DE60239403D1 - Elektromechanischer mikrosensor - Google Patents

Elektromechanischer mikrosensor

Info

Publication number
DE60239403D1
DE60239403D1 DE60239403T DE60239403T DE60239403D1 DE 60239403 D1 DE60239403 D1 DE 60239403D1 DE 60239403 T DE60239403 T DE 60239403T DE 60239403 T DE60239403 T DE 60239403T DE 60239403 D1 DE60239403 D1 DE 60239403D1
Authority
DE
Germany
Prior art keywords
electromechanic
microsensor
electromechanic microsensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239403T
Other languages
English (en)
Inventor
Art Zias
Phil Mauger
Sean Cahill
Norm Nystrom
Albert K Henning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Application granted granted Critical
Publication of DE60239403D1 publication Critical patent/DE60239403D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
DE60239403T 2001-07-17 2002-07-17 Elektromechanischer mikrosensor Expired - Lifetime DE60239403D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30617501P 2001-07-17 2001-07-17
PCT/US2002/022792 WO2003009319A1 (en) 2001-07-17 2002-07-17 Micro-electromechanical sensor

Publications (1)

Publication Number Publication Date
DE60239403D1 true DE60239403D1 (de) 2011-04-21

Family

ID=23184158

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239403T Expired - Lifetime DE60239403D1 (de) 2001-07-17 2002-07-17 Elektromechanischer mikrosensor

Country Status (6)

Country Link
US (2) US7047814B2 (de)
EP (1) EP1407464B1 (de)
JP (1) JP4378617B2 (de)
CN (1) CN100454455C (de)
DE (1) DE60239403D1 (de)
WO (1) WO2003009319A1 (de)

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RU2522770C1 (ru) * 2013-01-18 2014-07-20 Открытое акционерное общество "Научно-исследовательский институт физических измерений" Способ изготовления тензорезисторного датчика давления на основе тонкопленочной нано- и микроэлектромеханической системы
JP5974938B2 (ja) * 2013-03-08 2016-08-23 オムロン株式会社 静電容量型圧力センサ及び入力装置
US20150247879A1 (en) 2014-03-03 2015-09-03 Infineon Technologies Ag Acceleration sensor
FR3018916B1 (fr) * 2014-03-19 2017-08-25 Commissariat Energie Atomique Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique
US10704944B2 (en) * 2014-09-14 2020-07-07 Becton, Dickinson And Company System and method for capturing dose information
KR20170074914A (ko) * 2014-10-22 2017-06-30 반도 카가쿠 가부시키가이샤 정전 용량형 센서
RU2601613C1 (ru) * 2015-09-14 2016-11-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") Термоустойчивый датчик давления на основе нано- и микроэлектромеханической системы с мембраной, имеющей жёсткий центр
JP6143926B1 (ja) * 2016-07-09 2017-06-07 日本特殊陶業株式会社 圧力センサ
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US11190868B2 (en) 2017-04-18 2021-11-30 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a headphone device or an earbud
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DE102018131352A1 (de) * 2018-12-07 2020-06-10 Carl Freudenberg Kg Sensorelement mit einstückigem Trag- und Sensorkörper

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Also Published As

Publication number Publication date
US20060117857A1 (en) 2006-06-08
EP1407464A4 (de) 2007-06-27
CN100454455C (zh) 2009-01-21
JP4378617B2 (ja) 2009-12-09
EP1407464A1 (de) 2004-04-14
CN1552081A (zh) 2004-12-01
JP2004536455A (ja) 2004-12-02
US20030072127A1 (en) 2003-04-17
EP1407464B1 (de) 2011-03-09
WO2003009319A1 (en) 2003-01-30
US7047814B2 (en) 2006-05-23
US7305890B2 (en) 2007-12-11

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