DE60313435D1 - Ventil zur verwendung in mikrofluiden strukturen - Google Patents
Ventil zur verwendung in mikrofluiden strukturenInfo
- Publication number
- DE60313435D1 DE60313435D1 DE60313435T DE60313435T DE60313435D1 DE 60313435 D1 DE60313435 D1 DE 60313435D1 DE 60313435 T DE60313435 T DE 60313435T DE 60313435 T DE60313435 T DE 60313435T DE 60313435 D1 DE60313435 D1 DE 60313435D1
- Authority
- DE
- Germany
- Prior art keywords
- valve
- fluid
- aperture
- flow
- relatively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0046—Electric operating means therefor using magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0086—Medical applications
- F16K2099/0088—Implanted devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
- Y10T137/2191—By non-fluid energy field affecting input [e.g., transducer]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
- Y10T137/2202—By movable element
- Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/075,416 US6561224B1 (en) | 2002-02-14 | 2002-02-14 | Microfluidic valve and system therefor |
US75416 | 2002-02-14 | ||
PCT/US2003/003154 WO2003068670A2 (en) | 2002-02-14 | 2003-02-03 | Microfluidic valve and system therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60313435D1 true DE60313435D1 (de) | 2007-06-06 |
DE60313435T2 DE60313435T2 (de) | 2008-01-10 |
Family
ID=22125583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2003613435 Expired - Fee Related DE60313435T2 (de) | 2002-02-14 | 2003-02-03 | Ventil zur verwendung in mikrofluiden strukturen |
Country Status (9)
Country | Link |
---|---|
US (1) | US6561224B1 (de) |
EP (1) | EP1476393B1 (de) |
JP (1) | JP4199127B2 (de) |
AT (1) | ATE360597T1 (de) |
AU (1) | AU2003208953B2 (de) |
CA (1) | CA2475805A1 (de) |
DE (1) | DE60313435T2 (de) |
ES (1) | ES2285102T3 (de) |
WO (1) | WO2003068670A2 (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6561479B1 (en) * | 2000-08-23 | 2003-05-13 | Micron Technology, Inc. | Small scale actuators and methods for their formation and use |
JP2005500655A (ja) * | 2001-08-20 | 2005-01-06 | ハネウェル・インターナショナル・インコーポレーテッド | スナップアクション式熱スイッチ |
US6808075B2 (en) * | 2002-04-17 | 2004-10-26 | Cytonome, Inc. | Method and apparatus for sorting particles |
US9943847B2 (en) | 2002-04-17 | 2018-04-17 | Cytonome/St, Llc | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
US6877528B2 (en) * | 2002-04-17 | 2005-04-12 | Cytonome, Inc. | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
US6976590B2 (en) * | 2002-06-24 | 2005-12-20 | Cytonome, Inc. | Method and apparatus for sorting particles |
US20070065808A1 (en) * | 2002-04-17 | 2007-03-22 | Cytonome, Inc. | Method and apparatus for sorting particles |
US7867193B2 (en) * | 2004-01-29 | 2011-01-11 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
TW553734B (en) * | 2002-11-18 | 2003-09-21 | Rossmax Int Ltd | Air pressure adjustment device |
US20080257754A1 (en) * | 2003-06-27 | 2008-10-23 | Pugia Michael J | Method and apparatus for entry of specimens into a microfluidic device |
EP1498795A1 (de) * | 2003-07-17 | 2005-01-19 | Rossmax International LTD. | Druckregelvorrichtung |
US7315109B1 (en) * | 2003-08-15 | 2008-01-01 | Medrad, Inc. | Actuators and fluid delivery systems using such actuators |
US20050127206A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Device and system for dispensing fluids into the atmosphere |
US20050130747A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Video game system including a micromechanical dispensing device |
US20050127207A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Micromechanical dispensing device and a dispensing system including the same |
US20050129568A1 (en) * | 2003-12-10 | 2005-06-16 | Xerox Corporation | Environmental system including a micromechanical dispensing device |
US7100453B2 (en) * | 2003-12-30 | 2006-09-05 | Honeywell International Inc. | Modified dual diaphragm pressure sensor |
US7867194B2 (en) | 2004-01-29 | 2011-01-11 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
US8101244B2 (en) * | 2004-06-09 | 2012-01-24 | Smithkline Beecham Corporation | Apparatus and method for producing or processing a product or sample |
US20060002986A1 (en) * | 2004-06-09 | 2006-01-05 | Smithkline Beecham Corporation | Pharmaceutical product |
TWI428271B (zh) * | 2004-06-09 | 2014-03-01 | Smithkline Beecham Corp | 生產藥物之裝置及方法 |
US20060002594A1 (en) * | 2004-06-09 | 2006-01-05 | Clarke Allan J | Method for producing a pharmaceutical product |
US20060018795A1 (en) * | 2004-07-23 | 2006-01-26 | General Electric Company | Fabrication methods and multifunctional substrate materials for chemical and biological analysis in microfluidic systems |
US9260693B2 (en) | 2004-12-03 | 2016-02-16 | Cytonome/St, Llc | Actuation of parallel microfluidic arrays |
JP4784510B2 (ja) * | 2004-12-17 | 2011-10-05 | ブラザー工業株式会社 | キャピラリーエレクトロウェッティング現象を用いたバルブ及びアクチュエータ |
US7328882B2 (en) * | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
US20060153745A1 (en) * | 2005-01-11 | 2006-07-13 | Applera Corporation | Fluid processing device for oligonucleotide synthesis and analysis |
US7540469B1 (en) | 2005-01-25 | 2009-06-02 | Sandia Corporation | Microelectromechanical flow control apparatus |
US20060245933A1 (en) * | 2005-05-02 | 2006-11-02 | General Electric Company | Valve and pump for microfluidic systems and methods for fabrication |
JP2007239737A (ja) * | 2006-02-13 | 2007-09-20 | Nidec Sankyo Corp | ミキシングポンプ装置および燃料電池 |
JP5260836B2 (ja) * | 2006-02-15 | 2013-08-14 | パナソニック株式会社 | 燃料電池システム |
US7505110B2 (en) * | 2006-03-14 | 2009-03-17 | International Business Machines Corporation | Micro-electro-mechanical valves and pumps |
US7598091B2 (en) | 2006-04-04 | 2009-10-06 | Micropoint Bioscience, Inc. | Micromachined diagnostic device with controlled flow of fluid and reaction |
US7632698B2 (en) | 2006-05-16 | 2009-12-15 | Freescale Semiconductor, Inc. | Integrated circuit encapsulation and method therefor |
KR100904310B1 (ko) | 2006-06-12 | 2009-06-23 | 신병철 | 비전도성유체 내에서 밀도차에 의한 위치에너지를 갖는전도성액체의 이동을 일렉트로웨팅으로 통제하는 방법 및그에 따른 게이트 장치 |
US20080021364A1 (en) * | 2006-07-17 | 2008-01-24 | Industrial Technology Research Institute | Fluidic device |
US7794665B2 (en) * | 2006-07-17 | 2010-09-14 | Industrial Technology Research Institute | Fluidic device |
US7959876B2 (en) * | 2006-07-17 | 2011-06-14 | Industrial Technology Research Institute | Fluidic device |
US20080061163A1 (en) * | 2006-08-28 | 2008-03-13 | Xerox Corporation | Device and system for dispensing fluids into the atmosphere |
WO2008094672A2 (en) | 2007-01-31 | 2008-08-07 | Charles Stark Draper Laboratory, Inc. | Membrane-based fluid control in microfluidic devices |
WO2008124046A1 (en) | 2007-04-04 | 2008-10-16 | Micropoint Bioscience Inc.. | Micromachined electrowetting microfluidic valve |
WO2009149257A1 (en) * | 2008-06-04 | 2009-12-10 | The University Of Chicago | The chemistrode: a plug-based microfluidic device and method for stimulation and sampling with high temporal, spatial, and chemical resolution |
US8703358B2 (en) * | 2008-11-20 | 2014-04-22 | Mti Microfuel Cells, Inc. | Fuel cell feed systems |
US20100122733A1 (en) * | 2008-11-20 | 2010-05-20 | Mti Microfuel Cells, Inc. | Pressure biased micro-fluidic valve |
DE112010005887T5 (de) * | 2010-09-17 | 2013-09-12 | Agency For Science, Technology And Research | Mikrofluidische Vorrichtung zum Modifizieren eines Fluidflusses und mikrofluidisches System mit der mikrofluidischen Vorrichtung |
US8876795B2 (en) | 2011-02-02 | 2014-11-04 | The Charles Stark Draper Laboratory, Inc. | Drug delivery apparatus |
CN110579435B (zh) | 2012-10-15 | 2023-09-26 | 纳诺赛莱克特生物医药股份有限公司 | 颗粒分选的系统、设备和方法 |
CA2906730C (en) | 2013-03-14 | 2023-03-21 | Juan G. Santiago | Capillary barriers for staged loading of microfluidic devices |
US11209102B2 (en) | 2014-01-29 | 2021-12-28 | Hewlett-Packard Development Company, L.P. | Microfluidic valve |
NL2014801B1 (en) * | 2015-05-13 | 2017-01-27 | Berkin Bv | Fluid flow device, comprising a valve unit, as well as method of manufacturing the same. |
CN116083530A (zh) | 2016-01-29 | 2023-05-09 | 普瑞珍生物系统公司 | 用于核酸纯化的等速电泳 |
WO2018027108A1 (en) * | 2016-08-05 | 2018-02-08 | Marsh Stephen Alan | Micro pressure sensor |
JP7203106B2 (ja) | 2017-08-02 | 2023-01-12 | ピュリゲン バイオシステムズ インコーポレイテッド | 等速電気泳動のためのシステム、装置および方法 |
TWI636775B (zh) * | 2017-10-27 | 2018-10-01 | 研能科技股份有限公司 | 微型泵浦 |
US11198125B1 (en) | 2019-02-19 | 2021-12-14 | Facebook Technologies, Llc | Microfluidic valves, systems, and related methods |
US11084031B1 (en) | 2019-02-19 | 2021-08-10 | Facebook Technologies, Llc | Methods of fabricating microfluidic valves and systems |
EP3845790B1 (de) | 2019-12-30 | 2024-04-17 | Imec VZW | Mikrofluidische vorrichtung zur steuerung von pneumatischen mikroventilen |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4417786A (en) | 1981-02-19 | 1983-11-29 | Bell Telephone Laboratories, Incorporated | Devices based on surface tension changes |
US5065978A (en) * | 1988-04-27 | 1991-11-19 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
US5082242A (en) * | 1989-12-27 | 1992-01-21 | Ulrich Bonne | Electronic microvalve apparatus and fabrication |
CA2069894C (en) * | 1990-08-31 | 2001-04-24 | Harald T. G. Van Lintel | Valve equipped with a position detector and a micropump incorporating said valve |
DE4119955C2 (de) * | 1991-06-18 | 2000-05-31 | Danfoss As | Miniatur-Betätigungselement |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
JP3005972B2 (ja) | 1992-05-19 | 2000-02-07 | 株式会社 セル・コーポレーション | 閾動作式半導体型静電力装置 |
US6227809B1 (en) | 1995-03-09 | 2001-05-08 | University Of Washington | Method for making micropumps |
SE9502258D0 (sv) | 1995-06-21 | 1995-06-21 | Pharmacia Biotech Ab | Method for the manufacture of a membrane-containing microstructure |
US6048734A (en) | 1995-09-15 | 2000-04-11 | The Regents Of The University Of Michigan | Thermal microvalves in a fluid flow method |
WO1997010435A2 (de) | 1995-09-15 | 1997-03-20 | Institut Für Mikro- Und Informationstechnik Hahn-Schickard-Gesellschaft | Rückschlagventillose fluidpumpe |
DE19546570C1 (de) | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
US5810325A (en) * | 1996-06-25 | 1998-09-22 | Bcam International, Inc. | Microvalve |
US6143248A (en) | 1996-08-12 | 2000-11-07 | Gamera Bioscience Corp. | Capillary microvalve |
US6136212A (en) | 1996-08-12 | 2000-10-24 | The Regents Of The University Of Michigan | Polymer-based micromachining for microfluidic devices |
US5971355A (en) | 1996-11-27 | 1999-10-26 | Xerox Corporation | Microdevice valve structures to fluid control |
IL120858A (en) * | 1997-05-19 | 2001-01-11 | Q Core Ltd | Magnetic flow controller |
US6073482A (en) | 1997-07-21 | 2000-06-13 | Ysi Incorporated | Fluid flow module |
US6106245A (en) | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
US6098661A (en) * | 1997-12-19 | 2000-08-08 | Xerox Corporation | Unstable flap valve for fluid flow control |
US6126140A (en) | 1997-12-29 | 2000-10-03 | Honeywell International Inc. | Monolithic bi-directional microvalve with enclosed drive electric field |
US6056269A (en) | 1999-01-15 | 2000-05-02 | Hewlett-Packard Company | Microminiature valve having silicon diaphragm |
US7601270B1 (en) * | 1999-06-28 | 2009-10-13 | California Institute Of Technology | Microfabricated elastomeric valve and pump systems |
-
2002
- 2002-02-14 US US10/075,416 patent/US6561224B1/en not_active Expired - Fee Related
-
2003
- 2003-02-03 ES ES03707678T patent/ES2285102T3/es not_active Expired - Lifetime
- 2003-02-03 CA CA 2475805 patent/CA2475805A1/en not_active Abandoned
- 2003-02-03 DE DE2003613435 patent/DE60313435T2/de not_active Expired - Fee Related
- 2003-02-03 JP JP2003567814A patent/JP4199127B2/ja not_active Expired - Fee Related
- 2003-02-03 EP EP03707678A patent/EP1476393B1/de not_active Expired - Lifetime
- 2003-02-03 AT AT03707678T patent/ATE360597T1/de not_active IP Right Cessation
- 2003-02-03 WO PCT/US2003/003154 patent/WO2003068670A2/en active IP Right Grant
- 2003-02-03 AU AU2003208953A patent/AU2003208953B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
WO2003068670A2 (en) | 2003-08-21 |
EP1476393B1 (de) | 2007-04-25 |
AU2003208953B2 (en) | 2008-12-11 |
WO2003068670A3 (en) | 2004-07-01 |
ATE360597T1 (de) | 2007-05-15 |
AU2003208953A1 (en) | 2003-09-04 |
DE60313435T2 (de) | 2008-01-10 |
EP1476393A2 (de) | 2004-11-17 |
CA2475805A1 (en) | 2003-08-21 |
US6561224B1 (en) | 2003-05-13 |
ES2285102T3 (es) | 2007-11-16 |
JP2005525514A (ja) | 2005-08-25 |
JP4199127B2 (ja) | 2008-12-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |