DE60140124D1 - Phasenverschiebungsinterferometrie unter anwendung von frequenztransformation - Google Patents

Phasenverschiebungsinterferometrie unter anwendung von frequenztransformation

Info

Publication number
DE60140124D1
DE60140124D1 DE60140124T DE60140124T DE60140124D1 DE 60140124 D1 DE60140124 D1 DE 60140124D1 DE 60140124 T DE60140124 T DE 60140124T DE 60140124 T DE60140124 T DE 60140124T DE 60140124 D1 DE60140124 D1 DE 60140124D1
Authority
DE
Germany
Prior art keywords
phase shift
frequency transformation
shift interferometry
frequency
interferometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60140124T
Other languages
English (en)
Inventor
Leslie L Deck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Application granted granted Critical
Publication of DE60140124D1 publication Critical patent/DE60140124D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
DE60140124T 2000-08-08 2001-08-02 Phasenverschiebungsinterferometrie unter anwendung von frequenztransformation Expired - Lifetime DE60140124D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22380300P 2000-08-08 2000-08-08
US09/919,511 US6882432B2 (en) 2000-08-08 2001-07-31 Frequency transform phase shifting interferometry
PCT/US2001/024467 WO2002012825A1 (en) 2000-08-08 2001-08-02 Frequency transform phase shifting interferometry

Publications (1)

Publication Number Publication Date
DE60140124D1 true DE60140124D1 (de) 2009-11-19

Family

ID=26918145

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60140124T Expired - Lifetime DE60140124D1 (de) 2000-08-08 2001-08-02 Phasenverschiebungsinterferometrie unter anwendung von frequenztransformation

Country Status (8)

Country Link
US (1) US6882432B2 (de)
EP (1) EP1307702B1 (de)
JP (1) JP4951189B2 (de)
KR (1) KR100746515B1 (de)
AT (1) ATE445140T1 (de)
DE (1) DE60140124D1 (de)
HK (1) HK1055788A1 (de)
WO (1) WO2002012825A1 (de)

Families Citing this family (120)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924898B2 (en) * 2000-08-08 2005-08-02 Zygo Corporation Phase-shifting interferometry method and system
AU2002230842A1 (en) 2000-10-30 2002-05-15 The General Hospital Corporation Optical methods and systems for tissue analysis
US9295391B1 (en) 2000-11-10 2016-03-29 The General Hospital Corporation Spectrally encoded miniature endoscopic imaging probe
GB2408797B (en) * 2001-05-01 2006-09-20 Gen Hospital Corp Method and apparatus for determination of atherosclerotic plaque type by measurement of tissue optical properties
US7030995B2 (en) 2001-12-10 2006-04-18 Zygo Corporation Apparatus and method for mechanical phase shifting interferometry
US7355716B2 (en) 2002-01-24 2008-04-08 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
EP1359460B1 (de) * 2002-04-26 2005-12-14 Optrex Corporation Nematische Flüssigkristallanzeigevorrichtung vom Doppelschichttyp
US20110201924A1 (en) * 2002-04-30 2011-08-18 The General Hospital Corporation Method and Apparatus for Improving Image Clarity and Sensitivity in Optical Tomography Using Dynamic Feedback to Control Focal Properties and Coherence Gating
US6690690B2 (en) 2002-05-29 2004-02-10 Lightgage, Inc. Tunable laser system having an adjustable external cavity
US7046371B2 (en) 2002-06-17 2006-05-16 Zygo Corporation Interferometer having a coupled cavity geometry for use with an extended source
US7130059B2 (en) * 2002-06-24 2006-10-31 Light Gage, Inc Common-path frequency-scanning interferometer
WO2004003463A2 (en) 2002-07-01 2004-01-08 Lightgage, Inc. Interferometer system of compact configuration
JP4216805B2 (ja) 2002-07-01 2009-01-28 ライトゲイジ インコーポレイテッド 非鏡面基準表面をもつ周波数走査型干渉計
US8054468B2 (en) * 2003-01-24 2011-11-08 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
JP4805142B2 (ja) 2003-03-31 2011-11-02 ザ ジェネラル ホスピタル コーポレイション 光路長が変更された異なる角度の光の合成により光学的に干渉する断層撮影におけるスペックルの減少
EP2280260B1 (de) * 2003-06-06 2017-03-08 The General Hospital Corporation Verfahren und Vorrichtung für eine Lichtquelle mit Abstimmung der Wellenlänge
US6977730B2 (en) 2003-08-18 2005-12-20 Zygo Corporation Method and apparatus for alignment of a precision optical assembly
US7057738B2 (en) * 2003-08-28 2006-06-06 A D Technology Corporation Simultaneous phase-shifting Fizeau interferometer
US6943896B2 (en) * 2003-10-20 2005-09-13 Zygo Corporation Reconfigurable interferometer system
EP1685366B1 (de) * 2003-10-27 2011-06-15 The General Hospital Corporation Verfahren und vorrichtung zur durchführung optischer abbildung durch verwendung von frequenzbereichs-interferometrie
US7042578B2 (en) * 2003-12-18 2006-05-09 Zygo Corporation Method and apparatus for absolute figure metrology
US20060268277A1 (en) * 2005-02-23 2006-11-30 Optoplex Corporation Michelson interferometer based delay line interferometers
US7492469B2 (en) * 2004-03-15 2009-02-17 Zygo Corporation Interferometry systems and methods using spatial carrier fringes
US7417743B2 (en) * 2004-03-15 2008-08-26 Zygo Corporation Interferometry systems and methods
US7277183B2 (en) 2004-04-22 2007-10-02 Zygo Corporation Vibration resistant interferometry
WO2005117534A2 (en) 2004-05-29 2005-12-15 The General Hospital Corporation Process, system and software arrangement for a chromatic dispersion compensation using reflective layers in optical coherence tomography (oct) imaging
EP1771755B1 (de) 2004-07-02 2016-09-21 The General Hospital Corporation Endoskopische darstellungssonde mit doppelt kaschierter faser
KR101332222B1 (ko) 2004-08-06 2013-11-22 더 제너럴 하스피탈 코포레이션 광간섭 단층촬영법을 이용해서 샘플 내에서 적어도 하나의 위치를 결정하는 방법, 시스템 및 그 방법을 구현하기 위한 소프트웨어가 저장되어 컴퓨터로 판독 가능한 매체
KR20120062944A (ko) 2004-08-24 2012-06-14 더 제너럴 하스피탈 코포레이션 혈관절편 영상화 방법 및 장치
ES2379468T3 (es) 2004-08-24 2012-04-26 The General Hospital Corporation Procedimiento, sistema y configuración de software para determinar el módulo de elasticidad
KR101269455B1 (ko) 2004-09-10 2013-05-30 더 제너럴 하스피탈 코포레이션 광 간섭 영상화를 위한 시스템 및 방법
US7268889B2 (en) * 2004-09-22 2007-09-11 Corning Incorporated Phase-resolved measurement for frequency-shifting interferometry
US7259860B2 (en) * 2004-09-22 2007-08-21 Corning Incorporated Optical feedback from mode-selective tuner
US7286238B2 (en) * 2004-09-22 2007-10-23 Corning Incorporated Feature isolation for frequency-shifting interferometry
EP2329759B1 (de) 2004-09-29 2014-03-12 The General Hospital Corporation System und Verfahren zur Abbildung optischer Kohärenz
EP2487387A1 (de) * 2004-10-05 2012-08-15 Fallbrook Technologies Inc. Stufenlos verstellbares Getriebe
US7315381B2 (en) * 2004-10-26 2008-01-01 Mitutoyo Corporation Monolithic quadrature detector
JP4556169B2 (ja) 2004-10-29 2010-10-06 富士フイルム株式会社 保持歪み測定方法および装置
EP2278267A3 (de) 2004-11-24 2011-06-29 The General Hospital Corporation Interferometer mit gemeinsamem Pfad für endoskopische optische Kohärenztomographie
EP1816949A1 (de) 2004-11-29 2007-08-15 The General Hospital Corporation Anordnungen, vorrichtungen, endoskope, katheter und verfahren für die optische bilddarstellung durch gleichzeitige beleuchtung und nachweis von mehreren punkten auf einer probe
US7268887B2 (en) * 2004-12-23 2007-09-11 Corning Incorporated Overlapping common-path interferometers for two-sided measurement
WO2006112971A2 (en) * 2005-04-13 2006-10-26 Corning Incorporated Mode-matching system for tunable external cavity laser
ATE451669T1 (de) 2005-04-28 2009-12-15 Gen Hospital Corp Bewertung von bildmerkmalen einer anatomischen struktur in optischen kohärenztomographiebildern
JP5702049B2 (ja) 2005-06-01 2015-04-15 ザ ジェネラル ホスピタル コーポレイション 位相分解光学周波数領域画像化を行うための装置、方法及びシステム
ATE484727T1 (de) * 2005-08-09 2010-10-15 Gen Hospital Corp Gerät und verfahren zur durchführung von polarisationsbasierter quadraturdemodulation bei optischer kohärenztomographie
US7847949B2 (en) 2005-09-29 2010-12-07 The General Hospital Corporation Method and apparatus for optical imaging via spectral encoding
US7289220B2 (en) * 2005-10-14 2007-10-30 Board Of Regents, The University Of Texas System Broadband cavity spectrometer apparatus and method for determining the path length of an optical structure
EP1945094B1 (de) 2005-10-14 2018-09-05 The General Hospital Corporation Spektral- und frequenz-kodierte fluoreszenz-darstellung
US7796270B2 (en) * 2006-01-10 2010-09-14 The General Hospital Corporation Systems and methods for generating data based on one or more spectrally-encoded endoscopy techniques
US8145018B2 (en) 2006-01-19 2012-03-27 The General Hospital Corporation Apparatus for obtaining information for a structure using spectrally-encoded endoscopy techniques and methods for producing one or more optical arrangements
DK1973466T3 (da) 2006-01-19 2021-02-01 Massachusetts Gen Hospital Ballonbilleddannelseskateter
WO2007149602A2 (en) * 2006-02-01 2007-12-27 The General Hospital Corporation Methods and systems for providing electromagnetic radiation to at least one portion of a sample using conformal laser therapy procedures
US7538859B2 (en) 2006-02-01 2009-05-26 The General Hospital Corporation Methods and systems for monitoring and obtaining information of at least one portion of a sample using conformal laser therapy procedures, and providing electromagnetic radiation thereto
US9777053B2 (en) * 2006-02-08 2017-10-03 The General Hospital Corporation Methods, arrangements and systems for obtaining information associated with an anatomical sample using optical microscopy
US7982879B2 (en) 2006-02-24 2011-07-19 The General Hospital Corporation Methods and systems for performing angle-resolved fourier-domain optical coherence tomography
JP2009536740A (ja) 2006-05-10 2009-10-15 ザ ジェネラル ホスピタル コーポレイション サンプルの周波数領域画像形成を提供するためのプロセス、構成およびシステム
US8013838B2 (en) * 2006-06-30 2011-09-06 Microsoft Corporation Generating position information using a video camera
EP2054712B1 (de) 2006-08-25 2015-10-07 The General Hospital Corporation Vorrichtungen und verfahren zur verstärkung einer optischen kohärenztomographie-abbildung mithilfe volumetrischer filterungsverfahren
US8838213B2 (en) 2006-10-19 2014-09-16 The General Hospital Corporation Apparatus and method for obtaining and providing imaging information associated with at least one portion of a sample, and effecting such portion(s)
WO2008055060A2 (en) * 2006-10-27 2008-05-08 Zygo Corporation Vibration resistant interferometry
US7933025B2 (en) * 2006-12-18 2011-04-26 Zygo Corporation Sinusoidal phase shifting interferometry
EP2104968A1 (de) * 2007-01-19 2009-09-30 The General Hospital Corporation Drehscheiben-reflexion zur schnellen erfassung der wellenlänge von dispergiertem licht
JP5507258B2 (ja) * 2007-01-19 2014-05-28 ザ ジェネラル ホスピタル コーポレイション 光周波数領域イメージングにおける測定深度を制御するための装置及び方法
TWI370894B (en) * 2007-02-26 2012-08-21 Corning Inc Method for measuring distortion
EP2602651A3 (de) 2007-03-23 2014-08-27 The General Hospital Corporation Verfahren, Anordnungen und Vorrichtung zur Verwendung eines wellenlängengewobbelten Lasers anhand von Winkelabtastungs- und Dispersionsverfahren
WO2008121844A1 (en) 2007-03-30 2008-10-09 The General Hospital Corporation System and method providing intracoronary laser speckle imaging for the detection of vulnerable plaque
WO2008131082A1 (en) 2007-04-17 2008-10-30 The General Hospital Corporation Apparatus and methods for measuring vibrations using spectrally-encoded endoscopy techniques
EP2173254A2 (de) 2007-07-31 2010-04-14 The General Hospital Corporation System und verfahren zur bereitstellung von strahlerfassungsmustern für hochgeschwindigkeits-abbildungen optischer dopplerfrequenzdomänen
EP2191254B1 (de) 2007-08-31 2017-07-19 The General Hospital Corporation System und verfahren für selbstinterferenz-fluoreszenzmikroskopie und damit assoziiertes rechnerzugriffsmedium
US7933021B2 (en) 2007-10-30 2011-04-26 The General Hospital Corporation System and method for cladding mode detection
US7898656B2 (en) * 2008-04-30 2011-03-01 The General Hospital Corporation Apparatus and method for cross axis parallel spectroscopy
WO2009137701A2 (en) 2008-05-07 2009-11-12 The General Hospital Corporation System, method and computer-accessible medium for tracking vessel motion during three-dimensional coronary artery microscopy
EP2288948A4 (de) 2008-06-20 2011-12-28 Gen Hospital Corp Anordnung aus kondensierten glasfaserkopplern und verfahren zu ihrer verwendung
US9254089B2 (en) 2008-07-14 2016-02-09 The General Hospital Corporation Apparatus and methods for facilitating at least partial overlap of dispersed ration on at least one sample
US7796273B2 (en) * 2008-11-12 2010-09-14 Zygo Corporation Phase-shifting interferometry in the presence of vibration
ES2957932T3 (es) * 2008-12-10 2024-01-30 Massachusetts Gen Hospital Sistemas, aparatos y procedimientos para ampliar el rango de profundidad de imagen de tomografía de coherencia óptica mediante submuestreo óptico
WO2010090837A2 (en) * 2009-01-20 2010-08-12 The General Hospital Corporation Endoscopic biopsy apparatus, system and method
US8097864B2 (en) 2009-01-26 2012-01-17 The General Hospital Corporation System, method and computer-accessible medium for providing wide-field superresolution microscopy
WO2010105197A2 (en) 2009-03-12 2010-09-16 The General Hospital Corporation Non-contact optical system, computer-accessible medium and method for measuring at least one mechanical property of tissue using coherent speckle techniques(s)
SG176266A1 (en) * 2009-06-19 2012-01-30 Zygo Corp Equal-path interferometer
US11490826B2 (en) 2009-07-14 2022-11-08 The General Hospital Corporation Apparatus, systems and methods for measuring flow and pressure within a vessel
US10687704B2 (en) * 2009-12-30 2020-06-23 The University Of Kentucky Research Foundation System, device, and method for determination of intraocular pressure
EP2542154B1 (de) 2010-03-05 2020-09-09 The General Hospital Corporation Vorrichtung zur bereitstellung elektromagnetischer strahlung für proben
US9069130B2 (en) 2010-05-03 2015-06-30 The General Hospital Corporation Apparatus, method and system for generating optical radiation from biological gain media
WO2011149972A2 (en) 2010-05-25 2011-12-01 The General Hospital Corporation Systems, devices, methods, apparatus and computer-accessible media for providing optical imaging of structures and compositions
WO2011150069A2 (en) 2010-05-25 2011-12-01 The General Hospital Corporation Apparatus, systems, methods and computer-accessible medium for spectral analysis of optical coherence tomography images
EP2575591A4 (de) 2010-06-03 2017-09-13 The General Hospital Corporation Vorrichtung und verfahren für geräte zur abbildung von strukturen in oder an einem oder mehreren lumenorganen
WO2012058381A2 (en) 2010-10-27 2012-05-03 The General Hospital Corporation Apparatus, systems and methods for measuring blood pressure within at least one vessel
JP2011207757A (ja) * 2011-04-25 2011-10-20 Hoya Corp マスクブランクス用ガラス基板の製造方法、マスクブランクスの製造方法、反射型マスクブランクスの製造方法、露光用マスクの製造方法、反射型マスクの製造方法、及び、半導体装置の製造方法
US9330092B2 (en) 2011-07-19 2016-05-03 The General Hospital Corporation Systems, methods, apparatus and computer-accessible-medium for providing polarization-mode dispersion compensation in optical coherence tomography
EP3835718B1 (de) 2011-08-25 2023-07-26 The General Hospital Corporation Vorrichtung zur bereitstellung mikrooptischer kohärenztomographie in einem atmungssystem
US9341783B2 (en) 2011-10-18 2016-05-17 The General Hospital Corporation Apparatus and methods for producing and/or providing recirculating optical delay(s)
TWI464369B (zh) * 2012-02-29 2014-12-11 Univ Feng Chia And a method and a method for detecting three-dimensional surface profile and optical grade surface roughness at the same time
WO2013148306A1 (en) 2012-03-30 2013-10-03 The General Hospital Corporation Imaging system, method and distal attachment for multidirectional field of view endoscopy
US11490797B2 (en) 2012-05-21 2022-11-08 The General Hospital Corporation Apparatus, device and method for capsule microscopy
EP2948758B1 (de) 2013-01-28 2024-03-13 The General Hospital Corporation Vorrichtung zur bereitstellung von gemeinsam mit optischer frequenzdomänenbildgebung aufgezeichneter diffuser spektroskopie
WO2014120791A1 (en) 2013-01-29 2014-08-07 The General Hospital Corporation Apparatus, systems and methods for providing information regarding the aortic valve
WO2014121082A1 (en) 2013-02-01 2014-08-07 The General Hospital Corporation Objective lens arrangement for confocal endomicroscopy
US10478072B2 (en) 2013-03-15 2019-11-19 The General Hospital Corporation Methods and system for characterizing an object
EP2997354A4 (de) 2013-05-13 2017-01-18 The General Hospital Corporation Erkennung einer selbstinterferierenden fluoreszenzphase und amplitude
US11452433B2 (en) 2013-07-19 2022-09-27 The General Hospital Corporation Imaging apparatus and method which utilizes multidirectional field of view endoscopy
EP3021735A4 (de) 2013-07-19 2017-04-19 The General Hospital Corporation Bestimmung der augenbewegung mittels netzhautabbildung mit rückkopplung
EP3025173B1 (de) 2013-07-26 2021-07-07 The General Hospital Corporation Vorrichtung mit optische dispersion nutzender laseranordnung zur anwendung in der fourier-raum optischen kohärenztomographie
US9423306B2 (en) 2014-01-03 2016-08-23 Ram Photonics, LLC Method and apparatus for wavefront sensing
WO2015105870A1 (en) 2014-01-08 2015-07-16 The General Hospital Corporation Method and apparatus for microscopic imaging
US10736494B2 (en) 2014-01-31 2020-08-11 The General Hospital Corporation System and method for facilitating manual and/or automatic volumetric imaging with real-time tension or force feedback using a tethered imaging device
US10228556B2 (en) 2014-04-04 2019-03-12 The General Hospital Corporation Apparatus and method for controlling propagation and/or transmission of electromagnetic radiation in flexible waveguide(s)
CN103983609A (zh) * 2014-05-12 2014-08-13 复旦大学 基于光谱干涉的透明材料折射率及厚度测量装置和测量方法
US9110006B1 (en) 2014-06-19 2015-08-18 Southwest Sciences Incorporated Frequency-feedback cavity enhanced spectrometer
KR102513779B1 (ko) 2014-07-25 2023-03-24 더 제너럴 하스피탈 코포레이션 생체 내 이미징 및 진단을 위한 장치, 디바이스 및 방법
EP3397949B1 (de) * 2015-12-31 2022-05-18 Zygo Corporation Verfahren und vorrichtung zur optimierung der optischen leistung von interferometern
DE102016103109B4 (de) * 2016-02-23 2018-07-26 Björn Habrich Vermessung einer kavität mittels interferenzspektroskopie
JP6279013B2 (ja) * 2016-05-26 2018-02-14 Ckd株式会社 三次元計測装置
WO2017214268A1 (en) * 2016-06-08 2017-12-14 Zygo Corporation Precision positioning system using a wavelength tunable laser
JP6704833B2 (ja) * 2016-10-27 2020-06-03 浜松ホトニクス株式会社 位置検出方法及び光モジュール
CN110836633B (zh) 2016-11-18 2022-06-14 齐戈股份有限公司 用于优化干涉仪的光学性能的方法及设备
TWI794416B (zh) * 2018-02-28 2023-03-01 美商賽格股份有限公司 多層堆疊結構之計量方法及干涉儀系統
US11262191B1 (en) * 2018-07-12 2022-03-01 Onto Innovation Inc. On-axis dynamic interferometer and optical imaging systems employing the same
JP6576594B1 (ja) * 2018-10-05 2019-09-18 三菱電機株式会社 工作装置
KR102281511B1 (ko) * 2019-09-25 2021-07-23 울산과학기술원 토폴로지 정보를 이용하는 광간섭 현미경 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594003A (en) 1983-07-20 1986-06-10 Zygo Corporation Interferometric wavefront measurement
JPH02168102A (ja) * 1988-12-22 1990-06-28 Sumitomo Electric Ind Ltd 半導体多層薄膜の膜厚測定方法
JPH0628670A (ja) * 1992-04-07 1994-02-04 Masabumi Uchiumi レーザービデオセツト及びテープの製造方法及び記録方法。
US5488477A (en) * 1993-11-15 1996-01-30 Zygo Corporation Methods and apparatus for profiling surfaces of transparent objects
JP3577840B2 (ja) * 1996-05-22 2004-10-20 株式会社デンソー 半導体厚測定装置及びその測定方法
JP3332802B2 (ja) * 1997-05-30 2002-10-07 武晃 吉村 光周波数掃引式断層画像測定装置
EP1007901B1 (de) * 1997-06-02 2009-04-29 Joseph A. Izatt Doppler-abbildung einer strömung mittels optischer kohaerenztomografie
US6028670A (en) 1998-01-19 2000-02-22 Zygo Corporation Interferometric methods and systems using low coherence illumination
US6262818B1 (en) * 1998-10-07 2001-07-17 Institute Of Applied Optics, Swiss Federal Institute Of Technology Method for simultaneous amplitude and quantitative phase contrast imaging by numerical reconstruction of digital holograms
US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry

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WO2002012825A9 (en) 2003-04-03
EP1307702A1 (de) 2003-05-07
KR100746515B1 (ko) 2007-08-06
JP4951189B2 (ja) 2012-06-13
ATE445140T1 (de) 2009-10-15
US20020109851A1 (en) 2002-08-15
EP1307702B1 (de) 2009-10-07
KR20030051613A (ko) 2003-06-25
US6882432B2 (en) 2005-04-19
WO2002012825A1 (en) 2002-02-14

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