DE60203431D1 - Verfahren zur Herstellung von suspendierten Mikrostrukturen - Google Patents

Verfahren zur Herstellung von suspendierten Mikrostrukturen

Info

Publication number
DE60203431D1
DE60203431D1 DE60203431T DE60203431T DE60203431D1 DE 60203431 D1 DE60203431 D1 DE 60203431D1 DE 60203431 T DE60203431 T DE 60203431T DE 60203431 T DE60203431 T DE 60203431T DE 60203431 D1 DE60203431 D1 DE 60203431D1
Authority
DE
Germany
Prior art keywords
preparation
suspended microstructures
microstructures
suspended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60203431T
Other languages
English (en)
Other versions
DE60203431T2 (de
Inventor
David Horsley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE60203431D1 publication Critical patent/DE60203431D1/de
Publication of DE60203431T2 publication Critical patent/DE60203431T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/05—Temporary protection of devices or parts of the devices during manufacturing
    • B81C2201/056—Releasing structures at the end of the manufacturing process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/033—Thermal bonding
    • B81C2203/036—Fusion bonding
DE60203431T 2001-04-27 2002-04-26 Verfahren zur Herstellung von suspendierten Mikrostrukturen Expired - Fee Related DE60203431T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US844356 2001-04-27
US09/844,356 US6465355B1 (en) 2001-04-27 2001-04-27 Method of fabricating suspended microstructures

Publications (2)

Publication Number Publication Date
DE60203431D1 true DE60203431D1 (de) 2005-05-04
DE60203431T2 DE60203431T2 (de) 2006-02-16

Family

ID=25292493

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60203431T Expired - Fee Related DE60203431T2 (de) 2001-04-27 2002-04-26 Verfahren zur Herstellung von suspendierten Mikrostrukturen

Country Status (5)

Country Link
US (1) US6465355B1 (de)
EP (1) EP1253108B1 (de)
JP (1) JP2003039395A (de)
CN (1) CN1384042A (de)
DE (1) DE60203431T2 (de)

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Also Published As

Publication number Publication date
CN1384042A (zh) 2002-12-11
DE60203431T2 (de) 2006-02-16
JP2003039395A (ja) 2003-02-13
US20020160611A1 (en) 2002-10-31
US6465355B1 (en) 2002-10-15
EP1253108A2 (de) 2002-10-30
EP1253108A3 (de) 2003-12-10
EP1253108B1 (de) 2005-03-30

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