DE60211832T8 - Bildaufzeichnungsgerät mit Beleuchtungsgitterlichtventil - Google Patents

Bildaufzeichnungsgerät mit Beleuchtungsgitterlichtventil Download PDF

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Publication number
DE60211832T8
DE60211832T8 DE60211832T DE60211832T DE60211832T8 DE 60211832 T8 DE60211832 T8 DE 60211832T8 DE 60211832 T DE60211832 T DE 60211832T DE 60211832 T DE60211832 T DE 60211832T DE 60211832 T8 DE60211832 T8 DE 60211832T8
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DE
Germany
Prior art keywords
light valve
image recorder
lighting
grille light
lighting grille
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE60211832T
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English (en)
Other versions
DE60211832T2 (de
DE60211832D1 (de
Inventor
Yoshikazu Horikawa-dori Kamikyo-ku Kataoka
Eiichi Horikawa-dori Kamikyo-ku Tamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Application granted granted Critical
Publication of DE60211832D1 publication Critical patent/DE60211832D1/de
Publication of DE60211832T2 publication Critical patent/DE60211832T2/de
Publication of DE60211832T8 publication Critical patent/DE60211832T8/de
Active legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/465Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using masks, e.g. light-switching masks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/377Cooling or ventilating arrangements
DE60211832T 2001-11-08 2002-10-24 Bildaufzeichnungsgerät mit Beleuchtungsgitterlichtventil Active DE60211832T8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001342767 2001-11-08
JP2001342767A JP3563384B2 (ja) 2001-11-08 2001-11-08 画像記録装置

Publications (3)

Publication Number Publication Date
DE60211832D1 DE60211832D1 (de) 2006-07-06
DE60211832T2 DE60211832T2 (de) 2007-05-24
DE60211832T8 true DE60211832T8 (de) 2007-09-06

Family

ID=19156566

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60211832T Active DE60211832T8 (de) 2001-11-08 2002-10-24 Bildaufzeichnungsgerät mit Beleuchtungsgitterlichtventil

Country Status (4)

Country Link
US (1) US6806897B2 (de)
EP (1) EP1310375B1 (de)
JP (1) JP3563384B2 (de)
DE (1) DE60211832T8 (de)

Families Citing this family (182)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004247438A (ja) * 2003-02-13 2004-09-02 Canon Inc 冷却装置
US7063920B2 (en) * 2003-05-16 2006-06-20 Asml Holding, N.V. Method for the generation of variable pitch nested lines and/or contact holes using fixed size pixels for direct-write lithographic systems
US7183566B2 (en) * 2003-05-28 2007-02-27 Asml Netherlands B.V. Lithographic apparatus for manufacturing a device
US7061591B2 (en) * 2003-05-30 2006-06-13 Asml Holding N.V. Maskless lithography systems and methods utilizing spatial light modulator arrays
US6989920B2 (en) 2003-05-29 2006-01-24 Asml Holding N.V. System and method for dose control in a lithographic system
EP1482373A1 (de) 2003-05-30 2004-12-01 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
EP1489449A1 (de) * 2003-06-20 2004-12-22 ASML Netherlands B.V. Räumlicher Lichtmodulator
US7016015B2 (en) 2003-06-20 2006-03-21 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US7110082B2 (en) * 2003-06-24 2006-09-19 Asml Holding N.V. Optical system for maskless lithography
SG119224A1 (en) * 2003-06-26 2006-02-28 Asml Netherlands Bv Calibration method for a lithographic apparatus and device manufacturing method
US7158215B2 (en) * 2003-06-30 2007-01-02 Asml Holding N.V. Large field of view protection optical system with aberration correctability for flat panel displays
US7154587B2 (en) 2003-06-30 2006-12-26 Asml Netherlands B.V Spatial light modulator, lithographic apparatus and device manufacturing method
US7023463B2 (en) 2003-07-22 2006-04-04 Eastman Kodak Company Method and apparatus for printing images from digital image data
US7224504B2 (en) 2003-07-30 2007-05-29 Asml Holding N. V. Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use
US6831768B1 (en) * 2003-07-31 2004-12-14 Asml Holding N.V. Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
US7414701B2 (en) * 2003-10-03 2008-08-19 Asml Holding N.V. Method and systems for total focus deviation adjustments on maskless lithography systems
SG110196A1 (en) * 2003-09-22 2005-04-28 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US6876440B1 (en) * 2003-09-30 2005-04-05 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region
US7023526B2 (en) * 2003-09-30 2006-04-04 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation
US7410736B2 (en) * 2003-09-30 2008-08-12 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones
US7109498B2 (en) * 2003-10-09 2006-09-19 Asml Netherlands B.V. Radiation source, lithographic apparatus, and device manufacturing method
US7116398B2 (en) * 2003-11-07 2006-10-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7196772B2 (en) * 2003-11-07 2007-03-27 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7001232B2 (en) * 2003-12-11 2006-02-21 Montgomery Robert E Personal watercraft air intake assembly
JP3708102B2 (ja) * 2003-12-12 2005-10-19 浜松ホトニクス株式会社 レーザ加工装置
US6995830B2 (en) * 2003-12-22 2006-02-07 Asml Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US7012674B2 (en) * 2004-01-13 2006-03-14 Asml Holding N.V. Maskless optical writer
US6847461B1 (en) * 2004-01-29 2005-01-25 Asml Holding N.V. System and method for calibrating a spatial light modulator array using shearing interferometry
JP4083751B2 (ja) * 2004-01-29 2008-04-30 エーエスエムエル ホールディング エヌ.ブイ. 空間光変調器アレイを較正するシステムおよび空間光変調器アレイを較正する方法
US7580559B2 (en) * 2004-01-29 2009-08-25 Asml Holding N.V. System and method for calibrating a spatial light modulator
US7190434B2 (en) * 2004-02-18 2007-03-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7133118B2 (en) * 2004-02-18 2006-11-07 Asml Netherlands, B.V. Lithographic apparatus and device manufacturing method
US7016014B2 (en) * 2004-02-27 2006-03-21 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US7081947B2 (en) * 2004-02-27 2006-07-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7061586B2 (en) * 2004-03-02 2006-06-13 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
USRE43515E1 (en) 2004-03-09 2012-07-17 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US6967711B2 (en) * 2004-03-09 2005-11-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7094506B2 (en) * 2004-03-09 2006-08-22 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US7561251B2 (en) 2004-03-29 2009-07-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7153616B2 (en) * 2004-03-31 2006-12-26 Asml Holding N.V. System and method for verifying and controlling the performance of a maskless lithography tool
US7053981B2 (en) * 2004-03-31 2006-05-30 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7002666B2 (en) * 2004-04-16 2006-02-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20050243295A1 (en) * 2004-04-30 2005-11-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing
US6963434B1 (en) * 2004-04-30 2005-11-08 Asml Holding N.V. System and method for calculating aerial image of a spatial light modulator
US20050259269A1 (en) 2004-05-19 2005-11-24 Asml Holding N.V. Shearing interferometer with dynamic pupil fill
US7242456B2 (en) 2004-05-26 2007-07-10 Asml Holdings N.V. System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions
US7477403B2 (en) 2004-05-27 2009-01-13 Asml Netherlands B.V. Optical position assessment apparatus and method
US6989886B2 (en) * 2004-06-08 2006-01-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7123348B2 (en) 2004-06-08 2006-10-17 Asml Netherlands B.V Lithographic apparatus and method utilizing dose control
US7016016B2 (en) * 2004-06-25 2006-03-21 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US7116403B2 (en) * 2004-06-28 2006-10-03 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US7158208B2 (en) * 2004-06-30 2007-01-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7116404B2 (en) * 2004-06-30 2006-10-03 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US20060001890A1 (en) * 2004-07-02 2006-01-05 Asml Holding N.V. Spatial light modulator as source module for DUV wavefront sensor
US7573574B2 (en) * 2004-07-13 2009-08-11 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US20060012779A1 (en) * 2004-07-13 2006-01-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7227613B2 (en) * 2004-07-26 2007-06-05 Asml Holding N.V. Lithographic apparatus having double telecentric illumination
US7335398B2 (en) * 2004-07-26 2008-02-26 Asml Holding N.V. Method to modify the spatial response of a pattern generator
US7259829B2 (en) * 2004-07-26 2007-08-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7142286B2 (en) * 2004-07-27 2006-11-28 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7251020B2 (en) * 2004-07-30 2007-07-31 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7538855B2 (en) * 2004-08-10 2009-05-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7102733B2 (en) 2004-08-13 2006-09-05 Asml Holding N.V. System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool
US7304718B2 (en) * 2004-08-17 2007-12-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7500218B2 (en) * 2004-08-17 2009-03-03 Asml Netherlands B.V. Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same
US7079225B2 (en) * 2004-09-14 2006-07-18 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US7177012B2 (en) 2004-10-18 2007-02-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7388663B2 (en) * 2004-10-28 2008-06-17 Asml Netherlands B.V. Optical position assessment apparatus and method
US7423732B2 (en) * 2004-11-04 2008-09-09 Asml Holding N.V. Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane
US7609362B2 (en) * 2004-11-08 2009-10-27 Asml Netherlands B.V. Scanning lithographic apparatus and device manufacturing method
US7170584B2 (en) * 2004-11-17 2007-01-30 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7061581B1 (en) * 2004-11-22 2006-06-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7474384B2 (en) * 2004-11-22 2009-01-06 Asml Holding N.V. Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus
US7643192B2 (en) * 2004-11-24 2010-01-05 Asml Holding N.V. Pattern generator using a dual phase step element and method of using same
US7333177B2 (en) * 2004-11-30 2008-02-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7713667B2 (en) * 2004-11-30 2010-05-11 Asml Holding N.V. System and method for generating pattern data used to control a pattern generator
US7365848B2 (en) * 2004-12-01 2008-04-29 Asml Holding N.V. System and method using visible and infrared light to align and measure alignment patterns on multiple layers
US7391499B2 (en) * 2004-12-02 2008-06-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7362415B2 (en) * 2004-12-07 2008-04-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7355677B2 (en) * 2004-12-09 2008-04-08 Asml Netherlands B.V. System and method for an improved illumination system in a lithographic apparatus
US7349068B2 (en) * 2004-12-17 2008-03-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7180577B2 (en) * 2004-12-17 2007-02-20 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane
US7391676B2 (en) * 2004-12-22 2008-06-24 Asml Netherlands B.V. Ultrasonic distance sensors
US7230677B2 (en) * 2004-12-22 2007-06-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing hexagonal image grids
US7274502B2 (en) * 2004-12-22 2007-09-25 Asml Holding N.V. System, apparatus and method for maskless lithography that emulates binary, attenuating phase-shift and alternating phase-shift masks
US7202939B2 (en) 2004-12-22 2007-04-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7256867B2 (en) * 2004-12-22 2007-08-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7375795B2 (en) * 2004-12-22 2008-05-20 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7426076B2 (en) * 2004-12-23 2008-09-16 Asml Holding N.V. Projection system for a lithographic apparatus
US7242458B2 (en) * 2004-12-23 2007-07-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates
US7656506B2 (en) * 2004-12-23 2010-02-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a substrate handler
US7538857B2 (en) * 2004-12-23 2009-05-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a substrate handler
US20060138349A1 (en) * 2004-12-27 2006-06-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7459247B2 (en) * 2004-12-27 2008-12-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7317510B2 (en) * 2004-12-27 2008-01-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7126672B2 (en) * 2004-12-27 2006-10-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7279110B2 (en) * 2004-12-27 2007-10-09 Asml Holding N.V. Method and apparatus for creating a phase step in mirrors used in spatial light modulator arrays
US7145636B2 (en) * 2004-12-28 2006-12-05 Asml Netherlands Bv System and method for determining maximum operational parameters used in maskless applications
US7274029B2 (en) 2004-12-28 2007-09-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7403865B2 (en) * 2004-12-28 2008-07-22 Asml Netherlands B.V. System and method for fault indication on a substrate in maskless applications
US7756660B2 (en) * 2004-12-28 2010-07-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7342644B2 (en) * 2004-12-29 2008-03-11 Asml Netherlands B.V. Methods and systems for lithographic beam generation
US7253881B2 (en) * 2004-12-29 2007-08-07 Asml Netherlands Bv Methods and systems for lithographic gray scaling
US7567368B2 (en) * 2005-01-06 2009-07-28 Asml Holding N.V. Systems and methods for minimizing scattered light in multi-SLM maskless lithography
US7542013B2 (en) * 2005-01-31 2009-06-02 Asml Holding N.V. System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode
US20060199519A1 (en) * 2005-02-09 2006-09-07 Great Computer Corporation Pressurized air-filter container for mounting on a laser engraver
US7460208B2 (en) * 2005-02-18 2008-12-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7286137B2 (en) * 2005-02-28 2007-10-23 Asml Holding N.V. Method and system for constrained pixel graytones interpolation for pattern rasterization
US7499146B2 (en) * 2005-03-14 2009-03-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping
US7812930B2 (en) * 2005-03-21 2010-10-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume
US7209216B2 (en) * 2005-03-25 2007-04-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography
US7403265B2 (en) 2005-03-30 2008-07-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing data filtering
US7728956B2 (en) * 2005-04-05 2010-06-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate using a data buffer that stores pattern variation data
US7209217B2 (en) 2005-04-08 2007-04-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing plural patterning devices
US7330239B2 (en) * 2005-04-08 2008-02-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device
US7221514B2 (en) * 2005-04-15 2007-05-22 Asml Netherlands B.V. Variable lens and exposure system
JP5126928B2 (ja) * 2005-04-20 2013-01-23 大日本スクリーン製造株式会社 画像記録装置
US20060244805A1 (en) * 2005-04-27 2006-11-02 Ming-Hsiang Yeh Multicolor pen
US7400382B2 (en) 2005-04-28 2008-07-15 Asml Holding N.V. Light patterning device using tilting mirrors in a superpixel form
US7738081B2 (en) * 2005-05-06 2010-06-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler
US7477772B2 (en) * 2005-05-31 2009-01-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression
US7197828B2 (en) * 2005-05-31 2007-04-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement
US7742148B2 (en) * 2005-06-08 2010-06-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method for writing a digital image
US7292317B2 (en) * 2005-06-08 2007-11-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing substrate stage compensating
US7233384B2 (en) * 2005-06-13 2007-06-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor
US7321416B2 (en) * 2005-06-15 2008-01-22 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion
US7408617B2 (en) * 2005-06-24 2008-08-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method
US7965373B2 (en) * 2005-06-28 2011-06-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load
US7522258B2 (en) * 2005-06-29 2009-04-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
US7307694B2 (en) * 2005-06-29 2007-12-11 Asml Netherlands B.V. Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method
US20070013889A1 (en) * 2005-07-12 2007-01-18 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby having an increase in depth of focus
US7251019B2 (en) 2005-07-20 2007-07-31 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging
US7606430B2 (en) * 2005-08-30 2009-10-20 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD
US20070046917A1 (en) * 2005-08-31 2007-03-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method that compensates for reticle induced CDU
JP2007114750A (ja) * 2005-09-09 2007-05-10 Asml Netherlands Bv 投影システム設計方法、リソグラフィー装置およびデバイス製造方法
US7830493B2 (en) * 2005-10-04 2010-11-09 Asml Netherlands B.V. System and method for compensating for radiation induced thermal distortions in a substrate or projection system
US7391503B2 (en) * 2005-10-04 2008-06-24 Asml Netherlands B.V. System and method for compensating for thermal expansion of lithography apparatus or substrate
US7332733B2 (en) * 2005-10-05 2008-02-19 Asml Netherlands B.V. System and method to correct for field curvature of multi lens array
US20070127005A1 (en) * 2005-12-02 2007-06-07 Asml Holding N.V. Illumination system
US7626181B2 (en) * 2005-12-09 2009-12-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20070133007A1 (en) * 2005-12-14 2007-06-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using laser trimming of a multiple mirror contrast device
US20070153249A1 (en) * 2005-12-20 2007-07-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure types
US7440078B2 (en) * 2005-12-20 2008-10-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units
US7466394B2 (en) * 2005-12-21 2008-12-16 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array
US7532403B2 (en) * 2006-02-06 2009-05-12 Asml Holding N.V. Optical system for transforming numerical aperture
US7528933B2 (en) * 2006-04-06 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
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US7948606B2 (en) * 2006-04-13 2011-05-24 Asml Netherlands B.V. Moving beam with respect to diffractive optics in order to reduce interference patterns
US7839487B2 (en) * 2006-04-13 2010-11-23 Asml Holding N.V. Optical system for increasing illumination efficiency of a patterning device
US8264667B2 (en) * 2006-05-04 2012-09-11 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using interferometric and other exposure
US8934084B2 (en) * 2006-05-31 2015-01-13 Asml Holding N.V. System and method for printing interference patterns having a pitch in a lithography system
US7728954B2 (en) * 2006-06-06 2010-06-01 Asml Netherlands B.V. Reflective loop system producing incoherent radiation
US7649676B2 (en) * 2006-06-14 2010-01-19 Asml Netherlands B.V. System and method to form unpolarized light
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US8896808B2 (en) * 2006-06-21 2014-11-25 Asml Netherlands B.V. Lithographic apparatus and method
US7697115B2 (en) * 2006-06-23 2010-04-13 Asml Holding N.V. Resonant scanning mirror
US7593094B2 (en) * 2006-06-26 2009-09-22 Asml Netherlands B.V. Patterning device
US20080002174A1 (en) * 2006-06-30 2008-01-03 Asml Netherlands B.V. Control system for pattern generator in maskless lithography
US7630136B2 (en) 2006-07-18 2009-12-08 Asml Holding N.V. Optical integrators for lithography systems and methods
US7548315B2 (en) * 2006-07-27 2009-06-16 Asml Netherlands B.V. System and method to compensate for critical dimension non-uniformity in a lithography system
US7738077B2 (en) * 2006-07-31 2010-06-15 Asml Netherlands B.V. Patterning device utilizing sets of stepped mirrors and method of using same
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US7628875B2 (en) * 2006-09-12 2009-12-08 Asml Netherlands B.V. MEMS device and assembly method
US8049865B2 (en) * 2006-09-18 2011-11-01 Asml Netherlands B.V. Lithographic system, device manufacturing method, and mask optimization method
US7683300B2 (en) * 2006-10-17 2010-03-23 Asml Netherlands B.V. Using an interferometer as a high speed variable attenuator
US7738079B2 (en) * 2006-11-14 2010-06-15 Asml Netherlands B.V. Radiation beam pulse trimming
US20080111977A1 (en) * 2006-11-14 2008-05-15 Asml Holding N.V. Compensation techniques for fluid and magnetic bearings
US7453551B2 (en) * 2006-11-14 2008-11-18 Asml Netherlands B.V. Increasing pulse-to-pulse radiation beam uniformity
US8054449B2 (en) * 2006-11-22 2011-11-08 Asml Holding N.V. Enhancing the image contrast of a high resolution exposure tool
US8259285B2 (en) * 2006-12-14 2012-09-04 Asml Holding N.V. Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data
US7965378B2 (en) * 2007-02-20 2011-06-21 Asml Holding N.V Optical system and method for illumination of reflective spatial light modulators in maskless lithography
US8009269B2 (en) 2007-03-14 2011-08-30 Asml Holding N.V. Optimal rasterization for maskless lithography
US8009270B2 (en) * 2007-03-22 2011-08-30 Asml Netherlands B.V. Uniform background radiation in maskless lithography
US7714986B2 (en) * 2007-05-24 2010-05-11 Asml Netherlands B.V. Laser beam conditioning system comprising multiple optical paths allowing for dose control
US20080304034A1 (en) * 2007-06-07 2008-12-11 Asml Netherlands B.V. Dose control for optical maskless lithography
US8692974B2 (en) * 2007-06-14 2014-04-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control
US7768627B2 (en) * 2007-06-14 2010-08-03 Asml Netherlands B.V. Illumination of a patterning device based on interference for use in a maskless lithography system
US8189172B2 (en) * 2007-06-14 2012-05-29 Asml Netherlands B.V. Lithographic apparatus and method
US8861066B2 (en) * 2009-02-16 2014-10-14 Micronic Ab Oversized micro-mechanical light modulator with redundant elements, device and method
JP5714334B2 (ja) * 2011-01-12 2015-05-07 株式会社オーク製作所 熱交換機構および露光装置
US10747033B2 (en) * 2016-01-29 2020-08-18 Lawrence Livermore National Security, Llc Cooler for optics transmitting high intensity light
US11586031B2 (en) 2020-07-08 2023-02-21 Xerox Corporation In-line stitched image optical system architecture for GLV laser line imagers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62231973A (ja) * 1986-04-02 1987-10-12 Canon Inc 画像形成装置
US6400444B2 (en) 1992-07-09 2002-06-04 Canon Kabushiki Kaisha Exposure apparatus and device producing method using the same
JP2826785B2 (ja) 1992-07-09 1998-11-18 キヤノン株式会社 投影露光装置
JPH1027751A (ja) 1996-07-11 1998-01-27 Nikon Corp 照明装置及びこれを用いた露光装置
JP4006833B2 (ja) * 1998-07-03 2007-11-14 株式会社日立製作所 光学装置
JP2000131628A (ja) 1998-10-27 2000-05-12 Fuji Photo Film Co Ltd 画像記録装置
JP2002137440A (ja) * 2000-10-31 2002-05-14 Dainippon Screen Mfg Co Ltd 画像記録装置
US6765941B2 (en) * 2001-12-03 2004-07-20 Agfa Corporation Method and apparatus for cooling a self-contained laser head

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DE60211832T2 (de) 2007-05-24
EP1310375B1 (de) 2006-05-31
US20030085987A1 (en) 2003-05-08
EP1310375A1 (de) 2003-05-14
JP2003140354A (ja) 2003-05-14
JP3563384B2 (ja) 2004-09-08
DE60211832D1 (de) 2006-07-06
US6806897B2 (en) 2004-10-19

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Inventor name: KATAOKA, YOSHIKAZU, HORIKAWA-DORI, KAMIKYO-KU,, JP

Inventor name: TAMAKI, EIICHI, HORIKAWA-DORI, KAMIKYO-KU, KYO, JP