DE602006013619D1 - Verfahren zum ausrichung optischer komponenten mit wellenleitern - Google Patents

Verfahren zum ausrichung optischer komponenten mit wellenleitern

Info

Publication number
DE602006013619D1
DE602006013619D1 DE602006013619T DE602006013619T DE602006013619D1 DE 602006013619 D1 DE602006013619 D1 DE 602006013619D1 DE 602006013619 T DE602006013619 T DE 602006013619T DE 602006013619 T DE602006013619 T DE 602006013619T DE 602006013619 D1 DE602006013619 D1 DE 602006013619D1
Authority
DE
Germany
Prior art keywords
cladding layer
peaks
over
pattern
division
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006013619T
Other languages
English (en)
Inventor
Graeme Douglas Maxwell
Philip Richard Townley
Robert Campbell Mcdougall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huawei Technologies Co Ltd
Original Assignee
Centre for Integrated Photonics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre for Integrated Photonics Ltd filed Critical Centre for Integrated Photonics Ltd
Publication of DE602006013619D1 publication Critical patent/DE602006013619D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)
DE602006013619T 2005-06-03 2006-06-05 Verfahren zum ausrichung optischer komponenten mit wellenleitern Active DE602006013619D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0511300.6A GB0511300D0 (en) 2005-06-03 2005-06-03 Control of vertical axis for passive alignment of optical components with wave guides
PCT/GB2006/002056 WO2006129123A1 (en) 2005-06-03 2006-06-05 Method of aligning optical components with waveguides

Publications (1)

Publication Number Publication Date
DE602006013619D1 true DE602006013619D1 (de) 2010-05-27

Family

ID=34835055

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006013619T Active DE602006013619D1 (de) 2005-06-03 2006-06-05 Verfahren zum ausrichung optischer komponenten mit wellenleitern

Country Status (8)

Country Link
US (1) US7772022B2 (de)
EP (1) EP1886175B1 (de)
JP (1) JP5161076B2 (de)
CN (1) CN100573211C (de)
AT (1) ATE464583T1 (de)
DE (1) DE602006013619D1 (de)
GB (1) GB0511300D0 (de)
WO (1) WO2006129123A1 (de)

Families Citing this family (24)

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Publication number Priority date Publication date Assignee Title
GB0813784D0 (en) 2008-07-28 2008-09-03 Ct Integrated Photonics Ltd Optical intergration system
US9299866B2 (en) 2010-12-30 2016-03-29 Zena Technologies, Inc. Nanowire array based solar energy harvesting device
US9515218B2 (en) 2008-09-04 2016-12-06 Zena Technologies, Inc. Vertical pillar structured photovoltaic devices with mirrors and optical claddings
US8507840B2 (en) 2010-12-21 2013-08-13 Zena Technologies, Inc. Vertically structured passive pixel arrays and methods for fabricating the same
US9406709B2 (en) 2010-06-22 2016-08-02 President And Fellows Of Harvard College Methods for fabricating and using nanowires
US8866065B2 (en) 2010-12-13 2014-10-21 Zena Technologies, Inc. Nanowire arrays comprising fluorescent nanowires
US8229255B2 (en) 2008-09-04 2012-07-24 Zena Technologies, Inc. Optical waveguides in image sensors
US8546742B2 (en) 2009-06-04 2013-10-01 Zena Technologies, Inc. Array of nanowires in a single cavity with anti-reflective coating on substrate
US8274039B2 (en) 2008-11-13 2012-09-25 Zena Technologies, Inc. Vertical waveguides with various functionality on integrated circuits
US8889455B2 (en) 2009-12-08 2014-11-18 Zena Technologies, Inc. Manufacturing nanowire photo-detector grown on a back-side illuminated image sensor
US8835831B2 (en) 2010-06-22 2014-09-16 Zena Technologies, Inc. Polarized light detecting device and fabrication methods of the same
US9082673B2 (en) 2009-10-05 2015-07-14 Zena Technologies, Inc. Passivated upstanding nanostructures and methods of making the same
US8748799B2 (en) 2010-12-14 2014-06-10 Zena Technologies, Inc. Full color single pixel including doublet or quadruplet si nanowires for image sensors
US8519379B2 (en) 2009-12-08 2013-08-27 Zena Technologies, Inc. Nanowire structured photodiode with a surrounding epitaxially grown P or N layer
US9343490B2 (en) 2013-08-09 2016-05-17 Zena Technologies, Inc. Nanowire structured color filter arrays and fabrication method of the same
US8269985B2 (en) 2009-05-26 2012-09-18 Zena Technologies, Inc. Determination of optimal diameters for nanowires
US8890271B2 (en) 2010-06-30 2014-11-18 Zena Technologies, Inc. Silicon nitride light pipes for image sensors
US8299472B2 (en) 2009-12-08 2012-10-30 Young-June Yu Active pixel sensor with nanowire structured photodetectors
US9000353B2 (en) 2010-06-22 2015-04-07 President And Fellows Of Harvard College Light absorption and filtering properties of vertically oriented semiconductor nano wires
US8735797B2 (en) 2009-12-08 2014-05-27 Zena Technologies, Inc. Nanowire photo-detector grown on a back-side illuminated image sensor
US8791470B2 (en) 2009-10-05 2014-07-29 Zena Technologies, Inc. Nano structured LEDs
US8384007B2 (en) 2009-10-07 2013-02-26 Zena Technologies, Inc. Nano wire based passive pixel image sensor
US9478685B2 (en) 2014-06-23 2016-10-25 Zena Technologies, Inc. Vertical pillar structured infrared detector and fabrication method for the same
CN115380232A (zh) * 2020-03-31 2022-11-22 京瓷株式会社 光波导模块以及光源模块

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JPS61191093A (ja) 1985-02-20 1986-08-25 Matsushita Electric Ind Co Ltd 半導体装置
FR2694841B1 (fr) 1992-08-14 1994-09-09 Commissariat Energie Atomique Procédé d'hybridation et de positionnement d'un composant opto-électronique et application de ce procédé au positionnement de ce composant par rapport à un guide optique intégré.
JP2606078B2 (ja) 1993-06-25 1997-04-30 日本電気株式会社 半導体レーザアレイおよびその製造方法
JPH0829637A (ja) * 1994-07-20 1996-02-02 Nippon Telegr & Teleph Corp <Ntt> 光導波回路、光ファイバと光導波回路との接続器および接続方法
JPH10308555A (ja) * 1997-05-01 1998-11-17 Nippon Telegr & Teleph Corp <Ntt> ハイブリッド導波形光回路とその製造方法
JP2000047055A (ja) 1998-07-28 2000-02-18 Japan Aviation Electronics Industry Ltd 光導波路デバイスおよびその製造方法
JP2000098157A (ja) * 1998-09-25 2000-04-07 Japan Aviation Electronics Industry Ltd 光分岐装置およびその製造方法
JP2000275480A (ja) * 1999-03-19 2000-10-06 Nippon Telegr & Teleph Corp <Ntt> 光モジュール
JP2001242332A (ja) * 2000-03-01 2001-09-07 Nippon Telegr & Teleph Corp <Ntt> 光導波路及びこれを用いた光導波路モジュール
JP2001297963A (ja) * 2000-04-12 2001-10-26 Oki Electric Ind Co Ltd 位置合わせ方法
US6553170B2 (en) * 2001-08-31 2003-04-22 Lightwave Microsystems Corporation Method and system for a combination of high boron and low boron BPSG top clad fabrication process for a planar lightwave circuit
GB2379995B (en) * 2001-09-21 2005-02-02 Kamelian Ltd An optical coupling
US6778718B2 (en) * 2001-11-09 2004-08-17 Corning Incorporated Alignment of active optical components with waveguides
ATE361565T1 (de) 2002-03-08 2007-05-15 Nanoplus Gmbh Nanosystems And Ein halbleiterlaserarray mit seitlicher gratingstruktur
WO2004003614A1 (en) * 2002-06-28 2004-01-08 Xponent Photonics Inc Waveguides assembled for transverse-transfer of optical power
JP2004053659A (ja) * 2002-07-16 2004-02-19 Ricoh Co Ltd 光電気集積装置の製造方法及び光電気集積装置
US6816653B2 (en) * 2003-02-25 2004-11-09 Corning Incorporated Passive alignment of optical fibers with optical elements

Also Published As

Publication number Publication date
EP1886175B1 (de) 2010-04-14
EP1886175A1 (de) 2008-02-13
WO2006129123A8 (en) 2008-01-24
US7772022B2 (en) 2010-08-10
ATE464583T1 (de) 2010-04-15
GB0511300D0 (en) 2005-07-13
US20080311693A1 (en) 2008-12-18
CN101189541A (zh) 2008-05-28
JP5161076B2 (ja) 2013-03-13
CN100573211C (zh) 2009-12-23
WO2006129123A1 (en) 2006-12-07
JP2008542832A (ja) 2008-11-27

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