DE60140914D1 - Elektrolumineszenzanzeige mit aktiver Matrix - Google Patents

Elektrolumineszenzanzeige mit aktiver Matrix

Info

Publication number
DE60140914D1
DE60140914D1 DE60140914T DE60140914T DE60140914D1 DE 60140914 D1 DE60140914 D1 DE 60140914D1 DE 60140914 T DE60140914 T DE 60140914T DE 60140914 T DE60140914 T DE 60140914T DE 60140914 D1 DE60140914 D1 DE 60140914D1
Authority
DE
Germany
Prior art keywords
active matrix
electroluminescent display
electroluminescent
display
matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60140914T
Other languages
English (en)
Inventor
Shunpei Yamazaki
Jun Koyama
Kazutaka Inukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Application granted granted Critical
Publication of DE60140914D1 publication Critical patent/DE60140914D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/126Shielding, e.g. light-blocking means over the TFTs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/04Structural and physical details of display devices
    • G09G2300/0439Pixel structures
    • G09G2300/0465Improved aperture ratio, e.g. by size reduction of the pixel circuit, e.g. for improving the pixel density or the maximum displayable luminance or brightness
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00Aspects of the constitution of display devices
    • G09G2300/08Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809Several active elements per pixel in active matrix panels
    • G09G2300/0842Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00Command of the display device
    • G09G2310/02Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0243Details of the generation of driving signals
    • G09G2310/0251Precharge or discharge of pixel before applying new pixel voltage
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • G09G3/3208Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
    • G09G3/3225Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
    • H01L29/78627Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile with a significant overlap between the lightly doped drain and the gate electrode, e.g. GOLDD
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
DE60140914T 2000-02-28 2001-02-28 Elektrolumineszenzanzeige mit aktiver Matrix Expired - Lifetime DE60140914D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000050584 2000-02-28

Publications (1)

Publication Number Publication Date
DE60140914D1 true DE60140914D1 (de) 2010-02-11

Family

ID=18572350

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60140914T Expired - Lifetime DE60140914D1 (de) 2000-02-28 2001-02-28 Elektrolumineszenzanzeige mit aktiver Matrix

Country Status (8)

Country Link
US (3) US6690033B2 (de)
EP (1) EP1128439B1 (de)
KR (1) KR100688049B1 (de)
CN (1) CN1227739C (de)
DE (1) DE60140914D1 (de)
MY (1) MY124868A (de)
SG (1) SG88812A1 (de)
TW (1) TW521303B (de)

Families Citing this family (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3126661B2 (ja) * 1996-06-25 2001-01-22 株式会社半導体エネルギー研究所 液晶表示装置
US6512504B1 (en) 1999-04-27 2003-01-28 Semiconductor Energy Laborayory Co., Ltd. Electronic device and electronic apparatus
JP5210473B2 (ja) * 1999-06-21 2013-06-12 株式会社半導体エネルギー研究所 表示装置
TW468283B (en) * 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
TW471011B (en) 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
US6646692B2 (en) * 2000-01-26 2003-11-11 Semiconductor Energy Laboratory Co., Ltd. Liquid-crystal display device and method of fabricating the same
US6825488B2 (en) 2000-01-26 2004-11-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
TW495808B (en) * 2000-02-04 2002-07-21 Semiconductor Energy Lab Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus
US7023021B2 (en) * 2000-02-22 2006-04-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
TW521303B (en) * 2000-02-28 2003-02-21 Semiconductor Energy Lab Electronic device
TW507258B (en) 2000-02-29 2002-10-21 Semiconductor Systems Corp Display device and method for fabricating the same
TW521226B (en) * 2000-03-27 2003-02-21 Semiconductor Energy Lab Electro-optical device
US6789910B2 (en) 2000-04-12 2004-09-14 Semiconductor Energy Laboratory, Co., Ltd. Illumination apparatus
US7525165B2 (en) * 2000-04-17 2009-04-28 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and manufacturing method thereof
US6580475B2 (en) * 2000-04-27 2003-06-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
US7804552B2 (en) * 2000-05-12 2010-09-28 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device with light shielding portion comprising laminated colored layers, electrical equipment having the same, portable telephone having the same
US7633471B2 (en) 2000-05-12 2009-12-15 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electric appliance
TWI224806B (en) * 2000-05-12 2004-12-01 Semiconductor Energy Lab Semiconductor device and manufacturing method thereof
US6509616B2 (en) 2000-09-29 2003-01-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
TW525216B (en) 2000-12-11 2003-03-21 Semiconductor Energy Lab Semiconductor device, and manufacturing method thereof
SG111923A1 (en) * 2000-12-21 2005-06-29 Semiconductor Energy Lab Light emitting device and method of manufacturing the same
JP4831892B2 (ja) 2001-07-30 2011-12-07 株式会社半導体エネルギー研究所 半導体装置
TWI221268B (en) * 2001-09-07 2004-09-21 Semiconductor Energy Lab Light emitting device and method of driving the same
US7488986B2 (en) * 2001-10-26 2009-02-10 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US6956240B2 (en) * 2001-10-30 2005-10-18 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
KR100940342B1 (ko) 2001-11-13 2010-02-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시장치 및 그 구동방법
US7483001B2 (en) 2001-11-21 2009-01-27 Seiko Epson Corporation Active matrix substrate, electro-optical device, and electronic device
US8153184B2 (en) * 2001-11-26 2012-04-10 Samsung Mobile Display Co., Ltd. Organic EL display device and method of manufacturing the same
KR100656490B1 (ko) * 2001-11-26 2006-12-12 삼성에스디아이 주식회사 풀칼라 유기전계 발광표시소자 및 그의 제조방법
US6835954B2 (en) * 2001-12-29 2004-12-28 Lg.Philips Lcd Co., Ltd. Active matrix organic electroluminescent display device
KR100426031B1 (ko) * 2001-12-29 2004-04-03 엘지.필립스 엘시디 주식회사 능동행렬 유기전기발광소자 및 그의 제조 방법
CN101673508B (zh) * 2002-01-18 2013-01-09 株式会社半导体能源研究所 发光器件
US7230592B2 (en) * 2002-03-04 2007-06-12 Hitachi, Ltd. Organic electroluminescent light emitting display device
JP4216092B2 (ja) * 2002-03-08 2009-01-28 株式会社半導体エネルギー研究所 液晶表示装置
TWI282030B (en) * 2002-03-19 2007-06-01 Semiconductor Energy Lab Liquid crystal display device and method of driving the same
JP3989761B2 (ja) 2002-04-09 2007-10-10 株式会社半導体エネルギー研究所 半導体表示装置
US7038239B2 (en) 2002-04-09 2006-05-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor element and display device using the same
US7411215B2 (en) 2002-04-15 2008-08-12 Semiconductor Energy Laboratory Co., Ltd. Display device and method of fabricating the same
JP3989763B2 (ja) 2002-04-15 2007-10-10 株式会社半導体エネルギー研究所 半導体表示装置
US6911781B2 (en) 2002-04-23 2005-06-28 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and production system of the same
JP2003330388A (ja) * 2002-05-15 2003-11-19 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
TWI360098B (en) * 2002-05-17 2012-03-11 Semiconductor Energy Lab Display apparatus and driving method thereof
US7474285B2 (en) 2002-05-17 2009-01-06 Semiconductor Energy Laboratory Co., Ltd. Display apparatus and driving method thereof
TWI345211B (en) * 2002-05-17 2011-07-11 Semiconductor Energy Lab Display apparatus and driving method thereof
US7184034B2 (en) * 2002-05-17 2007-02-27 Semiconductor Energy Laboratory Co., Ltd. Display device
US7256421B2 (en) 2002-05-17 2007-08-14 Semiconductor Energy Laboratory, Co., Ltd. Display device having a structure for preventing the deterioration of a light emitting device
JP4086550B2 (ja) * 2002-05-30 2008-05-14 三洋電機株式会社 表示装置
JP4434563B2 (ja) * 2002-09-12 2010-03-17 パイオニア株式会社 有機el表示装置の製造方法
AU2003275615A1 (en) * 2002-11-01 2004-05-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
TW575961B (en) * 2002-12-03 2004-02-11 Quanta Display Inc Pixel structure
US7112113B2 (en) * 2002-12-25 2006-09-26 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of display device
US7221095B2 (en) * 2003-06-16 2007-05-22 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method for fabricating light emitting device
CN101777628B (zh) 2003-09-26 2013-03-13 株式会社半导体能源研究所 发光元件及其制造方法
EP1521316B1 (de) * 2003-10-03 2016-05-25 Semiconductor Energy Laboratory Co., Ltd. Verfahren zur herstellung ein lichtemittierendes Element
CA2546325A1 (en) * 2003-11-03 2005-05-26 General Mills Marketing, Inc. Dough and method for preparing leavened food product
US20060139342A1 (en) * 2004-12-29 2006-06-29 Gang Yu Electronic devices and processes for forming electronic devices
JP4287337B2 (ja) 2003-11-24 2009-07-01 三星モバイルディスプレイ株式會社 有機電界発光表示装置及びその製造方法
KR100786071B1 (ko) * 2003-12-08 2007-12-18 엘지전자 주식회사 유기 el 소자 및 그의 제조방법
US8796670B2 (en) * 2003-12-26 2014-08-05 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element
US7208401B2 (en) * 2004-03-12 2007-04-24 Hewlett-Packard Development Company, L.P. Method for forming a thin film
KR100584715B1 (ko) * 2004-04-06 2006-05-29 엘지.필립스 엘시디 주식회사 구동회로 일체형 액정표시장치용 어레이 기판의 제조 방법
JP2006295104A (ja) 2004-07-23 2006-10-26 Semiconductor Energy Lab Co Ltd 発光素子およびそれを用いた発光装置
CN101841002B (zh) 2004-09-24 2011-11-16 株式会社半导体能源研究所 发光器件
WO2006046678A1 (en) 2004-10-29 2006-05-04 Semiconductor Energy Laboratory Co., Ltd. Composite material, light-emittintg element, light-emitting device, and manufacturing method thereof
US20060091397A1 (en) * 2004-11-04 2006-05-04 Kengo Akimoto Display device and method for manufacturing the same
US20060099344A1 (en) 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
US7612368B2 (en) * 2004-12-29 2009-11-03 E.I. Du Pont De Nemours And Company Organic bottom emission electronic device
US20060138403A1 (en) * 2004-12-29 2006-06-29 Gang Yu Organic electronic devices including pixels
US8420227B2 (en) * 2005-03-23 2013-04-16 Semiconductor Energy Laboratory Co., Ltd. Composite material, light emitting element and light emitting device
US7851989B2 (en) * 2005-03-25 2010-12-14 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
EP1724852A3 (de) 2005-05-20 2010-01-27 Semiconductor Energy Laboratory Co., Ltd. Lichtemittierendes Bauelement, lichtemittierende Vorrichtung, und elektronische Vorrichtung
US8334057B2 (en) * 2005-06-08 2012-12-18 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element, light-emitting device, and electronic device
KR100712295B1 (ko) * 2005-06-22 2007-04-27 삼성에스디아이 주식회사 유기 전계 발광 소자 및 그 제조 방법
US8017252B2 (en) 2005-06-22 2011-09-13 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and electronic appliance using the same
US20070002199A1 (en) * 2005-06-30 2007-01-04 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and method for manufacturing the same
US7745989B2 (en) * 2005-06-30 2010-06-29 Semiconductor Energy Laboratory Co., Ltd Light emitting element, light emitting device, and electronic apparatus
KR101324756B1 (ko) 2005-10-18 2013-11-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시장치 및 그의 구동방법
KR101263196B1 (ko) * 2006-01-02 2013-05-10 삼성디스플레이 주식회사 표시 기판 및 이의 제조 방법
US7863612B2 (en) 2006-07-21 2011-01-04 Semiconductor Energy Laboratory Co., Ltd. Display device and semiconductor device
KR101294260B1 (ko) * 2006-08-18 2013-08-06 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
US8030114B2 (en) * 2007-01-31 2011-10-04 Taiwan Semiconductor Manufacturing Company, Ltd. Method and structure to reduce dark current in image sensors
JP5151172B2 (ja) 2007-02-14 2013-02-27 ソニー株式会社 画素回路および表示装置
JP2010153365A (ja) * 2008-11-19 2010-07-08 Semiconductor Energy Lab Co Ltd 発光素子、発光装置、電子機器及び照明装置
US20100224878A1 (en) 2009-03-05 2010-09-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8404500B2 (en) * 2009-11-02 2013-03-26 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing light-emitting element, light-emitting element, light-emitting device, lighting device, and electronic appliance
JP5969216B2 (ja) 2011-02-11 2016-08-17 株式会社半導体エネルギー研究所 発光素子、表示装置、照明装置、及びこれらの作製方法
KR101924526B1 (ko) * 2012-08-22 2018-12-04 삼성디스플레이 주식회사 유기 발광 표시장치 및 그 제조방법
KR102250061B1 (ko) 2013-04-15 2021-05-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치
KR102113173B1 (ko) * 2013-07-03 2020-05-21 삼성디스플레이 주식회사 유기발광표시장치
CN103474453B (zh) * 2013-09-23 2016-09-21 京东方科技集团股份有限公司 电致发光装置及其制备方法
KR102360783B1 (ko) 2014-09-16 2022-02-10 삼성디스플레이 주식회사 디스플레이 장치
JP6586102B2 (ja) 2014-10-29 2019-10-02 株式会社半導体エネルギー研究所 表示装置、または電子機器
CN107134460B (zh) * 2017-04-11 2019-08-02 深圳市华星光电半导体显示技术有限公司 显示装置及其goa电路
KR102482408B1 (ko) * 2017-05-19 2022-12-28 삼성디스플레이 주식회사 표시 장치
JP6702492B2 (ja) * 2019-09-02 2020-06-03 セイコーエプソン株式会社 電気光学装置及び電子機器

Family Cites Families (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122990A (en) * 1978-03-16 1979-09-22 Sharp Corp Manufacture for thin film el panel
JPS6045219A (ja) * 1983-08-23 1985-03-11 Toshiba Corp アクテイブマトリクス型表示装置
JPS63186216A (ja) * 1987-01-28 1988-08-01 Nec Corp アクテイブマトリツクス液晶表示器
JP2620240B2 (ja) * 1987-06-10 1997-06-11 株式会社日立製作所 液晶表示装置
JPS6472557A (en) * 1987-09-11 1989-03-17 Seiko Instr & Electronics Image sensor
US4802873A (en) * 1987-10-05 1989-02-07 Planar Systems, Inc. Method of encapsulating TFEL panels with a curable resin
JPH04313729A (ja) 1991-04-09 1992-11-05 Mitsubishi Electric Corp 液晶表示装置
US5194027A (en) * 1991-09-09 1993-03-16 Planar Systems, Inc. Solid seal for thin film electroluminescent display panels
US6759680B1 (en) * 1991-10-16 2004-07-06 Semiconductor Energy Laboratory Co., Ltd. Display device having thin film transistors
EP0909972A3 (de) * 1992-03-13 1999-06-09 Kopin Corporation Verfahren zur Herstellung einer hochauflösenden Flüssigkristallanzeigevorrichtung
JPH06148685A (ja) 1992-11-13 1994-05-27 Toshiba Corp 液晶表示装置
JP3587537B2 (ja) 1992-12-09 2004-11-10 株式会社半導体エネルギー研究所 半導体装置
TW425637B (en) * 1993-01-18 2001-03-11 Semiconductor Energy Lab Method of fabricating mis semiconductor device
US5336879A (en) * 1993-05-28 1994-08-09 David Sarnoff Research Center, Inc. Pixel array having image forming pixel elements integral with peripheral circuit elements
US6980275B1 (en) 1993-09-20 2005-12-27 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device
JP2821347B2 (ja) * 1993-10-12 1998-11-05 日本電気株式会社 電流制御型発光素子アレイ
JP3431033B2 (ja) 1993-10-29 2003-07-28 株式会社半導体エネルギー研究所 半導体作製方法
TW264575B (de) 1993-10-29 1995-12-01 Handotai Energy Kenkyusho Kk
US5923962A (en) 1993-10-29 1999-07-13 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device
JP3398453B2 (ja) 1994-02-24 2003-04-21 株式会社東芝 薄膜トランジスタの製造方法
JPH07302912A (ja) * 1994-04-29 1995-11-14 Semiconductor Energy Lab Co Ltd 半導体装置
CN1161646C (zh) 1994-06-02 2004-08-11 株式会社半导体能源研究所 有源矩阵显示器和电光元件
JP3312083B2 (ja) 1994-06-13 2002-08-05 株式会社半導体エネルギー研究所 表示装置
US5714968A (en) * 1994-08-09 1998-02-03 Nec Corporation Current-dependent light-emitting element drive circuit for use in active matrix display device
US5550066A (en) 1994-12-14 1996-08-27 Eastman Kodak Company Method of fabricating a TFT-EL pixel
US5640067A (en) * 1995-03-24 1997-06-17 Tdk Corporation Thin film transistor, organic electroluminescence display device and manufacturing method of the same
JP3539821B2 (ja) 1995-03-27 2004-07-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
JPH08274336A (ja) 1995-03-30 1996-10-18 Toshiba Corp 多結晶半導体薄膜トランジスタ及びその製造方法
JPH0926603A (ja) 1995-05-08 1997-01-28 Semiconductor Energy Lab Co Ltd 表示装置
US5900767A (en) * 1995-06-24 1999-05-04 U.S. Philips Corporation Electronic devices comprising an array
JPH09105953A (ja) 1995-10-12 1997-04-22 Semiconductor Energy Lab Co Ltd 液晶表示装置
TW329500B (en) * 1995-11-14 1998-04-11 Handotai Energy Kenkyusho Kk Electro-optical device
GB9524560D0 (en) * 1995-12-01 1996-01-31 Philips Electronics Nv Multiplexer circuit
JP3383535B2 (ja) 1995-12-14 2003-03-04 株式会社半導体エネルギー研究所 半導体装置
TW309633B (de) 1995-12-14 1997-07-01 Handotai Energy Kenkyusho Kk
KR100386203B1 (ko) 1996-02-29 2003-12-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 전기광학장치및그제조방법
JP3219685B2 (ja) * 1996-06-04 2001-10-15 キヤノン株式会社 液晶表示装置およびその製造方法
JPH1027913A (ja) 1996-07-09 1998-01-27 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JPH10104663A (ja) * 1996-09-27 1998-04-24 Semiconductor Energy Lab Co Ltd 電気光学装置およびその作製方法
KR100225097B1 (ko) * 1996-10-29 1999-10-15 구자홍 액정표시장치 및 그 제조방법
JPH10134959A (ja) 1996-10-29 1998-05-22 Sharp Corp 薄膜elパネル
JPH10144928A (ja) * 1996-11-08 1998-05-29 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
JP3525316B2 (ja) * 1996-11-12 2004-05-10 株式会社半導体エネルギー研究所 アクティブマトリクス型表示装置
JPH10154816A (ja) * 1996-11-21 1998-06-09 Semiconductor Energy Lab Co Ltd 半導体装置
US5821692A (en) * 1996-11-26 1998-10-13 Motorola, Inc. Organic electroluminescent device hermetic encapsulation package
JP3392672B2 (ja) * 1996-11-29 2003-03-31 三洋電機株式会社 表示装置
JP3281848B2 (ja) * 1996-11-29 2002-05-13 三洋電機株式会社 表示装置
JP3463971B2 (ja) 1996-12-26 2003-11-05 出光興産株式会社 有機アクティブel発光装置
JP3716580B2 (ja) * 1997-02-27 2005-11-16 セイコーエプソン株式会社 液晶装置及びその製造方法、並びに投写型表示装置
US5929474A (en) * 1997-03-10 1999-07-27 Motorola, Inc. Active matrix OED array
JP3544280B2 (ja) 1997-03-27 2004-07-21 株式会社半導体エネルギー研究所 半導体装置の作製方法
JPH10275914A (ja) * 1997-03-31 1998-10-13 Nec Corp 半導体装置
US6175345B1 (en) * 1997-06-02 2001-01-16 Canon Kabushiki Kaisha Electroluminescence device, electroluminescence apparatus, and production methods thereof
JP3541625B2 (ja) * 1997-07-02 2004-07-14 セイコーエプソン株式会社 表示装置及びアクティブマトリクス基板
JPH1154268A (ja) * 1997-08-08 1999-02-26 Sanyo Electric Co Ltd 有機エレクトロルミネッセンスディスプレイ装置
JP3980178B2 (ja) 1997-08-29 2007-09-26 株式会社半導体エネルギー研究所 不揮発性メモリおよび半導体装置
JP3919900B2 (ja) 1997-09-19 2007-05-30 株式会社半導体エネルギー研究所 液晶表示装置およびその作製方法
JPH1197698A (ja) 1997-09-24 1999-04-09 Toshiba Corp 薄膜トランジスタ
US6229508B1 (en) * 1997-09-29 2001-05-08 Sarnoff Corporation Active matrix light emitting diode pixel structure and concomitant method
KR100518923B1 (ko) * 1997-10-31 2005-10-06 세이코 엡슨 가부시키가이샤 전기 광학장치 및 전자 기기
US5998805A (en) * 1997-12-11 1999-12-07 Motorola, Inc. Active matrix OED array with improved OED cathode
TW542932B (en) * 1998-02-09 2003-07-21 Seiko Epson Corp Liquid crystal panel and electronic appliances
JPH11231805A (ja) 1998-02-10 1999-08-27 Sanyo Electric Co Ltd 表示装置
GB9803764D0 (en) * 1998-02-23 1998-04-15 Cambridge Display Tech Ltd Display devices
EP0989534B1 (de) 1998-03-12 2005-05-11 Seiko Epson Corporation Aktivmatrix-lichtemittierende vorrichtung und herstellungsverfahren
JPH11272235A (ja) 1998-03-26 1999-10-08 Sanyo Electric Co Ltd エレクトロルミネッセンス表示装置の駆動回路
JP3807096B2 (ja) 1998-05-15 2006-08-09 セイコーエプソン株式会社 アクティブマトリクス基板及びこれを備えた電気光学パネル
US6351010B1 (en) * 1998-09-22 2002-02-26 Sony Corporation Electrooptical device, substrate for driving electrooptical device and methods for making the same
US6274887B1 (en) * 1998-11-02 2001-08-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
US20120074418A1 (en) 1998-11-25 2012-03-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TW439387B (en) * 1998-12-01 2001-06-07 Sanyo Electric Co Display device
JP2000174282A (ja) 1998-12-03 2000-06-23 Semiconductor Energy Lab Co Ltd 半導体装置
US6469317B1 (en) * 1998-12-18 2002-10-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
US6524895B2 (en) * 1998-12-25 2003-02-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
DE69942442D1 (de) * 1999-01-11 2010-07-15 Semiconductor Energy Lab Halbleiteranordnung mit Treiber-TFT und Pixel-TFT auf einem Substrat
US6576924B1 (en) 1999-02-12 2003-06-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having at least a pixel unit and a driver circuit unit over a same substrate
US6281552B1 (en) * 1999-03-23 2001-08-28 Semiconductor Energy Laboratory Co., Ltd. Thin film transistors having ldd regions
TW518650B (en) * 1999-04-15 2003-01-21 Semiconductor Energy Lab Electro-optical device and electronic equipment
US6512504B1 (en) * 1999-04-27 2003-01-28 Semiconductor Energy Laborayory Co., Ltd. Electronic device and electronic apparatus
TW517260B (en) * 1999-05-15 2003-01-11 Semiconductor Energy Lab Semiconductor device and method for its fabrication
TW521223B (en) * 1999-05-17 2003-02-21 Semiconductor Energy Lab D/A conversion circuit and semiconductor device
EP1058310A3 (de) 1999-06-02 2009-11-18 Sel Semiconductor Energy Laboratory Co., Ltd. Halbleiterbauelement und deren Herstellungsverfahren
TWI232595B (en) * 1999-06-04 2005-05-11 Semiconductor Energy Lab Electroluminescence display device and electronic device
JP4700156B2 (ja) * 1999-09-27 2011-06-15 株式会社半導体エネルギー研究所 半導体装置
US6587086B1 (en) 1999-10-26 2003-07-01 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device
US6580094B1 (en) 1999-10-29 2003-06-17 Semiconductor Energy Laboratory Co., Ltd. Electro luminescence display device
US6307322B1 (en) * 1999-12-28 2001-10-23 Sarnoff Corporation Thin-film transistor circuitry with reduced sensitivity to variance in transistor threshold voltage
US6825488B2 (en) 2000-01-26 2004-11-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US6646692B2 (en) 2000-01-26 2003-11-11 Semiconductor Energy Laboratory Co., Ltd. Liquid-crystal display device and method of fabricating the same
US20010028226A1 (en) * 2000-02-18 2001-10-11 Malaviya Shashi D. Twin capacitor pixel driver circuit for micro displays
US7023021B2 (en) 2000-02-22 2006-04-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
TW521303B (en) 2000-02-28 2003-02-21 Semiconductor Energy Lab Electronic device
TW521226B (en) * 2000-03-27 2003-02-21 Semiconductor Energy Lab Electro-optical device
US6580475B2 (en) * 2000-04-27 2003-06-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
JP2002009296A (ja) 2000-06-26 2002-01-11 Matsushita Electric Ind Co Ltd 薄膜トランジスタアレイ及び薄膜トランジスタアレイの製造方法
US6781742B2 (en) * 2000-07-11 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
JP3695308B2 (ja) * 2000-10-27 2005-09-14 日本電気株式会社 アクティブマトリクス有機el表示装置及びその製造方法
TWI247162B (en) * 2002-05-15 2006-01-11 Toppoly Optoelectronics Corp Circuit structure of thin film transistor
KR100673765B1 (ko) * 2006-01-20 2007-01-24 삼성에스디아이 주식회사 유기전계발광 표시장치 및 그 제조방법
TWI421607B (zh) * 2006-08-24 2014-01-01 Creator Technology Bv 可撓性裝置上的滲透阻障
KR100722118B1 (ko) * 2006-09-04 2007-05-25 삼성에스디아이 주식회사 유기전계발광 표시 장치

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US20010025959A1 (en) 2001-10-04
US20040135181A1 (en) 2004-07-15
US8017944B2 (en) 2011-09-13
US6690033B2 (en) 2004-02-10
EP1128439A2 (de) 2001-08-29
US20120001187A1 (en) 2012-01-05
CN1341970A (zh) 2002-03-27
CN1227739C (zh) 2005-11-16
KR20010085613A (ko) 2001-09-07
US8829668B2 (en) 2014-09-09
SG88812A1 (en) 2002-05-21
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