DE602005021511D1 - Differenzdruckmessung mithilfe von rückseitenmessung und einer einzel-asic - Google Patents

Differenzdruckmessung mithilfe von rückseitenmessung und einer einzel-asic

Info

Publication number
DE602005021511D1
DE602005021511D1 DE602005021511T DE602005021511T DE602005021511D1 DE 602005021511 D1 DE602005021511 D1 DE 602005021511D1 DE 602005021511 T DE602005021511 T DE 602005021511T DE 602005021511 T DE602005021511 T DE 602005021511T DE 602005021511 D1 DE602005021511 D1 DE 602005021511D1
Authority
DE
Germany
Prior art keywords
measurement
differential pressure
backset
single asic
pressure measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005021511T
Other languages
English (en)
Inventor
Tuyen V Pham
Richard A Wade
Phillip I Lane
Gregory D Parker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602005021511D1 publication Critical patent/DE602005021511D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005—Apparatus for calibrating pressure sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/069—Protection against electromagnetic or electrostatic interferences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
DE602005021511T 2004-08-23 2005-08-23 Differenzdruckmessung mithilfe von rückseitenmessung und einer einzel-asic Active DE602005021511D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/924,598 US7077008B2 (en) 2004-07-02 2004-08-23 Differential pressure measurement using backside sensing and a single ASIC
PCT/US2005/030153 WO2006023987A1 (en) 2004-08-23 2005-08-23 Differential pressure measurement using backside sensing and a single asic

Publications (1)

Publication Number Publication Date
DE602005021511D1 true DE602005021511D1 (de) 2010-07-08

Family

ID=35500565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005021511T Active DE602005021511D1 (de) 2004-08-23 2005-08-23 Differenzdruckmessung mithilfe von rückseitenmessung und einer einzel-asic

Country Status (7)

Country Link
US (1) US7077008B2 (de)
EP (1) EP1782029B1 (de)
JP (1) JP2008511005A (de)
KR (1) KR101208442B1 (de)
CN (1) CN100520325C (de)
DE (1) DE602005021511D1 (de)
WO (1) WO2006023987A1 (de)

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US8124953B2 (en) * 2009-03-12 2012-02-28 Infineon Technologies Ag Sensor device having a porous structure element
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US8322225B2 (en) * 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8371175B2 (en) 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
US8082797B2 (en) 2009-11-11 2011-12-27 Honeywell International Inc. Pressure sensor assembly
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US8171800B1 (en) 2011-01-25 2012-05-08 Continental Automotive Systems, Inc. Differential pressure sensor using dual backside absolute pressure sensing
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US8534130B2 (en) 2011-08-01 2013-09-17 Honeywell International Inc. Joint between a pressure sensor and a pressure port of a sensor assembly
US8671753B2 (en) 2011-08-01 2014-03-18 Honeywell International Inc. Cable harness for a sensor
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US8459125B2 (en) 2011-08-01 2013-06-11 Honeywell International Inc. Pressure sensor assembly
US8817483B2 (en) 2011-08-01 2014-08-26 Honeywell International Inc. Connector assembly for a sensor
US8934263B2 (en) 2011-08-01 2015-01-13 Honeywell International Inc. Protective cover for pressure sensor assemblies
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US20130192379A1 (en) * 2012-01-27 2013-08-01 Neil S. Petrarca Small form factor microfused silicon strain gage (msg) pressure sensor packaging
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CN102661822A (zh) * 2012-04-28 2012-09-12 无锡永阳电子科技有限公司 硅应变片金属封装传感器
US9004048B2 (en) * 2012-07-09 2015-04-14 Ford Global Technologies, Llc Gas backpressure sensor assembly
US8914875B2 (en) * 2012-10-26 2014-12-16 Facebook, Inc. Contextual device locking/unlocking
DE102012222089A1 (de) * 2012-12-03 2014-06-05 Robert Bosch Gmbh Drucksensormodul
US9116057B2 (en) * 2013-02-27 2015-08-25 Honeywell International Inc. Integrated reference vacuum pressure sensor with atomic layer deposition coated input port
US9470593B2 (en) * 2013-09-12 2016-10-18 Honeywell International Inc. Media isolated pressure sensor
JP2015068800A (ja) * 2013-09-30 2015-04-13 セイコーエプソン株式会社 圧力センサー、電子機器および移動体
CN103575467B (zh) * 2013-10-12 2015-07-15 广西玉柴机器股份有限公司 发动机电子机油压力传感器检测线束
FR3017211B1 (fr) 2014-02-05 2016-01-22 Coutier Moulage Gen Ind Dispositif de determination de pression et de temperature, capteur de pression et de temperature comprenant un tel dispositif et procede de fabrication d’un tel dispositif
US10156491B2 (en) * 2014-04-25 2018-12-18 Rosemount Inc. Corrosion resistant pressure module for process fluid pressure transmitter
JP6170879B2 (ja) * 2014-05-29 2017-07-26 センサータ テクノロジーズ インコーポレーテッド 歪みゲージ圧力センサ
CN104483062B (zh) * 2014-12-23 2016-08-03 中国电子科技集团公司第四十九研究所 高可靠多余度压差传感器
US20160298575A1 (en) * 2015-04-02 2016-10-13 Sensata Technologies, Inc. Combined temperature, absolute and differential pressure sensor assembly
EP3112830B1 (de) 2015-07-01 2018-08-22 Sensata Technologies, Inc. Temperatursensor und verfahren zur herstellung eines temperatursensors
CN105278835B (zh) * 2015-09-21 2019-01-15 联想(北京)有限公司 一种控制电子设备的方法及电子设备
CN105403349A (zh) * 2015-12-25 2016-03-16 陕西电器研究所 一种采用组合桥路的四余度压差传感器
JP2017146137A (ja) * 2016-02-16 2017-08-24 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法
US9945747B1 (en) * 2016-10-13 2018-04-17 Honeywell International Inc. Gel filled port pressure sensor for robust media sealing
US10466125B2 (en) * 2016-11-11 2019-11-05 Measurement Specialties Inc. Pressure sensor sub assembly and fabrication
US10428716B2 (en) 2016-12-20 2019-10-01 Sensata Technologies, Inc. High-temperature exhaust sensor
US10684184B2 (en) 2017-04-20 2020-06-16 Honeywell International Inc. Pressure sensor assembly having a cavity filled with gel or fluid
US10481024B2 (en) * 2017-04-20 2019-11-19 Honeywell International Inc. Pressure sensor assembly including a cured elastomeric force transmitting member
US10502641B2 (en) 2017-05-18 2019-12-10 Sensata Technologies, Inc. Floating conductor housing

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Also Published As

Publication number Publication date
CN100520325C (zh) 2009-07-29
CN101044380A (zh) 2007-09-26
US20060000288A1 (en) 2006-01-05
KR101208442B1 (ko) 2012-12-05
US7077008B2 (en) 2006-07-18
EP1782029B1 (de) 2010-05-26
WO2006023987A1 (en) 2006-03-02
KR20070045337A (ko) 2007-05-02
EP1782029A1 (de) 2007-05-09
JP2008511005A (ja) 2008-04-10

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