DE60202468D1 - Verfahren zum hermetischen versiegeln von mikrochip-reservoir-vorrichtungen - Google Patents

Verfahren zum hermetischen versiegeln von mikrochip-reservoir-vorrichtungen

Info

Publication number
DE60202468D1
DE60202468D1 DE60202468T DE60202468T DE60202468D1 DE 60202468 D1 DE60202468 D1 DE 60202468D1 DE 60202468 T DE60202468 T DE 60202468T DE 60202468 T DE60202468 T DE 60202468T DE 60202468 D1 DE60202468 D1 DE 60202468D1
Authority
DE
Germany
Prior art keywords
hermetic sealing
reservoirs
hermetic
substrate
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60202468T
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English (en)
Other versions
DE60202468T2 (de
Inventor
A Uhland
F Polito
J Herman
T Santini
M Maloney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dare MB inc
Original Assignee
Microchips Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microchips Inc filed Critical Microchips Inc
Publication of DE60202468D1 publication Critical patent/DE60202468D1/de
Application granted granted Critical
Publication of DE60202468T2 publication Critical patent/DE60202468T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00Medicinal preparations characterised by special physical form
    • A61K9/0087Galenical forms not covered by A61K9/02 - A61K9/7023
    • A61K9/0097Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips
DE60202468T 2001-06-28 2002-06-28 Verfahren zum hermetischen versiegeln von mikrochip-reservoir-vorrichtungen Expired - Lifetime DE60202468T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US30168601P 2001-06-28 2001-06-28
US301686P 2001-06-28
PCT/US2002/020490 WO2003032957A2 (en) 2001-06-28 2002-06-28 Methods for hermetically sealing microchip reservoir devices

Publications (2)

Publication Number Publication Date
DE60202468D1 true DE60202468D1 (de) 2005-02-03
DE60202468T2 DE60202468T2 (de) 2006-02-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE60202468T Expired - Lifetime DE60202468T2 (de) 2001-06-28 2002-06-28 Verfahren zum hermetischen versiegeln von mikrochip-reservoir-vorrichtungen

Country Status (8)

Country Link
US (2) US6827250B2 (de)
EP (1) EP1399135B1 (de)
JP (2) JP2005505429A (de)
AT (1) ATE285756T1 (de)
AU (1) AU2002361545B2 (de)
CA (1) CA2451953A1 (de)
DE (1) DE60202468T2 (de)
WO (1) WO2003032957A2 (de)

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US20030010808A1 (en) 2003-01-16
US6827250B2 (en) 2004-12-07
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US7497846B2 (en) 2009-03-03

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