DE60302950D1 - Wismut-Titan-Silizium-Oxid, Wismut-Titan-Silizium-Oxiddünnfilm, und Verfahren zur Herstellung des Dünnfilms - Google Patents

Wismut-Titan-Silizium-Oxid, Wismut-Titan-Silizium-Oxiddünnfilm, und Verfahren zur Herstellung des Dünnfilms

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Publication number
DE60302950D1
DE60302950D1 DE60302950T DE60302950T DE60302950D1 DE 60302950 D1 DE60302950 D1 DE 60302950D1 DE 60302950 T DE60302950 T DE 60302950T DE 60302950 T DE60302950 T DE 60302950T DE 60302950 D1 DE60302950 D1 DE 60302950D1
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Germany
Prior art keywords
bismuth
thin film
titanium
silicon oxide
producing
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DE60302950T
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English (en)
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DE60302950T2 (de
Inventor
Young-Jin Cho
Yo-Sep Min
Young-Soo Park
Jung-Hyun Lee
June-Key Lee
Yong-Kyun Lee
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Publication of DE60302950T2 publication Critical patent/DE60302950T2/de
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DE60302950T 2002-08-06 2003-08-01 Wismut-Titan-Silizium-Oxid, Wismut-Titan-Silizium-Oxiddünnfilm, und Verfahren zur Herstellung des Dünnfilms Expired - Lifetime DE60302950T2 (de)

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US7892917B2 (en) 2011-02-22
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US20080293256A1 (en) 2008-11-27
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