DE602005022352D1 - Mikrofluidisches modulierendes ventil - Google Patents

Mikrofluidisches modulierendes ventil

Info

Publication number
DE602005022352D1
DE602005022352D1 DE602005022352T DE602005022352T DE602005022352D1 DE 602005022352 D1 DE602005022352 D1 DE 602005022352D1 DE 602005022352 T DE602005022352 T DE 602005022352T DE 602005022352 T DE602005022352 T DE 602005022352T DE 602005022352 D1 DE602005022352 D1 DE 602005022352D1
Authority
DE
Germany
Prior art keywords
microfluidic
modulating valve
modulating
valve
microfluidic modulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005022352T
Other languages
English (en)
Inventor
Tzu-Yu Wang
Cabuz Eugen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602005022352D1 publication Critical patent/DE602005022352D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0026—Valves using channel deformation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K2099/0069—Bistable microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications
DE602005022352T 2005-01-06 2005-12-19 Mikrofluidisches modulierendes ventil Active DE602005022352D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/030,508 US7328882B2 (en) 2005-01-06 2005-01-06 Microfluidic modulating valve
PCT/US2005/045689 WO2006073746A1 (en) 2005-01-06 2005-12-19 Microfluidic modulating valve

Publications (1)

Publication Number Publication Date
DE602005022352D1 true DE602005022352D1 (de) 2010-08-26

Family

ID=36218735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005022352T Active DE602005022352D1 (de) 2005-01-06 2005-12-19 Mikrofluidisches modulierendes ventil

Country Status (6)

Country Link
US (2) US7328882B2 (de)
EP (1) EP1834098B1 (de)
JP (1) JP2008527263A (de)
CN (1) CN1854580B (de)
DE (1) DE602005022352D1 (de)
WO (1) WO2006073746A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006119274A2 (en) * 2005-05-04 2006-11-09 The Board Of Trustees Of The University Of Illinois Thin welded sheets fluid pathway
US20100101670A1 (en) * 2006-11-03 2010-04-29 Mcgill University Electrical microvalve and method of manufacturing thereof
WO2009000284A1 (de) * 2007-06-22 2008-12-31 Siemens Aktiengesellschaft Mikroventil
US20090115285A1 (en) * 2007-10-08 2009-05-07 Khalil Najafi Liquid-gap electrostatic hydraulic micro actuators
US8973613B2 (en) * 2011-04-27 2015-03-10 Google Inc. Electrorheological valve
US8975193B2 (en) 2011-08-02 2015-03-10 Teledyne Dalsa Semiconductor, Inc. Method of making a microfluidic device
US9914116B2 (en) * 2015-09-10 2018-03-13 Panasonic Intellectual Property Management Co., Ltd. Microelement

Family Cites Families (141)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2403692A (en) * 1944-12-29 1946-07-09 George C Tibbetts Piezoelectric device
US2975307A (en) * 1958-01-02 1961-03-14 Ibm Capacitive prime mover
US3304446A (en) * 1963-12-26 1967-02-14 Union Oil Co Electrostrictive fluid transducer
US3414010A (en) 1965-11-01 1968-12-03 Honeywell Inc Control apparatus
US3381623A (en) * 1966-04-26 1968-05-07 Harold F Elliott Electromagnetic reciprocating fluid pump
CH511476A (de) 1968-10-08 1971-03-15 Proctor Ets Vorrichtung zum Erzeugen von periodischen, mechanischen Schwingungen in einem Uhrwerk
JPS4829420A (de) * 1971-08-20 1973-04-19
US3803424A (en) * 1972-05-08 1974-04-09 Physics Int Co Piezoelectric pump system
US3993939A (en) 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
GB1530662A (en) 1976-03-01 1978-11-01 Mullard Ltd Peristaltic pump
US4197737A (en) * 1977-05-10 1980-04-15 Applied Devices Corporation Multiple sensing device and sensing devices therefor
US4140936A (en) * 1977-09-01 1979-02-20 The United States Of America As Represented By The Secretary Of The Navy Square and rectangular electroacoustic bender bar transducer
US4360955A (en) 1978-05-08 1982-11-30 Barry Block Method of making a capacitive force transducer
DE3068433D1 (en) 1979-09-10 1984-08-09 Ici Plc Electrostatically actuated valve
IL59942A (en) * 1980-04-28 1986-08-31 D P Lab Ltd Method and device for fluid transfer
DE3108693A1 (de) 1981-03-07 1982-09-23 Walter Ing.(grad.) 7758 Meersburg Holzer Elektromagnetventil, insbesondere fuer hausgeraete
US4453169A (en) * 1982-04-07 1984-06-05 Exxon Research And Engineering Co. Ink jet apparatus and method
US4478077A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4501144A (en) * 1982-09-30 1985-02-26 Honeywell Inc. Flow sensor
US4478076A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4651564A (en) * 1982-09-30 1987-03-24 Honeywell Inc. Semiconductor device
DE3320441A1 (de) 1983-06-06 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
DE3515499C2 (de) * 1984-05-01 1994-08-04 Smc Kk Elektropneumatischer Wandler
US4576050A (en) * 1984-08-29 1986-03-18 General Motors Corporation Thermal diffusion fluid flow sensor
US4654546A (en) * 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
JPS61173319A (ja) * 1985-01-26 1986-08-05 Shoketsu Kinzoku Kogyo Co Ltd 流体用レギユレ−タ
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
JPH0729414B2 (ja) * 1987-01-22 1995-04-05 株式会社テック 弁素子及びその製造方法
FR2614986B1 (fr) * 1987-05-07 1989-08-18 Otic Fischer & Porter Structure de cellule capacitive pour la mesure des pressions differentielles
US4846440A (en) * 1987-09-30 1989-07-11 Spectra Physics Valve with metal diaphragm and flat surface valve body
JPH01174278A (ja) * 1987-12-28 1989-07-10 Misuzu Erii:Kk インバータ
US4911616A (en) * 1988-01-19 1990-03-27 Laumann Jr Carl W Micro miniature implantable pump
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
US5065978A (en) 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
JP2709318B2 (ja) 1988-08-31 1998-02-04 セイコープレシジョン株式会社 液晶パネルおよび液晶パネルを用いた変換装置
CH679555A5 (de) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
JPH04501449A (ja) * 1989-06-14 1992-03-12 ウエストンブリッジ　インターナショナル　リミティド マイクロポンプ
US5069419A (en) 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
DE3925749C1 (de) * 1989-08-03 1990-10-31 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
DE3926066A1 (de) * 1989-08-07 1991-02-14 Ibm Deutschland Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
JPH03170826A (ja) * 1989-11-29 1991-07-24 Toshiba Corp 容量型圧力センサ
KR910012538A (ko) 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
US5244537A (en) 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
US5180623A (en) * 1989-12-27 1993-01-19 Honeywell Inc. Electronic microvalve apparatus and fabrication
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
DE4006152A1 (de) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
DE69104585T2 (de) * 1990-10-30 1995-05-18 Hewlett Packard Co Mikropumpe.
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
DE4119955C2 (de) 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
JP2821286B2 (ja) 1991-08-06 1998-11-05 山形日本電気株式会社 半導体装置の製造装置
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE4143343C2 (de) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
JPH0678566A (ja) * 1992-08-25 1994-03-18 Kanagawa Kagaku Gijutsu Akad 静電アクチュエータ
US5316261A (en) * 1992-10-26 1994-05-31 Northern Research & Engineering Corp. Fluid conduit having a variable inner diameter
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5290240A (en) 1993-02-03 1994-03-01 Pharmetrix Corporation Electrochemical controlled dispensing assembly and method for selective and controlled delivery of a dispensing fluid
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
JP2569293B2 (ja) * 1993-07-24 1997-01-08 エンドレス ウント ハウザー ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー 高い線形性を有する容量圧力センサ
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
WO1995009987A1 (en) 1993-10-04 1995-04-13 Research International, Inc. Micromachined fluid flow regulators
JPH07184377A (ja) 1993-10-21 1995-07-21 Mitsubishi Chem Corp 静電アクチュエータ
US5499909A (en) * 1993-11-17 1996-03-19 Aisin Seiki Kabushiki Kaisha Of Kariya Pneumatically driven micro-pump
DE69410487T2 (de) * 1993-12-28 1998-11-05 Westonbridge Int Ltd Mikropumpe
CH689836A5 (fr) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
DE4402119C2 (de) * 1994-01-25 1998-07-23 Karlsruhe Forschzent Verfahren zur Herstellung von Mikromembranpumpen
US5536963A (en) * 1994-05-11 1996-07-16 Regents Of The University Of Minnesota Microdevice with ferroelectric for sensing or applying a force
CN1157668A (zh) * 1994-09-02 1997-08-20 拉德·哈桑·达巴 反射式光阀调制器
US5585069A (en) * 1994-11-10 1996-12-17 David Sarnoff Research Center, Inc. Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis
US5593134A (en) * 1995-02-21 1997-01-14 Applied Power Inc. Magnetically assisted piezo-electric valve actuator
US5788833A (en) * 1995-03-27 1998-08-04 California Institute Of Technology Sensors for detecting analytes in fluids
US5571401A (en) 1995-03-27 1996-11-05 California Institute Of Technology Sensor arrays for detecting analytes in fluids
US6457654B1 (en) * 1995-06-12 2002-10-01 Georgia Tech Research Corporation Micromachined synthetic jet actuators and applications thereof
US5696662A (en) 1995-08-21 1997-12-09 Honeywell Inc. Electrostatically operated micromechanical capacitor
DE19546570C1 (de) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluidpumpe
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
ATE294461T1 (de) * 1996-02-10 2005-05-15 Fraunhofer Ges Forschung Bistabiler microantrieb mit gekoppelten membranen
US5954079A (en) 1996-04-30 1999-09-21 Hewlett-Packard Co. Asymmetrical thermal actuation in a microactuator
US5897097A (en) * 1996-09-06 1999-04-27 Xerox Corporation Passively addressable fluid valves having S-shaped blocking films
WO1998012528A1 (fr) 1996-09-19 1998-03-26 Hokuriku Electric Industry Co., Ltd. Capteur de pression a capacite electrostatique
US6123316A (en) * 1996-11-27 2000-09-26 Xerox Corporation Conduit system for a valve array
US5971355A (en) 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US5683159A (en) 1997-01-03 1997-11-04 Johnson; Greg P. Hardware mounting rail
US5808205A (en) 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US6116863A (en) 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US5836750A (en) 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US5822170A (en) 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators
US5901939A (en) * 1997-10-09 1999-05-11 Honeywell Inc. Buckled actuator with enhanced restoring force
SE9704660D0 (sv) * 1997-12-15 1997-12-15 Siemens Elema Ab Ventil för reglering av ett gasflöde
US6126140A (en) 1997-12-29 2000-10-03 Honeywell International Inc. Monolithic bi-directional microvalve with enclosed drive electric field
US6089534A (en) 1998-01-08 2000-07-18 Xerox Corporation Fast variable flow microelectromechanical valves
US6032923A (en) * 1998-01-08 2000-03-07 Xerox Corporation Fluid valves having cantilevered blocking films
FR2775075B1 (fr) * 1998-02-18 2000-05-05 Theobald Sa A Capteur de pression differentielle
US6151967A (en) 1998-03-10 2000-11-28 Horizon Technology Group Wide dynamic range capacitive transducer
US6167761B1 (en) * 1998-03-31 2001-01-02 Hitachi, Ltd. And Hitachi Car Engineering Co., Ltd. Capacitance type pressure sensor with capacitive elements actuated by a diaphragm
DE69922727T2 (de) * 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
DE19849700C2 (de) * 1998-10-28 2001-06-28 Festo Ag & Co Mikroventilanordnung
US6211580B1 (en) * 1998-12-29 2001-04-03 Honeywell International Inc. Twin configuration for increased life time in touch mode electrostatic actuators
US6215221B1 (en) * 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces
US6358021B1 (en) * 1998-12-29 2002-03-19 Honeywell International Inc. Electrostatic actuators for active surfaces
US6184608B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Polymer microactuator array with macroscopic force and displacement
US6184607B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
JP2000255056A (ja) * 1999-03-10 2000-09-19 Seiko Epson Corp インクジェット記録装置の制御方法
US6655923B1 (en) * 1999-05-17 2003-12-02 Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Micromechanic pump
US6520753B1 (en) * 1999-06-04 2003-02-18 California Institute Of Technology Planar micropump
GB2352283A (en) * 1999-06-28 2001-01-24 California Inst Of Techn Microfabricated valves, pumps, mirror array and refracting structure
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6240944B1 (en) * 1999-09-23 2001-06-05 Honeywell International Inc. Addressable valve arrays for proportional pressure or flow control
US6247678B1 (en) * 1999-11-01 2001-06-19 Swagelok Company Shape memory alloy actuated fluid control valve
US6373682B1 (en) * 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6385021B1 (en) * 2000-04-10 2002-05-07 Motorola, Inc. Electrostatic discharge (ESD) protection circuit
US6578107B1 (en) * 2000-05-25 2003-06-10 International Business Machines Corporation Method and system for prefetching data where commands are reordered for execution
US6597438B1 (en) * 2000-08-02 2003-07-22 Honeywell International Inc. Portable flow cytometry
US6549275B1 (en) * 2000-08-02 2003-04-15 Honeywell International Inc. Optical detection system for flow cytometry
US7978329B2 (en) * 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US6568286B1 (en) * 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6382228B1 (en) * 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
US6590267B1 (en) * 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6626416B2 (en) * 2000-12-12 2003-09-30 Eastman Kodak Company Electrostrictive valve for modulating a fluid flow
JP3932302B2 (ja) * 2000-12-27 2007-06-20 独立行政法人産業技術総合研究所 圧力センサ
SG94753A1 (en) * 2001-02-06 2003-03-18 Inst Of High Performance Compu Microvalve devices
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
JP4296728B2 (ja) * 2001-07-06 2009-07-15 株式会社デンソー 静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体
US6536287B2 (en) * 2001-08-16 2003-03-25 Honeywell International, Inc. Simplified capacitance pressure sensor
US6729856B2 (en) * 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
FR2834324B1 (fr) * 2001-12-31 2007-04-13 Bosch Gmbh Robert Valve a commande electrique, membrane comportant de telles valves et servomoteur d'assistance de freinage comportant une telle membrane
US6750589B2 (en) * 2002-01-24 2004-06-15 Honeywell International Inc. Method and circuit for the control of large arrays of electrostatic actuators
US6561224B1 (en) * 2002-02-14 2003-05-13 Abbott Laboratories Microfluidic valve and system therefor
US6662663B2 (en) * 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
DE10302304B3 (de) * 2003-01-22 2004-01-29 Festo Ag & Co. Elektronisches Mikroventil und Verfahren zu seinem Betreiben
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve

Also Published As

Publication number Publication date
US20080087855A1 (en) 2008-04-17
JP2008527263A (ja) 2008-07-24
CN1854580A (zh) 2006-11-01
US7467779B2 (en) 2008-12-23
WO2006073746A1 (en) 2006-07-13
EP1834098A1 (de) 2007-09-19
EP1834098B1 (de) 2010-07-14
CN1854580B (zh) 2011-08-03
US7328882B2 (en) 2008-02-12
US20060145110A1 (en) 2006-07-06

Similar Documents

Publication Publication Date Title
DE602006002773D1 (de) Motorbetätigtes Ventil
DE602006007518D1 (de) Motorgesteuertes Ventil
DE602005003421D1 (de) Pneumatisches Ventil
DE602005021183D1 (de) Ventil
DE602005009422D1 (de) Elektromagnetisches Ventil
NO20065317L (no) Ventil
DE602005002903D1 (de) Motorgesteuertes Ventil
DE602005002858D1 (de) Motorbetätigtes Ventil
DE602006011744D1 (de) Stromregelventil
DE602005005916D1 (de) Elektromagnetisches Ventil
DE602005012914D1 (de) Motorgesteuertes Ventil
DE602006004640D1 (de) Ruckfreies Ventil
DE502005003463D1 (de) Ventil
DE602005003173D1 (de) Elektromagnetisches Ventil
DE502006009179D1 (de) Elektromagnetisch betätigbares ventil
DK1996843T3 (da) Ventil
DE602005022352D1 (de) Mikrofluidisches modulierendes ventil
DK1674400T3 (da) Dobbelts det ventil
DE602005003195D1 (de) Ventil
SE0400188L (sv) Ventil
DE602006000958D1 (de) Elektromagnetisches Ventil
DE112005002523A5 (de) Ventil
FI20075156A (fi) Venttiili
AT502342A3 (de) Ventil
DE502006005733D1 (de) Ventil