DE60325864D1 - Thermischer bewegungssensor - Google Patents

Thermischer bewegungssensor

Info

Publication number
DE60325864D1
DE60325864D1 DE60325864T DE60325864T DE60325864D1 DE 60325864 D1 DE60325864 D1 DE 60325864D1 DE 60325864 T DE60325864 T DE 60325864T DE 60325864 T DE60325864 T DE 60325864T DE 60325864 D1 DE60325864 D1 DE 60325864D1
Authority
DE
Germany
Prior art keywords
motion sensor
thermal motion
thermal
sensor
motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60325864T
Other languages
English (en)
Inventor
Gerd K Binnig
Michel Despont
Mark A Lantz
Peter Vettiger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE60325864D1 publication Critical patent/DE60325864D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
DE60325864T 2002-08-29 2003-08-22 Thermischer bewegungssensor Expired - Lifetime DE60325864D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02019322 2002-08-29
PCT/IB2003/003749 WO2004020328A1 (en) 2002-08-29 2003-08-22 Thermal movement sensor

Publications (1)

Publication Number Publication Date
DE60325864D1 true DE60325864D1 (de) 2009-03-05

Family

ID=31970269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60325864T Expired - Lifetime DE60325864D1 (de) 2002-08-29 2003-08-22 Thermischer bewegungssensor

Country Status (6)

Country Link
US (1) US7186019B2 (de)
EP (1) EP1532069B1 (de)
CN (1) CN100526206C (de)
AU (1) AU2003253213A1 (de)
DE (1) DE60325864D1 (de)
WO (1) WO2004020328A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7502193B2 (en) * 2005-02-28 2009-03-10 Hitachi Global Storage Technologies Netherlands B.V. Positioning of a magnetic head in a magnetic data recording device using a multiple sensor array
US20060291271A1 (en) * 2005-06-24 2006-12-28 Nanochip, Inc. High density data storage devices having servo indicia formed in a patterned media
CN1959392B (zh) * 2005-11-04 2010-11-10 鸿富锦精密工业（深圳）有限公司 测量导热片随温度变化其结构变化状况的装置及方法
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20080074792A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Control scheme for a memory device
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US20090129246A1 (en) * 2007-11-21 2009-05-21 Nanochip, Inc. Environmental management of a probe storage device
US7397754B1 (en) * 2008-01-22 2008-07-08 International Business Machines Corporation Micro-electromechanical system based data storage system
US20100039729A1 (en) * 2008-08-14 2010-02-18 Nanochip, Inc. Package with integrated magnets for electromagnetically-actuated probe-storage device
US20100116038A1 (en) * 2008-11-12 2010-05-13 International Business Machines Corporation Feedback- enhanced thermo-electric topography sensing
CN111316110B (zh) 2017-11-15 2023-07-14 卡普雷斯股份有限公司 用于测试测试样品电气性能的探针和相关的接近探测器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4468136A (en) * 1982-02-12 1984-08-28 The Johns Hopkins University Optical beam deflection thermal imaging
US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler
US5527110A (en) * 1993-04-30 1996-06-18 International Business Machines Corporation Method and apparatus for detecting asperities on magnetic disks using thermal proximity imaging
US5806978A (en) * 1996-11-21 1998-09-15 International Business Machines Corporation Calibration apparatus and methods for a thermal proximity sensor
US6647766B2 (en) * 1999-12-31 2003-11-18 International Business Machines Corporation Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
NO318170B1 (no) * 2002-12-23 2005-02-14 Vetco Aibel As Fremgangsmate og anordning for a detektere oppsamling av fast materiale

Also Published As

Publication number Publication date
US7186019B2 (en) 2007-03-06
EP1532069A1 (de) 2005-05-25
EP1532069B1 (de) 2009-01-14
AU2003253213A1 (en) 2004-03-19
US20060039442A1 (en) 2006-02-23
CN1678512A (zh) 2005-10-05
CN100526206C (zh) 2009-08-12
WO2004020328A1 (en) 2004-03-11

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Legal Events

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8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition