DE60034369D1 - Mos-transistor und speicherzelle mit eingekapselter wolfram-gate, und herstellungsverfahren - Google Patents

Mos-transistor und speicherzelle mit eingekapselter wolfram-gate, und herstellungsverfahren

Info

Publication number
DE60034369D1
DE60034369D1 DE60034369T DE60034369T DE60034369D1 DE 60034369 D1 DE60034369 D1 DE 60034369D1 DE 60034369 T DE60034369 T DE 60034369T DE 60034369 T DE60034369 T DE 60034369T DE 60034369 D1 DE60034369 D1 DE 60034369D1
Authority
DE
Germany
Prior art keywords
memory cell
mos transistor
tungsten gate
manufacturing
encapsulated tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60034369T
Other languages
English (en)
Other versions
DE60034369T2 (de
Inventor
Chi Chang
Richard J Huang
Keizaburo Yoshie
Yu Sun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spansion LLC
Original Assignee
Spansion LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spansion LLC filed Critical Spansion LLC
Application granted granted Critical
Publication of DE60034369D1 publication Critical patent/DE60034369D1/de
Publication of DE60034369T2 publication Critical patent/DE60034369T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42324—Gate electrodes for transistors with a floating gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/401—Multistep manufacturing processes
    • H01L29/4011—Multistep manufacturing processes for data storage electrodes
    • H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
DE60034369T 1999-09-02 2000-08-31 Mos-transistor und speicherzelle mit eingekapselter wolfram-gate, und herstellungsverfahren Expired - Lifetime DE60034369T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US15212699P 1999-09-02 1999-09-02
US152126P 1999-09-02
US09/649,027 US6346467B1 (en) 1999-09-02 2000-08-28 Method of making tungsten gate MOS transistor and memory cell by encapsulating
US649027 2000-08-28
PCT/US2000/024271 WO2001017021A1 (en) 1999-09-02 2000-08-31 Encapsulated tungsten gate mos transistor and memory cell and method of making same

Publications (2)

Publication Number Publication Date
DE60034369D1 true DE60034369D1 (de) 2007-05-24
DE60034369T2 DE60034369T2 (de) 2008-01-10

Family

ID=26849276

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034369T Expired - Lifetime DE60034369T2 (de) 1999-09-02 2000-08-31 Mos-transistor und speicherzelle mit eingekapselter wolfram-gate, und herstellungsverfahren

Country Status (8)

Country Link
US (2) US6346467B1 (de)
EP (1) EP1247299B1 (de)
JP (1) JP2003531472A (de)
KR (1) KR100773994B1 (de)
CN (1) CN1192434C (de)
AT (1) ATE359601T1 (de)
DE (1) DE60034369T2 (de)
WO (1) WO2001017021A1 (de)

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US6583460B1 (en) * 2000-08-29 2003-06-24 Micron Technology, Inc. Method of forming a metal to polysilicon contact in oxygen environment
JP3332909B2 (ja) * 2000-10-30 2002-10-07 松下電器産業株式会社 ゲート電極構造体、その形成方法及び電極構造体の形成方法
DE10120523A1 (de) 2001-04-26 2002-10-31 Infineon Technologies Ag Verfahren zur Minimierung der Wolframoxidausdampfung bei der selektiven Seitenwandoxidation von Wolfram-Silizium-Gates
KR100414562B1 (ko) * 2001-06-29 2004-01-07 주식회사 하이닉스반도체 비휘발성 메모리 셀의 제조 방법
US7297592B1 (en) 2002-03-27 2007-11-20 Spansion Llc Semiconductor memory with data retention liner
US6803624B2 (en) * 2002-07-03 2004-10-12 Micron Technology, Inc. Programmable memory devices supported by semiconductive substrates
KR100713326B1 (ko) * 2002-12-30 2007-05-04 동부일렉트로닉스 주식회사 반도체 소자의 극 미세 트랜지스터 제작방법
US7033897B2 (en) * 2003-10-23 2006-04-25 Texas Instruments Incorporated Encapsulated spacer with low dielectric constant material to reduce the parasitic capacitance between gate and drain in CMOS technology
DE102004008784B3 (de) * 2004-02-23 2005-09-15 Infineon Technologies Ag Verfahren zur Durchkontaktierung von Feldeffekttransistoren mit einer selbstorganisierten Monolage einer organischen Verbindung als Gatedielektrikum
GB0405325D0 (en) * 2004-03-10 2004-04-21 Koninkl Philips Electronics Nv Trench-gate transistors and their manufacture
US7030431B2 (en) * 2004-03-19 2006-04-18 Nanya Technology Corp. Metal gate with composite film stack
CN100388501C (zh) * 2004-03-26 2008-05-14 力晶半导体股份有限公司 与非门型闪存存储单元列及其制造方法
KR100586006B1 (ko) * 2004-06-15 2006-06-01 삼성전자주식회사 불휘발성 메모리 장치의 게이트 구조물 형성 방법 및 이를수행하기 위한 장치
KR100697286B1 (ko) * 2005-05-31 2007-03-20 삼성전자주식회사 비휘발성 메모리 장치 및 그 형성 방법
US7269067B2 (en) * 2005-07-06 2007-09-11 Spansion Llc Programming a memory device
KR100849852B1 (ko) * 2005-08-09 2008-08-01 삼성전자주식회사 비휘발성 반도체 집적 회로 장치 및 이의 제조 방법
US20070200149A1 (en) * 2006-02-28 2007-08-30 Veronika Polei Semiconductor device and method of production
US7524722B2 (en) 2006-10-12 2009-04-28 Macronix International Co., Ltd. Resistance type memory device and fabricating method and operating method thereof
US20080149990A1 (en) * 2006-12-21 2008-06-26 Spansion Llc Memory system with poly metal gate
KR100953050B1 (ko) * 2007-10-10 2010-04-14 주식회사 하이닉스반도체 비휘발성 메모리 소자 및 그의 제조 방법
KR100953034B1 (ko) * 2008-02-21 2010-04-14 주식회사 하이닉스반도체 반도체 소자 및 이의 제조 방법
KR100972716B1 (ko) * 2008-03-10 2010-07-27 주식회사 하이닉스반도체 반도체 소자 및 이의 제조 방법
KR101038603B1 (ko) * 2008-05-26 2011-06-03 주식회사 하이닉스반도체 반도체 소자 및 이의 제조 방법
WO2010076601A1 (en) * 2008-12-30 2010-07-08 Giulio Albini Memory device and method of fabricating thereof
US20110001179A1 (en) * 2009-07-03 2011-01-06 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US8546214B2 (en) * 2010-04-22 2013-10-01 Sandisk Technologies Inc. P-type control gate in non-volatile storage and methods for forming same
US9153656B2 (en) 2013-08-08 2015-10-06 Kabushiki Kaisha Toshiba NAND type nonvolatile semiconductor memory device and method for manufacturing same
TWI555066B (zh) * 2015-05-14 2016-10-21 力晶科技股份有限公司 半導體元件的製作方法
EP3381046B1 (de) 2015-11-23 2022-12-28 Entegris, Inc. Verfahren zum selektiven ätzen von p-dotiertem polysilicium relativ zu siliciumnitrid
US9929046B2 (en) 2016-07-21 2018-03-27 International Business Machines Corporation Self-aligned contact cap
FR3069374B1 (fr) 2017-07-21 2020-01-17 Stmicroelectronics (Rousset) Sas Transistor mos a effet bosse reduit
FR3069377B1 (fr) * 2017-07-21 2020-07-03 Stmicroelectronics (Rousset) Sas Transistor mos a double blocs de grille a tension de claquage augmentee
FR3069376B1 (fr) 2017-07-21 2020-07-03 Stmicroelectronics (Rousset) Sas Transistor comprenant une grille elargie
US10468491B1 (en) 2018-07-03 2019-11-05 International Business Machines Corporation Low resistance contact for transistors

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Publication number Priority date Publication date Assignee Title
US5077691A (en) 1989-10-23 1991-12-31 Advanced Micro Devices, Inc. Flash EEPROM array with negative gate voltage erase operation
JP2803548B2 (ja) 1993-12-28 1998-09-24 日本電気株式会社 半導体装置の製造方法
US5470773A (en) 1994-04-25 1995-11-28 Advanced Micro Devices, Inc. Method protecting a stacked gate edge in a semiconductor device from self aligned source (SAS) etch
TW295695B (de) 1994-09-19 1997-01-11 Motorola Inc
KR0161402B1 (ko) 1995-03-22 1998-12-01 김광호 불휘발성 메모리 제조방법
WO1998037583A1 (fr) * 1997-02-20 1998-08-27 Hitachi, Ltd. Procede pour fabriquer un dispositif a semi-conducteurs
US5925918A (en) * 1997-07-30 1999-07-20 Micron, Technology, Inc. Gate stack with improved sidewall integrity
JPH1168095A (ja) * 1997-08-11 1999-03-09 Fujitsu Ltd 半導体装置の製造方法
US6107171A (en) * 1998-07-09 2000-08-22 Vanguard International Semiconductor Corporation Method to manufacture metal gate of integrated circuits
US6074914A (en) 1998-10-30 2000-06-13 Halo Lsi Design & Device Technology, Inc. Integration method for sidewall split gate flash transistor

Also Published As

Publication number Publication date
US20020137284A1 (en) 2002-09-26
CN1192434C (zh) 2005-03-09
DE60034369T2 (de) 2008-01-10
KR100773994B1 (ko) 2007-11-08
EP1247299B1 (de) 2007-04-11
ATE359601T1 (de) 2007-05-15
EP1247299A1 (de) 2002-10-09
JP2003531472A (ja) 2003-10-21
US6346467B1 (en) 2002-02-12
KR20020029772A (ko) 2002-04-19
CN1376309A (zh) 2002-10-23
WO2001017021A1 (en) 2001-03-08

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