DE602004027454D1 - Vakuum-Regelsystem - Google Patents

Vakuum-Regelsystem

Info

Publication number
DE602004027454D1
DE602004027454D1 DE602004027454T DE602004027454T DE602004027454D1 DE 602004027454 D1 DE602004027454 D1 DE 602004027454D1 DE 602004027454 T DE602004027454 T DE 602004027454T DE 602004027454 T DE602004027454 T DE 602004027454T DE 602004027454 D1 DE602004027454 D1 DE 602004027454D1
Authority
DE
Germany
Prior art keywords
control system
vacuum control
vacuum
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004027454T
Other languages
English (en)
Inventor
Yoshio Ishii
Koji Tanemura
Toshihiko Matsumoto
Kozo Shirato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idex Health and Science KK
Original Assignee
ERC Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ERC Inc filed Critical ERC Inc
Publication of DE602004027454D1 publication Critical patent/DE602004027454D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2066—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using controlling means acting on the pressure source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0063—Regulation, control including valves and floats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
DE602004027454T 2003-10-10 2004-03-30 Vakuum-Regelsystem Expired - Lifetime DE602004027454D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003352286A JP4533614B2 (ja) 2003-10-10 2003-10-10 真空制御システム

Publications (1)

Publication Number Publication Date
DE602004027454D1 true DE602004027454D1 (de) 2010-07-15

Family

ID=34419840

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004027454T Expired - Lifetime DE602004027454D1 (de) 2003-10-10 2004-03-30 Vakuum-Regelsystem

Country Status (4)

Country Link
US (1) US7686590B2 (de)
EP (1) EP1529560B1 (de)
JP (1) JP4533614B2 (de)
DE (1) DE602004027454D1 (de)

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CN101421611B (zh) * 2006-02-16 2012-09-19 爱科来株式会社 脱气装置及具备其的液相色谱装置
JP2007291896A (ja) * 2006-04-24 2007-11-08 Erc:Kk 真空系における減圧吸引システム
US7399345B2 (en) * 2006-05-09 2008-07-15 Rheodyne Llc Capillary flow restrictor apparatus
US7676702B2 (en) * 2006-08-14 2010-03-09 International Business Machines Corporation Preemptive data protection for copy services in storage systems and applications
JP2008238582A (ja) * 2007-03-27 2008-10-09 Ube Nitto Kasei Co Ltd 中空構造板の製造装置及びその製造方法
KR100832696B1 (ko) * 2008-01-18 2008-05-28 임권현 진공척
US20100269700A1 (en) * 2009-04-22 2010-10-28 Han Zhen-Zhong Vacuum adsorption apparatus
US20100283194A1 (en) * 2009-05-11 2010-11-11 Han Zhen-Zhong Energy-saving vacuum adsorption apparatus
CN102481494B (zh) 2009-09-14 2014-09-10 兰登姆科技有限责任公司 用于改变液体中的气体浓度的装置及方法
DE102011001270A1 (de) 2011-03-15 2012-09-20 Dionex Softron Gmbh Lösungsmittel-Vorrats-System für HPLC-Systeme mit geringen Flussraten
US8668763B2 (en) * 2011-03-25 2014-03-11 Idex Health & Science Llc Apparatus for pervaporation control in liquid degassing systems
US8440003B2 (en) * 2011-03-25 2013-05-14 Idex Health & Science, Llc Apparatus for pervaporation control in liquid degassing systems
DE102011050314A1 (de) 2011-05-12 2012-11-15 Dionex Softron Gmbh Lösungsmittel-Entgasungs-System für HPLC-Systeme mit geringen Flussraten
CN102297756B (zh) * 2011-07-28 2013-02-27 水利部交通运输部国家能源局南京水利科学研究院 水工减压箱真空度自动调节方法及装置
CN103629095B (zh) * 2012-08-24 2016-08-17 岳勇斌 小型隔膜泵模拟变频系统及其控制方法
US9114331B2 (en) 2012-09-28 2015-08-25 Random Technologies Llc Apparatus and method for degassing liquids
US20140327919A1 (en) * 2013-05-06 2014-11-06 Halliburton Energy Services. Inc. Remote Seal for Pressure Sensor
CN103495291B (zh) * 2013-09-29 2015-11-04 中广核工程有限公司 从核电站循环冷却剂中分离气体杂质的除气装置
CN104107191A (zh) * 2014-06-10 2014-10-22 钟神秀 可自动控制排血量的多工位鹿茸抽排血装置
CN205235411U (zh) * 2015-11-19 2016-05-18 广州迪杰帕尔电子科技有限公司 一种速喷气柱舞台烟雾机及其电磁阀模组
CN105540692B (zh) * 2015-12-30 2019-04-19 广东威灵电机制造有限公司 净水器及其控制方法
DE102016220107B4 (de) 2016-10-14 2020-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Entgasungsvorrichtung
CN109751219A (zh) * 2018-12-30 2019-05-14 珠海市广源信科技有限公司 一种控制包括真空发生器的真空系统
GB2590130B (en) * 2019-09-23 2022-10-19 Idex Health & Science Llc Fluid degassing system with reduced pressure pulsatility
CN111878374B (zh) * 2020-07-14 2021-12-24 中国重型机械研究院股份公司 一种基于rh精炼工艺的机械真空泵系统的控制方法
US20240075411A1 (en) * 2020-12-24 2024-03-07 Dic Corporation Degassing apparatus

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US4278402A (en) * 1979-08-13 1981-07-14 Nielsen Axel L Adjustable liquid level control for pumps
JPS61130868A (ja) * 1984-11-30 1986-06-18 Eruma Kogaku Kk 液体クロマトグラフ
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
JPH0596104A (ja) * 1991-10-04 1993-04-20 Toray Ind Inc 脱気膜装置
US5242404A (en) * 1992-02-12 1993-09-07 American Cyanamid Company Aspiration control system
US5466229A (en) * 1993-08-06 1995-11-14 Davstar, Inc. Fluid collection system
JP3528057B2 (ja) 1994-07-15 2004-05-17 株式会社フロム 脱気装置
JPH08109097A (ja) * 1994-10-07 1996-04-30 Nissin Electric Co Ltd 流量調整・仕切りバルブ
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5901750A (en) * 1996-02-06 1999-05-11 Nartron Corporation Variable flow orifice valve assembly
JP3386313B2 (ja) * 1996-05-23 2003-03-17 株式会社日本ピスコ 真空発生器
JPH1169867A (ja) * 1997-08-11 1999-03-09 Matsushita Electric Ind Co Ltd センサレスｄｃブラシレスモータの制御駆動装置および制御駆動方法
JPH1182787A (ja) * 1997-09-05 1999-03-26 Mitsubishi Heavy Ind Ltd リークバルブ
JP2000102702A (ja) 1998-09-28 2000-04-11 Erc:Kk 真空脱気装置
JP2000162100A (ja) * 1998-11-30 2000-06-16 Jeol Ltd 液体脱気装置
ATE280406T1 (de) * 1999-04-07 2004-11-15 Cit Alcatel Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit
JP4214620B2 (ja) * 1999-06-07 2009-01-28 三浦工業株式会社 脱気装置における脱気方法
US6248157B1 (en) * 1999-08-20 2001-06-19 Systec Inc. Vacuum degassing
JP2001087601A (ja) 1999-09-27 2001-04-03 Erc:Kk 真空脱気装置
JP2001178168A (ja) * 1999-12-16 2001-06-29 Toshiba Corp 圧縮機の直流モータの制御装置及びその方法
US6289924B1 (en) * 2000-02-24 2001-09-18 Richard C. Kozinski Variable flow area refrigerant expansion device
JP2001329963A (ja) * 2000-05-17 2001-11-30 Erc:Kk ダイアフラム式ポンプ及び該ポンプを用いた脱気装置
CA2688798A1 (en) * 2001-01-19 2002-07-19 Hy-Drive Technologies Ltd. Hydrogen generating apparatus and components therefor
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法

Also Published As

Publication number Publication date
EP1529560B1 (de) 2010-06-02
EP1529560A2 (de) 2005-05-11
EP1529560A3 (de) 2005-09-28
JP4533614B2 (ja) 2010-09-01
US20050079074A1 (en) 2005-04-14
JP2005113874A (ja) 2005-04-28
US7686590B2 (en) 2010-03-30

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