US658570A
(en)
*
|
1900-04-16 |
1900-09-25 |
Adams & Westlake Co |
Pressure-regulator.
|
US3077958A
(en)
|
1961-09-05 |
1963-02-19 |
United Aircraft Corp |
Zero thermal expansion device
|
US3802781A
(en)
|
1972-08-15 |
1974-04-09 |
D Wright |
Extensometers
|
US3837125A
(en)
|
1973-09-04 |
1974-09-24 |
Celestron Pacific |
Method and system for making schmidt corrector lenses
|
US3917385A
(en)
|
1973-09-19 |
1975-11-04 |
Rockwell International Corp |
Simplified micropositioner
|
US3879105A
(en)
|
1974-04-04 |
1975-04-22 |
Jenoptik Jena Gmbh |
Telescope with an image reversing system
|
US4060315A
(en)
|
1975-07-07 |
1977-11-29 |
Rockwell International Corporation |
Precision mirror mount
|
US4038971A
(en)
|
1975-10-22 |
1977-08-02 |
Bezborodko Joseph A I B |
Concave, mirrored solar collector
|
DE2609312A1
(de)
*
|
1976-03-06 |
1977-09-15 |
Basf Ag |
Neue pyridyl-phosphorsaeurederivate
|
US4092518A
(en)
|
1976-12-07 |
1978-05-30 |
Laser Technique S.A. |
Method of decorating a transparent plastics material article by means of a laser beam
|
US4135778A
(en)
|
1976-12-15 |
1979-01-23 |
Lincoln Associates, Inc. |
Microscope lens system
|
US4195913A
(en)
|
1977-11-09 |
1980-04-01 |
Spawr Optical Research, Inc. |
Optical integration with screw supports
|
US4162120A
(en)
|
1977-12-02 |
1979-07-24 |
Ford Aerospace & Communications Corp. |
Thermal compensator linkage
|
US4236296A
(en)
|
1978-10-13 |
1980-12-02 |
Exxon Research & Engineering Co. |
Etch method of cleaving semiconductor diode laser wafers
|
US4277141A
(en)
|
1979-03-28 |
1981-07-07 |
Tropel, Inc. |
Multifaceted mirror and assembly fixture and method of making such mirror
|
US4202605A
(en)
|
1979-04-05 |
1980-05-13 |
Rockwell International Corporation |
Active segmented mirror
|
US4226507A
(en)
|
1979-07-09 |
1980-10-07 |
The Perkin-Elmer Corporation |
Three actuator deformable specimen
|
US4295710A
(en)
|
1979-09-04 |
1981-10-20 |
Rockwell International Corporation |
Deformable mirror with dither
|
JPS57624A
(en)
|
1980-06-03 |
1982-01-05 |
Nippon Kogaku Kk <Nikon> |
Albada type reverse-galilean finder
|
US4380391A
(en)
|
1980-09-30 |
1983-04-19 |
The United States Of America As Represented By The Secretary Of The Army |
Short pulse CO2 laser for ranging and target identification
|
US4403421A
(en)
|
1980-11-13 |
1983-09-13 |
Shepherd Daniel R |
Telescopic gun sight
|
US4408874A
(en)
|
1981-05-07 |
1983-10-11 |
Computervision Corporation |
Projection aligner with specific means for bending mirror
|
US4389115A
(en)
|
1981-08-06 |
1983-06-21 |
Richter Thomas A |
Optical system
|
US4471454A
(en)
*
|
1981-10-27 |
1984-09-11 |
Ibm Corporation |
Fast, efficient, small adder
|
JPS60168625A
(ja)
*
|
1984-02-13 |
1985-09-02 |
Ekuseru Kk |
複合材質を備えた中空成形品の製造方法とその装置
|
DE3323828C2
(de)
|
1983-07-01 |
1986-01-16 |
Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn |
Laserwarnsensor
|
US4871237A
(en)
|
1983-07-27 |
1989-10-03 |
Nikon Corporation |
Method and apparatus for adjusting imaging performance of projection optical apparatus
|
JPS60219744A
(ja)
|
1984-04-17 |
1985-11-02 |
Canon Inc |
投影露光装置
|
JP2516194B2
(ja)
|
1984-06-11 |
1996-07-10 |
株式会社日立製作所 |
投影露光方法
|
CA1298500C
(en)
|
1985-03-01 |
1992-04-07 |
Danny Filipovich |
Compact see-through night vision goggles
|
US4969726A
(en)
|
1985-06-03 |
1990-11-13 |
Northrop Corporation |
Ring laser gyro path-length-control mechanism
|
US4672439A
(en)
|
1985-09-04 |
1987-06-09 |
Texas Instruments Incorporated |
FLIR imager with hybrid optical/electronic processor
|
DE3544429A1
(de)
|
1985-12-16 |
1987-06-19 |
Juwedor Gmbh |
Verfahren zur galvanoplastischen herstellung von schmuckwaren
|
US4953965A
(en)
|
1985-12-26 |
1990-09-04 |
Toshiba Machine Company, Ltd. |
High-accuracy traveling table apparatus
|
US4705369A
(en)
|
1986-03-21 |
1987-11-10 |
The United States Of America As Represented By The United States Department Of Energy |
Mirror mount
|
US4722592A
(en)
|
1986-12-29 |
1988-02-02 |
The United States Of America As Represented By The Secretary Of The Army |
Motorized-axis-angular fine adjustment prism mount
|
US4740276A
(en)
|
1987-05-08 |
1988-04-26 |
The United States Of America As Represented By The Secretary Of The Air Force |
Fabrication of cooled faceplate segmented aperture mirrors (SAM) by electroforming
|
US4849668A
(en)
|
1987-05-19 |
1989-07-18 |
Massachusetts Institute Of Technology |
Embedded piezoelectric structure and control
|
AT393925B
(de)
|
1987-06-02 |
1992-01-10 |
Ims Ionen Mikrofab Syst |
Anordnung zur durchfuehrung eines verfahrens zum positionieren der abbildung der auf einer maske befindlichen struktur auf ein substrat, und verfahren zum ausrichten von auf einer maske angeordneten markierungen auf markierungen, die auf einem traeger angeordnet sind
|
US4932778A
(en)
|
1987-06-22 |
1990-06-12 |
Pioneer Data Processing, Inc. |
Autokinesis free optical instrument
|
US4865454A
(en)
|
1987-11-24 |
1989-09-12 |
Kaman Aerospace Corporation |
Adaptive optical system with synchronous detection of wavefront phase
|
US4826304A
(en)
|
1988-04-11 |
1989-05-02 |
Gte Government Systems Corporation |
Adjustable optical mounting assembly
|
US4932770A
(en)
|
1988-12-20 |
1990-06-12 |
Caravaty Raymond D |
Dual plane rear vision mirror
|
US5026977A
(en)
|
1989-04-05 |
1991-06-25 |
The Charles Stark Draper Laboratory, Inc. |
Wavefront sensing and correction with deformable mirror
|
US4959531A
(en)
|
1989-09-29 |
1990-09-25 |
Eastman Kodak Company |
Alignment sensing and correcting assembly for an optical element
|
FR2656079B1
(fr)
|
1989-12-20 |
1994-05-06 |
Etat Francais Delegue Armement |
Lunette episcopique modulable et reconfigurable.
|
US5074654A
(en)
|
1990-08-22 |
1991-12-24 |
Litton Systems, Inc. |
Hydraulic actuators for optical systems
|
US5079414A
(en)
|
1990-10-09 |
1992-01-07 |
Gte Government Systems Corporation |
Tracking telescope using an atomic resonance filter
|
NL9100421A
(nl)
|
1991-03-08 |
1992-10-01 |
Asm Lithography Bv |
Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting.
|
US5132979A
(en)
|
1991-08-16 |
1992-07-21 |
The United States Of America As Represented By The United States Department Of Energy |
Laser frequency modulator for modulating a laser cavity
|
US5428482A
(en)
|
1991-11-04 |
1995-06-27 |
General Signal Corporation |
Decoupled mount for optical element and stacked annuli assembly
|
US5157555A
(en)
|
1991-12-04 |
1992-10-20 |
General Electric Company |
Apparatus for adjustable correction of spherical aberration
|
NL9200418A
(nl)
|
1992-03-06 |
1993-10-01 |
Lely Nv C Van Der |
Inrichting voor het melken van dieren.
|
US5210650A
(en)
|
1992-03-31 |
1993-05-11 |
Eastman Kodak Company |
Compact, passively athermalized optical assembly
|
US5438451A
(en)
|
1992-09-25 |
1995-08-01 |
Schweizer; Bruno |
Linearly fine-adjustable stage
|
US5400184A
(en)
|
1992-10-29 |
1995-03-21 |
The United States Of America As Represented By The United States Department Of Energy |
Kinematic high bandwidth mirror mount
|
US5414557A
(en)
|
1992-11-30 |
1995-05-09 |
Itt Corporation |
Reticle apparatus for night vision devices
|
JPH06177007A
(ja)
*
|
1992-12-01 |
1994-06-24 |
Nippon Telegr & Teleph Corp <Ntt> |
投影露光装置
|
JPH06177008A
(ja)
*
|
1992-12-01 |
1994-06-24 |
Nippon Telegr & Teleph Corp <Ntt> |
投影露光装置
|
US6252334B1
(en)
|
1993-01-21 |
2001-06-26 |
Trw Inc. |
Digital control of smart structures
|
JP3463335B2
(ja)
*
|
1994-02-17 |
2003-11-05 |
株式会社ニコン |
投影露光装置
|
JPH0786152A
(ja)
*
|
1993-09-14 |
1995-03-31 |
Nikon Corp |
投影露光装置
|
US5485053A
(en)
|
1993-10-15 |
1996-01-16 |
Univ America Catholic |
Method and device for active constrained layer damping for vibration and sound control
|
US5537262A
(en)
|
1993-10-19 |
1996-07-16 |
Asahi Kogaku Kogyo Kabushiki Kaisha |
Rotational torque setting apparatus for screw mechanism
|
JPH07161622A
(ja)
*
|
1993-12-10 |
1995-06-23 |
Nikon Corp |
投影露光装置
|
JP2891074B2
(ja)
|
1993-12-10 |
1999-05-17 |
三菱電機株式会社 |
反射鏡固定装置
|
US5484053A
(en)
*
|
1994-06-22 |
1996-01-16 |
Riverwood International Corporation |
Basket-style clip carrier
|
US6154000A
(en)
|
1994-09-07 |
2000-11-28 |
Omnitek Research & Development, Inc. |
Apparatus for providing a controlled deflection and/or actuator apparatus
|
US5529277A
(en)
|
1994-09-20 |
1996-06-25 |
Ball Corporation |
Suspension system having two degrees of rotational freedom
|
EP0703575B1
(de)
|
1994-09-22 |
2003-01-22 |
Ricoh Company, Ltd |
Informationsaufzeichnungsverfahren und -vorrichtung
|
US6341006B1
(en)
|
1995-04-07 |
2002-01-22 |
Nikon Corporation |
Projection exposure apparatus
|
DE29507189U1
(de)
|
1995-04-28 |
1995-06-29 |
Precitec Gmbh |
Anschlußkopf zur Bearbeitung eines Werkstücks mittels eines Laserstrahls
|
US5870133A
(en)
|
1995-04-28 |
1999-02-09 |
Minolta Co., Ltd. |
Laser scanning device and light source thereof having temperature correction capability
|
US5724017A
(en)
|
1995-07-31 |
1998-03-03 |
General Electric Company |
Electrical transformer with reduced core noise
|
JPH09152505A
(ja)
|
1995-11-30 |
1997-06-10 |
Sharp Corp |
変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置
|
IT1277080B1
(it)
*
|
1995-12-14 |
1997-11-04 |
Salvagnini Italia Spa |
Testa di focalizzazione di un fascio laser dotata di una lente di focalizzazione per una macchina di lavorazione di pezzi metallici
|
JPH09199390A
(ja)
*
|
1996-01-16 |
1997-07-31 |
Hitachi Ltd |
パターン形成方法、投影露光装置および半導体装置の製造方法
|
US5694257A
(en)
|
1996-05-06 |
1997-12-02 |
New Focus, Inc. |
Rotary beamsplitter prism mount
|
WO2004092799A1
(ja)
|
1996-08-26 |
2004-10-28 |
Hitoshi Umetsu |
光学系要素の固定装置
|
JP3695494B2
(ja)
*
|
1996-11-13 |
2005-09-14 |
セイコーエプソン株式会社 |
光変調デバイス、その製造方法および表示装置
|
US5891317A
(en)
|
1997-02-04 |
1999-04-06 |
Avon Products, Inc. |
Electroformed hollow jewelry
|
US6128122A
(en)
*
|
1998-09-18 |
2000-10-03 |
Seagate Technology, Inc. |
Micromachined mirror with stretchable restoring force member
|
EP0874283B1
(de)
*
|
1997-04-23 |
2003-09-03 |
Nikon Corporation |
Optischer Belichtungsapparat und optisches Reinigungsverfahren
|
US6268904B1
(en)
*
|
1997-04-23 |
2001-07-31 |
Nikon Corporation |
Optical exposure apparatus and photo-cleaning method
|
WO1999005708A1
(fr)
|
1997-07-22 |
1999-02-04 |
Nikon Corporation |
Procede d'exposition pour projection, dispositif de cadrage pour projection, et procedes de fabrication et de nettoyage optique du dispositif de cadrage
|
US6829041B2
(en)
*
|
1997-07-29 |
2004-12-07 |
Canon Kabushiki Kaisha |
Projection optical system and projection exposure apparatus having the same
|
DE19735760A1
(de)
*
|
1997-08-18 |
1999-02-25 |
Zeiss Carl Fa |
Lötverfahren für optische Materialien an Metallfassungen und gefaßte Baugruppen
|
DE19735831A1
(de)
|
1997-08-18 |
1999-02-25 |
Zeiss Carl Fa |
Galvanoplastische Optik-Fassung
|
US6208407B1
(en)
|
1997-12-22 |
2001-03-27 |
Asm Lithography B.V. |
Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement
|
US6054784A
(en)
|
1997-12-29 |
2000-04-25 |
Asm Lithography B.V. |
Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device
|
JPH11224839A
(ja)
|
1998-02-04 |
1999-08-17 |
Canon Inc |
露光装置とデバイス製造方法、ならびに該露光装置の光学素子クリーニング方法
|
JP3278407B2
(ja)
*
|
1998-02-12 |
2002-04-30 |
キヤノン株式会社 |
投影露光装置及びデバイス製造方法
|
DE19807120A1
(de)
|
1998-02-20 |
1999-08-26 |
Zeiss Carl Fa |
Optisches System mit Polarisationskompensator
|
US6108121A
(en)
|
1998-03-24 |
2000-08-22 |
The Board Of Trustees Of The Leland Stanford Junior University |
Micromachined high reflectance deformable mirror
|
FR2776830B1
(fr)
|
1998-03-26 |
2001-11-23 |
Sgs Thomson Microelectronics |
Cellule memoire electriquement programmable
|
DE19823634A1
(de)
*
|
1998-05-27 |
1999-12-02 |
Dystar Textilfarben Gmbh & Co |
Wasserlösliche Monoazoverbindungen, Verfahren zu ihrer Herstellung und ihre Verwendung als Farbstoffe
|
DE19825716A1
(de)
|
1998-06-09 |
1999-12-16 |
Zeiss Carl Fa |
Baugruppe aus optischem Element und Fassung
|
US5986795A
(en)
|
1998-06-15 |
1999-11-16 |
Chapman; Henry N. |
Deformable mirror for short wavelength applications
|
AU4061099A
(en)
|
1998-06-17 |
2000-01-05 |
Nikon Corporation |
Exposure method and exposure apparatus
|
US5986827A
(en)
|
1998-06-17 |
1999-11-16 |
The Regents Of The University Of California |
Precision tip-tilt-piston actuator that provides exact constraint
|
TWI242113B
(en)
|
1998-07-17 |
2005-10-21 |
Asml Netherlands Bv |
Positioning device and lithographic projection apparatus comprising such a device
|
FR2783055B1
(fr)
|
1998-09-04 |
2000-11-24 |
Essilor Int |
Support pour lentille optique, et son procede de mise en oeuvre
|
US6521892B2
(en)
|
1998-10-09 |
2003-02-18 |
Thomson-Csf Optronics Canada Inc. |
Uncooled driver viewer enhancement system
|
US6296811B1
(en)
|
1998-12-10 |
2001-10-02 |
Aurora Biosciences Corporation |
Fluid dispenser and dispensing methods
|
DE19859634A1
(de)
|
1998-12-23 |
2000-06-29 |
Zeiss Carl Fa |
Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie
|
KR20010006578A
(ko)
|
1999-01-20 |
2001-01-26 |
에이에스엠 리소그라피 비.브이. |
광학 보정 플레이트, 및 전사 투영 장치에의 적용
|
DE19904152A1
(de)
|
1999-02-03 |
2000-08-10 |
Zeiss Carl Fa |
Baugruppe aus einem optischen Element und einer Fassung
|
JP2000234906A
(ja)
|
1999-02-15 |
2000-08-29 |
Koji Masutani |
反射部材移動装置および前記反射部材移動装置を使用する光路長周期的増減装置
|
DE19908554A1
(de)
|
1999-02-27 |
2000-08-31 |
Zeiss Carl Fa |
Verstellbare Baugruppe
|
DE19910947A1
(de)
|
1999-03-12 |
2000-09-14 |
Zeiss Carl Fa |
Vorrichtung zum Verschieben eines optischen Elementes entlang der optischen Achse
|
DE69901596T2
(de)
*
|
1999-03-29 |
2003-01-16 |
Abb T & D Tech Ltd |
Geräuscharmer Transformator
|
US6594204B1
(en)
|
1999-03-31 |
2003-07-15 |
Sony Corporation |
Lens holder, method for manufacturing lens holder, metal die for producing lens holder and objective lens device
|
US6428173B1
(en)
|
1999-05-03 |
2002-08-06 |
Jds Uniphase, Inc. |
Moveable microelectromechanical mirror structures and associated methods
|
US6246822B1
(en)
|
1999-05-18 |
2001-06-12 |
The Boeing Company |
Fiber-coupled receiver and associated method
|
US6160628A
(en)
|
1999-06-29 |
2000-12-12 |
Nikon Corporation |
Interferometer system and method for lens column alignment
|
DE19930643C2
(de)
|
1999-07-02 |
2002-01-24 |
Zeiss Carl |
Baugruppe aus einem optischen Element und einer Fassung
|
TW442783B
(en)
|
1999-07-09 |
2001-06-23 |
Ind Tech Res Inst |
Folding mirror
|
JP2001077003A
(ja)
*
|
1999-09-02 |
2001-03-23 |
Nikon Corp |
露光装置
|
JP2001110710A
(ja)
*
|
1999-10-08 |
2001-04-20 |
Nikon Corp |
露光装置、露光方法、および半導体デバイスの製造方法
|
US6478434B1
(en)
|
1999-11-09 |
2002-11-12 |
Ball Aerospace & Technologies Corp. |
Cryo micropositioner
|
JP4482990B2
(ja)
|
1999-12-10 |
2010-06-16 |
株式会社ニコン |
レンズ保持枠及びレンズ鏡筒
|
TW522460B
(en)
*
|
2000-03-30 |
2003-03-01 |
Nikon Corp |
Exposure apparatus, exposure method, and device manufacturing method
|
US6369999B1
(en)
*
|
2000-03-31 |
2002-04-09 |
Fellowes Manufacturing Company |
Portable surge protector
|
US6411426B1
(en)
|
2000-04-25 |
2002-06-25 |
Asml, Us, Inc. |
Apparatus, system, and method for active compensation of aberrations in an optical system
|
DE10026541A1
(de)
*
|
2000-05-27 |
2001-11-29 |
Zeiss Carl |
Vorrichtung zur präzisen Positionierung eines Bauteils, insbesondere eines optischen Bauteiles
|
DE10030005A1
(de)
|
2000-06-17 |
2001-12-20 |
Zeiss Carl |
Objektiv, insbesondere Projektionsobjektiv in der Halbleiter-Lithographie
|
DE10031702A1
(de)
|
2000-06-29 |
2002-01-10 |
Hymmen Gmbh Maschinen & Anlage |
Vorrichtung zum Abtrennen einer überstehenden Deckschicht und Verfahren zum Beschichten von Platten
|
KR100493151B1
(ko)
|
2000-07-19 |
2005-06-02 |
삼성전자주식회사 |
멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
|
US6449106B1
(en)
*
|
2000-08-10 |
2002-09-10 |
Nikon Corporation |
Catadioptric lens barrel structure having a support structure to maintain alignment of a plurality of sub-barrels
|
US6566627B2
(en)
*
|
2000-08-11 |
2003-05-20 |
Westar Photonics, Inc. |
Laser method for shaping of optical lenses
|
KR100775796B1
(ko)
*
|
2000-08-18 |
2007-11-12 |
가부시키가이샤 니콘 |
광학소자 유지장치
|
JP4019160B2
(ja)
*
|
2000-08-21 |
2007-12-12 |
富士フイルム株式会社 |
遠隔操作システム
|
US6537479B1
(en)
|
2000-08-24 |
2003-03-25 |
Colbar Art, Inc. |
Subsurface engraving of three-dimensional sculpture
|
DE10048188A1
(de)
*
|
2000-09-28 |
2002-04-11 |
Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh |
Selbstverriegelnde Schaltungsanordnung
|
DE10051706A1
(de)
*
|
2000-10-18 |
2002-05-02 |
Zeiss Carl |
Vorrichtung zur Lagerung eines optischen Elementes
|
DE10053899A1
(de)
|
2000-10-31 |
2002-05-08 |
Zeiss Carl |
Vorrichtung zur Lagerung eines optischen Elementes
|
DE10115914A1
(de)
*
|
2001-03-30 |
2002-10-02 |
Zeiss Carl |
Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
|
DE10121346A1
(de)
*
|
2001-05-02 |
2002-11-07 |
Zeiss Carl |
Objektiv, insbesondere Projektionsobjektiv für die Halbleiter-Lithographie
|
DE10200366A1
(de)
*
|
2002-01-08 |
2003-07-17 |
Zeiss Optronik Gmbh |
Mehrkanalempfängersystem für winkelaufgelöste Laserentfernungsmessung
|
US6729062B2
(en)
*
|
2002-01-31 |
2004-05-04 |
Richard L. Thomas |
Mil.dot reticle and method for producing the same
|
US7265917B2
(en)
|
2003-12-23 |
2007-09-04 |
Carl Zeiss Smt Ag |
Replacement apparatus for an optical element
|