DE602006018606D1 - Speicherzelle mit antifuse mit hoher dielektrizitätskonstante für sperrvorspannungsprogrammierung - Google Patents

Speicherzelle mit antifuse mit hoher dielektrizitätskonstante für sperrvorspannungsprogrammierung

Info

Publication number
DE602006018606D1
DE602006018606D1 DE602006018606T DE602006018606T DE602006018606D1 DE 602006018606 D1 DE602006018606 D1 DE 602006018606D1 DE 602006018606 T DE602006018606 T DE 602006018606T DE 602006018606 T DE602006018606 T DE 602006018606T DE 602006018606 D1 DE602006018606 D1 DE 602006018606D1
Authority
DE
Germany
Prior art keywords
antifuse
memory cell
dielectric constant
high dielectric
voltage programming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006018606T
Other languages
English (en)
Inventor
James M Cleeves
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SanDisk 3D LLC
Original Assignee
SanDisk 3D LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SanDisk 3D LLC filed Critical SanDisk 3D LLC
Publication of DE602006018606D1 publication Critical patent/DE602006018606D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C17/00Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/14Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
    • G11C17/16Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5692Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency read-only digital stores using storage elements with more than two stable states
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C17/00Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/14Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
    • G11C17/16Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
    • G11C17/165Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • G11C2013/0073Write using bi-directional cell biasing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • G11C2013/009Write using potential difference applied between cell electrodes
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C2213/00Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70Resistive array aspects
    • G11C2213/71Three dimensional array
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C2213/00Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70Resistive array aspects
    • G11C2213/72Array wherein the access device being a diode
DE602006018606T 2005-07-01 2006-06-19 Speicherzelle mit antifuse mit hoher dielektrizitätskonstante für sperrvorspannungsprogrammierung Active DE602006018606D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/174,240 US7453755B2 (en) 2005-07-01 2005-07-01 Memory cell with high-K antifuse for reverse bias programming
PCT/US2006/023936 WO2007005273A1 (en) 2005-07-01 2006-06-19 Memory cell with high-k antifuse for reverse bias programming

Publications (1)

Publication Number Publication Date
DE602006018606D1 true DE602006018606D1 (de) 2011-01-13

Family

ID=37060999

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006018606T Active DE602006018606D1 (de) 2005-07-01 2006-06-19 Speicherzelle mit antifuse mit hoher dielektrizitätskonstante für sperrvorspannungsprogrammierung

Country Status (9)

Country Link
US (1) US7453755B2 (de)
EP (1) EP1899978B1 (de)
JP (1) JP2008545276A (de)
KR (1) KR101226172B1 (de)
CN (1) CN101258558A (de)
AT (1) ATE490541T1 (de)
DE (1) DE602006018606D1 (de)
TW (1) TW200721181A (de)
WO (1) WO2007005273A1 (de)

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US7800932B2 (en) * 2005-09-28 2010-09-21 Sandisk 3D Llc Memory cell comprising switchable semiconductor memory element with trimmable resistance
US8008700B2 (en) * 2002-12-19 2011-08-30 Sandisk 3D Llc Non-volatile memory cell with embedded antifuse
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US20070164388A1 (en) * 2002-12-19 2007-07-19 Sandisk 3D Llc Memory cell comprising a diode fabricated in a low resistivity, programmed state
US7660181B2 (en) * 2002-12-19 2010-02-09 Sandisk 3D Llc Method of making non-volatile memory cell with embedded antifuse
US8018024B2 (en) 2003-12-03 2011-09-13 Sandisk 3D Llc P-i-n diode crystallized adjacent to a silicide in series with a dielectric antifuse
US7682920B2 (en) * 2003-12-03 2010-03-23 Sandisk 3D Llc Method for making a p-i-n diode crystallized adjacent to a silicide in series with a dielectric antifuse
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US7800934B2 (en) * 2005-09-28 2010-09-21 Sandisk 3D Llc Programming methods to increase window for reverse write 3D cell
CN101553925B (zh) * 2006-11-15 2013-08-14 桑迪士克3D公司 邻近于硅化物而结晶的与介电反熔丝串联的p-i-n二极管及其形成方法
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US8637413B2 (en) 2011-12-02 2014-01-28 Sandisk 3D Llc Nonvolatile resistive memory element with a passivated switching layer
US8698119B2 (en) 2012-01-19 2014-04-15 Sandisk 3D Llc Nonvolatile memory device using a tunnel oxide as a current limiter element
US8686386B2 (en) 2012-02-17 2014-04-01 Sandisk 3D Llc Nonvolatile memory device using a varistor as a current limiter element
CN103943669B (zh) * 2013-01-22 2017-11-14 中芯国际集成电路制造(上海)有限公司 一种反熔丝结构及其制备方法
US20140241031A1 (en) 2013-02-28 2014-08-28 Sandisk 3D Llc Dielectric-based memory cells having multi-level one-time programmable and bi-level rewriteable operating modes and methods of forming the same
CN106098691B (zh) * 2015-07-01 2019-05-28 珠海创飞芯科技有限公司 反熔丝结构、反熔丝存储器及其制作方法
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US20180137927A1 (en) * 2016-04-16 2018-05-17 Chengdu Haicun Ip Technology Llc Three-Dimensional Vertical One-Time-Programmable Memory Comprising No Separate Diode Layer
CN107342105B (zh) * 2016-04-28 2020-02-07 华邦电子股份有限公司 电阻式记忆胞的写入方法及电阻式内存
TWI704557B (zh) * 2019-12-24 2020-09-11 大陸商珠海南北極科技有限公司 單次可程式化位元之形成方法
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Also Published As

Publication number Publication date
WO2007005273A1 (en) 2007-01-11
EP1899978A1 (de) 2008-03-19
KR101226172B1 (ko) 2013-01-25
TW200721181A (en) 2007-06-01
US7453755B2 (en) 2008-11-18
KR20080081243A (ko) 2008-09-09
ATE490541T1 (de) 2010-12-15
JP2008545276A (ja) 2008-12-11
US20070002603A1 (en) 2007-01-04
EP1899978B1 (de) 2010-12-01
CN101258558A (zh) 2008-09-03

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