DE60043887D1 - Filme aus mehrschichtigen kohlenstoff-nanoröhren - Google Patents

Filme aus mehrschichtigen kohlenstoff-nanoröhren

Info

Publication number
DE60043887D1
DE60043887D1 DE60043887T DE60043887T DE60043887D1 DE 60043887 D1 DE60043887 D1 DE 60043887D1 DE 60043887 T DE60043887 T DE 60043887T DE 60043887 T DE60043887 T DE 60043887T DE 60043887 D1 DE60043887 D1 DE 60043887D1
Authority
DE
Germany
Prior art keywords
substrate
nanotube film
preparation
aligned
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60043887T
Other languages
English (en)
Inventor
Liming Dai
Shaoming Huang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Application granted granted Critical
Publication of DE60043887D1 publication Critical patent/DE60043887D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/05Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82BNANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • C01B32/162Preparation characterised by catalysts
    • DTEXTILES; PAPER
    • D01NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01FCHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/08Aligned nanotubes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00Coating processes
    • Y10S427/102Fullerene type base or coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/778Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/842Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/895Manufacture, treatment, or detection of nanostructure having step or means utilizing chemical property
    • Y10S977/896Chemical synthesis, e.g. chemical bonding or breaking
DE60043887T 1999-04-16 2000-04-14 Filme aus mehrschichtigen kohlenstoff-nanoröhren Expired - Fee Related DE60043887D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP9764A AUPP976499A0 (en) 1999-04-16 1999-04-16 Multilayer carbon nanotube films
PCT/AU2000/000324 WO2000063115A1 (en) 1999-04-16 2000-04-14 Multilayer carbon nanotube films

Publications (1)

Publication Number Publication Date
DE60043887D1 true DE60043887D1 (de) 2010-04-08

Family

ID=3813963

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60043887T Expired - Fee Related DE60043887D1 (de) 1999-04-16 2000-04-14 Filme aus mehrschichtigen kohlenstoff-nanoröhren

Country Status (13)

Country Link
US (1) US6808746B1 (de)
EP (1) EP1183210B1 (de)
JP (1) JP2002542136A (de)
KR (1) KR20020024580A (de)
CN (1) CN1349478A (de)
AT (1) ATE458698T1 (de)
AU (1) AUPP976499A0 (de)
CA (1) CA2370022A1 (de)
DE (1) DE60043887D1 (de)
IL (1) IL145896A0 (de)
TW (1) TW483870B (de)
WO (1) WO2000063115A1 (de)
ZA (1) ZA200108303B (de)

Families Citing this family (229)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6692717B1 (en) * 1999-09-17 2004-02-17 William Marsh Rice University Catalytic growth of single-wall carbon nanotubes from metal particles
AUPQ065099A0 (en) * 1999-05-28 1999-06-24 Commonwealth Scientific And Industrial Research Organisation Substrate-supported aligned carbon nanotube films
DE19954225A1 (de) * 1999-11-05 2001-05-23 Henning Kanzow Verfahren zur Herstellung von Kohlenstoff-Nanofasern
US6495116B1 (en) * 2000-04-10 2002-12-17 Lockheed Martin Corporation Net shape manufacturing using carbon nanotubes
EP2360298A3 (de) 2000-08-22 2011-10-05 President and Fellows of Harvard College Verfahren zur Abscheidung eines halbleitenden Nanodrahtes
US7301199B2 (en) 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
KR100604459B1 (ko) 2000-10-06 2006-07-26 풀러린 인터내셔날 코포레이션 이중벽 탄소 나노튜브와 그의 제조방법 및 응용방법
AU2904602A (en) 2000-12-11 2002-06-24 Harvard College Nanosensors
JP4712213B2 (ja) * 2001-03-30 2011-06-29 株式会社ノリタケカンパニーリミテド ナノチューブ膜の製造方法
AUPR421701A0 (en) * 2001-04-04 2001-05-17 Commonwealth Scientific And Industrial Research Organisation Process and apparatus for the production of carbon nanotubes
AU2002245939B2 (en) * 2001-04-04 2006-05-11 Commonwealth Scientific And Industrial Research Organisation Process and apparatus for the production of carbon nanotubes
US6911767B2 (en) 2001-06-14 2005-06-28 Hyperion Catalysis International, Inc. Field emission devices using ion bombarded carbon nanotubes
US7341498B2 (en) 2001-06-14 2008-03-11 Hyperion Catalysis International, Inc. Method of irradiating field emission cathode having nanotubes
EP1451844A4 (de) * 2001-06-14 2008-03-12 Hyperion Catalysis Int Feldemissionsvorrichtungen, bei denen modifizierte kohlenstoffnanoröhren verwendet werden
US6919592B2 (en) 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
US7563711B1 (en) * 2001-07-25 2009-07-21 Nantero, Inc. Method of forming a carbon nanotube-based contact to semiconductor
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US7566478B2 (en) * 2001-07-25 2009-07-28 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
US6706402B2 (en) 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US7259410B2 (en) * 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
WO2003049219A1 (en) * 2001-11-30 2003-06-12 The Trustees Of Boston College Coated carbon nanotube array electrodes
SE0104452D0 (sv) * 2001-12-28 2001-12-28 Forskarpatent I Vaest Ab Metod för framställning av nanostrukturer in-situ, och in-situ framställda nanostrukturer
JP4404961B2 (ja) * 2002-01-08 2010-01-27 双葉電子工業株式会社 カーボンナノ繊維の製造方法。
GB2387021B (en) * 2002-03-25 2004-10-27 Printable Field Emitters Ltd Field electron emission materials and devices
US6872645B2 (en) * 2002-04-02 2005-03-29 Nanosys, Inc. Methods of positioning and/or orienting nanostructures
JP3877302B2 (ja) * 2002-06-24 2007-02-07 本田技研工業株式会社 カーボンナノチューブの形成方法
FR2841233B1 (fr) 2002-06-24 2004-07-30 Commissariat Energie Atomique Procede et dispositif de depot par pyrolyse de nanotubes de carbone
WO2004010552A1 (en) 2002-07-19 2004-01-29 President And Fellows Of Harvard College Nanoscale coherent optical components
AU2003264212A1 (en) * 2002-09-17 2004-04-08 Ht Innovative Technologies, Llc Process of controllable synthesis of carbon films with composite structures
AU2003291133A1 (en) 2002-11-26 2004-06-18 Carbon Nanotechnologies, Inc. Carbon nanotube particulates, compositions and use thereof
US7666382B2 (en) 2004-12-16 2010-02-23 Nantero, Inc. Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof
US8937575B2 (en) 2009-07-31 2015-01-20 Nantero Inc. Microstrip antenna elements and arrays comprising a shaped nanotube fabric layer and integrated two terminal nanotube select devices
EP1585845A1 (de) * 2003-01-13 2005-10-19 Nantero, Inc. Verfahren zur verwendung dünner metallschichten für die herstellung von folien, schichten, geweben, bändern, elementen und artikeln aus kohlenstoffnanoröhrchen
US7858185B2 (en) * 2003-09-08 2010-12-28 Nantero, Inc. High purity nanotube fabrics and films
US9574290B2 (en) 2003-01-13 2017-02-21 Nantero Inc. Methods for arranging nanotube elements within nanotube fabrics and films
CN1321885C (zh) * 2003-01-23 2007-06-20 南昌大学 在软基底上制造定向碳纳米管膜方法
US7780918B2 (en) 2003-05-14 2010-08-24 Nantero, Inc. Sensor platform using a horizontally oriented nanotube element
US6982903B2 (en) * 2003-06-09 2006-01-03 Nantero, Inc. Field effect devices having a source controlled via a nanotube switching element
US7583526B2 (en) 2003-08-13 2009-09-01 Nantero, Inc. Random access memory including nanotube switching elements
BRPI0413586A (pt) 2003-08-14 2006-10-17 Monsanto Technology Llc catalisadores contendo metal de transição e processo para a preparação dos mesmos e uso como catalisadores de oxidação e de desidrogenação
US8541054B2 (en) 2003-09-08 2013-09-24 Honda Motor Co., Ltd Methods for preparation of one-dimensional carbon nanostructures
WO2005033001A2 (en) * 2003-09-03 2005-04-14 Honda Motor Co., Ltd. Methods for preparation of one-dimensional carbon nanostructures
US7504051B2 (en) * 2003-09-08 2009-03-17 Nantero, Inc. Applicator liquid for use in electronic manufacturing processes
US7375369B2 (en) 2003-09-08 2008-05-20 Nantero, Inc. Spin-coatable liquid for formation of high purity nanotube films
US7416993B2 (en) * 2003-09-08 2008-08-26 Nantero, Inc. Patterned nanowire articles on a substrate and methods of making the same
EP1678741A1 (de) * 2003-09-12 2006-07-12 Kobenhavns Universitet Verfahren zur herstellung und bauelement mit länglichen nanogrössen-elementen
DE10345755B4 (de) * 2003-09-25 2006-08-31 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Herstellung von strukturierten magnetischen Funktionselementen
FR2865739B1 (fr) * 2004-01-30 2006-06-02 Centre Nat Rech Scient Procede d'obtention de nanotubes de carbone sur des supports et composites les renfermant
US20070189953A1 (en) * 2004-01-30 2007-08-16 Centre National De La Recherche Scientifique (Cnrs) Method for obtaining carbon nanotubes on supports and composites comprising same
JP4239848B2 (ja) * 2004-02-16 2009-03-18 富士ゼロックス株式会社 マイクロ波用アンテナおよびその製造方法
US7135773B2 (en) * 2004-02-26 2006-11-14 International Business Machines Corporation Integrated circuit chip utilizing carbon nanotube composite interconnection vias
CN1946634A (zh) * 2004-04-20 2007-04-11 皇家飞利浦电子股份有限公司 纳米结构和制备这种纳米结构的方法
CN1309770C (zh) * 2004-05-19 2007-04-11 中国航空工业第一集团公司北京航空材料研究院 高体积分数碳纳米管阵列-树脂基复合材料及制备方法
US7556746B2 (en) * 2004-06-03 2009-07-07 Nantero, Inc. Method of making an applicator liquid for electronics fabrication process
US7658869B2 (en) * 2004-06-03 2010-02-09 Nantero, Inc. Applicator liquid containing ethyl lactate for preparation of nanotube films
US7709880B2 (en) * 2004-06-09 2010-05-04 Nantero, Inc. Field effect devices having a gate controlled via a nanotube switching element
US7161403B2 (en) * 2004-06-18 2007-01-09 Nantero, Inc. Storage elements using nanotube switching elements
FR2874910A1 (fr) * 2004-09-09 2006-03-10 Commissariat Energie Atomique Procede de realisation d'une structure emissive d'electrons a nanotubes et structure emissive d'electrons
US8471238B2 (en) 2004-09-16 2013-06-25 Nantero Inc. Light emitters using nanotubes and methods of making same
CA2581058C (en) * 2004-09-21 2012-06-26 Nantero, Inc. Resistive elements using carbon nanotubes
US20100147657A1 (en) * 2004-11-02 2010-06-17 Nantero, Inc. Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches
US7567414B2 (en) * 2004-11-02 2009-07-28 Nantero, Inc. Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches
CN101124638A (zh) 2004-12-06 2008-02-13 哈佛大学 基于纳米尺度线的数据存储
CN100395172C (zh) * 2004-12-24 2008-06-18 清华大学 一种基于宏观长单壁或双壁碳纳米管束的负光控电导器件
JP2006176373A (ja) * 2004-12-24 2006-07-06 Jfe Engineering Kk 微細炭素繊維およびその利用方法
CN100395173C (zh) * 2004-12-24 2008-06-18 清华大学 一种基于宏观长多壁碳纳米管束的正光控电导器件
KR100663326B1 (ko) * 2005-01-14 2007-01-02 고려대학교 산학협력단 광전도성 이층 복합나노튜브, 그 제조방법 및 상기 이층 복합나노튜브를 이용한 나노 광전소자
EP1866244A2 (de) * 2005-02-16 2007-12-19 University Of Dayton Asymmetrische endfunktionalisierung von kohlenstoffnanoröhrchen
TW200635663A (en) 2005-02-17 2006-10-16 Monsanto Technology Llc Transition metal-containing catalysts and catalyst combinations including transition metal-containing catalysts and processes for their preparation and use as oxidation catalysts
US8000127B2 (en) 2009-08-12 2011-08-16 Nantero, Inc. Method for resetting a resistive change memory element
US8941094B2 (en) 2010-09-02 2015-01-27 Nantero Inc. Methods for adjusting the conductivity range of a nanotube fabric layer
US9287356B2 (en) * 2005-05-09 2016-03-15 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US9390790B2 (en) 2005-04-05 2016-07-12 Nantero Inc. Carbon based nonvolatile cross point memory incorporating carbon based diode select devices and MOSFET select devices for memory and logic applications
CN100376478C (zh) * 2005-04-22 2008-03-26 清华大学 碳纳米管阵列结构的制备装置
US8102018B2 (en) * 2005-05-09 2012-01-24 Nantero Inc. Nonvolatile resistive memories having scalable two-terminal nanotube switches
US7835170B2 (en) * 2005-05-09 2010-11-16 Nantero, Inc. Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks
US8217490B2 (en) 2005-05-09 2012-07-10 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US8513768B2 (en) 2005-05-09 2013-08-20 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US7781862B2 (en) 2005-05-09 2010-08-24 Nantero, Inc. Two-terminal nanotube devices and systems and methods of making same
TWI324773B (en) 2005-05-09 2010-05-11 Nantero Inc Non-volatile shadow latch using a nanotube switch
US9911743B2 (en) 2005-05-09 2018-03-06 Nantero, Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US7782650B2 (en) * 2005-05-09 2010-08-24 Nantero, Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US7479654B2 (en) * 2005-05-09 2009-01-20 Nantero, Inc. Memory arrays using nanotube articles with reprogrammable resistance
US8183665B2 (en) * 2005-11-15 2012-05-22 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US8013363B2 (en) * 2005-05-09 2011-09-06 Nantero, Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US7394687B2 (en) 2005-05-09 2008-07-01 Nantero, Inc. Non-volatile-shadow latch using a nanotube switch
US8008745B2 (en) * 2005-05-09 2011-08-30 Nantero, Inc. Latch circuits and operation circuits having scalable nonvolatile nanotube switches as electronic fuse replacement elements
US9196615B2 (en) * 2005-05-09 2015-11-24 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
US20060258054A1 (en) * 2005-05-11 2006-11-16 Molecular Nanosystems, Inc. Method for producing free-standing carbon nanotube thermal pads
US7598127B2 (en) 2005-05-12 2009-10-06 Nantero, Inc. Nanotube fuse structure
TWI264271B (en) * 2005-05-13 2006-10-11 Delta Electronics Inc Heat sink
US7575693B2 (en) * 2005-05-23 2009-08-18 Nantero, Inc. Method of aligning nanotubes and wires with an etched feature
US20100227382A1 (en) 2005-05-25 2010-09-09 President And Fellows Of Harvard College Nanoscale sensors
WO2006132659A2 (en) 2005-06-06 2006-12-14 President And Fellows Of Harvard College Nanowire heterostructures
US7915122B2 (en) * 2005-06-08 2011-03-29 Nantero, Inc. Self-aligned cell integration scheme
US20060292716A1 (en) * 2005-06-27 2006-12-28 Lsi Logic Corporation Use selective growth metallization to improve electrical connection between carbon nanotubes and electrodes
US7538040B2 (en) * 2005-06-30 2009-05-26 Nantero, Inc. Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers
CA2621924A1 (en) 2005-09-06 2007-03-06 Nantero, Inc. Carbon nanotubes for the selective transfer of heat from electronics
AU2006287610A1 (en) * 2005-09-06 2007-03-15 Nantero, Inc. Nanotube fabric-based sensor systems and methods of making same
US7744793B2 (en) 2005-09-06 2010-06-29 Lemaire Alexander B Apparatus and method for growing fullerene nanotube forests, and forming nanotube films, threads and composite structures therefrom
US7850778B2 (en) * 2005-09-06 2010-12-14 Lemaire Charles A Apparatus and method for growing fullerene nanotube forests, and forming nanotube films, threads and composite structures therefrom
WO2007030483A2 (en) * 2005-09-06 2007-03-15 Nantero, Inc. Method and system of using nanotube fabrics as joule heating elements for memories and other applications
US8217220B2 (en) 2005-10-05 2012-07-10 Sca Hygiene Products Ab Absorbent article comprising a thin film including an active agent
CN100427388C (zh) * 2005-11-25 2008-10-22 清华大学 一种大面积的超薄碳纳米管膜及其制备工艺
EP1973845A4 (de) * 2005-12-19 2009-08-19 Nantero Inc Herstellung von kohlenstoffnanoröhren
JP4374456B2 (ja) * 2006-01-05 2009-12-02 国立大学法人 東京大学 カーボンナノチューブ自立膜及びその製造方法、並びにカーボンナノチューブ膜を有する構成体及びその製造方法
WO2007142115A1 (ja) * 2006-06-02 2007-12-13 Sonac Incorporated 電子放出材料およびそれを用いた電子エミッタ
EP2035584B1 (de) 2006-06-12 2011-01-26 President and Fellows of Harvard College Nanosensoren und entsprechende technologien
US20100239491A1 (en) * 2006-06-28 2010-09-23 Honda Motor Co., Ltd. Method of producing carbon nanotubes
US20100068461A1 (en) * 2006-06-30 2010-03-18 University Of Wollongong Nanostructured composites
CN101104513B (zh) * 2006-07-12 2010-09-29 清华大学 单壁碳纳米管的生长方法
US8207658B2 (en) * 2006-08-25 2012-06-26 Rensselaer Polytechnic Institute Carbon nanotube growth on metallic substrate using vapor phase catalyst delivery
KR100811266B1 (ko) * 2006-09-01 2008-03-07 주식회사 하이닉스반도체 하드 마스크를 이용한 선택적 식각 방법 및 이를 이용한메모리 소자의 소자분리 형성 방법
CA2661982C (en) * 2006-09-05 2015-07-21 Airbus Uk Limited Method of manufacturing composite material by growing of layers of reinforcement and related apparatus
GB0617460D0 (en) * 2006-09-05 2006-10-18 Airbus Uk Ltd Method of manufacturing composite material
US8058640B2 (en) 2006-09-11 2011-11-15 President And Fellows Of Harvard College Branched nanoscale wires
US7968474B2 (en) 2006-11-09 2011-06-28 Nanosys, Inc. Methods for nanowire alignment and deposition
US8575663B2 (en) 2006-11-22 2013-11-05 President And Fellows Of Harvard College High-sensitivity nanoscale wire sensors
WO2008127780A2 (en) * 2007-02-21 2008-10-23 Nantero, Inc. Symmetric touch screen system with carbon nanotube-based transparent conductive electrode pairs
JP5355423B2 (ja) * 2007-02-22 2013-11-27 ダウ コーニング コーポレーション 伝導性フィルムを調製するためのプロセスおよびそのプロセスを用いて調製した物品
WO2008112764A1 (en) 2007-03-12 2008-09-18 Nantero, Inc. Electromagnetic and thermal sensors using carbon nanotubes and methods of making same
WO2008119138A1 (en) * 2007-04-03 2008-10-09 Commonwealth Scientific And Industrial Research Organisation Production of nanotube forests
WO2009005908A2 (en) * 2007-05-22 2009-01-08 Nantero, Inc. Triodes using nanofabric articles and methods of making the same
CN101315974B (zh) * 2007-06-01 2010-05-26 清华大学 锂离子电池负极及其制备方法
US8134220B2 (en) 2007-06-22 2012-03-13 Nantero Inc. Two-terminal nanotube devices including a nanotube bridge and methods of making same
GB0715164D0 (en) * 2007-08-06 2007-09-12 Airbus Uk Ltd Method and apparatus for manufacturing a composite material
CN101409962B (zh) * 2007-10-10 2010-11-10 清华大学 面热光源及其制备方法
CN101409961B (zh) * 2007-10-10 2010-06-16 清华大学 面热光源,其制备方法及应用其加热物体的方法
CN101400198B (zh) * 2007-09-28 2010-09-29 北京富纳特创新科技有限公司 面热光源,其制备方法及应用其加热物体的方法
EP2062515B1 (de) * 2007-11-20 2012-08-29 So, Kwok Kuen Schüssel- und Korbanordnung sowie Salatschleuder mit einer solchen Korbanordnung
CN101456277B (zh) * 2007-12-14 2012-10-10 清华大学 碳纳米管复合材料的制备方法
CN101462391B (zh) * 2007-12-21 2013-04-24 清华大学 碳纳米管复合材料的制备方法
CN101480858B (zh) * 2008-01-11 2014-12-10 清华大学 碳纳米管复合材料及其制备方法
KR101410929B1 (ko) * 2008-01-17 2014-06-23 삼성전자주식회사 탄소나노튜브의 전사방법
WO2010008624A2 (en) * 2008-03-25 2010-01-21 Nantero, Inc. Carbon nanotube-based neural networks and methods of making and using same
CN101254916B (zh) * 2008-04-11 2010-04-07 北京工业大学 原位合成金属酞菁/碳纳米管复合物的方法
US8249279B2 (en) * 2008-04-28 2012-08-21 Beijing Funate Innovation Technology Co., Ltd. Thermoacoustic device
US8270639B2 (en) 2008-04-28 2012-09-18 Tsinghua University Thermoacoustic device
US8259967B2 (en) * 2008-04-28 2012-09-04 Tsinghua University Thermoacoustic device
US8068624B2 (en) * 2008-04-28 2011-11-29 Beijing Funate Innovation Technology Co., Ltd. Thermoacoustic device
CN101820571B (zh) * 2009-02-27 2013-12-11 清华大学 扬声器系统
US8259968B2 (en) * 2008-04-28 2012-09-04 Tsinghua University Thermoacoustic device
CN101594563B (zh) * 2008-04-28 2013-10-09 北京富纳特创新科技有限公司 发声装置
US8452031B2 (en) * 2008-04-28 2013-05-28 Tsinghua University Ultrasonic thermoacoustic device
CN101600141B (zh) * 2008-06-04 2015-03-11 清华大学 发声装置
JP4555384B2 (ja) * 2008-06-04 2010-09-29 北京富納特創新科技有限公司 熱音響装置
EP2138998B1 (de) * 2008-06-04 2019-11-06 Tsing Hua University Thermoakustische Vorrichtung mit einer Kohlenstoff-Nanoröhrchen-Struktur
CN101605292B (zh) * 2008-06-13 2013-04-24 清华大学 发声装置及发声元件
US8587989B2 (en) * 2008-06-20 2013-11-19 Nantero Inc. NRAM arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same
CN102119120B (zh) 2008-08-08 2013-08-07 株式会社东芝 纳米碳生成装置
JP5193745B2 (ja) * 2008-08-26 2013-05-08 株式会社東芝 ナノカーボン生成炉
US8541843B2 (en) 2008-08-14 2013-09-24 Nantero Inc. Nonvolatile nanotube programmable logic devices and a nonvolatile nanotube field programmable gate array using same
US9263126B1 (en) 2010-09-01 2016-02-16 Nantero Inc. Method for dynamically accessing and programming resistive change element arrays
CN101656907B (zh) * 2008-08-22 2013-03-20 清华大学 音箱
CN101715160B (zh) * 2008-10-08 2013-02-13 清华大学 柔性发声装置及发声旗帜
CN101715155B (zh) * 2008-10-08 2013-07-03 清华大学 耳机
US7915637B2 (en) 2008-11-19 2011-03-29 Nantero, Inc. Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same
US8221937B2 (en) * 2008-12-19 2012-07-17 University Of Dayton Metal-free vertically-aligned nitrogen-doped carbon nanotube catalyst for fuel cell cathodes
CN101771922B (zh) * 2008-12-30 2013-04-24 清华大学 发声装置
US8325947B2 (en) 2008-12-30 2012-12-04 Bejing FUNATE Innovation Technology Co., Ltd. Thermoacoustic device
US8300855B2 (en) * 2008-12-30 2012-10-30 Beijing Funate Innovation Technology Co., Ltd. Thermoacoustic module, thermoacoustic device, and method for making the same
KR20100102381A (ko) 2009-03-11 2010-09-24 고려대학교 산학협력단 전자물질 막 형성 방법 및 이를 적용하는 전자 소자의 제조방법
JP2012528020A (ja) 2009-05-26 2012-11-12 ナノシス・インク. ナノワイヤおよび他のデバイスの電場沈着のための方法およびシステム
CN101922755A (zh) * 2009-06-09 2010-12-22 清华大学 取暖墙
CN101931842B (zh) 2009-06-26 2013-07-03 清华大学 音圈骨架及扬声器
CN101931841A (zh) 2009-06-26 2010-12-29 清华大学 音圈骨架及扬声器
CN101943850B (zh) * 2009-07-03 2013-04-24 清华大学 发声银幕及使用该发声银幕的放映系统
CN101990148B (zh) 2009-07-31 2013-08-21 清华大学 振动膜及应用该振动膜的扬声器
US8128993B2 (en) * 2009-07-31 2012-03-06 Nantero Inc. Anisotropic nanotube fabric layers and films and methods of forming same
US8574673B2 (en) 2009-07-31 2013-11-05 Nantero Inc. Anisotropic nanotube fabric layers and films and methods of forming same
CN101990147B (zh) * 2009-07-31 2013-08-28 清华大学 振动膜及应用该振动膜的扬声器
CN101990142B (zh) * 2009-08-05 2013-12-11 清华大学 音圈引线及采用该音圈引线的扬声器
CN101990150A (zh) 2009-08-05 2011-03-23 鸿富锦精密工业(深圳)有限公司 扬声器
US20110034008A1 (en) * 2009-08-07 2011-02-10 Nantero, Inc. Method for forming a textured surface on a semiconductor substrate using a nanofabric layer
CN101990152B (zh) 2009-08-07 2013-08-28 清华大学 热致发声装置及其制备方法
CN101998210A (zh) 2009-08-11 2011-03-30 鸿富锦精密工业(深圳)有限公司 音圈骨架及使用该音圈骨架的扬声器
CN101998209A (zh) 2009-08-11 2011-03-30 清华大学 定心支片及使用该定心支片的扬声器
CN102006542B (zh) * 2009-08-28 2014-03-26 清华大学 发声装置
CN102006539B (zh) 2009-08-28 2013-06-05 清华大学 扬声器
CN102023297B (zh) 2009-09-11 2015-01-21 清华大学 声纳系统
CN102026065A (zh) * 2009-09-15 2011-04-20 清华大学 定心支片及使用该定心支片的扬声器
CN102026069A (zh) 2009-09-17 2011-04-20 清华大学 音圈及使用该音圈的扬声器
CN102026068B (zh) 2009-09-17 2016-06-08 清华大学 音圈及使用该音圈的扬声器
CN102026066B (zh) * 2009-09-18 2013-10-09 清华大学 定心支片及使用该定心支片的扬声器
US9297796B2 (en) 2009-09-24 2016-03-29 President And Fellows Of Harvard College Bent nanowires and related probing of species
CN102034467B (zh) * 2009-09-25 2013-01-30 北京富纳特创新科技有限公司 发声装置
CN102036146A (zh) 2009-09-30 2011-04-27 清华大学 振动膜及应用该振动膜的扬声器
CN102036149A (zh) * 2009-09-30 2011-04-27 清华大学 音圈骨架及具有该音圈骨架的扬声器
US8895950B2 (en) 2009-10-23 2014-11-25 Nantero Inc. Methods for passivating a carbonic nanolayer
CN102045624B (zh) * 2009-10-23 2014-12-10 清华大学 定心支片及具有该定心支片的扬声器
WO2011050331A2 (en) * 2009-10-23 2011-04-28 Nantero, Inc. Method for passivating a carbonic nanolayer
CN102045623B (zh) * 2009-10-23 2014-12-10 清华大学 振动膜、振动膜的制备方法及具有该振动膜的扬声器
US8351239B2 (en) * 2009-10-23 2013-01-08 Nantero Inc. Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array
CN102056064B (zh) 2009-11-06 2013-11-06 清华大学 扬声器
CN102056065B (zh) * 2009-11-10 2014-11-12 北京富纳特创新科技有限公司 发声装置
TW201116480A (en) * 2009-11-12 2011-05-16 Nat Univ Tsing Hua Multilayer film structure, method and apparatus for transferring nano-carbon material
CN102065363B (zh) * 2009-11-16 2013-11-13 北京富纳特创新科技有限公司 发声装置
CN102065353B (zh) * 2009-11-17 2014-01-22 清华大学 振动膜及使用该振动膜的扬声器
US8222704B2 (en) * 2009-12-31 2012-07-17 Nantero, Inc. Compact electrical switching devices with nanotube elements, and methods of making same
EP2531558B1 (de) * 2010-02-02 2018-08-22 Applied NanoStructured Solutions, LLC Kohlenstoffnanoröhrcheninfundierte fasermaterialien mit parallel ausgerichteten kohlenstoffnanoröhrchen, herstellungsverfahren dafür sowie daraus gewonnene verbundmaterialien
WO2011100661A1 (en) 2010-02-12 2011-08-18 Nantero, Inc. Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films
US20110203632A1 (en) * 2010-02-22 2011-08-25 Rahul Sen Photovoltaic devices using semiconducting nanotube layers
WO2011109421A1 (en) * 2010-03-01 2011-09-09 Auburn University Novel nanocomposite for sustainability of infrastructure
EP2542501A1 (de) 2010-03-02 2013-01-09 The Ohio State University Research Foundation Molekular geprägter kohlenstoff
US10661304B2 (en) 2010-03-30 2020-05-26 Nantero, Inc. Microfluidic control surfaces using ordered nanotube fabrics
EP2552826A4 (de) 2010-03-30 2013-11-13 Nantero Inc Verfahren zur anordnung nanoskopischer elemente in netzwerken, fasern und filmen
US8824722B2 (en) 2010-06-28 2014-09-02 Tsinghua University Loudspeaker incorporating carbon nanotubes
CN103021763A (zh) * 2012-12-27 2013-04-03 青岛艾德森能源科技有限公司 一种制备场发射阴极材料的方法
CN103043648A (zh) * 2012-12-27 2013-04-17 青岛艾德森能源科技有限公司 一种碳纳米管的制备方法
US9650732B2 (en) 2013-05-01 2017-05-16 Nantero Inc. Low defect nanotube application solutions and fabrics and methods for making same
CN103293822B (zh) * 2013-05-16 2015-10-28 中北大学 一种非线性光学碳纳米颗粒与酞菁类化合物杂化材料的制备方法
US10654718B2 (en) 2013-09-20 2020-05-19 Nantero, Inc. Scalable nanotube fabrics and methods for making same
KR101620194B1 (ko) 2013-09-30 2016-05-12 주식회사 엘지화학 탄소나노튜브 집합체의 벌크 밀도 조절 방법
CN104952987B (zh) * 2014-03-26 2018-04-24 清华大学 发光二极管
CN103921520B (zh) * 2014-04-17 2016-08-24 苏州捷迪纳米科技有限公司 碳纳米管薄膜复合材料及其制备方法
US9299430B1 (en) 2015-01-22 2016-03-29 Nantero Inc. Methods for reading and programming 1-R resistive change element arrays
CN104726844B (zh) * 2015-02-06 2017-06-27 北京控制工程研究所 一种在钛合金基底生长超强光吸收碳纳米管涂层的方法
JP2016190780A (ja) * 2015-03-30 2016-11-10 日本電気硝子株式会社 カーボンナノチューブ製造用基材およびカーボンナノチューブ製造方法
WO2016158286A1 (ja) * 2015-03-30 2016-10-06 日本電気硝子株式会社 カーボンナノチューブ製造用基材およびカーボンナノチューブ製造方法
US9947400B2 (en) 2016-04-22 2018-04-17 Nantero, Inc. Methods for enhanced state retention within a resistive change cell
US9934848B2 (en) 2016-06-07 2018-04-03 Nantero, Inc. Methods for determining the resistive states of resistive change elements
US9941001B2 (en) 2016-06-07 2018-04-10 Nantero, Inc. Circuits for determining the resistive states of resistive change elements
CN106517147B (zh) * 2016-12-09 2018-07-27 北京科技大学 制备高纯度高导热碳纳米管阵列热界面材料的方法及装置
CN107119262A (zh) * 2017-05-27 2017-09-01 华南理工大学 一种镍金属基体表面催化生长碳纳米管薄膜的方法
JP7167053B2 (ja) * 2017-11-15 2022-11-08 住友電気工業株式会社 カーボンナノ構造体製造方法及びカーボンナノ構造体製造装置
US10950846B2 (en) * 2019-01-03 2021-03-16 GM Global Technology Operations LLC Method for in situ growth of axial geometry carbon structures in electrodes
CN111747767B (zh) * 2020-07-20 2021-12-03 天津大学 石墨烯增强的树脂基全碳复合材料及其制备方法
CN114566663A (zh) * 2022-01-18 2022-05-31 陈九廷 一种燃料电池阴极用多层碳纳米管催化剂及其制备方法
CN115928010B (zh) * 2022-11-18 2023-08-18 有研国晶辉新材料有限公司 石英容器熏碳装置及熏碳方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0758028B1 (de) * 1995-07-10 2002-09-11 Research Development Corporation Of Japan Verfahren zur Herstellung von Graphitfasern
US5872422A (en) 1995-12-20 1999-02-16 Advanced Technology Materials, Inc. Carbon fiber-based field emission devices
US5726524A (en) 1996-05-31 1998-03-10 Minnesota Mining And Manufacturing Company Field emission device having nanostructured emitters
DE69830847T2 (de) * 1997-03-07 2006-01-12 William Marsh Rice University, Houston Kohlenstofffasern ausgehend von einwandigen kohlenstoffnanoröhren
JP3183845B2 (ja) 1997-03-21 2001-07-09 財団法人ファインセラミックスセンター カーボンナノチューブ及びカーボンナノチューブ膜の製造方法
US6221330B1 (en) * 1997-08-04 2001-04-24 Hyperion Catalysis International Inc. Process for producing single wall nanotubes using unsupported metal catalysts
US6129901A (en) * 1997-11-18 2000-10-10 Martin Moskovits Controlled synthesis and metal-filling of aligned carbon nanotubes
KR20010074667A (ko) * 1998-06-19 2001-08-08 추후보정 자립 정렬형 탄소 나노튜브 및 그 합성방법
US6232706B1 (en) * 1998-11-12 2001-05-15 The Board Of Trustees Of The Leland Stanford Junior University Self-oriented bundles of carbon nanotubes and method of making same
US6283812B1 (en) * 1999-01-25 2001-09-04 Agere Systems Guardian Corp. Process for fabricating article comprising aligned truncated carbon nanotubes
US6062931A (en) 1999-09-01 2000-05-16 Industrial Technology Research Institute Carbon nanotube emitter with triode structure

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