areas on articles
JPS60181906A (ja) * 1984-02-29 1985-09-17 Mitsubishi Electric Corp 電源装置
FR2587489B1 (fr) * 1985-09-16 1988-07-08 Bertin & Cie Procede de controle optique automatique d'objets tels que des circuits integres

Also Published As

Publication number Publication date
FR2626074A1 (fr) 1989-07-21
EP0327416B1 (de) 1993-01-13
JPH01213077A (ja) 1989-08-25
FR2626074B1 (fr) 1990-05-04
DE68904316T2 (de) 1993-07-01
US4991970A (en) 1991-02-12
EP0327416A1 (de) 1989-08-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee