DE60033901D1 - Verpackung für Halbleitervorrichtung und deren Herstellungsverfahren - Google Patents

Verpackung für Halbleitervorrichtung und deren Herstellungsverfahren

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Publication number
DE60033901D1
DE60033901D1 DE60033901T DE60033901T DE60033901D1 DE 60033901 D1 DE60033901 D1 DE 60033901D1 DE 60033901 T DE60033901 T DE 60033901T DE 60033901 T DE60033901 T DE 60033901T DE 60033901 D1 DE60033901 D1 DE 60033901D1
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Germany
Prior art keywords
package
manufacturing
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60033901T
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English (en)
Other versions
DE60033901T2 (de
Inventor
Yoshio Furuhata
Tsuyoshi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
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Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Application granted granted Critical
Publication of DE60033901D1 publication Critical patent/DE60033901D1/de
Publication of DE60033901T2 publication Critical patent/DE60033901T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568Temporary substrate used as encapsulation process aid
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    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
DE60033901T 1999-10-01 2000-09-27 Verpackung für Halbleitervorrichtung und deren Herstellungsverfahren Expired - Lifetime DE60033901T2 (de)

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JP28095099 1999-10-01
JP28095099A JP3691993B2 (ja) 1999-10-01 1999-10-01 半導体装置及びその製造方法並びにキャリア基板及びその製造方法

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JP2001102484A (ja) 2001-04-13
DE60033901T2 (de) 2007-07-12
EP1091401A2 (de) 2001-04-11
TW471149B (en) 2002-01-01
US6423643B1 (en) 2002-07-23
EP1091401A3 (de) 2003-07-02
JP3691993B2 (ja) 2005-09-07
EP1091401B1 (de) 2007-03-14
KR100721839B1 (ko) 2007-05-28

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