DE60321511D1 - Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren - Google Patents

Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren

Info

Publication number
DE60321511D1
DE60321511D1 DE60321511T DE60321511T DE60321511D1 DE 60321511 D1 DE60321511 D1 DE 60321511D1 DE 60321511 T DE60321511 T DE 60321511T DE 60321511 T DE60321511 T DE 60321511T DE 60321511 D1 DE60321511 D1 DE 60321511D1
Authority
DE
Germany
Prior art keywords
liquid ejection
ejection head
associated manufacturing
manufacturing
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60321511T
Other languages
English (en)
Inventor
Masahiko Kubota
Wataru Hiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60321511D1 publication Critical patent/DE60321511D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
DE60321511T 2002-07-10 2003-07-10 Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren Expired - Lifetime DE60321511D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002201873A JP3862624B2 (ja) 2002-07-10 2002-07-10 液体吐出ヘッドおよび、該ヘッドの製造方法

Publications (1)

Publication Number Publication Date
DE60321511D1 true DE60321511D1 (de) 2008-07-24

Family

ID=29728484

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60321511T Expired - Lifetime DE60321511D1 (de) 2002-07-10 2003-07-10 Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren

Country Status (7)

Country Link
US (2) US7048358B2 (de)
EP (1) EP1380421B1 (de)
JP (1) JP3862624B2 (de)
KR (1) KR100499298B1 (de)
CN (1) CN1248858C (de)
DE (1) DE60321511D1 (de)
TW (1) TW590895B (de)

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JP3862624B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
US7370944B2 (en) * 2004-08-30 2008-05-13 Eastman Kodak Company Liquid ejector having internal filters
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
JP4819586B2 (ja) 2006-06-14 2011-11-24 富士フイルム株式会社 液体吐出機構および画像形成装置
WO2008029650A1 (en) 2006-09-08 2008-03-13 Canon Kabushiki Kaisha Liquid discharge head and method of manufacturing the same
EP2091741B1 (de) * 2006-12-07 2011-08-24 Hewlett-Packard Development Company, L.P. Verfahren zur ausbildung von öffnungen in substraten
US7971964B2 (en) * 2006-12-22 2011-07-05 Canon Kabushiki Kaisha Liquid discharge head and method for manufacturing the same
JP4937061B2 (ja) * 2007-09-20 2012-05-23 富士フイルム株式会社 液体吐出ヘッドの流路基板の製造方法
JP4948370B2 (ja) * 2007-11-22 2012-06-06 キヤノン株式会社 記録ヘッドおよび記録装置
JP2009184265A (ja) * 2008-02-07 2009-08-20 Canon Inc 液体吐出ヘッド及び液体吐出ヘッドの製造方法
US8499453B2 (en) * 2009-11-26 2013-08-06 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
JP5506600B2 (ja) * 2010-08-25 2014-05-28 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2012121168A (ja) * 2010-12-06 2012-06-28 Canon Inc 液体吐出ヘッド及びその製造方法
JP5854193B2 (ja) * 2011-08-24 2016-02-09 セイコーエプソン株式会社 液体噴射ヘッド及びこれを有する液体噴射装置
JP6039579B2 (ja) * 2011-12-13 2016-12-07 キヤノン株式会社 ノズルチップの製造方法
US9776407B2 (en) * 2013-04-30 2017-10-03 Hewlett-Packard Development Company, L.P. Fluid ejection device with ink feedhole bridge
US9308728B2 (en) * 2013-05-31 2016-04-12 Stmicroelectronics, Inc. Method of making inkjet print heads having inkjet chambers and orifices formed in a wafer and related devices
JP6410528B2 (ja) * 2014-08-29 2018-10-24 キヤノン株式会社 液体吐出ヘッドとそれを用いたヘッドユニット
JP7034586B2 (ja) 2016-01-08 2022-03-14 キヤノン株式会社 液体吐出ヘッド及び液体吐出方法
WO2018179706A1 (ja) * 2017-03-31 2018-10-04 コニカミノルタ株式会社 インクジェット記録装置
JP6522040B2 (ja) * 2017-04-28 2019-05-29 キヤノン株式会社 積層体の製造方法および液体吐出ヘッドの製造方法
US10894295B2 (en) 2017-09-29 2021-01-19 Illinois Tool Works Inc. Adjustable cover for air recirculation in a generator power supply
US10556433B2 (en) * 2018-01-29 2020-02-11 Canon Kabushiki Kaisha Liquid discharge apparatus and cleaning method for liquid discharge head
CN110487686B (zh) * 2019-09-03 2022-09-02 中国工程物理研究院流体物理研究所 一种空气气溶胶单粒子多模态光谱诊断装置及诊断方法
JP2021133647A (ja) * 2020-02-28 2021-09-13 キヤノン株式会社 液体吐出ヘッド
US11642887B2 (en) * 2021-04-22 2023-05-09 Funai Electric Co., Ltd. Ejection head having optimized fluid ejection characteristics

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JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP3890268B2 (ja) * 2002-07-10 2007-03-07 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
JP3862624B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
JP3862625B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドの製造方法

Also Published As

Publication number Publication date
JP3862624B2 (ja) 2006-12-27
US20040008239A1 (en) 2004-01-15
US7293859B2 (en) 2007-11-13
KR100499298B1 (ko) 2005-07-05
TW590895B (en) 2004-06-11
EP1380421A1 (de) 2004-01-14
KR20040005667A (ko) 2004-01-16
US20060098051A1 (en) 2006-05-11
CN1472072A (zh) 2004-02-04
TW200402368A (en) 2004-02-16
US7048358B2 (en) 2006-05-23
CN1248858C (zh) 2006-04-05
JP2004042395A (ja) 2004-02-12
EP1380421B1 (de) 2008-06-11

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