DE60041124D1 - Ruktur mit kontrollierten eigenspannungen - Google Patents
Ruktur mit kontrollierten eigenspannungenInfo
- Publication number
- DE60041124D1 DE60041124D1 DE60041124T DE60041124T DE60041124D1 DE 60041124 D1 DE60041124 D1 DE 60041124D1 DE 60041124 T DE60041124 T DE 60041124T DE 60041124 T DE60041124 T DE 60041124T DE 60041124 D1 DE60041124 D1 DE 60041124D1
- Authority
- DE
- Germany
- Prior art keywords
- ruktur
- voltages
- controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
- B81C1/0065—Mechanical properties
- B81C1/00666—Treatments for controlling internal stress or strain in MEMS structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0161—Controlling physical properties of the material
- B81C2201/0163—Controlling internal stress of deposited layers
- B81C2201/0167—Controlling internal stress of deposited layers by adding further layers of materials having complementary strains, i.e. compressive or tensile strain
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12528—Semiconductor component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
- Recrystallisation Techniques (AREA)
- Diaphragms And Bellows (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9901558A FR2789518B1 (fr) | 1999-02-10 | 1999-02-10 | Structure multicouche a contraintes internes controlees et procede de realisation d'une telle structure |
PCT/FR2000/000308 WO2000048238A1 (fr) | 1999-02-10 | 2000-02-09 | Structure multicouche a contraintes internes controlees et procede de realisation d'une telle structure |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60041124D1 true DE60041124D1 (de) | 2009-01-29 |
Family
ID=9541823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60041124T Expired - Lifetime DE60041124D1 (de) | 1999-02-10 | 2000-02-09 | Ruktur mit kontrollierten eigenspannungen |
Country Status (7)
Country | Link |
---|---|
US (1) | US6756285B1 (de) |
EP (1) | EP1155442B1 (de) |
JP (1) | JP4889154B2 (de) |
KR (1) | KR100743557B1 (de) |
DE (1) | DE60041124D1 (de) |
FR (1) | FR2789518B1 (de) |
WO (1) | WO2000048238A1 (de) |
Families Citing this family (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2773261B1 (fr) | 1997-12-30 | 2000-01-28 | Commissariat Energie Atomique | Procede pour le transfert d'un film mince comportant une etape de creation d'inclusions |
FR2823596B1 (fr) | 2001-04-13 | 2004-08-20 | Commissariat Energie Atomique | Substrat ou structure demontable et procede de realisation |
FR2823599B1 (fr) * | 2001-04-13 | 2004-12-17 | Commissariat Energie Atomique | Substrat demomtable a tenue mecanique controlee et procede de realisation |
US6956268B2 (en) | 2001-05-18 | 2005-10-18 | Reveo, Inc. | MEMS and method of manufacturing MEMS |
US7045878B2 (en) | 2001-05-18 | 2006-05-16 | Reveo, Inc. | Selectively bonded thin film layer and substrate layer for processing of useful devices |
FR2828762B1 (fr) * | 2001-08-14 | 2003-12-05 | Soitec Silicon On Insulator | Procede d'obtention d'une couche mince d'un materiau semi-conducteur supportant au moins un composant et/ou circuit electronique |
US6875671B2 (en) | 2001-09-12 | 2005-04-05 | Reveo, Inc. | Method of fabricating vertical integrated circuits |
US7163826B2 (en) | 2001-09-12 | 2007-01-16 | Reveo, Inc | Method of fabricating multi layer devices on buried oxide layer substrates |
FR2830983B1 (fr) | 2001-10-11 | 2004-05-14 | Commissariat Energie Atomique | Procede de fabrication de couches minces contenant des microcomposants |
US6806151B2 (en) * | 2001-12-14 | 2004-10-19 | Texas Instruments Incorporated | Methods and apparatus for inducing stress in a semiconductor device |
US6995430B2 (en) * | 2002-06-07 | 2006-02-07 | Amberwave Systems Corporation | Strained-semiconductor-on-insulator device structures |
US20030227057A1 (en) | 2002-06-07 | 2003-12-11 | Lochtefeld Anthony J. | Strained-semiconductor-on-insulator device structures |
US7176108B2 (en) | 2002-11-07 | 2007-02-13 | Soitec Silicon On Insulator | Method of detaching a thin film at moderate temperature after co-implantation |
FR2848337B1 (fr) * | 2002-12-09 | 2005-09-09 | Commissariat Energie Atomique | Procede de realisation d'une structure complexe par assemblage de structures contraintes |
FR2848336B1 (fr) * | 2002-12-09 | 2005-10-28 | Commissariat Energie Atomique | Procede de realisation d'une structure contrainte destinee a etre dissociee |
FR2856844B1 (fr) | 2003-06-24 | 2006-02-17 | Commissariat Energie Atomique | Circuit integre sur puce de hautes performances |
US6982210B2 (en) | 2003-07-10 | 2006-01-03 | S.O.I.Tec Silicon On Insulator Technologies S.A. | Method for manufacturing a multilayer semiconductor structure that includes an irregular layer |
FR2857953B1 (fr) | 2003-07-21 | 2006-01-13 | Commissariat Energie Atomique | Structure empilee, et procede pour la fabriquer |
JP4552858B2 (ja) * | 2003-09-08 | 2010-09-29 | 株式会社Sumco | 貼り合わせウェーハの製造方法 |
US20050067377A1 (en) * | 2003-09-25 | 2005-03-31 | Ryan Lei | Germanium-on-insulator fabrication utilizing wafer bonding |
FR2860178B1 (fr) * | 2003-09-30 | 2005-11-04 | Commissariat Energie Atomique | Procede de separation de plaques collees entre elles pour constituer une structure empilee. |
FR2861497B1 (fr) | 2003-10-28 | 2006-02-10 | Soitec Silicon On Insulator | Procede de transfert catastrophique d'une couche fine apres co-implantation |
FR2863405B1 (fr) * | 2003-12-08 | 2006-02-03 | Commissariat Energie Atomique | Collage moleculaire de composants microelectroniques sur un film polymere |
US7772087B2 (en) | 2003-12-19 | 2010-08-10 | Commissariat A L'energie Atomique | Method of catastrophic transfer of a thin film after co-implantation |
FR2864970B1 (fr) * | 2004-01-09 | 2006-03-03 | Soitec Silicon On Insulator | Substrat a support a coefficient de dilatation thermique determine |
JP4020097B2 (ja) * | 2004-05-11 | 2007-12-12 | セイコーエプソン株式会社 | 半導体チップ、半導体装置及びその製造方法、並びに電子機器 |
KR100669778B1 (ko) * | 2004-11-20 | 2007-01-16 | 삼성에스디아이 주식회사 | 기판 및 박막 트랜지스터를 구비한 기판 |
JP4624131B2 (ja) * | 2005-02-22 | 2011-02-02 | 三洋電機株式会社 | 窒化物系半導体素子の製造方法 |
US7205202B2 (en) * | 2005-04-21 | 2007-04-17 | Freescale Semiconductor, Inc. | Semiconductor device and method for regional stress control |
US7271069B2 (en) * | 2005-04-21 | 2007-09-18 | Freescale Semiconductor, Inc. | Semiconductor device having a plurality of different layers and method therefor |
FR2886051B1 (fr) | 2005-05-20 | 2007-08-10 | Commissariat Energie Atomique | Procede de detachement d'un film mince |
US20060270192A1 (en) * | 2005-05-24 | 2006-11-30 | International Business Machines Corporation | Semiconductor substrate and device with deuterated buried layer |
US7319591B2 (en) * | 2005-05-26 | 2008-01-15 | International Business Machines Corporation | Optimized thermally conductive plate and attachment method for enhanced thermal performance and reliability of flip chip organic packages |
US7262112B2 (en) * | 2005-06-27 | 2007-08-28 | The Regents Of The University Of California | Method for producing dislocation-free strained crystalline films |
FR2889887B1 (fr) | 2005-08-16 | 2007-11-09 | Commissariat Energie Atomique | Procede de report d'une couche mince sur un support |
FR2891281B1 (fr) | 2005-09-28 | 2007-12-28 | Commissariat Energie Atomique | Procede de fabrication d'un element en couches minces. |
US7544964B2 (en) * | 2005-12-01 | 2009-06-09 | National Institute Of Information And Communications Technology, Incorporated Administrative Agency | Method for fabricating thin layer device |
US7992128B2 (en) * | 2006-01-27 | 2011-08-02 | Sap Ag | Computer software adaptation method and system |
FR2899378B1 (fr) | 2006-03-29 | 2008-06-27 | Commissariat Energie Atomique | Procede de detachement d'un film mince par fusion de precipites |
JP5532527B2 (ja) * | 2006-08-03 | 2014-06-25 | 株式会社デンソー | Soi基板およびその製造方法 |
JP4958147B2 (ja) * | 2006-10-18 | 2012-06-20 | Hoya株式会社 | 露光用反射型マスクブランク及び露光用反射型マスク、多層反射膜付き基板、並びに半導体装置の製造方法 |
FR2910179B1 (fr) | 2006-12-19 | 2009-03-13 | Commissariat Energie Atomique | PROCEDE DE FABRICATION DE COUCHES MINCES DE GaN PAR IMPLANTATION ET RECYCLAGE D'UN SUBSTRAT DE DEPART |
FR2913968B1 (fr) * | 2007-03-23 | 2009-06-12 | Soitec Silicon On Insulator | Procede de realisation de membranes autoportees. |
FR2924273B1 (fr) * | 2007-11-28 | 2010-02-19 | Commissariat Energie Atomique | Procede de moderation de deformation |
FR2925221B1 (fr) * | 2007-12-17 | 2010-02-19 | Commissariat Energie Atomique | Procede de transfert d'une couche mince |
FR2926674B1 (fr) | 2008-01-21 | 2010-03-26 | Soitec Silicon On Insulator | Procede de fabrication d'une structure composite avec couche d'oxyde de collage stable |
JP2009277944A (ja) * | 2008-05-15 | 2009-11-26 | Toyoda Gosei Co Ltd | 接合体の製造方法及び発光装置の製造方法 |
US8003492B2 (en) * | 2008-05-30 | 2011-08-23 | Alta Devices, Inc. | Epitaxial lift off stack having a unidirectionally shrunk handle and methods thereof |
CN101634880A (zh) * | 2008-07-23 | 2010-01-27 | 鸿富锦精密工业(深圳)有限公司 | 电磁干扰挡片制造方法 |
JP5430109B2 (ja) * | 2008-09-30 | 2014-02-26 | 株式会社半導体エネルギー研究所 | Soi基板の作製方法 |
US8063370B2 (en) * | 2009-01-16 | 2011-11-22 | Hanvision Co., Ltd. | Semiconductor device and method of manufacturing the same |
DE102009000514A1 (de) * | 2009-01-30 | 2010-08-26 | Robert Bosch Gmbh | Verbundbauteil sowie Verfahren zum Herstellen eines Verbundbauteil |
US7927975B2 (en) | 2009-02-04 | 2011-04-19 | Micron Technology, Inc. | Semiconductor material manufacture |
FR2947098A1 (fr) | 2009-06-18 | 2010-12-24 | Commissariat Energie Atomique | Procede de transfert d'une couche mince sur un substrat cible ayant un coefficient de dilatation thermique different de celui de la couche mince |
JP5522263B2 (ja) | 2010-09-28 | 2014-06-18 | 株式会社村田製作所 | 圧電デバイス、圧電デバイスの製造方法 |
CN103109350A (zh) * | 2010-09-30 | 2013-05-15 | 飞思卡尔半导体公司 | 处理半导体晶片的方法、半导体晶片以及半导体器件 |
FR2985370A1 (fr) * | 2011-12-29 | 2013-07-05 | Commissariat Energie Atomique | Procede de fabrication d'une structure multicouche sur un support |
JP5887403B2 (ja) * | 2012-04-27 | 2016-03-16 | 並木精密宝石株式会社 | 複合基板の製造方法、半導体素子の製造方法、複合基板および半導体素子 |
CN104507853B (zh) | 2012-07-31 | 2016-11-23 | 索泰克公司 | 形成半导体设备的方法 |
CN104003346B (zh) * | 2013-02-25 | 2019-05-17 | 中芯国际集成电路制造(上海)有限公司 | 一种薄膜结构、压力传感器及电子装置 |
US20160146761A1 (en) * | 2013-06-10 | 2016-05-26 | Empire Technology Development Llc | Graded structure films |
CN105712286B (zh) * | 2014-12-02 | 2018-03-30 | 中芯国际集成电路制造(上海)有限公司 | Mems器件的制作方法 |
KR101627815B1 (ko) * | 2015-04-21 | 2016-06-08 | 인천대학교 산학협력단 | 비결정질 이그조(igzo) tft 기반 트랜젼트 반도체의 제조 방법 |
FR3037443B1 (fr) * | 2015-06-12 | 2018-07-13 | Soitec | Heterostructure et methode de fabrication |
CN106548972B (zh) * | 2015-09-18 | 2019-02-26 | 胡兵 | 一种将半导体衬底主体与其上功能层进行分离的方法 |
JP6563360B2 (ja) * | 2016-04-05 | 2019-08-21 | 信越化学工業株式会社 | 酸化物単結晶薄膜を備えた複合ウェーハの製造方法 |
JP7120225B2 (ja) * | 2017-05-31 | 2022-08-17 | 日本ゼオン株式会社 | タッチセンサ基材及びその製造方法、タッチセンサ部材及びその製造方法、並びに、表示装置 |
US11721554B2 (en) * | 2019-03-18 | 2023-08-08 | Intel Corporation | Stress compensation for wafer to wafer bonding |
FR3129622B1 (fr) * | 2021-11-26 | 2023-10-27 | Nelumbo Digital | Système pour déformer une structure utile |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0355822A (ja) * | 1989-07-25 | 1991-03-11 | Shin Etsu Handotai Co Ltd | 半導体素子形成用基板の製造方法 |
US5362667A (en) * | 1992-07-28 | 1994-11-08 | Harris Corporation | Bonded wafer processing |
US5102821A (en) * | 1990-12-20 | 1992-04-07 | Texas Instruments Incorporated | SOI/semiconductor heterostructure fabrication by wafer bonding of polysilicon to titanium |
US5261999A (en) * | 1991-05-08 | 1993-11-16 | North American Philips Corporation | Process for making strain-compensated bonded silicon-on-insulator material free of dislocations |
JPH07187892A (ja) * | 1991-06-28 | 1995-07-25 | Internatl Business Mach Corp <Ibm> | シリコン及びその形成方法 |
JPH06196377A (ja) * | 1991-11-19 | 1994-07-15 | Sumitomo Metal Mining Co Ltd | 半導体基板の接合方法 |
JP3048754B2 (ja) * | 1992-06-25 | 2000-06-05 | 日本電気株式会社 | 半導体基板 |
US5310451A (en) * | 1993-08-19 | 1994-05-10 | International Business Machines Corporation | Method of forming an ultra-uniform silicon-on-insulator layer |
US5753134A (en) * | 1994-01-04 | 1998-05-19 | Siemens Aktiengesellschaft | Method for producing a layer with reduced mechanical stresses |
JP3352340B2 (ja) * | 1995-10-06 | 2002-12-03 | キヤノン株式会社 | 半導体基体とその製造方法 |
JP3257580B2 (ja) * | 1994-03-10 | 2002-02-18 | キヤノン株式会社 | 半導体基板の作製方法 |
JP2669368B2 (ja) * | 1994-03-16 | 1997-10-27 | 日本電気株式会社 | Si基板上化合物半導体積層構造の製造方法 |
US6143628A (en) * | 1997-03-27 | 2000-11-07 | Canon Kabushiki Kaisha | Semiconductor substrate and method of manufacturing the same |
US6255731B1 (en) * | 1997-07-30 | 2001-07-03 | Canon Kabushiki Kaisha | SOI bonding structure |
US5909627A (en) * | 1998-05-18 | 1999-06-01 | Philips Electronics North America Corporation | Process for production of thin layers of semiconductor material |
-
1999
- 1999-02-10 FR FR9901558A patent/FR2789518B1/fr not_active Expired - Fee Related
-
2000
- 2000-02-09 US US09/913,006 patent/US6756285B1/en not_active Expired - Lifetime
- 2000-02-09 JP JP2000599069A patent/JP4889154B2/ja not_active Expired - Lifetime
- 2000-02-09 KR KR1020017010086A patent/KR100743557B1/ko active IP Right Grant
- 2000-02-09 DE DE60041124T patent/DE60041124D1/de not_active Expired - Lifetime
- 2000-02-09 EP EP00903763A patent/EP1155442B1/de not_active Expired - Lifetime
- 2000-02-09 WO PCT/FR2000/000308 patent/WO2000048238A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1155442B1 (de) | 2008-12-17 |
WO2000048238A1 (fr) | 2000-08-17 |
JP2002536843A (ja) | 2002-10-29 |
FR2789518A1 (fr) | 2000-08-11 |
KR100743557B1 (ko) | 2007-07-27 |
FR2789518B1 (fr) | 2003-06-20 |
KR20010113684A (ko) | 2001-12-28 |
JP4889154B2 (ja) | 2012-03-07 |
EP1155442A1 (de) | 2001-11-21 |
US6756285B1 (en) | 2004-06-29 |
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