DE60323327D1 - Anordnung und Verfahren zur Gestaltrekonstruktion aus optischen Bildern - Google Patents

Anordnung und Verfahren zur Gestaltrekonstruktion aus optischen Bildern

Info

Publication number
DE60323327D1
DE60323327D1 DE60323327T DE60323327T DE60323327D1 DE 60323327 D1 DE60323327 D1 DE 60323327D1 DE 60323327 T DE60323327 T DE 60323327T DE 60323327 T DE60323327 T DE 60323327T DE 60323327 D1 DE60323327 D1 DE 60323327D1
Authority
DE
Germany
Prior art keywords
reconstruction
construct
arrangement
optical images
images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60323327T
Other languages
English (en)
Inventor
Xuemei Zhang
Ramakrishna Kakarala
Izhak Baharav
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aptina Imaging Corp
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Application granted granted Critical
Publication of DE60323327D1 publication Critical patent/DE60323327D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/55—Depth or shape recovery from multiple images
    • G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
DE60323327T 2003-03-20 2003-11-03 Anordnung und Verfahren zur Gestaltrekonstruktion aus optischen Bildern Expired - Lifetime DE60323327D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/392,948 US7352892B2 (en) 2003-03-20 2003-03-20 System and method for shape reconstruction from optical images

Publications (1)

Publication Number Publication Date
DE60323327D1 true DE60323327D1 (de) 2008-10-16

Family

ID=32824892

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60323327T Expired - Lifetime DE60323327D1 (de) 2003-03-20 2003-11-03 Anordnung und Verfahren zur Gestaltrekonstruktion aus optischen Bildern

Country Status (3)

Country Link
US (1) US7352892B2 (de)
EP (2) EP1775684A1 (de)
DE (1) DE60323327D1 (de)

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Also Published As

Publication number Publication date
US20040184648A1 (en) 2004-09-23
EP1462992A2 (de) 2004-09-29
EP1462992A3 (de) 2006-02-08
EP1462992B1 (de) 2008-09-03
US7352892B2 (en) 2008-04-01
EP1775684A1 (de) 2007-04-18

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: MICRON TECHNOLOGY, INC., BOISE, ID., US

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: APTINA IMAGING CORP., GRAND CAYMAN, CAYMAN ISL, KY