DE602004014420D1 - Apparat zum Transport von Substrathaltern - Google Patents
Apparat zum Transport von SubstrathalternInfo
- Publication number
- DE602004014420D1 DE602004014420D1 DE602004014420T DE602004014420T DE602004014420D1 DE 602004014420 D1 DE602004014420 D1 DE 602004014420D1 DE 602004014420 T DE602004014420 T DE 602004014420T DE 602004014420 T DE602004014420 T DE 602004014420T DE 602004014420 D1 DE602004014420 D1 DE 602004014420D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate holders
- transporting substrate
- transporting
- holders
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01K—ANIMAL HUSBANDRY; CARE OF BIRDS, FISHES, INSECTS; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
- A01K93/00—Floats for angling, with or without signalling devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01K—ANIMAL HUSBANDRY; CARE OF BIRDS, FISHES, INSECTS; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
- A01K97/00—Accessories for angling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
- B65G17/20—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface comprising load-carriers suspended from overhead traction chains
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US44308703P | 2003-01-27 | 2003-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE602004014420D1 true DE602004014420D1 (de) | 2008-07-24 |
Family
ID=32655739
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE602004002971T Expired - Lifetime DE602004002971T2 (de) | 2003-01-27 | 2004-01-27 | Verfahren und Apparate zum Transportieren von Substrathaltern |
| DE602004014420T Expired - Lifetime DE602004014420D1 (de) | 2003-01-27 | 2004-01-27 | Apparat zum Transport von Substrathaltern |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE602004002971T Expired - Lifetime DE602004002971T2 (de) | 2003-01-27 | 2004-01-27 | Verfahren und Apparate zum Transportieren von Substrathaltern |
Country Status (8)
| Country | Link |
|---|---|
| US (5) | US7077264B2 (de) |
| EP (2) | EP1975996A3 (de) |
| JP (1) | JP4537720B2 (de) |
| KR (1) | KR101107368B1 (de) |
| CN (1) | CN1537797B (de) |
| DE (2) | DE602004002971T2 (de) |
| TW (1) | TWI330166B (de) |
| WO (1) | WO2004068563A2 (de) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7684895B2 (en) | 2002-08-31 | 2010-03-23 | Applied Materials, Inc. | Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event |
| US7506746B2 (en) | 2002-08-31 | 2009-03-24 | Applied Materials, Inc. | System for transporting substrate carriers |
| US7243003B2 (en) | 2002-08-31 | 2007-07-10 | Applied Materials, Inc. | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor |
| US7930061B2 (en) | 2002-08-31 | 2011-04-19 | Applied Materials, Inc. | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback |
| US7778721B2 (en) * | 2003-01-27 | 2010-08-17 | Applied Materials, Inc. | Small lot size lithography bays |
| US7077264B2 (en) * | 2003-01-27 | 2006-07-18 | Applied Material, Inc. | Methods and apparatus for transporting substrate carriers |
| US7221993B2 (en) * | 2003-01-27 | 2007-05-22 | Applied Materials, Inc. | Systems and methods for transferring small lot size substrate carriers between processing tools |
| US7578647B2 (en) * | 2003-01-27 | 2009-08-25 | Applied Materials, Inc. | Load port configurations for small lot size substrate carriers |
| US7611318B2 (en) * | 2003-01-27 | 2009-11-03 | Applied Materials, Inc. | Overhead transfer flange and support for suspending a substrate carrier |
| KR20050038134A (ko) * | 2003-10-21 | 2005-04-27 | 삼성전자주식회사 | 기판 스토킹 시스템 |
| US7218983B2 (en) * | 2003-11-06 | 2007-05-15 | Applied Materials, Inc. | Method and apparatus for integrating large and small lot electronic device fabrication facilities |
| US7720557B2 (en) * | 2003-11-06 | 2010-05-18 | Applied Materials, Inc. | Methods and apparatus for enhanced operation of substrate carrier handlers |
| US20050209721A1 (en) * | 2003-11-06 | 2005-09-22 | Applied Materials, Inc. | Methods and apparatus for enhanced operation of substrate carrier handlers |
| TWI367192B (en) * | 2003-11-13 | 2012-07-01 | Applied Materials Inc | Calibration of high speed loader to substrate transport system |
| TWI348450B (en) * | 2003-11-13 | 2011-09-11 | Applied Materials Inc | Break-away positioning conveyor mount for accommodating conveyor belt bends |
| TW200524073A (en) * | 2003-11-13 | 2005-07-16 | Applied Materials Inc | Kinematic pin with shear member and substrate carrier for use therewith |
| TWI290875B (en) * | 2004-02-28 | 2007-12-11 | Applied Materials Inc | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility |
| US7274971B2 (en) * | 2004-02-28 | 2007-09-25 | Applied Materials, Inc. | Methods and apparatus for electronic device manufacturing system monitoring and control |
| TWI316044B (en) | 2004-02-28 | 2009-10-21 | Applied Materials Inc | Methods and apparatus for material control system interface |
| US7611319B2 (en) | 2004-06-16 | 2009-11-03 | Applied Materials, Inc. | Methods and apparatus for identifying small lot size substrate carriers |
| US7577487B2 (en) * | 2005-09-14 | 2009-08-18 | Applied Materials, Inc. | Methods and apparatus for a band to band transfer module |
| US20080107507A1 (en) * | 2005-11-07 | 2008-05-08 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
| KR20140091768A (ko) * | 2005-11-07 | 2014-07-22 | 브룩스 오토메이션 인코퍼레이티드 | 반도체 작업대상물 공정처리 시스템 |
| US20070201967A1 (en) * | 2005-11-07 | 2007-08-30 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
| US8267634B2 (en) * | 2005-11-07 | 2012-09-18 | Brooks Automation, Inc. | Reduced capacity carrier, transport, load port, buffer system |
| US8272827B2 (en) * | 2005-11-07 | 2012-09-25 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
| DE102006062530B4 (de) * | 2006-12-29 | 2016-06-23 | Siegmund Kumeth | Transportsystem für Werkstücke |
| US20080279658A1 (en) * | 2007-05-11 | 2008-11-13 | Bachrach Robert Z | Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory |
| US20080279672A1 (en) * | 2007-05-11 | 2008-11-13 | Bachrach Robert Z | Batch equipment robots and methods of stack to array work-piece transfer for photovoltaic factory |
| US7496423B2 (en) * | 2007-05-11 | 2009-02-24 | Applied Materials, Inc. | Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots |
| US20080293329A1 (en) * | 2007-05-21 | 2008-11-27 | Applied Materials, Inc. | Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile |
| US7816617B2 (en) | 2007-05-21 | 2010-10-19 | Lockheed Martin Corporation | Configurable intelligent conveyor system and method |
| JP5504164B2 (ja) * | 2007-10-22 | 2014-05-28 | アプライド マテリアルズ インコーポレイテッド | 基板キャリアを移送するための方法および装置 |
| DE202014101003U1 (de) * | 2014-03-06 | 2015-06-17 | Kuka Systems Gmbh | Fertigungsanlage |
| CN104016069B (zh) * | 2014-06-12 | 2016-11-23 | 江苏恒康家居科技股份有限公司 | 一种慢回弹海绵枕输送系统 |
| EP3336016B1 (de) * | 2015-08-14 | 2021-06-16 | Murata Machinery, Ltd. | Förderwagensystem |
| CN106386727A (zh) * | 2016-11-22 | 2017-02-15 | 郑飚 | 一种智能鱼漂 |
| JP6710321B2 (ja) * | 2017-03-29 | 2020-06-17 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板移載ユニット及び基板処理装置及び半導体装置の製造方法 |
| CN114851117B (zh) * | 2022-06-30 | 2022-09-09 | 四川晁禾微电子有限公司 | 一种三极管散热片组装夹具及设备 |
| CN116960040B (zh) * | 2023-09-15 | 2023-11-24 | 季华实验室 | 空中运输车控制方法、系统、电子设备及存储介质 |
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-
2004
- 2004-01-26 US US10/764,982 patent/US7077264B2/en not_active Expired - Lifetime
- 2004-01-27 EP EP08010509A patent/EP1975996A3/de not_active Withdrawn
- 2004-01-27 DE DE602004002971T patent/DE602004002971T2/de not_active Expired - Lifetime
- 2004-01-27 KR KR1020040005176A patent/KR101107368B1/ko not_active IP Right Cessation
- 2004-01-27 DE DE602004014420T patent/DE602004014420D1/de not_active Expired - Lifetime
- 2004-01-27 TW TW093101777A patent/TWI330166B/zh active
- 2004-01-27 JP JP2004018800A patent/JP4537720B2/ja not_active Expired - Fee Related
- 2004-01-27 WO PCT/US2004/002402 patent/WO2004068563A2/en active Application Filing
- 2004-01-27 CN CN2004100352187A patent/CN1537797B/zh not_active Expired - Fee Related
- 2004-01-27 EP EP04250424A patent/EP1445794B1/de not_active Expired - Lifetime
-
2006
- 2006-06-27 US US11/476,994 patent/US7293642B2/en not_active Expired - Fee Related
- 2006-07-28 US US11/494,904 patent/US7506752B2/en not_active Expired - Fee Related
- 2006-10-31 US US11/554,919 patent/US7367446B2/en not_active Expired - Fee Related
-
2007
- 2007-08-14 US US11/838,354 patent/US7537108B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7506752B2 (en) | 2009-03-24 |
| EP1975996A3 (de) | 2012-08-08 |
| EP1445794A3 (de) | 2004-10-06 |
| DE602004002971T2 (de) | 2007-03-01 |
| TWI330166B (en) | 2010-09-11 |
| US20070278067A1 (en) | 2007-12-06 |
| JP4537720B2 (ja) | 2010-09-08 |
| EP1445794B1 (de) | 2006-11-02 |
| WO2004068563A2 (en) | 2004-08-12 |
| US7537108B2 (en) | 2009-05-26 |
| DE602004002971D1 (de) | 2006-12-14 |
| CN1537797B (zh) | 2010-09-29 |
| US20060243565A1 (en) | 2006-11-02 |
| KR101107368B1 (ko) | 2012-01-19 |
| JP2004274033A (ja) | 2004-09-30 |
| EP1975996A2 (de) | 2008-10-01 |
| TW200415098A (en) | 2004-08-16 |
| US7077264B2 (en) | 2006-07-18 |
| US7293642B2 (en) | 2007-11-13 |
| US7367446B2 (en) | 2008-05-06 |
| KR20040068881A (ko) | 2004-08-02 |
| US20040191030A1 (en) | 2004-09-30 |
| US20070056834A1 (en) | 2007-03-15 |
| US20060260916A1 (en) | 2006-11-23 |
| EP1445794A2 (de) | 2004-08-11 |
| CN1537797A (zh) | 2004-10-20 |
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