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Publication numberDE60140124 D1
Publication typeGrant
Application numberDE2001640124
Publication date19 Nov 2009
Filing date2 Aug 2001
Priority date8 Aug 2000
Also published asEP1307702A1, EP1307702B1, US6882432, US20020109851, WO2002012825A1, WO2002012825A9
Publication number01640124, 2001640124, DE 60140124 D1, DE 60140124D1, DE-D1-60140124, DE01640124, DE2001640124, DE60140124 D1, DE60140124D1
InventorsLeslie L Deck
ApplicantZygo Corp
Export CitationBiBTeX, EndNote, RefMan
Phasenverschiebungsinterferometrie unter anwendung von frequenztransformation Phase shifting under application of frequency transformation translated from German
DE 60140124 D1
Abstract  available in
Description  available in
Claims  available in
Classifications
International ClassificationG01B11/24, G01B11/30, G01B11/06, G01B9/02
Cooperative ClassificationG01B9/02028, G01B2290/45, G01B2290/70, G01B9/02081, G01B9/02021, G01B9/02004, G01B9/02057, G01B11/06, G01B11/2441
European ClassificationG01B11/24H, G01B11/06, G01B9/02
Legal Events
DateCodeEventDescription
28 Oct 20108364No opposition during term of opposition