DE602005024387D1 - Verbesserungen von gasentladungslaser-kammern - Google Patents

Verbesserungen von gasentladungslaser-kammern

Info

Publication number
DE602005024387D1
DE602005024387D1 DE602005024387T DE602005024387T DE602005024387D1 DE 602005024387 D1 DE602005024387 D1 DE 602005024387D1 DE 602005024387 T DE602005024387 T DE 602005024387T DE 602005024387 T DE602005024387 T DE 602005024387T DE 602005024387 D1 DE602005024387 D1 DE 602005024387D1
Authority
DE
Germany
Prior art keywords
gas discharge
discharge laser
laser chambers
chambers
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005024387T
Other languages
English (en)
Inventor
William N Partlo
Yoshiho Amada
James A Carmichael
Timothy S Dyer
Walter D Gillespie
Bryan G Moosman
Curtis L Rettig
Brian D Strate
Thomas D Steiger
Fedor B Trintchouk
Richard C Ujazdowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of DE602005024387D1 publication Critical patent/DE602005024387D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
DE602005024387T 2004-03-31 2005-03-03 Verbesserungen von gasentladungslaser-kammern Active DE602005024387D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/815,387 US7522650B2 (en) 2004-03-31 2004-03-31 Gas discharge laser chamber improvements
PCT/US2005/007168 WO2005104313A2 (en) 2004-03-31 2005-03-03 Gas discharge laser chamber improvements

Publications (1)

Publication Number Publication Date
DE602005024387D1 true DE602005024387D1 (de) 2010-12-09

Family

ID=35060497

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005024387T Active DE602005024387D1 (de) 2004-03-31 2005-03-03 Verbesserungen von gasentladungslaser-kammern

Country Status (6)

Country Link
US (1) US7522650B2 (de)
EP (1) EP1754291B1 (de)
JP (1) JP5063341B2 (de)
KR (1) KR101204694B1 (de)
DE (1) DE602005024387D1 (de)
WO (1) WO2005104313A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
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US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
US7848835B2 (en) * 2006-06-02 2010-12-07 Cymer, Inc. High power laser flat panel workpiece treatment system controller
US7655925B2 (en) * 2007-08-31 2010-02-02 Cymer, Inc. Gas management system for a laser-produced-plasma EUV light source
US7995637B2 (en) * 2008-10-21 2011-08-09 Cymer, Inc. Gas discharge laser chamber
US7819945B2 (en) * 2008-10-30 2010-10-26 Cymer, Inc. Metal fluoride trap
JP7065186B2 (ja) * 2017-12-05 2022-05-11 サイマー リミテッド ライアビリティ カンパニー レーザ放電チャンバにおけるダスト捕捉のための不織スクリーン

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JPS60197073A (ja) * 1984-03-21 1985-10-05 Sony Corp カラ−画像の色指定処理装置
US5315611A (en) 1986-09-25 1994-05-24 The United States Of America As Represented By The United States Department Of Energy High average power magnetic modulator for metal vapor lasers
US5189678A (en) 1986-09-29 1993-02-23 The United States Of America As Represented By The United States Department Of Energy Coupling apparatus for a metal vapor laser
US5018161A (en) 1988-01-15 1991-05-21 Cymer Laser Technologies Compact excimer laser
US5023884A (en) 1988-01-15 1991-06-11 Cymer Laser Technologies Compact excimer laser
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Also Published As

Publication number Publication date
WO2005104313A3 (en) 2007-02-01
EP1754291A4 (de) 2008-04-09
US20050226301A1 (en) 2005-10-13
EP1754291B1 (de) 2010-10-27
KR101204694B1 (ko) 2012-11-26
WO2005104313A2 (en) 2005-11-03
KR20060132967A (ko) 2006-12-22
JP2007531312A (ja) 2007-11-01
JP5063341B2 (ja) 2012-10-31
EP1754291A2 (de) 2007-02-21
US7522650B2 (en) 2009-04-21

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