DE602004014968D1 - Elektrostatisch rückgekoppelter kapazitiver beschleunigungsaufnehmer mit ausgeglichener gasdämpfung - Google Patents
Elektrostatisch rückgekoppelter kapazitiver beschleunigungsaufnehmer mit ausgeglichener gasdämpfungInfo
- Publication number
- DE602004014968D1 DE602004014968D1 DE602004014968T DE602004014968T DE602004014968D1 DE 602004014968 D1 DE602004014968 D1 DE 602004014968D1 DE 602004014968 T DE602004014968 T DE 602004014968T DE 602004014968 T DE602004014968 T DE 602004014968T DE 602004014968 D1 DE602004014968 D1 DE 602004014968D1
- Authority
- DE
- Germany
- Prior art keywords
- retracted
- electrostatic
- gas damping
- balanced gas
- accelerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/718,974 US6935175B2 (en) | 2003-11-20 | 2003-11-20 | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping |
PCT/US2004/038864 WO2005052602A1 (en) | 2003-11-20 | 2004-11-19 | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004014968D1 true DE602004014968D1 (de) | 2008-08-21 |
Family
ID=34591205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004014968T Active DE602004014968D1 (de) | 2003-11-20 | 2004-11-19 | Elektrostatisch rückgekoppelter kapazitiver beschleunigungsaufnehmer mit ausgeglichener gasdämpfung |
Country Status (4)
Country | Link |
---|---|
US (2) | US6935175B2 (de) |
EP (1) | EP1685413B1 (de) |
DE (1) | DE602004014968D1 (de) |
WO (1) | WO2005052602A1 (de) |
Families Citing this family (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7146856B2 (en) * | 2004-06-07 | 2006-12-12 | Honeywell International, Inc. | Dynamically balanced capacitive pick-off accelerometer |
US7210352B2 (en) * | 2005-06-14 | 2007-05-01 | Innovative Micro Technology | MEMS teeter-totter apparatus with curved beam and method of manufacture |
DE102006022811A1 (de) * | 2006-05-16 | 2007-11-22 | Robert Bosch Gmbh | Beschleunigungssensor |
DE102006026880B4 (de) * | 2006-06-09 | 2023-02-16 | Robert Bosch Gmbh | Mikromechanischer Beschleunigungssensor |
WO2008023710A1 (fr) * | 2006-08-23 | 2008-02-28 | Asahi Kasei Emd Corporation | Modulateur delta-sigma |
DE102006057929A1 (de) * | 2006-12-08 | 2008-06-12 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor mit verringerter Empfindlichkeit gegenüber dem Einfluss driftender Oberflächenladungen und zu seinem Betrieb geeignetes Verfahren |
DE102006058747A1 (de) * | 2006-12-12 | 2008-06-19 | Robert Bosch Gmbh | Mikromechanischer z-Sensor |
US7610809B2 (en) * | 2007-01-18 | 2009-11-03 | Freescale Semiconductor, Inc. | Differential capacitive sensor and method of making same |
ITTO20070033A1 (it) * | 2007-01-19 | 2008-07-20 | St Microelectronics Srl | Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata |
US7578190B2 (en) * | 2007-08-03 | 2009-08-25 | Freescale Semiconductor, Inc. | Symmetrical differential capacitive sensor and method of making same |
US8079262B2 (en) * | 2007-10-26 | 2011-12-20 | Rosemount Aerospace Inc. | Pendulous accelerometer with balanced gas damping |
DE102009021567A1 (de) * | 2008-05-15 | 2009-12-31 | Continental Teves Ag & Co. Ohg | Mikromechanischer Beschleunigungssensor |
WO2010001947A1 (ja) * | 2008-07-04 | 2010-01-07 | アルプス電気株式会社 | 静電容量検出型の可動センサ |
US8171793B2 (en) | 2008-07-31 | 2012-05-08 | Honeywell International Inc. | Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer |
DE102008043788A1 (de) * | 2008-11-17 | 2010-05-20 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
DE102009026462B4 (de) * | 2009-05-26 | 2023-03-30 | Robert Bosch Gmbh | Beschleunigungssensor |
US7736931B1 (en) | 2009-07-20 | 2010-06-15 | Rosemount Aerospace Inc. | Wafer process flow for a high performance MEMS accelerometer |
JP2013501941A (ja) * | 2009-08-13 | 2013-01-17 | メギット (サン ファン キャピストラーノ) インコーポレイテッド | 高g範囲加速度センサにおける最大化された双方向の対称的な減衰のためのプルーフマス |
DE102009029248B4 (de) * | 2009-09-08 | 2022-12-15 | Robert Bosch Gmbh | Mikromechanisches System zum Erfassen einer Beschleunigung |
IT1401001B1 (it) * | 2010-06-15 | 2013-07-05 | Milano Politecnico | Accelerometro capacitivo triassiale microelettromeccanico |
US8839670B2 (en) * | 2010-11-24 | 2014-09-23 | Invensense, Inc. | Anchor-tilt cancelling accelerometer |
US8656778B2 (en) | 2010-12-30 | 2014-02-25 | Rosemount Aerospace Inc. | In-plane capacitive mems accelerometer |
JP5790296B2 (ja) | 2011-08-17 | 2015-10-07 | セイコーエプソン株式会社 | 物理量センサー及び電子機器 |
DE102011057110A1 (de) * | 2011-12-28 | 2013-07-04 | Maxim Integrated Products, Inc. | MEMS-Beschleunigungssensor |
US10371714B2 (en) * | 2012-06-14 | 2019-08-06 | Analog Devices, Inc. | Teeter-totter type MEMS accelerometer with electrodes on circuit wafer |
US9290067B2 (en) * | 2012-08-30 | 2016-03-22 | Freescale Semiconductor, Inc. | Pressure sensor with differential capacitive output |
US9470709B2 (en) | 2013-01-28 | 2016-10-18 | Analog Devices, Inc. | Teeter totter accelerometer with unbalanced mass |
CN104981425B (zh) * | 2013-01-31 | 2016-10-05 | 惠普发展公司,有限责任合伙企业 | 具有微粒屏障的传感器 |
US9297825B2 (en) | 2013-03-05 | 2016-03-29 | Analog Devices, Inc. | Tilt mode accelerometer with improved offset and noise performance |
CN104166016B (zh) * | 2013-05-16 | 2016-06-01 | 中国科学院地质与地球物理研究所 | 一种高灵敏度三轴mems加速度计及其制造工艺 |
US10081535B2 (en) | 2013-06-25 | 2018-09-25 | Analog Devices, Inc. | Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry |
US9556017B2 (en) | 2013-06-25 | 2017-01-31 | Analog Devices, Inc. | Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry |
JP6146566B2 (ja) * | 2013-08-06 | 2017-06-14 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
DE102013216915A1 (de) * | 2013-08-26 | 2015-02-26 | Robert Bosch Gmbh | Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors |
JP2015072188A (ja) | 2013-10-03 | 2015-04-16 | セイコーエプソン株式会社 | 物理量検出素子、および物理量検出装置、電子機器、移動体 |
US8893563B1 (en) | 2014-01-15 | 2014-11-25 | King Fahd University Of Petroleum And Minerals | Differential capacitance torque sensor |
JP2015210095A (ja) * | 2014-04-24 | 2015-11-24 | 日立オートモティブシステムズ株式会社 | 加速度センサ |
JP6655281B2 (ja) * | 2014-08-19 | 2020-02-26 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
US9604841B2 (en) | 2014-11-06 | 2017-03-28 | Analog Devices, Inc. | MEMS sensor cap with multiple isolated electrodes |
US10073113B2 (en) | 2014-12-22 | 2018-09-11 | Analog Devices, Inc. | Silicon-based MEMS devices including wells embedded with high density metal |
CN106153982B (zh) * | 2015-04-03 | 2019-05-17 | 中芯国际集成电路制造(上海)有限公司 | 一种mems加速度传感器及其制作方法 |
US10078098B2 (en) | 2015-06-23 | 2018-09-18 | Analog Devices, Inc. | Z axis accelerometer design with offset compensation |
JP6631108B2 (ja) | 2015-09-15 | 2020-01-15 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器および移動体 |
JP6437429B2 (ja) * | 2015-12-25 | 2018-12-12 | 株式会社日立製作所 | 加速度センサ、受振器および地震探査システム |
DE102016203153A1 (de) * | 2016-02-29 | 2017-08-31 | Robert Bosch Gmbh | Verfahren zum Betreiben eines mikromechanischen z-Beschleunigungssensors |
WO2017150201A1 (ja) | 2016-03-03 | 2017-09-08 | セイコーエプソン株式会社 | センサーデバイス、電子機器、および移動体 |
DE102016209241A1 (de) * | 2016-05-27 | 2017-11-30 | Robert Bosch Gmbh | Mikromechanisches Bauteil für eine Drucksensorvorrichtung |
JP6816603B2 (ja) | 2017-03-27 | 2021-01-20 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
JP6911444B2 (ja) | 2017-03-27 | 2021-07-28 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
US20190049482A1 (en) * | 2017-08-10 | 2019-02-14 | Analog Devices, Inc. | Differential z-axis resonant mems accelerometers and related methods |
JP6943121B2 (ja) | 2017-09-29 | 2021-09-29 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
US10895457B2 (en) | 2018-03-08 | 2021-01-19 | Analog Devices, Inc. | Differential z-axis resonant accelerometry |
DE102018211547A1 (de) * | 2018-07-11 | 2020-01-16 | Robert Bosch Gmbh | Mikromechanischer Sensor |
JP2020030067A (ja) * | 2018-08-21 | 2020-02-27 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器、および移動体 |
JP2021001853A (ja) * | 2019-06-24 | 2021-01-07 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
JP7331498B2 (ja) | 2019-06-27 | 2023-08-23 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
JP7383978B2 (ja) * | 2019-10-23 | 2023-11-21 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
IT202000003868A1 (it) * | 2020-02-25 | 2021-08-25 | St Microelectronics Srl | Inclinometro mems avente ridotto errore di rettificazione di vibrazioni |
JP2021173536A (ja) | 2020-04-20 | 2021-11-01 | セイコーエプソン株式会社 | 慣性センサー、電子機器、及び移動体 |
JP2021173700A (ja) | 2020-04-28 | 2021-11-01 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP2022079809A (ja) * | 2020-11-17 | 2022-05-27 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス及び慣性計測装置 |
EP4123313A1 (de) * | 2021-07-23 | 2023-01-25 | STMicroelectronics S.r.l. | Mikroelektromechanischer beschleunigungsmesser mit geschlossenem regelkreis und kompensation von störschwingungsmoden und verfahren zur herstellung eines mikroelektromechanischen beschleunigungsmessers |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
US4945765A (en) | 1988-08-31 | 1990-08-07 | Kearfott Guidance & Navigation Corp. | Silicon micromachined accelerometer |
US5006487A (en) | 1989-07-27 | 1991-04-09 | Honeywell Inc. | Method of making an electrostatic silicon accelerometer |
US5659195A (en) * | 1995-06-08 | 1997-08-19 | The Regents Of The University Of California | CMOS integrated microsensor with a precision measurement circuit |
DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
US6040611A (en) * | 1998-09-10 | 2000-03-21 | Hughes Electonics Corporation | Microelectromechanical device |
DE19925979B4 (de) * | 1999-06-08 | 2004-07-01 | Eads Deutschland Gmbh | Vorrichtung und Verfahren zur Bestimmung von Frequenz und Amplitude einer schwingenden Struktur, insbesondere zur Messung von Beschleunigungen oder Drehraten |
US6230567B1 (en) * | 1999-08-03 | 2001-05-15 | The Charles Stark Draper Laboratory, Inc. | Low thermal strain flexure support for a micromechanical device |
JP2004530897A (ja) | 2001-06-18 | 2004-10-07 | ハネウェル・インターナショナル・インコーポレーテッド | 小型で容量表示値が高いシリコン系mems加速度計 |
US6701779B2 (en) * | 2002-03-21 | 2004-03-09 | International Business Machines Corporation | Perpendicular torsion micro-electromechanical switch |
US6841992B2 (en) * | 2003-02-18 | 2005-01-11 | Honeywell International, Inc. | MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement |
-
2003
- 2003-11-20 US US10/718,974 patent/US6935175B2/en not_active Expired - Lifetime
-
2004
- 2004-11-19 WO PCT/US2004/038864 patent/WO2005052602A1/en not_active Application Discontinuation
- 2004-11-19 DE DE602004014968T patent/DE602004014968D1/de active Active
- 2004-11-19 EP EP04811564A patent/EP1685413B1/de active Active
-
2005
- 2005-02-23 US US11/064,608 patent/US7022543B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20050139942A1 (en) | 2005-06-30 |
WO2005052602A1 (en) | 2005-06-09 |
US20050109109A1 (en) | 2005-05-26 |
EP1685413A1 (de) | 2006-08-02 |
US6935175B2 (en) | 2005-08-30 |
US7022543B2 (en) | 2006-04-04 |
EP1685413B1 (de) | 2008-07-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |